Sm rtline Intelligent Vacuum Metrology - SENSOR+TEST · 2010. 1. 29. · Sm rtline Smartline Vacuum...

Intelligent Vacuum Metrology

V a c u u m I n s t r u m e n t s

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IntelligentVacuum Transducers For1000 To 1 x 10 mbar

Durability That Pays Off

Green Gauges

Time Is Money

Further Smartline Advantages:

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THYRACONTs tradition isresearch and innovation andproviding optimal solutions forour customer‘s requirements.The latest family ofTHYRACONT Smartline gaugeswas developed to meet theincreasing demands forfunctionality, precision andreliability in a wide varietyof vacuum applications.

The patented THYRACONTimpulse Pirani with extendedmeasuring range activatesionization sensors below avery low pressure threshold.This protects the sensors andimproves gauge life.

Both, sensors and electronicsare designed for highperformance with minimumenergy consumption.

Smartline‘s intelligentmicrocontrollers can managesensor control automatically.This ensures optimalinteraction between the Piranisensor and ionization sensorswithout operator intervention.

Compact, metal sealedsensorsLow thermal and electricdisturbance of the vacuumprocessInsensitive to shockventingReplaceable sensor headsCorrect pressure readingsdue to separate gascorrection factors for eachsensor

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Application Example

Challenge

Solution Applications

Brazing, sintering or annealing requires anoxygen free atmosphere which means thatprocesses are carried out under vacuumpartially using inert gas.

The vacuum level must be monitored and keptconstantly low during the process to avoidoxidation of the products. One of our clientsneeded to measure the pressure in their highvacuum tube furnace near the gas inlet as wellas at the vacuum port with high accuracy.

Two VSH82 transducers that have the requiredwide measuring range and are used tomeasure the pressure at the furnaces gas inletand vacuum port with high precision. Thetransducers are linked to the system PLC bytheir serial RS485 interfaces, so that bothpressure levels can be directly visualizedgraphically which allows easy monitoring ofthe pressure gradient inside the furnace tube.

Analysis instrumentsCoating processesControlling fine to ultrahighvacuum applicationsSputtering appliancesProcess engineering

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V S H 8 2 1 0 0 0 t o 1 x 1 0 m b a r- 9 P i r a n i / H o t C a t h o d e

Application Example

Challenge

Solution

Applications

Freeze drying is a method to carefully extractmoisture from products like food or serums.These products are sensitive to temperatureso that their internal structure must beprotected. Freezing is followed by anaccurately controlled pressure decrease,which results in sublimation of themicroscopic ice crystals.

To avoid costly damage to products andmaintain a cost effective process vacuum

gauges with high repeatability and reliabilityare required.

The VSP62 Pirani is protected against vaporcondensation by a stainless steel shield. Itsmetal sealed sensor has a long life helixfilament and the stainless steel flange makesthe gauge very durable resulting in improvedprocess reliability and a reduction inmaintenance costs.

Analysis instrumentsVacuum furnacesCoating plantsTest of roughing pumpsDevices with confinedspace for installationSafety switching invacuum systemsProcess engineeringVacuum centrifuges

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V S P 6 2 1 0 0 0 t o 1 x 1 0 m b a r- 4 P i r a n i S e n s o r

V S M 7 2 1 0 0 0 t o 5 x 1 0 m b a r- 9 P i r a n i / C o l d C a t h o d eApplication Example

Challenge

Solution

Applications

During the optical coating of mirrors for laserresonators the typical process pressure liesabove 2 x 10 mbar.

A suitable vacuum transducer must be ableto monitor both, process pressure during thecoating as well as the available minimumpressure of 10 mbar in the vacuumchamber. One of our customers used to workwith a Pirani/cold cathode combinationgauge, the cold cathode monitoringminimum and process vacuum. However,the continuous operation above 10 mbar

resulted in rapid deterioration of the sensor.

In the VSM72 transducer a patented impulsePirani with extended range operates the coldcathode only below very low pressures.Further the transition between the twosensors can be configured to meetapplications requirements. The entirecoating process is now monitored by thePirani. The cold cathode is saved because itis active only when the system pumps downto minimum pressure. The availability of thecoating plant has improved significantly.

Analysis instrumentsCoating plantsProcess engineeringControlling fine to highvacuum applicationsSputtering appliancesVacuum furnaces

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Technical Features Advantages

All types of Smartline vacuum transducerscan be connected to the VD9 and VD10 rangeof display and control units. The gauges aredesigned for industrial use. Their shieldedmetal cases offer a high degree of protectionagainst electromagnetic interference.

Display and front plateare protected against watersplashes2 relay set points permeasurement channelRemote control via serialinterfaceLarge and bright LCD displaywith background illumination

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V D 91 C h a n n e l D i s p l a yA n d C o n t r o l U n i t

4 C h a n n e l D i s p l a yA n d C o n t r o l U n i t

V D 1 0

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Smartline Vacuum TransducerAbsolute Pressure 1000 to 1 x 10 mbar-4

The VSP62 is based on a new,patented measurement principle.

This enhancement of the well provenPirani sensor results in a largermeasuring range with higherresolution.

The temperature compensatedtransducer provides an analog,logarithmic output signal 0 - 10 V.

Typical Applications

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Analysis instruments

Freeze drying

Vacuum ovens

Coating plants

Operational control of roughingpumps and vacuum plants

Applications requiring cost savingsand inaccessible installations

Safety circuits in vacuum systems

Monitoring of fore vacuum

Process engineering

Vacuum centrifuges

Benefits

High reliability

Extremely compact, designed forindustrial applications

Wide measuring range, highresolution in the rough vacuumrange

Excellent reproducibility

Suitable for UHV applications dueto the robust metal sealedstainless steel sensor

Durable Pirani helix filament

Highly cost effective

Filament protected by a metalscreen provides good resistanceagainst oil and solvent vapors

Rugged, EMI-proof metal housing

Low power consumption

Stable measuring values due tooptimized temperaturecompensation

Precise push button digitaladjustment on zeropressure and atmosphere

Easy system integration andconnection with PLCs due tologarithmic 0 - 10 V standard output

Vacuum connection using stainlesssteel small flange DN 16 ISO-KF,conflat flange DN 16 CF or hosenozzle 9.5 mm

VSP62

Technical Data

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Measuring Principle Heat conduction (Impulse Pirani), depending on gas type_______________________________________________________________________________________

Materials In Contact With Vacuum Stainless steel 1.4307, nickel, tungsten, glass_______________________________________________________________________________________

Measurement Range 1000 - 1 x 10 mbar (750 - 1 x 10 Torr),

max. overpressure 4 bar absolute_______________________________________________________________________________________

Accuracy 1000 - 20 mbar: < 30% from reading

20 - 2 x 10 mbar: < 10% from reading

< 2 x 10 mbar: < factor 2_______________________________________________________________________________________

Repeatability 2%_______________________________________________________________________________________

Reaction Time Max. 200 ms_______________________________________________________________________________________

Voltage Supply 15 - 30 VDC_______________________________________________________________________________________

Electrical Connection Hirschmann, 6 pole, male, screwable_______________________________________________________________________________________

Power Consumption Approx. 10 mA_______________________________________________________________________________________

Operating Temperature +5...+50°C_______________________________________________________________________________________

Storage Temperature -20...+70°C_______________________________________________________________________________________

Max. Bake Out Temperature 80°C at the flange_______________________________________________________________________________________

Output Signal 0 - 10 VDC, measuring range 1.5 - 8.5 VDC, logarithmic, 1V / decade

load resistance > 10 k_______________________________________________________________________________________

Vacuum Connection Stainless steel small flange DN 16 ISO-KF (VSP62MV),

additional hose nozzle 9.5 mm (VSP62MVSW)

stainless steel conflat flange DN 16 CF (VSP62MVCF)_______________________________________________________________________________________

Protection Class IP40_______________________________________________________________________________________

Weight Approx. 120 g_______________________________________________________________________________________

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Product Codes

VSP62MV

VSP62MVCF

Accessories:

XB0600002

W0606002

W0606006

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Pirani transducer, 1000 to1 x 10 mbar, with DN 16 ISO-KFconnection; Output 0 - 10 Vlogarithmic

As above, with DN 16 ISO-KFconnection and hose nozzle9.5 mm

As above, with DN 16 CF connection

Counter plug, 6-pole

Measuring cable, shielded, 2 m(for VD9 / VD10)

Measuring cable, shielded, 6 m(for VD9 / VD10)

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VSP62MVSW

Vout (V) = log (p(hPa)) + 5.5

p (hPa) = 10 (Vout(V) - 5.5)

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1,0E-04 1,0E-03 1,0E-02 1,0E-01 1,0E+00 1,0E+01 1,0E+02 1,0E+03

Pressure (hPa)

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The combination transducer VSM72(Pirani/cold cathode) measuresabsolute pressure from atmosphericto ultrahigh vacuum.

The intelligent, micro processorcontrolled Smartline transducersautomatically manage theappropriate interaction of bothvacuum sensors regardingmeasurement ranges and switchingpoints.

Smartline uses a high tech designand provides safe, easy to use andcost effective process control.


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Analysis technology

Coating plants andvapor deposition

Process engineering

Measuring and controlling infine and ultrahigh vacuum

Sputtering plants

Vacuum furnaces

Benefits

Combination sensor with widemeasuring range

The cold cathode sensor isautomatically switched on and offby the Pirani

Patented pulsed Pirani sensor withextended range allows operationof cold cathode at lower pressureand increase of lifetime

Robust cold cathode sensor

Low thermal and electricalinterference with the vacuumprocess

Excellent ignition behavior

Insensitive against inrush of air

Two independent, dry relayswitch points

Logarithmic signal output0 - 10 V provides easyinterpretation

RS485 serial interface

The digital output signalscan be transmitted error-freeover long distances (up to 500 m)

Replaceable sensor heads


Correct pressure readings bymeans of separate gas typecorrection factors for Pirani and coldcathode sensors

Precise pushbutton digitaladjustment of zero pressure andatmospheric

Rugged, EMI-proof metal housing

VSM72

Technical Data

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Measuring Principle Heat conduction (Impulse Pirani),

cold cathode: inverted magnetron, both depending on gas type_______________________________________________________________________________________

Material In Contact With Vacuum Stainless steel 1.4307, nickel, tungsten, molybdenum, glass_______________________________________________________________________________________

Measurement Range 1000 - 5 x 10 mbar (750 - 5 x 10 Torr), max. overpressure 4 bar abs._______________________________________________________________________________________

Accuracy 1000 - 20 mbar: < 30 % from reading

20 - 5 x 10 mbar: < 10 % from reading

5 x 10 mbar - 1 x 10 mbar: < 25% from reading_______________________________________________________________________________________

Repeatability 5%_______________________________________________________________________________________

Response Time 200 ms, 500 ms for activating the cold cathode_______________________________________________________________________________________

Cathode Voltage Max. 2.5 kV_______________________________________________________________________________________


Electrical Connection Sub-D, 15-pole, male_______________________________________________________________________________________

Power Consumption Approx. 2.5 W (without switch points)_______________________________________________________________________________________



Maximum Bake Out Temperature 150°C at flange (electronic detached)_______________________________________________________________________________________

Output Signal 0 - 10 VDC, measuring range 1.8 - 8.6 VDC, logarithmic, 1 V/decade_______________________________________________________________________________________

Serial Interface RS485: 9600 baud, address switch_______________________________________________________________________________________

Switch Points 2 switch-over relays, 60 V, 0.5 A_______________________________________________________________________________________

Vacuum Connection Stainless steel flange DN 25-KF (VSM72MV)

Stainless steel conflat flange DN 40 CF (VSM72MVCF)_______________________________________________________________________________________


Weight Approx. 570 g_______________________________________________________________________________________

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Product Codes

VSM72MV

Accessories:

W1506002

W1506006

W1515002

W1515006

BVSM72KF25

BVSM72CF

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Combination transducerPirani/inverted magnetron1000 - 5 x 10 mbar, withDN 25 ISO-KF connection; output0 - 10 V logarithmic, RS485


Measuring cable, shielded, 2 m(for VD9)




Sensor head DN 25 ISO-KF forreplacement

Sensor head DN 40 CF forreplacement

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VSM72MVCF

Vout /V = 0,6 log (p/mbar) + 6,8

p /mbar = 10( (Vout /V – 6,8) / 0,6 )

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1E-09 0,0000001 0,00001 0,001 0,1 10

Pressure (hPa)

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The combination transducer VSH82(Pirani/hot cathode) measuresabsolute pressure from atmosphericto ultrahigh vacuum.

The intelligent, micro processorcontrolled Smartline transducersautomatically manage theappropriate interaction of bothvacuum sensors regardingmeasurement ranges and switchingpoints.

Smartline uses a high tech designand provides safe, easy to use andcost effective process control.


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Analysis technology

Coating plants andvapor deposition

Sputtering plants

Vacuum furnaces

Process engineering

Measuring and controlling inthe fine and ultrahigh vacuum range

Benefits

Combination sensor with widemeasuring range

The hot cathode sensor isautomatically switched on and offby the Pirani

Patented pulsed Pirani sensor withextended range allows operationof hot cathode at lower pressureand increase of lifetime

Excellent repeatability andhigh accuracy

Low thermal and electricalinterference with the vacuumprocess

Bayard-Alpert with doublefilament, in the event offilament failure the gaugeautomatically switches to thebackup

Insensitive against inrush of air

Two independent, dry relayswitch points

Logarithmic signal output0 - 10 V provides easyinterpretation

RS485 interface

The digital output signalscan be transmitted error freeover long distances (up to 500 m)

Replaceable sensor heads


Correct pressure readings bymeans of separate gas typecorrection factors for Pirani and hotcathode sensors

Metal sealed stainless steelsensor cell with detachableprotective screen

Resistant, EMC compatiblemetal housing

Precise pushbutton digitaladjustment of zero pressure andatmospheric

VSH82

Technical Data

_______________________________________________________________________________________

Measuring Principle Heat conduction (Impulse Pirani), Bayard Alpert, dep. on gas type_______________________________________________________________________________________

Materials In Contact With Vacuum Stainl. steel 1.4307, Ni, W, Pl, yttrium coated iridium, glass, ceramic_______________________________________________________________________________________

Measurement Range 1000 - 1 x 10 mbar (750 - 1 x 10 Torr), max. overpressure 4 bar abs._______________________________________________________________________________________

Accuracy 1000 - 20 mbar: < 30 % from reading

20 - 5 x 10 mbar: < 10 % from reading

< 5 x 10 mbar: < 15% from reading_______________________________________________________________________________________

Response Time 200 ms, 500 ms for switching BA emission currents_______________________________________________________________________________________

Repeatability 5%_______________________________________________________________________________________

Emission Current 10 µA, 100 A, 1 mA_______________________________________________________________________________________

Degas Ohmic heating of the anode_______________________________________________________________________________________


Electrical Connection Sub-D, 15-pole, male_______________________________________________________________________________________

Power Consumption Approx. 6.5 W (without switch points)_______________________________________________________________________________________



Maximum Bake Out Temperature 180°C at the flange (electronic detached)_______________________________________________________________________________________

Output Signal 0 - 10 VDC, measuring range 2.0 - 8.6 VDC, logarithmic, 1V / decade_______________________________________________________________________________________

Serial Interface RS485: 9600 baud, address switch 1 - 15_______________________________________________________________________________________

Switch Points 2 switch-over relays, 60 V, 0.5 A_______________________________________________________________________________________

Vacuum Connection Stainless steel flange DN 40 ISO-KF (VSH82MV)

Stainless steel conflat flange DN 40 CF (VSH82MVCF)_______________________________________________________________________________________


Weight Approx. 665 g_______________________________________________________________________________________

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Product Codes

VSH82MV

Accessories:

W1506002

W1506006

W1515002

W1515006

BVSH82KF40

BVSH82CF

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Combination transducerPirani/Bayard Alpert,1000 to 1 x 10 mbar, withDN 40 ISO-KF connection;output 0 - 10 V, logarithmic, RS485






Sensor head DN 40 ISO-KF forreplacement

Sensor head DN 40 CF forreplacement

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VSH82MVCF

Vout /V = 0,6 log (p/mbar) + 6,8

p /mbar = 10( (Vout /V – 6,8) / 0,6 )

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1,0E-09 1,0E-07 1,0E-05 1,0E-03 1,0E-01 1,0E+01

Pressure (hPa)

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1 Channel Vacuum Display And Control UnitAbsolute Pressure 1400 to 1 x 10 mbar-9

VD9 is an intelligent control unit forapplications in apparatus and plantengineering or special equipmentconstruction.

It offers two relay switches, one jointor two independent set points.

Compact metal EMC compatible19inch cassette 14 HP x 3 RE.

A front foil protects the instrumentfrom water splashing and can beeasily cleaned.


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Industrial plant engineering

Process automation

Apparatus engineering, e. g.process control and documentationfor quality assurance

Mechanical engineering

Packaging technology

Chemical process engineering(vacuum mixers)

Benefits

High contrast LCD display withbackground illumination

Pressure display inmbar, Torr, hPa

Easy to use

2 relay switches

On-off or three-position control

Control optionally with PIcharacteristic, continuous PIcontrol output configurable

Shielded 19" metal cassette withfoil-protected front panel

1 channel controller, can becombined with 2 transducers tocover a wider range (e.g. 1400 -1 x 10 mbar) providing acontinuous pressure display

Supports programming ofset points via serial interface

VacuGraph software:Documentation and evaluation ofvacuum processes, programmingset points and time basedpressure profiles, remote control

The controller is configured at thefactory to customer‘s specification

Versions made to customer‘sspecification on request (e.g.analog set point adjustment)

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Universal switched modepower supply 95 - 265 VAC

VD9

Technical Data

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Display Alphanumeric LCD display, background illumination,

4 digits, 45 x 20 mm, floating point: 2 - 4 digits

exponential, 2 digits mantissa, 1st. exponent_______________________________________________________________________________________

Display Refresh Rate 2 Hz (0.5 s)_______________________________________________________________________________________

Sample Rate 20 Hz (50 ms)_______________________________________________________________________________________

Power Supply 95 - 265 VAC, 50/60 Hz_______________________________________________________________________________________

Power Consumption Max. 15 W incl. transducer_______________________________________________________________________________________

Fuse 0.8 A/T_______________________________________________________________________________________



Measuring Inputs 2 x 4 - 20 mA, SubD, 9-pole, female, for VSC42MA4, VSP52MA4

1 x 0 - 10 V Amphenol C91E, 6-pole, female, for VSP62, VSM72,

VSH82_______________________________________________________________________________________

Control Outputs 2 x relay contact, potential free change over switches,

Phoenix strip terminal 6-pole:

4 A / 250 VAC, 2 A / 45 VDC_______________________________________________________________________________________

Analog Output 0 - 10 V, 10 k , jack plug, 2-pole_______________________________________________________________________________________

Serial Interface RS232, SubD, 9-pole, female; from fall 2009 on

Mini-USB, type B, 5-pole, female, Virtual Com Port protocol_______________________________________________________________________________________


Weight 750 g_______________________________________________________________________________________

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Product Codes

VD9S2

Complete Sets

VD92P

VD95P

VD96P

VD96CFP

VD97P

VD97CFP

VD98P

VD98CFP

Accessories:

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19inch cassette 14 HP x 3 RU,RS232, analog output, 95 - 265 VAC

(1400 - 1 mbar)VD9S2 + VSC42MA4 + cable 2 m

(1400 - 1 x 10 mbar)VD9S2 + VSC42MA4 + VSP52MA4 +2 cables á 2 m

(1000 - 1 x 10 mbar)VD9S2 + VSP62MV + cable 2 m

(1000 - 1 x 10 mbar)VD9S2 + VSP62MVCF + cable 2 m

(1000 - 5 x 10 mbar)VD9S2 + VSM72MV + cable2 m

(1000 - 5 x 10 mbar)VD9S2 + VSM72MVCF + cable 2 m

(1000 - 1 x 10 mbar)VD9S2 + VSH82MV + cable 2 m

(1000 - 1 x 10 mbar)VD9S2 + VSH82MVCF + cable 2 m

VacuGraph software for windows

Interface cable USB, shielded, 2 m

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WUSB0002

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106,0

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70,8 mm

66,0 mm

45,5 x 20,0 mm

set

VD9

4 Channel Vacuum Display And Control UnitAbsolute Pressure 1000 to 1 x 10 mbar-9

VD10 is an intelligent control unit for

application in apparatus and plant

engineering or special equipment

construction.

Eight potential free switches can be

mapped to the measuring channels.

Compact metal 19inch cassette

21 HP x 3 RU.


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Industrial plant engineering

Process automation

Coating plants

Vacuum furnaces

Apparatus engineering, e. g.

process control and

documentation for quality

assurance

Special equipment construction

Benefits

Simultaneous control of up to

4 measuring channels

Can be combined with all

Smartline transducers

8 potential-free switching points

2 programmable function keys

Universal switched mode

power supply 95 - 265 VAC

Pressure display in

mbar, Torr, hPa

Fail safe operation due to the

EMC compatible metal housing

Foil-protected front panel

Large graphic LCD display with

background illumination

Easy to use, menu-driven operator

instructions

USB interface for process

documentation

Interfaces CAN, Ethernet,

Profibus on request

VacuGraph software:

Documentation and evaluation of

vacuum processes, programming

set points and time based pressure

profiles, remote control

The controller is configured

at the factory to customer‘s

specification

VD10

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Technical Data

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Display LCD graphic display, background illuminated,

57 x 35 mm, floating point: 2 - 4 digits,

exponential, 2 digits mantissa, 1 digit exponent

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Display Refresh Rate 2 Hz (0.5 s)

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Sample Rate 5 Hz (200 ms) per channel (RS485-serial interface, digital)

30 Hz (33 ms) per channel (0 - 10 V input, analog)

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Power Supply 95 - 265 VAC, 50/60 Hz

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Power Consumption Max. 45 W incl. transducer

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Fuse 2.0 A / T

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Operating Temperature +5...+40°C

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Storage Temperature -20...+60°C

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Measuring Inputs 1 x RS485, SubD, 15-pole, male, for VSM72, VSH82

2 x 0 - 10 V Amphenol C91E, 6-pole, female, for VSP62

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Control Outputs 8 x relay, normally open contact, SP free assignable,

Phoenix strip terminal 16-pole,

lifetime > 1.000.000 cycles,

3 A, 250 VAC, 2 A 40 VD

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Serial Interface Mini-USB, type B, 5-pole, female, Virtual Com Port protocol

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Protection Class IP20

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Weight 1100 g

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Product Codes

VD10S8

Accessories:

W0606002

W0606006

W1515002

W1515006

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4-channel display and control unit,

19" cassette 21 HP x 3 RU,95 - 265 VAC

Measuring cable for VSP62MV,shielded, 2 m

Measuring cable for VSP62,shielded, 6 m

Measuring cable RS485 for VSM72,VSH82, shielded, 2 m

Measuring cable RS485 for VSM72,VSH82, shielded, 6 m

VacuGraph software for windows

USB interface cable, shielded, 2 m

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WUSB0002

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8,4

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106,5 mm

101,6 mm

VD10

57,5 x 34,0 mm

set

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VacuGraphWindows Software®

VacuGraph software can savemeasurements, plot pressurediagrams for graphical evaluationand control your application incombination with our vacuum controlunits.

VacuGraph is easy to use, is selfexplanatory and is suitable for allThyracont instruments with either anUSB or RS 232 interface.

Operating Systems:Windows 98/ME/2000/XP/Vista


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Benefits

Documentation of measurementsand pump down curves

Analysis of vacuum processes

Visualization of pressure increase

Set point setting and regulation oftime based pressure profiles

Saving of Measurements

Graphical display and evaluation ofmeasurements

Online measurement on a PC

Comparison of multiple plots

Read out data of Thyracontdata loggers

Easy operation

Export data as ASCII text filee. g. for Microsoft Excel

Printing diagramms

Logarithmic or linear pressurescales

PC based control by programmingtime triggered setpoints andprocess profiles in combination withThyracont control units like VD9

Remote control of vacuumcontrollers (keyboard lock,Start/Stop,...)

Comfortable setting of instrumentparameters in the configurationboard

VGR

Product Codes

WUSB0002

VGR

Accessories:

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VacuGraph Windows software

Interface cable 2m, for instrumentswith USB interface

Features

VD8 VD6 VD9 VD10 DC1 DC1S VSM VSH

Read measurements x x x x x x x x

Define set points x x x x x

Program set point profiles x x

Set hystereses x x

Read out data logger x

Set data logger rate x

Start / Stop Control x x x

Keyboard lock x x x

Gas correction factors x x x x x

Degas x

Instrument configuration x x x

V a c u u m I n s t r u m e n t s

Vacuum Instruments GmbH

Max-Emanuel-Straße 10

94036 Passau, Germany

Tel.: +49 (0)851 95986 0

Fax: +49 (0)851 95986 40

Email: [email protected]

www.thyracont.com

Expertise and Responsiveness: +49 (0)851 95986 28

THYRACONT

smartlinee_hqvsp62e_hqvsm72e_hqvsh82e_hqvd9e_hqvd10e_hqvgre_hq

Sm rtline Intelligent Vacuum Metrology - SENSOR+TEST · 2010. 1. 29. · Sm rtline Smartline Vacuum...

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Transcript of Sm rtline Intelligent Vacuum Metrology - SENSOR+TEST · 2010. 1. 29. · Sm rtline Smartline Vacuum...