Shot blast deflashing system

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Selective Electroless Copper for Interconnect Plugs US. Patenf 5,674,787. Ott 7, 1997 6. Zhao et al., assignors to Semarech Inc.. Austin, Texas A method of selectively forming an inter- connect structure on a semiconductor wafer to couple a first conductive region to a sec- ond conductive region and in which the two conductive regions are separated by a dielec- tric layer comprising forming an opening in the dielectric layer to expose a first barrier layer overlying the first conductive region: depositing a dielectric barrier layer within the opening; anisotropically etching the dielectric barrier layer so that the dielectric barrier layer remains along sidewalls of the opening, but not atop the first barrier layer; activating a surface of the first barrier layer for autocata- lytic growth of copper by forming a copper activation seed layer on the first barrier layer: subjecting the copper activation seed layer to an electroless deposition solution; and depos- iting copper electrolessly on the first barrier layer by having the copper activation seed layer initiate the autocatalytic growth of cop- per to form the interconnect structure. Descaling System U.S. Patent 5,675,880. Oct. 14, 1997 J. L. Saikin, assignor to Bethlehem Steel Corp.. Befhlehem, Pa. A method of descaling steel. comprising providing a nozzle to be selectively opened and closed for directing high-pressure des- caling fluid toward the steel so as to des- tale the steel when the nozzle is opened. Spray Coating Device U.S. Patent 5676,310. Oct. 14, 1997 J.E. Hynds, Famington Hi//k, Mich. A method and system for air spray coat- ing and manually operated atomizing de- vice for use therein. Shot Blast Deflashing System U.S. Patent 5,676,5&T Oct. 14, 1997 WR. Frederick and M. Hjerpe, assignors to AGA AB, Lidingo, Sweden A cryogen shot blast apparatus for de- flashing workpieces. comprising a sealed cryogenic chamber having a stationary por- tion; a barrel supported within the cryo- genic chamber and rotatable about a longi- tudinal axis; and a throwing wheel adapted to propel particulate media into the treat- ment chamber to impact the workpieces. Blast Apparatus U.S. Patent 5,676.589. Oct. 14, 1997 TI. Ashworfh, assignor to Vapormatl ltd., Guernsey Channel islands A blast gun assembly comprising a plurality of body sections. which are clamped in face-to-face contact with one another, at least some of the body sec- tions being in the form of head sections carrying respective mixture discharge nozzles. the sections being formed with duct mean5 for supplying in use the dis- charge nozzles with separate flows of abrasive material and fluid. the duct means extending through the contacting faces of adjacent body sections to pro- vide communication between the sec- tions. MeDeA Systems - Your Solution for Monitoring Heavy Metals Concentration in Wustewuter The MeDeA products automatically monitor on-line concentration of : Zn, Cr, Ni, Cu, Fe, Pb, and other metals. hall-mark \‘hBI-,mlrk\ n [Goldsmith’s Ha//, London, England, where gold and silver articles were assayed and stamped to indicate origin, purity, or genuineness] 2 : a distinguishing characteristic, trait, or feature High Quality Finishing Products Circle 083 on reader information card On-site Problem Solving Assistance 2828 Highland Avenue, Cincinnati, OH 45212 800.996.8396 l 513.731.3400 l 513.731.8113 Fax Circle 079 on reader information card 96 METAL FINISHING l MAY 1998

Transcript of Shot blast deflashing system

Page 1: Shot blast deflashing system

Selective Electroless Copper for Interconnect Plugs US. Patenf 5,674,787. Ott 7, 1997 6. Zhao et al., assignors to Semarech Inc.. Austin, Texas

A method of selectively forming an inter- connect structure on a semiconductor wafer to couple a first conductive region to a sec- ond conductive region and in which the two conductive regions are separated by a dielec- tric layer comprising forming an opening in the dielectric layer to expose a first barrier layer overlying the first conductive region: depositing a dielectric barrier layer within the opening; anisotropically etching the dielectric barrier layer so that the dielectric barrier layer remains along sidewalls of the opening, but not atop the first barrier layer; activating a surface of the first barrier layer for autocata- lytic growth of copper by forming a copper activation seed layer on the first barrier layer: subjecting the copper activation seed layer to an electroless deposition solution; and depos- iting copper electrolessly on the first barrier layer by having the copper activation seed layer initiate the autocatalytic growth of cop- per to form the interconnect structure.

Descaling System U.S. Patent 5,675,880. Oct. 14, 1997 J. L. Saikin, assignor to Bethlehem Steel Corp.. Befhlehem, Pa.

A method of descaling steel. comprising providing a nozzle to be selectively opened and closed for directing high-pressure des- caling fluid toward the steel so as to des- tale the steel when the nozzle is opened.

Spray Coating Device U.S. Patent 5676,310. Oct. 14, 1997 J.E. Hynds, Famington Hi//k, Mich.

A method and system for air spray coat- ing and manually operated atomizing de- vice for use therein.

Shot Blast Deflashing System U.S. Patent 5,676,5&T Oct. 14, 1997 WR. Frederick and M. Hjerpe, assignors to AGA AB, Lidingo, Sweden

A cryogen shot blast apparatus for de- flashing workpieces. comprising a sealed

cryogenic chamber having a stationary por- tion; a barrel supported within the cryo- genic chamber and rotatable about a longi- tudinal axis; and a throwing wheel adapted to propel particulate media into the treat- ment chamber to impact the workpieces.

Blast Apparatus U.S. Patent 5,676.589. Oct. 14, 1997 TI. Ashworfh, assignor to Vapormatl ltd., Guernsey Channel islands

A blast gun assembly comprising a plurality of body sections. which are clamped in face-to-face contact with one another, at least some of the body sec-

tions being in the form of head sections carrying respective mixture discharge nozzles. the sections being formed with duct mean5 for supplying in use the dis- charge nozzles with separate flows of abrasive material and fluid. the duct means extending through the contacting faces of adjacent body sections to pro- vide communication between the sec- tions.

MeDeA Systems - Your Solution for Monitoring Heavy Metals Concentration in Wustewuter

The MeDeA products automatically monitor on-line concentration of : Zn, Cr, Ni, Cu, Fe, Pb, and other metals.

hall-mark \‘hBI-,mlrk\ n [Goldsmith’s Ha//, London,

England, where gold and silver articles were assayed and stamped to indicate origin, purity, or genuineness] 2 : a distinguishing characteristic, trait, or feature

High Quality Finishing Products

Circle 083 on reader information card

On-site Problem Solving Assistance

2828 Highland Avenue, Cincinnati, OH 45212 800.996.8396 l 513.731.3400 l 513.731.8113 Fax

Circle 079 on reader information card

96 METAL FINISHING l MAY 1998