SiGe Technology

22
RTO RTCVD poly RTCVD nitride Clean Module Load lock ellipso- meter foup Department of Electrical Engineering, National Taiwan University SiGe Technology SiGe Technology 陳陳陳 R91943105 Temperature Temperature Effects Effects

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SiGe Technology. Temperature Effects. 陳博文 R91943105. Outline. The Impact of Temperature on Bipolar Transistors Cryogenic Operation of SiGe HBTs Optimization of SiGe HBTs for 77K Helium Temperature Operation Nonequilibrium Base Transport High-Temperature Operation. - PowerPoint PPT Presentation

Transcript of SiGe Technology

Page 1: SiGe Technology

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SiGe TechnologySiGe Technology

陳博文R91943105

Temperature Temperature EffectsEffects

Page 2: SiGe Technology

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OutlineOutline• The Impact of Temperature on Bipolar Transistors• Cryogenic Operation of SiGe HBTs• Optimization of SiGe HBTs for 77K• Helium Temperature Operation• Nonequilibrium Base Transport• High-Temperature Operation

Page 3: SiGe Technology

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The Impact of Temperature on Bipolar The Impact of Temperature on Bipolar TransistorsTransistors

• A modest increase in the junction turn on voltage with decreasing temperature

• A strong increasing in the low-injection transconductance with cooling

• A strong decrease in ß with cooling• A modest decrease in frequency response wit

h cooling, with fT typically degrading more rapidly than fmax with decreasing temperature

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Current-Voltage CharacteristicsCurrent-Voltage Characteristics• For fixed bias current, VBE increase with cooling.

)exp()exp()( 30 KT

EKTE

TTJ RbigoCO

TJ

JqKT

TV

TV CO

CO

biasBEJ

BEC

1| ,

2

20

033

0

311KT

EET

TT

TTJ

JgoRbiCO

CO

qE

VTT

V gobiasBEJ

BEC ,

1| BEVT

Page 5: SiGe Technology

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Current-Voltage CharacteristicsCurrent-Voltage Characteristics

)KTqV(T)exp(J(T)J BE

COC

BW

nie

PCO

dxxDxn

xPqJ

0 2 )()()(

(T)J(T)Jln

qKTV

CO

CBE

Page 6: SiGe Technology

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TransconductanceTransconductance

• We can expect an improvement in gm of roughly 3.9* in cooling from room temperature to liquid nitrogen temperature (Fig.9.1)

KTTqI

KTqVI

KTq

VITg CBE

COBE

Cm

)()exp()(

Page 7: SiGe Technology

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Current GainCurrent Gain

• Consider ideal Si BJT (constant doping profiles, metal emitter contact)

Page 8: SiGe Technology

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Current GainCurrent Gain)exp(

)()()()()(

2

KTqV

TNTWTnTqDTJ BE

abb

ibnbC

)exp()()()()(

)(2

KTqV

TNTLTnTqD

TJ BE

depe

iepeB

)exp()()()(

)()()()()(

KTEE

TNTWTDTNLTqD

TITIT

appge

appgb

abbpe

depenb

B

Cideal

)exp()( KTEEE

ideal

appge

appgbRbiT

Page 9: SiGe Technology

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ResistancesResistances

• Simulated effects of carrier freeze-out on the doping profile of a bipolar transistor at 77K

Page 10: SiGe Technology

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ResistancesResistances

KTE

bi

TWb

bpbbi

Rbi

eTTR

dxTxpTxquTR

)()(

),(),()(1)(

0

• The result for realistic base profiles shows a quasi-exponential increase below about 200K and is very sensitive function of the peak base doping, particularly in strong freeze out below 77K

• One can measure a base freeze activation energy ERbi

Page 11: SiGe Technology

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CapacitanceCapacitance

21

)()(

TqNq

ATCbi

Sidepl

dc

• The parasitic depletion capacitances will generally decrease (improve) with cooling, due to the increase in junction built-in voltage, since for a one-side step junction.

• For the CB junction, which is the most important parasitic capacitance for switching performance due to Miller effect, CCB typically decreases by 10-20% form 300K to 77K

Page 12: SiGe Technology

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Frequency ResponseFrequency Response

)()()(2)())()((

21 TCTr

TvTWTCTC

qIKT

f CBCsat

CBebCBEB

CT

• For fixed bias current, both depletion capacitances will decrease only slightly, while τ b and τe will both increase strongly with cooling

• Unb increase only weakly with cooling since the base is heavily doped and thus cannot offset the factor of KT

• In addition, enhanced carrier trapping on frozen-out acceptor sites can further degrade the base transit time

)(2)(

)(2)()(

22

, TKTTqW

TDTWT

nb

b

nb

bSib

Page 13: SiGe Technology

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Frequency ResponseFrequency Response

)()(8)(

TCTRTff

CBb

TMAX

• The strong base resistance increase at low temperatures.

Page 14: SiGe Technology

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SiGe HBT Performance Down to 77KSiGe HBT Performance Down to 77K

)/)(exp(1/)0(exp/)(|

,

),(,~~

KTgradeEKTEKTgradeE

Geg

GegGegV

Si

SiGeBE

•Measure and calculated SiGe-to-Si current gain ratio as a function of reciprocal temperature for a comparably constructed i-p-i SiGe HBT and i-p-i Si BJT

Page 15: SiGe Technology

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SiGe HBT Performance Down to 77KSiGe HBT Performance Down to 77K

KTgradeEKTgradeE

KTgradeE

VV

Geg

Geg

GegV

SiA

SiGeABE

)(

))(exp(1))(exp(|

,

,

,

,

,

•Measure and calculated SiGe-to-Si Early voltage ratio as a function of reciprocal temperature for a comparably constructed i-p-i SiGe HBT and i-p-i Si BJT

Page 16: SiGe Technology

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SiGe HBT Performance Down to 77KSiGe HBT Performance Down to 77K

))(exp())0(exp( ,,~~

,

,

KTgradeE

KTE

VV GegGeg

SiA

SiGeA

•Measure and calculated SiGe-to-Si current gain- Early voltage product ratio as a function of reciprocal temperature for a comparably constructed i-p-i SiGe HBT and i-p-i Si BJT

Page 17: SiGe Technology

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High Temperature OperationHigh Temperature Operation

• Percent change in peak current gain between 25°C and 125 °C for various Ge profile.

Page 18: SiGe Technology

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14% Ge low-noise profile14% Ge low-noise profile

Page 19: SiGe Technology

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High Temperature OperationHigh Temperature Operation• The current gain in SiGe HBTs does indeed have an

opposite temperature dependence from that of a Si BJT, as expected from simple theory.

• These changes in ß between 25°C and 125 °C, however, are modest at best (<25%), and clearly not cause for alarm for any realistic circuit.

• The negative temperature coefficient of ß in SiGe HBTs is tunable, meaning that its temperature behavior between, say, 25°C and 125 °C can be trivially adjusted to its desired value by changing the Ge profile shape near the EB junction.

Page 20: SiGe Technology

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High Temperature OperationHigh Temperature Operation

• In the case of the 15% Ge triangle profile, with 0% Ge at the EB junction, ß is in fact femperature independent from 25°C to 125 °C.

• It is well known that thermal-runaway in high-power Si BJT is the result of the positive temperature coefficient of ß.

• The fact that SiGe HBTs naturally have a negative temperature coefficient for ß suggests that this might present interesting opportunities for power amplifiers, since emitter ballasting resistors (which degrade RF gain) could in principle be eliminated.

Page 21: SiGe Technology

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High Temperature OperationHigh Temperature Operation

• Gummel characteristics at 25°C and 275°C for a 14% Ge, low-noise optimized SiGe HBT

Page 22: SiGe Technology

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High Temperature OperationHigh Temperature Operation

• Current gain as a function of collector current at 25°C and 275°C for a 14% Ge, low-noise optimized SiGe HBT