Shanghai Industrial

µTechnology Research Institute

In the past thirty years, the Information Technology has evolved from one

based on advances in Computing capabilities (the PC era) through the

development of the Communication infrastructure (the Internet era). In the

next decade, Sensing will become ubiquitous and an Internet of Things (the

IoT era) will emerge. Where Computing and Communication technologies

were driven primarily by steady advances in IC capabilities as dictated by

Moore’s Law, the IoT Age will be largely driven by 'More than Moore' (MtM)

technology: a fusion of different technologies and innovations such as MEMS,

optoelectronics, analog, RF, power and micro-energy.

The Shanghai Industrial μTechnology Research Institute (SITRI) was

established on the foundation of the Chinese Academy of Sciences with

support from Shanghai Government to focus on the development and

commercialization of ‘More than Moore’ (MtM) technologies. SITRI is based

on an open engagement model that includes an 8” MtM micro-fabrication line

augmented by a consortium of industry partners, state-of-the-art R&D

facilities, engineering services, market intelligence, industry trade association

participation, as well as dedicated investment funds.

Leveraging China’s established Semiconductor ecosystem, fast-growing

domestic markets, and increasingly large talent pool, SITRI’s mission is to

become a world-class R&D Center that works with global partners to fuel

innovations in the next Information Technology revolution.

Departments

Departments

The SITRI Vision

Engineering Information

Funding and Investment

Application and Development

Industry Cooperation

Industry Analysis

SITRI’s vision is to create a collaborative research and commercial manufacturing environment and industrial center to

service the emerging industries driven by the Internet of Things and Cloud-based analytics. We provide an industry

platform to develop and commercialize innovative ideas and technologies in MEMS, analog/power RF, micro fluidics and

micro-biology, optical communications and displays, energy harvesting and micro-energy fuel cells based on leading

research in micro systems and micro electronics. Together with the existing industrial infrastructure in semiconductor

manufacturing, our vision is to create a world-class ‘More than Moore’ (MtM) industry cluster. Situated in Shanghai, SITRI

is uniquely able to combine new ideas and innovation with an established, globally competitive manufacturing

infrastructure servicing the high technology industry.

Research and Development

The SITRI Vision

The SITRI R&D Center is dedicated to ‘More than Moore’ (MtM)

technology development with facilities which include an advanced

micro-fabrication line, a comprehensive EDA design platform and a

state-of-the-art engineering laboratory.

The R&D Center is established on an open engagement model,

working with R&D teams in Shanghai and internationally to develop

innovative technologies and products for the MtM field. Through this

center, SITRI brings together top international and Chinese

technologists to promote new technology development and industrial

development. SITRI works with research institutions worldwide on

collaborative research products in materials, technologies, and

advanced designs for IoT solutions.

SITRI·R&D Center

Micro-fabrication Consortium Research and Development

Micro-fabrication Consortium

SITRI’s initial micro-fabrication capabilities include an 8-12” MtM R&D pilot line located in Shanghai. The line has 6000

square meters of cleanroom space, more than 100 installed tools for wafer processing and packaging, and an established

suite of micro/nano process flows.

SITRI is dedicated to the development of ‘More than Moore’ technologies, processes, devices and microsystems, and is

building out an 8” micro-fabrication line to accelerate this technology development and transfer to high volume production.

The R&D line is designed for compatibility with the production capabilities of SITRI’s Foundry partners, which ensures

seamless transfer from R&D to volume production. The line is an integral part of SITRI’s micro-fabrication consortium and

provides leading-edge IC capabilities in MEMS, RF, CMOS logic, Silicon-based III-V, 3D integration, TMR magnetic

sensing and IGBT back-end technologies. As part of More than Moore and 3D integration, it enables comprehensively

integrated MtM development and transition to high volume production, all within the SITRI ecosystem environment.

SITRI, in collaboration with leading IC and MEMS

foundries, is establishing a consortium of

microfabrication and R&D lines to partner in SITRI’s

efforts. This consortium enables SITRI, working with

our research and industry partners, to support new

research and advances in materials and sensor

prototypes, deliver commercially-ready product to the

market, and seamlessly scale up to high volume

production.

Research and Development

The SITRI R&D Center is dedicated to the development of

‘More than Moore’ (MtM) technology and product development.

‘MtM technology’ refers to the development of heterogeneous

technologies, based on mature semiconductor technologies,

which allow integration advancements beyond the ‘Moore’s

Law’ limitations being faced by the traditional IC industry. MtM

includes MEMS/Sensor devices, optical technology,

high-performance analog and RF chips, high power amplifiers,

ULP MCU, biology, micro energy and others. SITRI cooperates

with the world's leading enterprises, taking full advantage of the

SITRI R&D center, to jointly develop MtM innovative technology

and products, and build a globally influential MtM R&D center

and industrial ecosystem.

SENSOR

- MEMS- Acoustics- Optical- Bio Sensor

OPTO

- Imaging- Communications- Silicon Photonics

ENERGY

- Energy Harvest- Solid State Battery- Wireless Charging

μ

RF, POWER

- RF SOI - IGBT - Si-based GaN

ULTRA LOW POWER

- ULP MCU- ULP SoC- Sensor Hub

IOT

- Wearables- Smart City- Robotics/Industry 4.0

To serve the MtM industry better and to speed up the pace of technology innovation, SITRI has established

the engineering team to provide cutting-edge semiconductor process analysis, hierarchical schematic

analysis and device parameter measurement service to innovative enterprises and research institutions.

SITRI provides process analysis, circuit analysis and wafer test services. Our clients include technologists,

intellectual property practitioners and research analysts.

With the increasing complexity of semiconductor process integration, it is becoming difficult to keep up with

the world's leading companies. Our analysis services can analyze most advanced technology products,

helping developers to understand the global technology trends and gain a more thorough understanding of

how their own technologies rate by comparison.

Our engineering team also provide intellectual property services, supporting patent analysis, patent

management and patent litigation. Our technical capabilities of semiconductors and the understanding of

patents enable us to provide technical support for the intellectual property practitioners, to avoid the risk of

infringement, monitor the market, and provide evidence of infringement. Through this work, SITRI

accumulates a product analysis database, the foundation for technical analysis for industry analysts, fund

investors and enterprise marketing.

SITRI·Engineering Center

Engineering Capabilities Design Platform

Engineering Capabilities

Process AnalysisSITRI engineering analysis service covers MEMS, RF, Power, optical electronics, and more. We focus on semiconductor process analysis, composition analysis and package analysis. These services help clients increase their knowledge of integrated circuits and MEMS devices.

Wafer TestWith automatic probe stations, we provide wafer testing, power testing, input leakage current testing, output voltage testing, comprehensive functional test, dynamic parameter testing and analog signal parametric testing.

Circuit AnalysisClients can learn the technical basis on a specific technology or a particular product through chip circuit analysis. We provide one-stop service on sample preparation, imaging, annotation and hierarchical schematic analysis.

PWM_FB1

PWM_FB2

OSC_CTL

OSC_CTL

VCCI2

VCCI3

BG_VREF

GL_VBP1

GL_VBP2

GL_VBN

VC

CI3

DR

AIN

VP_

DR

V

VC

TL_D

RV

PWM

VC

CI2

VCCI2

VCCI2

VCCI2

VC

CI3

VCCI3

BG_VREF

GL_VBP1

GL_VBP1

GL_VBP1

GL_VBP2

GL_VBP2

GL_

VB

N

GL_VBN

VREG_V4

VREG_V2

PWM

PWM_FB1

PWM

_FB

2

VCCI2

VCCI3

GL_VBP1

RC

DRAIN

VCCI1

VCCI2

VCCI2

VCCI2

VCCI3

VCCI3

BG_VREF

GL_VBP1

GL_VBP1

GL_VBP1

GL_VBP2

GL_VBP2

GL_VBP2

GL_VBN

GL_VBN

VREG_VT

VREG_VT

VREG_V6

VREG_V6

VREG_V6

VREG_V5

PWM

OSC_CTL

OSC_CTL

OSC_CTL

VCCI1

VCCI2

VCCI3

VP_DRV

VCTL_DRV

BG_VREF

VREG_V2

VREG_V4

VREG_V5

VREG_V6

VREG_VT

VG_DET

GL_VBP1

GL_VBP2

GL_VBN

DR

AIN

OSC_CTL

VC

CI3

VCCI2

GL_VBP1

VG_DET

POR_OK

POR_OK

POR_OK

POR_OK

POR_OK

POR_OK

POR_OK

POR_OK

TSDP

TSDP

U12

OUTPUT DRIVER

FIG.3.11 U

AN30G700D1

w = 24843l = 11.05

GND

U6

PWM COMP

FIG.3.4

U15

VALLEY DETECTOR

FIG.3.5

U11

BLEEDER

FIG.3.6

U13

OVERCURRENT AND

SHORT-WINDING PROTECTION

FIG.3.9

WB

LEED

SBLE

ED

AUX

U7

PWM CONTROL LOGIC

FIG.3.10

I16

INV_1

I41

inv_4

RN

P

l = 1

8.75

w =

2.0

5

RN

P

l = 9

w =

18.

8

RNP

l = 27w = 6.3

RNP

l = 27w = 6.3

GND

BJT5

se = 216.125pe = 79.5

GND

BJT5

se = 58.1878pe = 34

GNDS

D

GB

AN30G30D

l = 2w = 118.75

S

D

GB

AN30G30D

l = 2

w = 118.75

GND

SOURCE

ISENSE

U4

FREQUENCY REDUCTION

CIRCUIT

FIG.3.3

U8

PWM LIMIT CIRCUIT

FIG.3.2

U5

OSCILLATOR

FIG.3.1

U3

INTERNAL

POWER SUPPLY

FIG.3.12

VCC

RC

RC2

RN

P

l = 1

9.25

w =

2.0

5

BJT5

se = 57.3751pe = 34.5

GND

BJT5

se = 224.438pe = 80m = 2

GND

BRIGHTNESS

S

D

GB

AN30G30D

l = 2.8w = 179

S

D

GB

AN30G30D

l = 2.8

w = 179

S

D

GB

AN30G30D

l = 2.8w = 179

VCC

DR

AIN

PWMLIMITI14

INV_1

GND

U1

POWER ON RESET

FIG.3.7

U2

DEMAGNETIZATION

DETECTOR

FIG.3.8

==insight technology==SITRITopDESIGN:

FIG#: 3

LIBARAY: SSL2101

ByangENG:C

TL

VP

OUTIN

IN-

VP

VB

N

OUT

EN

IN+

EN

VCCI2

VBP1

VBP2

VDRAIN

OUT

POR_OK

VCCI2

GL_VBP1

VCCI3

ISENSE

WB

LEED

SBLE

ED

VBN

VBP1

PWM

BG_VREF

VCCI2

VBP2

OCP

SWP

BREG_V2

BREG_V4

SOURCE

POR_OK

VCCI3

TSDP

DEMAGOCP

SWP

CK

BG_VREF

OSC_CTL

PWM_FB1

PWM_FB2

OSC_CTL

GL_VBN

VCCI2

GL_VBP1

GL_VBP2

POR_OK

PWM

I ZN

VP

I ZN

VP

OSC_CTL

OSC_CTL

VBP1

POR_OK

V3

V4

VBN

VCCI2

VCCI3

VBP2

VIN

V2

V1

RC

RC2

VBP1

VBP2

VREF

VCCI2

OUT

PWMLIMIT

CTL

CTL

VBN

VBP1

EN

VOSCV1

VCCI2

VCCI3

VBP2

CKO

VCCI1

RC

V2

TSDP

DRAIN

GL_VBN

VCCI2

GL_VBP1

VCCI3

GL_VBP2

VBRIGHTNESS

VG_DET

VREG_V5

VREG_V2VREG_V4

VP_DRV

VDRAIN

VCC

VCTL_DRV

BG_VREF

VREG_V6

VREG_VT

PWM

VCCI1

I ZNV

PVBP OUT

EN

VCCI2

AUX

EN

VCCI2

VBPVCCI3

DEMAG

EN

VDRAIN

VCCI2

VBP2

VBP1

OUT

RN

P

l = 1

8.75

w =

2.0

5

RPP

w = 4.8l = 38.5

RPP

m = 2w = 4.8l = 38.5

BJT5

se = 216.125

pe = 79.5

BJT5

se = 20.2501

pe = 18m = 2

BJT5

se = 22.5626

pe = 19m = 3

BJT5

se = 22.5626

pe = 19m = 3

BJT5

se = 21.375

pe = 18.5m = 2

BJT5

se = 22.5626

pe = 19

BJT5

se = 22.5623

pe = 19

BJT5

se = 23.7499

pe = 19.5

BJT5

se = 23.7499pe = 19.5

BJT5

se = 23.7501

pe = 19.5

BJT5

se = 23.7499

pe = 19.5

BJT5

se = 23.7499

pe = 19.5

BJT5

se = 23.7499

pe = 19.5

NCH

l = 2.05

w = 4.5

NCH

l = 2.05

w = 4.5

NCH

l = 3.05

w = 4.25

NCH

l = 3.05

w = 4.25

NCH

l = 2.05

w = 4.5

PCH

w = 9.75

l = 3.55

PCH

w = 9.75

l = 3.55

PCH

w = 9.75

l = 3.55

PCH

w = 9.75

l = 3.55

PCH

w = 4.5

l = 4.55

PCH

w = 4.5

l = 4.55

m = 2

PCH

w = 24.25

l = 24.3

PCH

w = 9.5

l = 24.05

PCH

w = 29

l = 24.3

PCH

w = 11.25

l = 24.3

GND

GND

GND

GND

GND

GND

GNDGND

GNDGND

GND

GND

SITRIFIG#:

DESIGN:

==insight technology==

LIBARAY:

ENG:

VALLEY SSL2101

Byang3.5

Design PlatformThe IC/MEMS design platform provides the software and hardware to cover the enter workflow of IC/MEMS design and simulation. The tools developed by SITRI shorten the R&D cycle to develop MtM products.

RCAD Circuit Analysis: the RCAD approach (Reconstruction of Circuit schematics for Analysis of Design,) developed by

SITRI, is an advanced computer-aided approach to schematic capture of existing IC and MEMS designs. Through

sophisticated IC deprocessing and imaging technologies, the RCAD program can generate an equivalent netlist and layout

schematic of the IC and port that into existing EDA environments. This allows SITRI or its clients to investigate IC or MEMS

designs for technical benchmarking, design evaluation, or IP use or re-use. RCAD allows SITRI customers to investigate

existing designs at a level of detail not commonly achieved.

Product Analysis

IC Analysis

Server Support

Stitching & Alignment

Utility Tools

Product

Design

Product

Analysis

IC EDA

MEMS EDA

CoventorWare

Product Design

Product Analysis

The SITRI Accelerator provides an infrastructure

and resource platform to help innovative

companies speed up time to market. The

Accelerator has a comprehensive list of

resources including incubation, engineering

services, a global network of supply chain and

ecosystem partners, cross-border talent pool,

industry consortiums, etc. The Accelerator

works closely with SITRI Seed Fund, IoT Fund

and IoT Science Park to help startup companies

to grow at different stages.

The Accelerator provides independent office

space for start-up enterprises, as well

asprofessional services to help companies with

strategic planning and market intelligence, sales

channels and market penetration, talent,

strategic industrial partnerships and more,

particularly in the Greater China Area.

SITRI is establishing a local presence in Silicon

Valley, Europe and Hsinchu Taiwan to greate a

Global Innovation Network for IoT development,

as well as to help interested partners to engage

with SITRI.

SITRI·Industry Accelerator

loT Science Park

IoT Science Park

Investment FundsIndustry Association and Alliance

SITRI is building the IoT Science Park to help startup companies establish a presence in Shanghai. In the IoT Science

Park, we are building a smart community with a research center, housing, fitness center, education and entertainment

services. In the future, the IoT Science Park will act as an anchor for the growing ecosystem for IoT commercialization

and manufacturing.

The Park helps startup companies engage with the global market in smart electronics, automotive electronics, consumer

and industrial markets, and more by fostering the environment and ecosystem to allow these new companies to flourish.

By joining the IoT Science Park, the new startup gains access to leading researchers, shared resources, and strategic

commercial partnerships which can accelerate their development, growth and ultimate market success.

Industry Association and Alliance

To accelerate the development of the MtM industry, SITRI has established an industry information platform with a professional magazine, high-level conference/workshops and industry exhibitions. The platform will deliver up-to-date technology trends, market intelligence and news about market and technology advancement to the executives and engineersin China. Furthermore, the SITRI analyst team monitors the market for technology innovations and changes in the market and market players. These regularly updated industry reports provide solid data to help our clients to make intelligent and informed business decisions.

“More than Moore” Industry AssociationThe More than Moore (MtM) Industry Technology Innovation Association focuses on advanced sensor technology, including MEMS and other sensors, energy harvesting, RF, and power devices. It promotes integration of member’s resources, encourages greater interdisciplinary exchanges and cooperation, and seeks to enable the ‘More than Moore’ combination of technologies at the chip level through the sharing of information and resources across the Association membership.

Robotics Industry GroupRobotics Industry Group (RIG) is aimed to build the robotics industry ecosystem, and to help create a world-class robotics industry in China. Through the RIG members will regularly communicate, cooperate efficiently, and tackle key technology challenges including miniaturization, multi-sensor fusion, mobile technology, artificial intelligence, and connectivity. RIG will also introduce capital investment and domestic & international market expansion. RIG helps members grasp the great opportunities being created by Industry 4.0.

Wearable Industry AllianceThe Wearable Industry Alliance (WIA) is aimed at promoting the development of the wearable industry. The alliance’s charter is to better integrate resources, explore wearable device technology, develop a market roadmap, formulate standards, and to promote the health and sustainability of the Wearable Devices industry. The Wearable Industry Alliance promotes the establishment of a wearable devices industrial value chain involving terminal products, product design, industry standards, production, project supply, proprietary chip, packaging and testing, and other aspects critical to the development of a robust ecosystem.

SITRI provides investment support to the MtM industry in different stages, depending on need and opportunity.

Investment Funds

Seed Fund

The SITRI Seed Fund is to provide early-stage investments to ‘More than Moore’ (MtM) startups as part of the

incubation service. With a comprehensive suite of resources and services made available to the startup, SITRI

helps innovative MtM startups focus their efforts on product development and speed up their time to market.

IoT Fund

Shanghai Internet of Things (IoT) Fund is a dedicated investment fund focusing on innovative ‘More than Moore’

technologies and IoT applications. The Fund is committed to partnering with entrepreneurs to achieve sustained

industrial and social advancement through scientific and technology development.

Investment Guidelines

SITRI’s investment focus is on high growth potential opportunities in technology fields relating to IoT and MtM. Investment decisions are guided by our assessment of the founding team, business model, and market potential of the proposed venture. Areas of interest to SITRI include advanced sensors, optoelectronics, analog chips, RF power, biomedical, micro power, IoT applications, and big data based industries. SITRI looks at all times to leverage SITRI’s in-house capabilities to complement the core team’s R&D focus, to accelerate time to market cost effectively, so that these new ventures can accelerate their market entry and growth. SITRI works with all major players in the VC and PE for smooth funding and growth of the new venture. SITRI’s strategic relationships with the industry’s players provide the new venture with professional guidance in operations, management, supply chain setup, and market entry.

SITRI Advantages

SITRI’s deep technical expertise in IoT technologies and experienced executive team mean that SITRI evaluations of prospective ventures receive the highest levels of assessment, evaluation, mentoring and support. SITRI represents a uniquely open model for technology innovation that encompasses R&D, industrialization, engineering, consulting and investment. SITRI’s deep connections throughout the industrial supply chain, richly resourced R&D projectcapabilities, and excellent relationships with government and institutions provide access to a complex industry ecosystem.

Contact Information

Email：info@sitrigroup.com

Website：www.sitrigroup.com

Silicon Valley

HsinchuShanghai

Europe

SITRI INNOVATION CENTERS

www.sitrigroup.com

Shanghai Industrial µTechnology Research Institute