Single-phase Unidirectional Transducers for Low …...SINGLE-PHASE UNIDIRECTIONAL TRANSDUCERS FOR...
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SINGLE-PHASE UNIDIRECTIONAL TRANSDUCERS FOR
"LOW-LOSS SURfACE ACOUSTIC WAVE DEVICES
by
~ C.B. SAW. B.Eng .• H.Eng.
A ThesIs
Submftted to the School of Graduate StudIes
In PartIal FulfIlment of the RequIrements
for the Degree
<0' Doctor of' Ph I losophy
July 1988
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SINGLE-PHASE UNIDIRECTIONAL
SURFACE ACOUSTIC WAVE TRANSDUCERS
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----_!_---.-DOCTOR OF PHILOSOPHY (1988)
(Electrical Engineering)
McHaster University
HamI , ton. Ont.. canada
TITLE: Single-phase ~Idfrectlonal Transcb:ers for Low-loss
Surface Acoust I c Wave DevI ces
AUTHOR: Choo Beng Saw. B.Eng. (HcKaster)
H.Eng. (HcHaster)
SUPERVISOR: Prof~ C.K. Campbell. Ph.D •• D.Se •• FRSC. FIEEE. FEle. FRSA,
NUHaER OF PAGES: xv. 267
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ABSTRACT
There ha~. been an up~urg~ fn Interest recently' fn lower~'loss
surface acoustfc wave
app J I c\t Jon~ •
,(,SAW) dev f ces for' new signa I . process I ng. ' , ,
(
In this thesis; a·'dew generation of.. unIdirectional
transducers (UDT~) for the realization of low-loss SAW devices has been'.' I
stud I ed I In wh I ch un i direct fona I i ty I s~ effected~. by· exploft fng cohe'rimt. . .
'Internal reflectfons within a transducer.\I
These sf ng.l'e-phase UDTs'
(SPUDTs) offer many' aavantages 'and attract Ions that are unava II ab lei n•
1,\1tc'!Y prev I ous UOT des fgns. Coup I ed-mode 'theory is extens i ~e1Y used to
analyze and characterIze these structures. A general theory Is proposed,'whlch wi 11 guide design' and construction of all SPUDT devices.' This
, .JIncludes specificatIons of the optimum conditions for achieving maximum
directIvIty. An accurate and detailed model is also developed for SPUDTs
wIth Inter-lOT ref1ectors. The mode I accounts for a I I major electrode4'
InteractIon ~fects and Involves the cascade of transfer matrices of~ p
reflectors. transmission I fnes and transducers,. to realize the avera I 1I
response. Experimental verIfications have consistently shown that thl~
model Is very accurate in the analysIs of SPUDTs. I....
Based on a better understanding of the SPUDT concept. several new
SPUDT designs have been developed. SpecIal efforts are expended towar-ds
scqu Iring key propert f es never before obta Ined with SPUOTs. such a\
Improved sidelobe suppression. ,wider bandwIdths and higher oPtr~tlng
,frequencIes. In these respects. the new designs represent a sfgnificant
Ifl
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Improvement over the earlier SPUDT designs.
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The final part of the the3ls'
•
. - describes the theory and Qpet:8t..lon of a novel SPUOT-based multlmode
osclUator for frequency.agfle radar. An InnovatIve Injection-locking.'!"'. " .
,scheme Involving FH chlrp-mlxl~g Is. also disclosed. PrelimInary tests
have Indicated very encouraging results including .low phase noise levels
(120 dBc/Hz -@ 10 kHz) t. wide tuning bandwidth (50'1) and fast switching
speeds « 2 us) •
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• CKNOVlEDGE"ENTS.
Th's research wou'ld not have succeeded without Dr.:. C.K.
Can1Jbel 1'5 actIve help, guIdance and encouragement; It fs dIfficult for. ..me to express my thanks adequately:' HIs sUPpOrt and conc~rn are deepl~
:.apprecfated. I am also grateful for the gufdance and counsel received. .
from the other membef"S of my .supervlsory conmfttee, namely, Drs. B.K.# •
Garside, J.P. Ref Ily and D.P. Taylor\' Dr. Campbell and Dr. P.M. Smith/
took time to p~oof-read this thesIs and I than~hem for their helpful
suggestions and crIticisms (mostly kInd and constructIve).
\
P.J.
I Wou I d a 150 I fke to thank my co II eagues, I1r. C. G. Ba f 1ey, Hr., CEcinonson and "s. S. F. Yuen for" the many discuss Ions on the finer
)
thIngs In lIfe, not the least of whIch were noise measurements and other
topIcs of general electrIcal Interest.
The f Inanc I a I support prov I ded by the Goverrvnent of Ontar 10 and
the Department of EI ectr I~I and CQITl)uter Eng I neer I ng I n the fonn of
scho I arsh I ps, teachsJ ng ass I stantsh Ips ctnd bursar I es Is gratefu 11 y
acknowledged.
a I so wIsh to acknowI edge the years of he I p and encouragement
given to me by my parents. In additIon, I wish to thank my fiancee for;
all her encouragement, love and sacrifIces.
v
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TABLE OF CONTENTS
I •
CHAPTER I - INTRODUCnON
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I . I Mot Ivat I on for Low- Joss Transducer Study
1.2...
Unidirectional Transducers (UDTs)..,...
5
1.3 Objectives
PART I
.THEORY OF SINGLE-PHASE UNIQIRECTIONAL TRANSDUCERS•
10
",,-/
CHAPTER 2 - UNIDIRECTIONAL SAW TR~SDUCTION EXPLOITING
( COHERENT INTERNAL REFLECTIONS
2.1 . Introduct~n
2.2 Theory of Coupled ~des
2.3 Coupled-mode Equations of ~ Periodically
Perturbed Piezoelectric Surface
2.4 Coupled-mode Analysis of lOTs with Enhanced
Internal Reflections"
2.5 The SPUDT Criterion•I ~
2.6 Practical SPUDT Design, (1982-1~85)
2.7 Standing Wave Patterns In SPUDTs
CHAPTER 3~- MODELLING AND SIMULATIONS
3.1 Introduction
vi
) 13 ,
13
14
19
27
37
41
47
50
50
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.I/ •
'. ' .. ,.',~ ., ~
~
3.2., ..
interactIon EffectsEYeluatlon of Electr~e 52, .
3.2.1 '~Yer8ge"VelocIty Shfft 53' ,.. :. e ,
"- 3.2.2 ' AcoustJc "Ismatch 56.. ',- .. ' , \',,.' , 3.2.3 Summery of Results ,,58
.'
3.3 AcoustIc Reflector Gratfn~
t:'-60
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V· 4 Acoustfc Transmlssfon Lfnes - 77..a."5 Interdlgftal Transducers 78
3.5.1 Scatterfng Parameters.of Electrfcallyt.ooded lOTs J 79
• (a) Acoustft Reflection Coefficient 80/ " Acoustfc T,ransmfsslon Coefficient(b) 88
q(c) Acousto-electrlc ConYers~on 88
3.5.2 Scattering Transfer Parameters 89-.'. 3.6 Experimental Verifications ,
101 I
- 3.6. I SPUDT with SplIt-electrode lOTs 10J.>
3.6.2 SPUDT wfth Single-electrode JOTs 102
3.6.3, SPUDT with Bloomfng Reflectors 105
Passband-shifted SPUDT~
3.6.4 107
"3.6.5 Two-port SAW Resonator 110
PART II
NEW SPUDT DESIGNS
PREFACE
CHAPTER 4 - SPUDT TECHNIQUES FOR SPECIALISED FILTERS
113
115
4. 1,
Low-loss Comb FIlters
4.1.1 Theory of SAW Ladder Transducers
4.1.2 Sampled DIstrIbuted Reflector Arrays I
115
116
123
4.2 Low-loss Wfde-band DesIgn
4.2.1 Slanted Reflector Arrays"
4.2.2 Slanted SPUDTs
yll
130
131
135
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4.3. Low-loss Harmonic-mode Excftatfons
. \ 4~3·.1 The SPUOT Crftetfon~at Harmonlc..Frequencles, ~
4~3.2 Efflcfency of Reflectors at Harmonic'. Frequencf es .
41.3.3 Stepped-electrode SPUDTs for Mode Selectlon
4.4 Passband-sh Ifted F1'1 ters
146
150
153 ."-
.l51 ,... ,161
CHAPTER'5 - LOW SIDELOBE DESIGNS '.~. 168
5.1 Wfthdrawal Weighted SPUDT
5.1.1 Time DomaIn CharacterizatIon
5.2 Aperture WeIghted SPUDT
5.2.1 Lfnear Array Hodel
5.2.2 Dolph-Chebyshev Array' Synthesis'
5.2.3 IllustratIve Designs
5.3 Electrically-coupled SPUDTr.
PART III~.
SPUDT-BASED APPLICATIONS
•PR~FACE
CHAPTER 6 - FREQUENCY AGILE SPUDT OSCILLATOR USING FH
< CHIRP-HIXING SIGNAL INJECTION •
168
175
17&
nrl-·181
190
198
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201
...
6.1 Introduction 201
6.2 Oscillator StabilIty as a Funttlon of InsertIon Loss
of Feedback Element 20e
6.3 Frequency AgIlity UsIng Hultlmode OscIllators 210
6.4 DesIgn of Prototype Oscll18tor
6.4.1 Phase CondItions for Oscfllatlons
6.4.2 Gain Condftlons for Frequency HoppIng
6.4.3 Chlrp-mfxlng Network
vIII
215
215
219
220
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.. '6.6 Unique Features of Prototype~, . 244
240
223.
229
229233' .~
;/ . ~235 ..
237
237
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Frequency Swftchfng Speed
Short Term Stabf 1Ity
. (8)\ Phase Noise Spectral Density\ .
(b) Time Domain StabI 1fty.,
"e~fum T~rm Stability
Beat-frequency Spectra I~ Dr f yenUn locked State
6.5.4
6.5.5
.,.6.5 Osc" lator Perfo~mance
6.5.1 Locking Bandwidth
6.5.2.. 6..-5.3
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"CONCLUSION AND APPENDICES
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CHAPTER 7 - CONCLUDING REMARKS .
APPENOIX A - EQUIVALENT FORMS OF SAW COUPLED-HODE EQUATIONS
246
251
APPENg IX B - DOLPH-CHEBY~HEV ARRAY SYNTH~S 1-5 PROCEDURE 254
APPENDIX C - REFERENCES 260
,
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SAW reflector grating 66
Reflection magnitude for 200 AI strips on ST-X Quartz 72
Single reflector 6(Equivalent circuit
Reflection coefficient Vs. Number of strl~s
on ~T-X Quartz 73
54,
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2
4
9- -
16
17 ...21
26.~.' ,.,30
33
36
38
43
49
. .LisT QF FIGURES.
Hechanism of acoustic mismatchSimple equivalent circuit representation
Varlatlon of directivity in a SPUDT
Expanded view of SPUDT section
Group-type SPUDT with unshorted reflectorsGroup-type SPUDT with shorted reflectorsGeneral SPUDT with unshorted reflectors
General SPUDT using split-finger lOT
Some practical SPUDT designs
First order SAW grating dispersion diagram
General SPUDT structure
Periodically pertur~ed substrate
Basic SAW. device
Plot10f minimum TTl level Vs. inser\lon loss
. \
"Some low-loss techniques
~llcatfons of OFBs
General DFB structure
1 .'. ,.~
Figure,;.
1• I_.. - .1.2 ~
1.3I\
2.1
2.2
2.3
2.4
2.5
2.6
2.7
2.8
2.9
2.10(a)(b)(c)
3.I(a)(b)
3.2(q)(b)
3.3
3.4
3.5(a)
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3.6(8) .(b)
(c)•. Cd} •
•3.7(8)
Jb}(c)
3.S 7
3.9(a) .
(b)
•.:-: .. '... :'.
Reflec~lon coefficient Vs. Number of str(p~on 128 YX-LINb0
3
Grating resonator.~lltude responses ef grating fl Iter comput~ usfnq.·the coupled-mode~ndmodified equivalent circuIt models
,CorrespondIng e)(per Imenta I response '.Refrectlvlty responses of gratings using 2 models
EV8J~atfon of regeneration effectsEqul~lent circuit Of lOT'Eva luat Ion of edge ref I ect Ions .
3-port lOT
Computed. short-cIrcuit reflectivity responses 'ofsingle-electrode and ::plit-electrode lOTsCorresponding experimental results from [54]
73
75
76
82
90
96
97
99
3.10(a)
(b),
3.1I(a)
( 0)
3.12(a)
(b)
. 3. J3
Computed open-circuit reflectivity responses ofsingle-electrode and split-electrode lOTsCorresponding experimental results from '[54]
Amplftude-f,requency responses of SAW filter usingsIngle-electrode and splft-electrode lOTsFInger reflections between two lOTs
A~I ftude response of SAW ff Iter on 1280 YX-L INb03using single-electrode lOTs 100
Same fIlter on ST-X Quartz
Responses of low-loss SAW device usIng group-type SPUDTs 103(a) Experimental responses reported by Lewfs[IO](b) Corresponding theoretical amplitude response
3.14
3.15(a)(b)(c)
3.16
AmplItude responses of SAW filter using SPUDTs withsIngle-electrode lOTs(a) ExperImental response(b) Correpondfng theoretical response
SPUDT wfth blooming reflectors.,Experlmental response of spuor filter on ST-X Quartz
TheoretIcal response
Amplitude responses of passband-shifted filters usingmodIfied SPUOTs(a) TheoretIcal response computed using latest
SPUDI model(b) ExperImental response(c) Theoretical response computed using "old"
SPUDT model
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104
106
108
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fIlter
, ,3.17
3.18(a) .(b)
.4.1
4.2
4.3
4.4(a}(b) ,
4.5
4.6
4.7 :,..4.8{a}
(b)
4.9
4. 10
4. II
4.12
4.13
4.14
4. 15
Phas~ respOnses of passband-shffted filter(a) Exper fmenta I respOnse(b) Theoretfcal respOnse ~
Amplftbde and phase resPonses of 2-pOrt SAW resonatorCorrespOnding experfmental respOnses
Basfc M-rung ladder transducer.
Phasor analysfs of 3-rung comb
Sampl'ed ~eflector array
Reflectlvfty respOnse of sampled reflector arrayReflectivity response of conventional grating
Amplitude responses of low-loss comb filter(a) Theoretical response(b) Experimental response
Wide-band sweep of the low-loss comb filter response
Slanted reflector array
Overall reflectfvlty response of a 9-channel slantedreflector gratingRe~lectfvity response of a conventional grating fora IO~ reflectivfty ban~ldth
•Section of slanted SPUDT
Responses of 6~ 'bandwldth low-loss SAW filter usingslanted SPUOTs{a} Theoretfcal response(b) Experfmental responses
Computed amplitude response of IO~ bandwIdth lowloss fflter
Measured responses of IO~ bandwfdth 10W~OSS(a) Amplftude and group-delay responses(b) Expanded dfsplay of amplftude ·response
Hodiffed floatlng-electrpde SPUDT
Amplitudes of spatial harmonics as a function ofmetallization ratio In a single-electrode IOT{?7)
3rd and 7th harmonic responses of fEUDT-baseo filter(a) 3rd harmonic response(b) 7th 'harmonic response
109
112
118
IZZ
124
125
127
129
132
134
136
141
143
144
147
149
152
.0
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4.16 •
4.17(a)
(b)
4.16
, 4. 19
4.20
5. I
5.2(a)(b)(c)
5.3(a)
(b)
5.4
5.5(a)(b)
5.6(a)(b)
5.7
5.8
5.9
. Var·fatlon of arpplltude dfrectlvftfeswfth electrodewIdths for sl,ngle metal strip on YZ-L~Nb03
Measured,amplltude response of FEUDT-based filter.showIng the Ist~ 3rd and 5th harmonfcMeasured response of stepped-e' ectrode SPUDT f_. Iter
Stepped-e Iectrode SPUDT'•
5th harmonIc and 1st harmonic responses of stepped-e1ectrode SPUDT f II ter 1\(a) 5th harmonIc response(b) 1st harmonIc (fundamental) response
.Design chart showing variation of normalized frequencyshift wIth SPUDT spacing d
1-
Amplitude responses of passband-shifted SPUDT filter'(al TheoretIcal response(b) ExperImental response
Schematic of withdrawal weighted SPUDT
Amplitude respo~se of a SAW filterWIthdrawal weightIng by selective removal electrodesAmplftude response of withdrawal weIghted SPUDT filter
Measured amplitude response of withdrawal weightedSPUOT filterMeasured amplItude response of filter using conventional groupe-type SPUOTs
Test set-up for time domaln,studles of SPUOTs
Impulse response of withdrawal weighted SPUOT filterCorrected frequency response after time-gating
~
Antenna array of H ~ubarrays
The acoustic analogue
AmplItude responses of a SPUOT comb filter(a) Experimental response(b) Computed response us:ng lInear array model
Computed frequency responses of weighted andunwelghted element factors
Amplitude responses of SPUOT comb filter with flatwide-band envelopes(a) Theoretical response(b) Experimental response
xffl
154
156,
)
158....,
160 \
164
167
169
171
173
176
177
180
183
186
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5.10(a),.(b)
5. II
5.12(a)(b)
Computed values of aperture weights for 35 ,dB side lobesComputed.amplltuijeresponse of a SAW Dolph-Chebyshev'ladder transducer wfth, 35 dB sfdelObe 'suppresslon .
Amplitude responses of aperture weighted SPUOT fflt~
(a) Theoretical response C-(b) ExperImental response
Impulse response of aperture wefghted SPUOT·fllterCorrected frequency response after time gating
188
189
191
193
5.13 Artwork of prototype's mask showing aperture weightedInput SPUOT and'unfform output SPUOT 194
'5. 14 Amp I Itude responses of aperture we f ghted comb f I Iter 191(a) TheoretIcal response(b) ExperImental response
5.15 Impulse response of aperture weighted SPUDT comb filter 197
5. 16 EIectr Ica I Iy-coup Ied SPUOT 199
5.17 Amplitude responses of electrically-coupled SPUDT filter ,202(a) Theoretical response(b) Experimental response
5.18
P.ICa)(b)
P.2
6. I
6.2(a)(b)
6.3
6.4
6.5(a)(b)
6.6(a)(b)
6.7
6.8
Impulse response of electrically-coupled SPUDT filter
Descrambler blodK diagramChannel 3 audio SPUDT filter
Frequency agile radar sys~em
theoretical and experimental phase noise spectra ofa SAW oscillator
. Varactor-tuned coot:> osc·11 IatorInJection-locked comb oscillator
Prototype frequency agile SPUDT oscillator
Measured amplitude response of SPUDT comb fl Iter
Basic chirp-mixing networkTypical chirp mixer output spectrum
\
Measured oscillator output spectrum for 80 "Hz modeMeasured oscillator output spectrum for 100 MHz mode
Measured oscillator output spectrum for 70 MHz mode
Convex parabo I Ie enve Iope for clean modes
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206
206
211
214
216
218
221
225
226
227
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