Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified...

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Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch

Transcript of Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified...

Page 1: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

Silver Sintering in Diversified Applications

Thomas Krebs, Susanne Duch

Page 2: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

Agenda

Introduction of Heraeus

Why sintering is needed

Materials and Processes

Sintering in Power Electronic Modules

Sintering in Discretes

Sintering in Power Amplifiers

Summary

Heraeus Deutschland GmbH & Co. KG | HET-AM-RDT-Sinter | Thomas Krebs, Susanne Duch Page 2

Page 3: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

Who We Are

Page 3Heraeus Deutschland GmbH & Co. KG | HET-AM-RDT-Sinter | Thomas Krebs, Susanne Duch Introduction

A globally active material technology Group

Family-owned for over 160 years

We create high value solutions for our customers and substantially strengthen

their competitiveness

We are organized in 11 Global Business Units

Over 12,591 employees at over 100 sites in 38 countries

2014 product revenue: €3,4 billion

2014 precious metals trading revenue: €12,2 billion

THE GROUP

Headquarter Hanau Regional Headquarter Shanghai Buford USA

Page 4: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

The Markets

Page 4Heraeus Deutschland GmbH & Co. KG | HET-AM-RDT-Sinter | Thomas Krebs, Susanne Duch Introduction

We are active in global markets characterized by a clear differentiation lasting

growth and attractive returns

Our ideas are focused on themes such as:

THE GROUP

Page 5: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

Why sintering is needed?

Heraeus Deutschland GmbH & Co. KG | HET-AM-RDT-Sinter | Thomas Krebs, Susanne Duch Page 6

Page 6: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

Trends in Electronic Packages

Longer Lifetime

Automotive electronics; Systems, difficult to access

Miniaturization

Restricted installation volume

Cost reduction (reduction of die and substrate size)

Increase of power density and operation temperature

Accelerated aging of die contact materials

Reduction of manufacturing Costs

Minimize process costs (no cleaning after processing)

Lower material costs (by increase of power density)

Lead Free Electronics

Heraeus Deutschland GmbH & Co. KG | HET-AM-RDT-Sinter | Thomas Krebs, Susanne Duch

SINTERING IN BRIEF

Page 7Trends in Power Electronic

Page 7: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

mAgic Sintering Materials, Processes, Applications

Heraeus Deutschland GmbH & Co. KG | HET-AM-RDT-Sinter | Thomas Krebs, Susanne Duch Page 10

Page 8: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

Processes

MAGIC SINTER MATERIAL – MATERIALS, PROCESSES, APPLICATIONS

Heraeus Deutschland GmbH & Co. KG | HET-AM-RDT-Sinter | Thomas Krebs, Susanne Duch

mAgic Paste

HPSHigh Performance Sintering

Printing

Die placement

Pressure sinteringAll die sizes

Pre-drying

mAgic Paste

EPS Easy Processing Sintering

Printing / Dispensing

Die placement

Non-pressure

sinteringdie sizes <40mm²

Solder Paste

Printing / Dispensing

Die placement

(Vacuum) ReflowAll die sizes

Cleaning

Page 11Sinter Processes

Page 9: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

Heraeus Deutschland GmbH & Co. KG | HET-AM-RDT-Sinter | Thomas Krebs, Susanne Duch

MAGIC SINTER MATERIAL – MATERIALS, PROCESSES, APPLICATIONS

mAgic Paste

ASP016/043

HPS

≤ 0.008

> 200

19

~ 50

≥ 10

≥ 230

Yes

Material properties

Electrical resistivity [mΩ∙cm]

Thermal conductivity [W/m∙K]

CTE [ppm/K] (below/above Tg)

E-Modulus @ 25°C [GPa]

Shear strength [N/mm2 ]

Process temperature [°C]

Residue free

SnAg3.5 Solder

0.01 - 0.03

20 - 50

25 - 30

~ 30

~ 40

230-260

No

Comparison of Material Properties

mAgic Paste

LTS295-Series

EPS

≤ 0.008

>100

19

~ 25

≥ 10

≥ 230

Yes

Page 12Sinter Processes

Page 10: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

mAgic Sinter Applications

Heraeus Deutschland GmbH & Co. KG | HET-AM-RDT-Sinter | Thomas Krebs, Susanne Duch

MAGIC SINTER MATERIAL – MATERIALS, PROCESSES, APPLICATIONS

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Power Modules

Discretes

Power Amplifier

Page 11: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

mAgic Sinter Materials in Power Electronic Modules

Heraeus Deutschland GmbH & Co. KG | HET-AM-RDT-Sinter | Thomas Krebs, Susanne Duch Page 14

Page 12: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

HPS Process

Heraeus Deutschland GmbH & Co. KG | HET-AM-RDT-Sinter | Thomas Krebs, Susanne Duch Pressure Sintering Process

POWER MODULES

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Pick & Place SinteringPrinting Drying

Page 13: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

Benchmark Wire Bonding and Die Attach Material –Power Cycling Test Package

Conventional DCB package:

DCB : bare Cu for solder, NiAu metallization for mAgic product

Diode: Infineon: 8.15 mm x 9 mm diode, NiAg backside metallization, thickness: 120 µm

Tested Materials

Wire Bond Materials Al-Wire, 300µm vs. AlCu-wire, 300µm

Die Attach Material SnAg3.5 Solder vs. mAgic Sinter Paste

Active power cycle test Parameter

ton=toff=15s

Tmin=40°C

ΔT=110°C

Heraeus Deutschland GmbH & Co. KG | HET-AM-RDT-Sinter | Thomas Krebs, Susanne Duch

POWER MODULES

Page 16Pressure Sintering Process

Page 14: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

Power Cycling Capabilities

Heraeus Deutschland GmbH & Co. KG | HET-AM-RDT-Sinter | Thomas Krebs, Susanne Duch

POWER MODULES

21000 PC

56000 PC

130000 PC

0 PC

40000 PC

80000 PC

120000 PC

Sample

Solder w/ Al wire

Solder w/ CucorAl Wire

Sinter layer w/ CucorAl Wire

- Soldered module

failed after 56,000

cycles

- Test of sintered

module stopped after

130,000 cycles

- Improvement of life

time >2.5 times

Page 17Pressure Sintering Process

Page 15: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

Soldered Modules Bonded using AlCu Wires at End of Life

Overview Picture

SEM DA Layer Center SEM DA Layer Center SEM DA Layer Corner

Bond Lift on Chip Die Attach Layer Center

Heraeus Deutschland GmbH & Co. KG | HET-AM-RDT-Sinter | Thomas Krebs, Susanne Duch

POWER MODULES

Soldered Module with AlCu-Wire after 56.000 Power Cycles

Page 19Pressure Sintering Process

Page 16: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

Sintered Modules Bonded using AlCu Wires at 130000 Power Cycles

Overview Picture

SEM DA Layer Center SEM DA Layer Corner SEM DA Layer Corner

Bond Lift on Chip Die Attach Layer

Heraeus Deutschland GmbH & Co. KG | HET-AM-RDT-Sinter | Thomas Krebs, Susanne Duch

POWER MODULES

Page 20Pressure Sintering Process

Page 17: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

mAgic Sintering Material in Discretes

Page 21Heraeus Deutschland GmbH & Co. KG | HET-AM-RDT-Sinter | Thomas Krebs, Susanne Duch Pressure-Free Sintering Process

Page 18: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

Lead Free Die AttachRoHS / ELV /

Green Electronics

Reflow at 260°C

MSL1

AEC proven

Operation temperature

>150°CCost effective

Improved thermal

performance

Improved electrical

performance

Sintering as Die Attach TechnologyMotivation and Requirements

Heraeus Deutschland GmbH & Co. KG | HET-AM-RDT-Sinter | Thomas Krebs, Susanne Duch Pressure-Free Sintering Process

DISCTRETS

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Page 19: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

Pick & Place SinteringDispensing

Pressure - Free Sintering Process

Heraeus Deutschland GmbH & Co. KG | HET-AM-RDT-Sinter | Thomas Krebs, Susanne Duch Pressure-Free Sintering Process

DISCTRETS

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Page 20: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

Example of Sintering Profile

Heraeus Deutschland GmbH & Co. KG | HET-AM-RDT-Sinter | Thomas Krebs, Susanne Duch Page 24Pressure-Free Sintering Process

DISCTRETS

Page 21: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

Reliability Test on D2PakSetup

D2Pack Power MOSFET package (automotive part)

Die Size is 4.3mm x 6.1mm

Paddle size is 8.53 mm x 5.10 mm; Ag Spot Plating for paste

Die Attach materials: Sinter Paste ASP295

Reliability tests performed

MSL1 3 times reflow after 168h 85/85 storage

Auto Clave 96h @ 121°C, 1 bar and 100% r-h.

Temperature Cycle Test -55/+150°C

Test methods

RDSon measurement

Inspection of X-section

Heraeus Deutschland GmbH & Co. KG | HET-AM-RDT-Sinter | Thomas Krebs, Susanne Duch Pressure-Free Sintering Process

DISCTRETS

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Page 22: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

ASP 295 in D2Pak RDSon Test Result

Heraeus Deutschland GmbH & Co. KG | HET-AM-RDT-Sinter | Thomas Krebs, Susanne Duch Pressure-Free Sintering Process

DISCTRETS

1000 TCT500 TCT250 TCT96h ACMSL1t0

2,5

2,0

1,5

1,0

0,5

0,0

Test

RD

So

n (

mO

hm

)

2

Electrical Performace during Reliability Test (RDSon)

LTS295-01P2 sintered in MOD3 Profile1000 TCT500 TCT250 TCT96h ACMSL1t0

2,5

2,0

1,5

1,0

0,5

0,0

Test

RDSon (mOhm) 2

Electrical Performace during Reliability Test (RDSon)

LTS295-01P2 sintered in MOD3 Profile

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Page 23: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

ASP 295 in D2Pak Rth Test Result

Heraeus Deutschland GmbH & Co. KG | HET-AM-RDT-Sinter | Thomas Krebs, Susanne Duch Pressure-Free Sintering Process

DISCTRETS

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1000 TCT500 TCT250 TCT96h ACMSL1t0

2,5

2,0

1,5

1,0

0,5

0,0

Test

RDSon (mOhm) 2

Electrical Performace during Reliability Test (RDSon)

LTS295-01P2 sintered in MOD3 Profile

Page 24: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

LTS295-01P2 Initial

Heraeus Deutschland GmbH & Co. KG | HET-AM-RDT-Sinter | Thomas Krebs, Susanne Duch Pressure-Free Sintering Process

DISCTRETS

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Page 25: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

LTS295-01P2 1000 TCT -55/+150°C

Heraeus Deutschland GmbH & Co. KG | HET-AM-RDT-Sinter | Thomas Krebs, Susanne Duch Pressure-Free Sintering Process

DISCTRETS

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Page 26: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

mAgic Sintering Material for Power Amplifier on Organic Substrates

Page 32Heraeus Deutschland GmbH & Co. KG | HET-AM-RDT-Sinter | Thomas Krebs, Susanne Duch Pressure-Free Sintering Process

Page 27: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

Power Amplifier

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therm. enhanced

Adhesive

ASP 295

(mAgic sinter paste)

Tc @848MHz 153,9 115,61

Tc @1785MHz 163,13 110,69

PA Chips generating a lot of heat but getting

less efficient if they are getting hotter

This drives the need for higher thermal

conductivity die attach materials

mAgic sinter paste provides outstanding

thermal conductivity between die and

substrate

Improved thermal conductivity of die attach

material enable

Lower chip temperatures

Less power loss and longer battery life

Improved performance

SINTERING ON ORGANIC SUBSTRATES

Page 28: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

Sinter ProfilePressure Less Sintering EPS

Seite 34

SINTERING ON ORGANIC SUBSTRATES

Heraeus Deutschland GmbH & Co. KG | HET-AM-RDT-Sinter | Thomas Krebs, Susanne Duch

N2

Page 29: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

Workability Results

Seite 35Heraeus Deutschland GmbH & Co. KG | HET-AM-RDT-Sinter | Thomas Krebs, Susanne Duch

SINTERING ON ORGANIC SUBSTRATES

Dispensing Die Attach

Page 30: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

Workability Results

Seite 36Heraeus Deutschland GmbH & Co. KG | HET-AM-RDT-Sinter | Thomas Krebs, Susanne Duch

SINTERING ON ORGANIC SUBSTRATES

Die Shear

Lower Spec Limit

Page 31: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

Summary

Heraeus Deutschland GmbH & Co. KG | HET-AM-RDT-Sinter | Thomas Krebs, Susanne Duch Page 39

Page 32: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

Summary

Based on its unique properties and processing silver

sintering allows a usage in different applications

Due to its material performance, thermally, electrically and

mechanically it works as enabler and booster if the system

is matched

Compared to solders a makeable increase in life time for of

interconnects in power electronics modules will be achieved

based on its mechanical stability and thermal conductivity

For discrete power electronics it can be used as lead free

die attach solution, easy in processing and providing the

required thermal and mechanical stability for 2nd level

interconnect

In high power density application like power amplifier it

allows a further increase of power density or increase in life

time due to its exceptional thermal conductivity

Heraeus Deutschland GmbH & Co. KG | HET-AM-RDT-Sinter | Thomas Krebs, Susanne Duch

SUMMARY

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Page 33: Silver Sintering in Diversified Applications · 2021. 6. 18. · Silver Sintering in Diversified Applications Thomas Krebs, Susanne Duch. Agenda Introduction of Heraeus Why sintering

Heraeus Deutschland GmbH & Co. KG | HET-AM-RDT-Sinter | Thomas Krebs, Susanne Duch

QUESTIONS

Thank You!

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