Shot blast deflashing system
Transcript of Shot blast deflashing system
Selective Electroless Copper for Interconnect Plugs US. Patenf 5,674,787. Ott 7, 1997 6. Zhao et al., assignors to Semarech Inc.. Austin, Texas
A method of selectively forming an inter- connect structure on a semiconductor wafer to couple a first conductive region to a sec- ond conductive region and in which the two conductive regions are separated by a dielec- tric layer comprising forming an opening in the dielectric layer to expose a first barrier layer overlying the first conductive region: depositing a dielectric barrier layer within the opening; anisotropically etching the dielectric barrier layer so that the dielectric barrier layer remains along sidewalls of the opening, but not atop the first barrier layer; activating a surface of the first barrier layer for autocata- lytic growth of copper by forming a copper activation seed layer on the first barrier layer: subjecting the copper activation seed layer to an electroless deposition solution; and depos- iting copper electrolessly on the first barrier layer by having the copper activation seed layer initiate the autocatalytic growth of cop- per to form the interconnect structure.
Descaling System U.S. Patent 5,675,880. Oct. 14, 1997 J. L. Saikin, assignor to Bethlehem Steel Corp.. Befhlehem, Pa.
A method of descaling steel. comprising providing a nozzle to be selectively opened and closed for directing high-pressure des- caling fluid toward the steel so as to des- tale the steel when the nozzle is opened.
Spray Coating Device U.S. Patent 5676,310. Oct. 14, 1997 J.E. Hynds, Famington Hi//k, Mich.
A method and system for air spray coat- ing and manually operated atomizing de- vice for use therein.
Shot Blast Deflashing System U.S. Patent 5,676,5&T Oct. 14, 1997 WR. Frederick and M. Hjerpe, assignors to AGA AB, Lidingo, Sweden
A cryogen shot blast apparatus for de- flashing workpieces. comprising a sealed
cryogenic chamber having a stationary por- tion; a barrel supported within the cryo- genic chamber and rotatable about a longi- tudinal axis; and a throwing wheel adapted to propel particulate media into the treat- ment chamber to impact the workpieces.
Blast Apparatus U.S. Patent 5,676.589. Oct. 14, 1997 TI. Ashworfh, assignor to Vapormatl ltd., Guernsey Channel islands
A blast gun assembly comprising a plurality of body sections. which are clamped in face-to-face contact with one another, at least some of the body sec-
tions being in the form of head sections carrying respective mixture discharge nozzles. the sections being formed with duct mean5 for supplying in use the dis- charge nozzles with separate flows of abrasive material and fluid. the duct means extending through the contacting faces of adjacent body sections to pro- vide communication between the sec- tions.
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England, where gold and silver articles were assayed and stamped to indicate origin, purity, or genuineness] 2 : a distinguishing characteristic, trait, or feature
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