Signal enhancement and limiting factors in waveguides containing Si nanoclusters and Er 3+ ions D....

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Signal enhancement and limiting factors in waveguides containing Si nanoclusters and Er 3+ ions D. Navarro Urrios, N. Daldosso, L. Ferraioli, F. Gourbilleau, R. Rizk, P. Pellegrino, B. Garrido and L. Pavesi

Transcript of Signal enhancement and limiting factors in waveguides containing Si nanoclusters and Er 3+ ions D....

Page 1: Signal enhancement and limiting factors in waveguides containing Si nanoclusters and Er 3+ ions D. Navarro Urrios, N. Daldosso, L. Ferraioli, F. Gourbilleau,

Signal enhancement and limiting factors in waveguides containing Si nanoclusters and Er3+ ions

D. Navarro Urrios, N. Daldosso, L. Ferraioli, F. Gourbilleau, R. Rizk, P. Pellegrino, B. Garrido and L. Pavesi

Page 2: Signal enhancement and limiting factors in waveguides containing Si nanoclusters and Er 3+ ions D. Navarro Urrios, N. Daldosso, L. Ferraioli, F. Gourbilleau,

D. Navarro-Urrios, Microtechnologies for the New

Millenium 2007, 2-4 May, Maspalomas

2/20

Introduction to the system under study.Characterisation and modelling of the

studied samples.Signal enhancement setup and

measurements.Conclusions

Outline

Page 3: Signal enhancement and limiting factors in waveguides containing Si nanoclusters and Er 3+ ions D. Navarro Urrios, N. Daldosso, L. Ferraioli, F. Gourbilleau,

D. Navarro-Urrios, Microtechnologies for the New

Millenium 2007, 2-4 May, Maspalomas

3/20

We want to improve

Erbium (Er3+)

Usual EDFAsUsual EDFAs (Erbium doped Fiber Amplifier)(Erbium doped Fiber Amplifier)

absabs1010-21-21 cm cm22

Expensive pumping source Expensive pumping source

(resonant, intense and coupled)(resonant, intense and coupled)

by using

Si substrate

buffer S

iO 2

EDWA EDWA (Erbium doped Waveguide Amplifier)(Erbium doped Waveguide Amplifier)

By taking advantage of the couplingBy taking advantage of the coupling

between Si-nc and Erbetween Si-nc and Er3+ 3+ ionsions

Introduction

x x

x x

x

x

x

x

x

x

x x

x

x

x x

x x

x

x

x

x

x

x

x x

x

x

x x

x x

x

x

x

x

x

x

x x

x

x

Page 4: Signal enhancement and limiting factors in waveguides containing Si nanoclusters and Er 3+ ions D. Navarro Urrios, N. Daldosso, L. Ferraioli, F. Gourbilleau,

D. Navarro-Urrios, Microtechnologies for the New

Millenium 2007, 2-4 May, Maspalomas

4/20

Why Si-nc?

Broad band absorption (UV-VIS)

Increment of excitation for Er3+ : exc from ~10-21 (in SiO2) to 10-16-10-18 cm2 (with Si-nc)

Fast (~ 1s) and efficient (~55%) energy transfer from Si-nc to Er3+

Possibility of electrical pumping

Higher index contrast for light confinement

CMOS compatibility

Page 5: Signal enhancement and limiting factors in waveguides containing Si nanoclusters and Er 3+ ions D. Navarro Urrios, N. Daldosso, L. Ferraioli, F. Gourbilleau,

D. Navarro-Urrios, Microtechnologies for the New

Millenium 2007, 2-4 May, Maspalomas

5/20

( )exc excNC NC exc t exc ind Er

dN NN N k N C N

dt

Excitons:

NC NCexc

NC t ind Er

NN

k C N

Steady state:

Nexc

4I15/2

4I13/2

4I11/2, 4I9/2

Er3+

Introduction

Nexc : density of excitonsNNC: total density of Si-nc NC: absorption cross section : intrinsic lifetime of the exciton kt: average coupling rate Cind: percentage of Er3+ coupled to Si-nc

Exciton generation and strong Auger

Intrinsic recombination

Transfer to Er3+

Page 6: Signal enhancement and limiting factors in waveguides containing Si nanoclusters and Er 3+ ions D. Navarro Urrios, N. Daldosso, L. Ferraioli, F. Gourbilleau,

D. Navarro-Urrios, Microtechnologies for the New

Millenium 2007, 2-4 May, Maspalomas

6/20

22 21 d 1 up 2 1 2

d

NN + N - -C Nexc p abs s em s

dNKN N N

dt

221 up 2 1 2

d

NN - -C Nexc p abs s em sN N

Absorption and stimulated emission term

Important for pump and probe measurements

Nexc

N1

N2

Er3+

Excitation term De-excitation mechanisms

Introduction

abs, em, exc, d, Cup ?

Page 7: Signal enhancement and limiting factors in waveguides containing Si nanoclusters and Er 3+ ions D. Navarro Urrios, N. Daldosso, L. Ferraioli, F. Gourbilleau,

D. Navarro-Urrios, Microtechnologies for the New

Millenium 2007, 2-4 May, Maspalomas

7/20

Dep. conditions

Annealing T

The samplesThe samplesEr:Si-nc produced by Reactive Magnetron co-Sputtering and successive annealing to get phase separation and reduction of non

radiative defects

Si-substrate

Si-nc doped Er3+(1m)

SiO2

(2÷6 m)

SiO2 (m)

800 nm

Annealing time

Waveguide Sample

Annealing time (min)

Si excess (at. %)

Er content(x1020 cm-3)

n

A 240 7 3±0.1 1.61 0.62

B 60 7 4±0.1 1.545 0.51

C 30 6-7 5.4±0.2 1.516 0.48

D 10 6-7 5.4±0.2 1.48 0.28

n increases with annealing time

Optical litography andReactive ion etching

F. Gourbilleau et al., JAP, 94, 3869 (2003)JAP 95, 3717 (2004).

NSi-nc1x1017cm-3

Page 8: Signal enhancement and limiting factors in waveguides containing Si nanoclusters and Er 3+ ions D. Navarro Urrios, N. Daldosso, L. Ferraioli, F. Gourbilleau,

D. Navarro-Urrios, Microtechnologies for the New

Millenium 2007, 2-4 May, Maspalomas

8/20

Determination of abs and em

h

kTem abs e

Mc Cumber relation:

From transmission measurements

abs and em

abs and em similar to that of Er3+ in SiO2

1400 1450 1500 1550 1600

30

35

40

450

2

4

6

0

2x10-21

4x10-21

6x10-21

abs (

cm2)

abs (

dB

/cm

)

Real measurement Background losses

In

s. lo

sses

(dB

)

Wavelength (nm)

abs

L

Absorption losses

5dB/cm

Decreasing with annealing time

Page 9: Signal enhancement and limiting factors in waveguides containing Si nanoclusters and Er 3+ ions D. Navarro Urrios, N. Daldosso, L. Ferraioli, F. Gourbilleau,

D. Navarro-Urrios, Microtechnologies for the New

Millenium 2007, 2-4 May, Maspalomas

9/20

Total lifetime and cooperative up-conversion

22 2up 2

d

( ) N ( )-C N ( )

dN t tt

dt

Quantitative measurements of the photon flux emitted from the samples. It is so possible to correlate

the number of emitted photons with N2

Page 10: Signal enhancement and limiting factors in waveguides containing Si nanoclusters and Er 3+ ions D. Navarro Urrios, N. Daldosso, L. Ferraioli, F. Gourbilleau,

D. Navarro-Urrios, Microtechnologies for the New

Millenium 2007, 2-4 May, Maspalomas

10/20

Total lifetime and cooperative up-conversion

0 2 4 6

1017

1018

1019

N2(c

m-3)

time (ms)

sample B-60' sample C-30' sample D-10'

1x1020 (ph/cm2s)

Sample D

Sample C

Sample B

1.98.0E-175.60E+18

3.25.5E-171.06E+19

3.82.0E-179.00E+18

21(ms)Cup (cm3 s-1)N2(t=0) (cm-3)

Sample D

Sample C

Sample B

1.98.0E-175.60E+18

3.25.5E-171.06E+19

3.82.0E-179.00E+18

21(ms)Cup (cm3 s-1)N2(t=0) (cm-3)

d and Cup

Decreases with annealing time

Increases with annealing time

Page 11: Signal enhancement and limiting factors in waveguides containing Si nanoclusters and Er 3+ ions D. Navarro Urrios, N. Daldosso, L. Ferraioli, F. Gourbilleau,

D. Navarro-Urrios, Microtechnologies for the New

Millenium 2007, 2-4 May, Maspalomas

11/20

Excitation cross section at low pump power

1 1exc

r d

0

10

20

30

40

1/ r -

1/ d(s

-1)

1017 ph/s cm2

=2x10-17cm2

=1x10-16cm2

Sample C

0

10

20

30

40

=2x10-17cm2

488 nm 476 nm

Sample B=8x10-17cm2exc

…but seems to be flux dependent, the slope is changing with increasing pump flux

exc is orders of magnitude higher than that of Er3+ in pure silica (~10-21 cm2),

for samples B and C, resonant (488 nm) and non-resonant (476 nm) result in the same exc

Page 12: Signal enhancement and limiting factors in waveguides containing Si nanoclusters and Er 3+ ions D. Navarro Urrios, N. Daldosso, L. Ferraioli, F. Gourbilleau,

D. Navarro-Urrios, Microtechnologies for the New

Millenium 2007, 2-4 May, Maspalomas

12/20

Excited erbium population vs photon flux

1016 1017 1018 1019 1020 1021 1022 10231017

1018

1019

1020

1021

1022

measurement simulations

N

2 (cm

-3)

Photon flux (ph/cm2s)

pump

=488nm

Sample B

Population

inversion

Page 13: Signal enhancement and limiting factors in waveguides containing Si nanoclusters and Er 3+ ions D. Navarro Urrios, N. Daldosso, L. Ferraioli, F. Gourbilleau,

D. Navarro-Urrios, Microtechnologies for the New

Millenium 2007, 2-4 May, Maspalomas

13/20

( )nc

o

R R

Rexc o dR e

ModellingModelling

Model for exc

Er3+ ions near the Si-nc are efficiently coupled to them, whereas Er3+ ions far away behave more and more as Er3+ in SiO2 that can be excited only directly.

We consider that the first Er to be excited and therefore the strongest coupled would be the closest to the Si-nc

The coupling diminishes with the distance

Rnc

Ro

Page 14: Signal enhancement and limiting factors in waveguides containing Si nanoclusters and Er 3+ ions D. Navarro Urrios, N. Daldosso, L. Ferraioli, F. Gourbilleau,

D. Navarro-Urrios, Microtechnologies for the New

Millenium 2007, 2-4 May, Maspalomas

14/20

Simulations

1016101710181019102010211022102310241025102610271014

1015

1016

1017

1018

1019

1020

1021

1022

N2 (

cm-3)

Photon flux (ph/cm2s)

through Si-Nc directly excited totalexperimental data

pump

=488nm

Sample B

0 2 4 6 8 10

0

10

20

30

40

1017 ph/s cm21/

r - 1

/ d(s-1)

experimental simulation

d=3.8 ms, Cup=2x10-17cm3s-1, o=3x10-16cm2, d=5x10-21cm2,

Rnc=4nm , Ro=0.5nm, NNC=1x1017cm-3.Doing this for each flux we obtain….

Short range interaction

And this means that only 2-3% of the whole erbium population can be excited trough transfer from Si-nc. The rest can only be excited directly because

simply it is too farIn any case it is about 10-100 excitable Er3+ per Si-nc

Page 15: Signal enhancement and limiting factors in waveguides containing Si nanoclusters and Er 3+ ions D. Navarro Urrios, N. Daldosso, L. Ferraioli, F. Gourbilleau,

D. Navarro-Urrios, Microtechnologies for the New

Millenium 2007, 2-4 May, Maspalomas

15/20

INPUT OUTPUT

PROBE

PUMP

Signal enhancement (Pump&Probe experimental setup)

Page 16: Signal enhancement and limiting factors in waveguides containing Si nanoclusters and Er 3+ ions D. Navarro Urrios, N. Daldosso, L. Ferraioli, F. Gourbilleau,

D. Navarro-Urrios, Microtechnologies for the New

Millenium 2007, 2-4 May, Maspalomas

16/20

Signal enhancement

&2

2exp(2 ) exp

1( )

pump probe excem em Er

probeexc

d

ISE N L N L

I

probe

Signal from sa

mple

To detector

Si substrate buffer S

iO 2

Pump

Probe

SE>1SE1

0 50 100 1500.015

0.020

0.025

0.030

0.035

Inte

nsity

(V

)

pump onpump off

time (sec)

pump off

0.5 1 5 100.9

1.0

1.1

1.2

1.3

1.4

100 1000

B at 1535 nm C at 1535 nm D at 1535 nm

Power density (W/cm2)

Sig

na

l En

ha

nce

me

nt

(1020phot/cm2s)

0 10 20 30 40 50 60 70 80

1.00

1.05

1.10

pump on

Sig

nal e

nhan

cem

ent

time (sec)

pump off probe

1510nm Sample D

Internal gain = g

Page 17: Signal enhancement and limiting factors in waveguides containing Si nanoclusters and Er 3+ ions D. Navarro Urrios, N. Daldosso, L. Ferraioli, F. Gourbilleau,

D. Navarro-Urrios, Microtechnologies for the New

Millenium 2007, 2-4 May, Maspalomas

17/20

Signal enhancement

Sample Max SE

(dB/cm)

Propagation

Losses

(dB/cm)

Absorption

Losses (dB/cm)

Max internal gain

(CA corrected)

(dB/cm)

needed

(ph/cm2 s)

B-60’ 0.12 1.2 5.4 0.6 1x1022 (488nm)

C-30’ 0.65 1.6 8.5 0.76 5x1020 (488nm)

D-10’ 0.45 2.0 7.5 0.56 1x1021 (532nm)

Page 18: Signal enhancement and limiting factors in waveguides containing Si nanoclusters and Er 3+ ions D. Navarro Urrios, N. Daldosso, L. Ferraioli, F. Gourbilleau,

D. Navarro-Urrios, Microtechnologies for the New

Millenium 2007, 2-4 May, Maspalomas

18/20

Signal enhancement

From maximum gain value:

2 2em

abs Er Er

N Ng

N N

Sample Max N2/NEr

B-60’ 11%

C-30’ 9%

D-10’ 7%

…but only 2-3% is being excited thorugh transfer from the Si-nc

Page 19: Signal enhancement and limiting factors in waveguides containing Si nanoclusters and Er 3+ ions D. Navarro Urrios, N. Daldosso, L. Ferraioli, F. Gourbilleau,

D. Navarro-Urrios, Microtechnologies for the New

Millenium 2007, 2-4 May, Maspalomas

19/20

Conclusions

• We have measured and quantified reliable values for:

Absorption and emission cross sectionsTotal lifetimes and cooperative up-conversion coefficientsEffective excitation cross sections at low pump powerIndirectly excitable Er3+ population through Si-nc energy

transfer (2-3% of the Er3+ concentration)

• Using a pump and probe technique we have demonstrated values of internal gains of around 0.7dB/cm

We still have to optimize the Si-nc:Er3+ ratio and the characteristics of the Si-nc in order to excite the whole Er population through indirect energy transfer

Page 20: Signal enhancement and limiting factors in waveguides containing Si nanoclusters and Er 3+ ions D. Navarro Urrios, N. Daldosso, L. Ferraioli, F. Gourbilleau,

D. Navarro-Urrios, Microtechnologies for the New

Millenium 2007, 2-4 May, Maspalomas

20/20

THANK YOU!

Page 21: Signal enhancement and limiting factors in waveguides containing Si nanoclusters and Er 3+ ions D. Navarro Urrios, N. Daldosso, L. Ferraioli, F. Gourbilleau,

D. Navarro-Urrios, Microtechnologies for the New

Millenium 2007, 2-4 May, Maspalomas

21/20

Page 22: Signal enhancement and limiting factors in waveguides containing Si nanoclusters and Er 3+ ions D. Navarro Urrios, N. Daldosso, L. Ferraioli, F. Gourbilleau,

D. Navarro-Urrios, Microtechnologies for the New

Millenium 2007, 2-4 May, Maspalomas

22/20

Page 23: Signal enhancement and limiting factors in waveguides containing Si nanoclusters and Er 3+ ions D. Navarro Urrios, N. Daldosso, L. Ferraioli, F. Gourbilleau,

D. Navarro-Urrios, Microtechnologies for the New

Millenium 2007, 2-4 May, Maspalomas

23/20

As much Er3+ as possible (avoiding up-conversion phenomena, NEr4-5x1020cm-3)

Enough Si-nc to excite all the Er3+ ions Good modal confinement Low waveguide losses (not that due to absorption of Er3+)

Gain favouring

Gain limiting Up-conversion (shifts the pump threshold for population inversion

towards higher pump energies) Excited state absorption Non radiative de-excitation (Auger de-excitation with a nearby

exciton) Carrier absorption in Si-nc (decreases the signal and blocks the

transfer to Er ions)

Page 24: Signal enhancement and limiting factors in waveguides containing Si nanoclusters and Er 3+ ions D. Navarro Urrios, N. Daldosso, L. Ferraioli, F. Gourbilleau,

D. Navarro-Urrios, Microtechnologies for the New

Millenium 2007, 2-4 May, Maspalomas

24/20

Propagation losses at 1600nmPropagation losses at 1600nm

Losses at 1600 nm are essentially propagation losses of the rib loaded waveguide

Page 25: Signal enhancement and limiting factors in waveguides containing Si nanoclusters and Er 3+ ions D. Navarro Urrios, N. Daldosso, L. Ferraioli, F. Gourbilleau,

D. Navarro-Urrios, Microtechnologies for the New

Millenium 2007, 2-4 May, Maspalomas

25/20

2.1 2.2 2.3 2.4 2.5 2.6

4

8

12

16

0.4

0.2

0.1

n2

n SiO2

(m

s-1)

rad (from equation)

PL

(measured) Life

time (

ms)

n2

rad, SiO2

2.1 2.2 2.3 2.4 2.5 2.6

0

5

10

n SiO2

abs(1

0-21 cm

2 )

SiO2

Radiative lifetime determination

2

22

0

81e

rad

nd

c

Also, from Mc Cumber analysis:

Local fieldeffects prevail

Medium fieldeffects prevail

Page 26: Signal enhancement and limiting factors in waveguides containing Si nanoclusters and Er 3+ ions D. Navarro Urrios, N. Daldosso, L. Ferraioli, F. Gourbilleau,

D. Navarro-Urrios, Microtechnologies for the New

Millenium 2007, 2-4 May, Maspalomas

26/20

Excited Er3+ vs pump flux

1017 1018 1019 1020 10211017

1018

1019

N2

(cm

-3)

Photon flux (ph/cm2s)

experimental data

pump

=488nm

Sample B, 60'

1E16 1E17 1E18 1E19 1E20 1E21 1E22 1E23 1E24 1E25 1E26 1E271E14

1E15

1E16

1E17

1E18

1E19

1E20

1E21

1E22

N2 p

opul

atio

n (c

m-3

)Photon flux (ph/cm2s)

through Si-Nc directly excited totalexperimental data

ind

=2E-17 cm-2

d=5E-21cm-2

k=2%

0 1 2 3 4 5 6 7 8 9 10

x 1017

0

5

10

15

20

25

30

photon flux(ph/cm2 s)

1/ta

uris

e-1/

tauf

all(s

-1)

simulationexperimental (Fabrice)

11

1(

)r

d

s

Photon flux (ph/cm2s)

…but

SimulationExperimental

Page 27: Signal enhancement and limiting factors in waveguides containing Si nanoclusters and Er 3+ ions D. Navarro Urrios, N. Daldosso, L. Ferraioli, F. Gourbilleau,

D. Navarro-Urrios, Microtechnologies for the New

Millenium 2007, 2-4 May, Maspalomas

27/20

Around 96% of the total volume of the sample is occupied by Er3+ that are only excitable through direct photon excitation, because simply they are too far from a Si-nc.