Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary...

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Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas- Yihui Zhou Ridvan Adjimambetov Shu-chen Liu Isaac Luria Mario Padron Miramare June 10, 2005 Andrew Rinzler Jennifer Sippel-Oakley Mark Sheplak-University of Florida Engineering T. Chen Vadim Mitin-V. Lashkarev Institute of Semiconductor Physics, NASU, Kiev, Ukraine Funding: Research Corporation

Transcript of Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary...

Page 1: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Small Sensors at Low TemperatureRevealing Cryogenic Turbulence

University of Florida PhysicsGary Ihas-

Yihui Zhou Ridvan Adjimambetov Shu-chen LiuIsaac LuriaMario Padron

Miramare June 10, 2005

Andrew RinzlerJennifer Sippel-Oakley

Mark Sheplak-University of Florida EngineeringT. ChenVadim Mitin-V. Lashkarev Institute of Semiconductor Physics, NASU, Kiev, Ukraine Funding: Research Corporation

Page 2: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Thank you Mr. Organizer

In his lab circa 2004 (with research trainee)

Page 3: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Thank you Mr. Director

In his lab circa 2005

Page 4: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Thank you Mr. Helium Vorticity

50th Anniversary of First Direct Detection of Quantized Vorticity

Page 5: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Outline Low Temperature Motivation-Small apparatus

size & Quantum turbulence decay studies Measurement Techniques

Thermal-Electrical Resistance Semiconductor technology Results

Mechanical Piezo-resistive Piezo-electric Capacitive Optical Results

Nanotube films Thermal Mechanical Results

Page 6: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Characteristics of turbulent flow

[H. Tennekes, 1983]

1. Irregularity — randomness

2. Diffusivity — rapid mixing and increased rates of momentum, heat and mass transfer

3. Large Reynolds numbers

4. Three-dimensional vorticity fluctuations

5. Dissipation — due to viscous loss; decaying rapidly without energy supply

6. Continuum — even smallest scales >>molecular length scale

e forceviscous forceinertial

ULR

Page 7: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Large Scale Turbulence

JPL

Page 8: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Intrepid Experimentalist

Page 9: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

A Matter of Scale

Water Facility of Nikuradse

R=107

Oregon Cryogenic Facility

Page 10: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

[H. Tennekes, 1983]

Grid TurbulenceGrid turbulence in a classical fluid [Frisch, 1995]

Eddy motion Larger length scaleSmaller length scale

(wavenumber, k > inverse of vortex line spacing, )1

(the mesh of grid the size of the channel)

Energy dissipation by viscosity (Re ~ 1)

Energy flow rate

Energy input

Dissipa-tion

1~ k

k

dt

dE

inertial regimeRe >> 1

Kolmogorov Spectrum

3/53/2)( kCkE

Page 11: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Two Fluid Model– Landau -1941

[J. Wilks, 1987]

Viscosity (P)

4He

(oscillating disc viscometer)

56 %

Fluid density

0 2.0 T

T (K)

n

s

=n +s

0.14g/cm3

Sn=SHe = n nnormal fluid

Ss =0s =0

irrotational

sSuper-fluid

Two fluids

entropyviscositydensityTwo Fluid model

0 s

Page 12: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Quantization of superfluid circulation:

scmnm

nhds / 1097.9 24

(postulated separately in 1955 by Onsager and Feynman)

The angular velocity is

(a) 0.30 /s, (b) 0.30 /s,

(c) 0.40 /s, (d) 0.37 /s,

(e) 0.45 /s, (f) 0.47 /s,

(g) 0.47 /s, (h) 0.45 /s,

(i) 0.86 /s, (j) 0.55 /s,

(k) 0.58 /s, (l) 0.59 /s.

[Yarmchuk, 1979]

1. Circulation round any circular path of radius r concentric with the axis of rotation=2r2

2. Total circulation=r2n0h/m (n0: # of lines per unit area)

3. n0=2 m/h=2 /

All superfluid vortex lines align along the rotation axis with ordered array of areal density= length of quantized vortex line per unit volume=

2000 lines/cm2

s

2

Quantization of Superfluid Circulation

Page 13: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Cryogenic Towed Grid Apparatus

Dimensions in inches

Superconductingsolenoid

Niobiumcylinder

Grid Liquid Helium

Page 14: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Drive Simulation

Page 15: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Techniques To Study Quantum Turbulence

Observation of rise in temperature of helium as turbulence decays

Localized correlated pressure measurements to detect vortex motion and density

Flow

Page 16: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Requirements for the thermometers

Two excellent candidates1. Neutron transmutation doped Germanium Bolometer-- [N. Wang, 1988]

sensitivity (rms energy fluctuation 6 eV at 25mK); T/T ~ 4.810-6

response time < 20 ms size: 1mm1mm0.25mm

2. Miniature Ge Film Resistance Thermistors-- [V.F. Mitin, et al.]

sensitivity =50/K- 100/K in the temperature range 50mK- 10mK

response time< 0.1s size: 650 m

1. Operating temperature: 10 - 100mK.

2. Sensitivity: T ~ 10-7K, or T/T ~ 10-5.

3. Short response time: t ~ 10-3 s.

4. Small mass & good thermal contact.

Page 17: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Conduction in a doped semiconductor

1 10 10010

100

1000

10000

100000

1000000

Electron Collisions

(R~T-1)

Phonon Collisions

(R~T-1/2}

Variable Range Hopping

(R~exp{T-1/4})

Coulomb Interaction

(R~exp{T-1/2})

Re

sist

an

ce ()

Temperature (K)

Page 18: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Mass Production/Consistency•Each wafer will generate sensors with very similar properties•Resistance measurements made on a single batch over the range 10K – 150K•A single fixed point measurement at 4.2K will approximate the sensors properties if the entire curve for any one sensor from the batch is known

1 10 10010

1

102

103

104

Re

sis

tan

ce,

Oh

ms

Tem p erature, K

Advantages of Thin Film Technology

Page 19: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Semiconductor Chip Technology

 

Ge/GaAs thermistors 300 m square by 150 m thick. Mass of the thermistor = 7.2 10-5 gram. 

Active layerInsulator

Page 20: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Thermistor R vs. T Development Work

10 100 10001

10

100

1000

#3

#2

#1

Th

erm

isto

r re

sist

ance

(K

oh

m)

Temperature (mK)

http://microsensor.com.ua/products.html

Page 21: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Pressure Transducer Requirementssampling on micron scale sensitivity: 0.1 Pascal fast: 1 msecfunction at low temperatures (20 – 100 mK) transduction: as simple as possible

MEMS Technology Pressure Sensors Piezo-resistive Capacitive Optical

Page 22: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Design Of Piezo-resistive Pressure Sensors Typical design: 4 piezo-resistors in Wheatstone bridge on a diaphragm diaphragm deflects from applied pressure causing the deformation of the piezo-resistors mounted on the surface

Wheatstone bridge

Page 23: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Piezo-resistive Pressure Sensor SM5108

Manufactured by Silicon Microstructures, Inc.

Semiconductor resistors joined by aluminum conductors in bridge configuration

Resistors placed on diaphragmTwo strained parallel to ITwo strained perpendicular to I

Page 24: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Piezo-resistive Pressure Sensor SM5108

Page 25: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Drawbacks of Piezo-resistive Pressure Sensors-Results Relatively low sensitivity Large temperature dependence temperature

compensation necessary

0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.40

5

10

15

20

25

30

35

40

45

50

55 300 K 91.2 K - 94.6 K 64.4 K - 66.0 K 49.8 K - 51.0 K 40.4 K - 43.5 K 29.9 K - 30.4 K 22.9 K - 26.0 K 26.2 K

Voltage vs Pressure for Piezoresistive Transducer at varying temperatures

Vo

ltag

e (

mV

)

Pressure (Bar)

Page 26: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Capacitive Pressure Sensors Inherently nonlinear output of the sensor Distributed capacitance of read-out circuit

requires low T amplifierTypical design: parallel-plate capacitor integrated electronics for signal processing reference capacitors for temperature compensation

Page 27: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Advantages And Disadvantages Of Capacitive Pressure Sensors Over Piezo-resistive Sensors Advantages:

Higher sensitivity Long-term stability Smaller temperature dependence

Disadvantages: Non-linear output More complicated manufacturing due to the

integration of the compensation circuit and signal processing electronics to the sensor chip

Relatively high price

Page 28: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Optical Pressure Sensors

Optical techniques typically employ a microsensor structure that deforms under pressure resulting in change in optical signal.

Diaphragm-based sensors, for example, incorporate optical waveguides on the top surface.

Page 29: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Example Of An Optical Pressure Sensor

Page 30: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Simple Interferometer Sensor

Difficulty is readout

Production Process

Attach optical fiber

Page 31: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Nanotube/Film Technology•Small•Strong•Conducting•But not too conducting•Elastic•Stick to some surfaces

Can be used forThermometersHeatersStrain gaugesCapacitor platesFlow metersTurbulence detectors

Page 32: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Nanotube film AFM Image

1 micron

Page 33: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Helium liquid or gas flow

TinnedCopper

G10 (fiberglas)

4-terminal ResistanceMeasurement

Nanotube Film Flow Sensor Test

Page 34: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Nanotube film “rope” test jig

Page 35: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Nanotube film “rope” R vs. T

0.01 0.1 1 10 1001000

10000

100000R

(oh

ms)

T(Kelvin)

Page 36: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Flow past a Nanotube film

0.0 0.1 0.2 0.3 0.4870

872

874

876

878

880

882

884R

film ()

Flow (cubic feet/hour)V (mm/sec)

Page 37: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

Nanofilm CapacitiveFlow/Pressure Fluctuation Sensor

AFM of Nanofilm

Flow

Page 38: Small Sensors at Low Temperature Revealing Cryogenic Turbulence University of Florida Physics Gary Ihas-  Yihui Zhou  Ridvan Adjimambetov  Shu-chen.

The Group minus Shu-chen Liu

Mario Yihui

GregRidvan