SHA-CG Series Model Options High Precision SHA-CG ... · The SHA-CG Series actuators is compact,...

4
New Product News Vol. 17 Compact, Hollow Shaft Design High Precision SHA-CG Actuators Direct Drive Motor Performance ~ 80-90% less weight ~ 50% more compact High torque for fast acceleration and positioning Measurement, Analytical and Test Systems Optical Equipment Machine Tools Application Examples Theta Axis Wafer Dicing Precision Machining (Indexing Device) The SHA-CG delivers high precision with improved positioning accuracy and surface runout. Ideal for high precision rotary applications such as indexing tables.

Transcript of SHA-CG Series Model Options High Precision SHA-CG ... · The SHA-CG Series actuators is compact,...

Page 1: SHA-CG Series Model Options High Precision SHA-CG ... · The SHA-CG Series actuators is compact, delivers high torque and features a hollow shaft that allows design versatility in

SHA-CG Series

Harmonic Drive is a registered trademark of Harmonic Drive LLC.

Harmonic Drive LLCBoston US Headquarters247 Lynnfield StreetPeabody, MA 01960

New York Sales Office100 Motor ParkwaySuite 116Hauppauge, NY 11788

Group CompaniesHarmonic Drive Systems, Inc.6-25-3 Minami-Ohi, Shinagawa-kuTokyo 141-0013, Japan

Harmonic Drive AGHoenbergstrasse, 14, D-6555Limburg/Lahn Germany

San Jose Sales Office333 W. San Carlos Street Suite 1070San Jose, CA 95110

Chicago Sales Office137 N. Oak Park Avenue Suite 410Oak Park, IL 6030

T: 800.921.3332T: 978.532.1800F: 978.532.9406www.HarmonicDrive.net

Rev_07_14

Driver and Extension Cables

REL-230-18 REL-230-18REL-230-36

REL-230-18REL-230-36

REL-230-36REL-230-40

HA-800B-3D/E-200 HA-800B-6D/E-200

HA-800C-6D/E-200

HA-800B-6D/E-100HA-800B-3D/E-200

HA-800B-6D/E-200(HA-800B-24D/E-200)

HA-800C-6D/E-200(HA-800C-24D/E-200)

HA-800C-6D/E-100HA-800C-3D/E-200HA-800C-3D/E-200

CC-Link Commands

General Purpose I/O CommandsControl Modes (Position / Velocity / Current) Size 20 Size 25 Size 32 Size 40

MECHATROLINK-ⅡCommands

New Product News Vol. 17

Compact, Hollow Shaft Design

The SHA-CG Series actuators is compact, delivers high torque and features a hollow shaft that allows design versatility indemanding applications.

Model OptionsGearhead Cable Orientation Encoder

Brake

Servomotor

Environmental

Option

Harmonic Drive® Gear - CSG Series 50:1 ~ 160:1

Magnetic Absolute Encoder (17 bit)Multi-Turn (16 bit)(Nikon -A Format)

Standard

Option

Standard

Option Side exit

Origin & End Limit Sensor

Mounting Stand IP 65

No Brake

Absolute Encoder: Panasonic format,Mitsubishi format, Riss-C formatIncremental Encoder

200V AC100V AC (size 25)

100V AC72V DC, 48V DC

IP 54Temperature Range 0°C - 40°CUL, CE marking, RoHS

Motor Brake (Integrated without dimension change)

Cross Roller Bearing

Larger size bearing for higher load capacities

Rear exitStandard

Option

Standard

Option

Standard

Option

Standard

Option

StandardOutput Bearing

High Precision SHA-CG Actuators

Direct Drive Motor Performance ~ 80-90% less weight ~ 50% more compact High torque for fast acceleration and positioning

Measurement, Analytical and Test Systems Optical Equipment Machine ToolsApplication Examples

Theta Axis Wafer Dicing Precision Machining (Indexing Device)

The SHA-CG delivers high precision with improved positioning accuracy and surface runout. Ideal for high precision rotary applications such as indexing tables.

Page 2: SHA-CG Series Model Options High Precision SHA-CG ... · The SHA-CG Series actuators is compact, delivers high torque and features a hollow shaft that allows design versatility in

SHA25A-CG

SHA32A-CG

SHA40A-CGSHA20A-CG

AWG20-4C+AWG24-2CCable dia. Ø5.6

(Removal Tap)

Housing :350715-1 [AMP]Pin Contact (Motor U • V • W) :350690-1 [AMP]Pin Contact (Brake) :350690-1 [AMP]Pin Contact (Motor PE) :350669-1 [AMP]

Housing :1-1903130-4 [AMP]Tab Contact :1903111-2 [AMP]

Output Rotational Part

Hollo

w Sh

aft D

iamete

r

AWG28-3P+ShieldCable dia. Ø6

X 7C0.5

50:1

80:1

100:1

120:1

160:1

50:1

80:1

100:1

120:1

160:1

50:1

80:1

100:1

120:1

160:1

50:1

80:1

100:1

120:1

160:1

127

178

204

217

229

127

178

204

217

229

281

395

433

459

484

523

675

738

802

841

34

57

72

81

81

40

66

81

81

81

90

151

178

178

178

157

260

327

382

382

96

60

48

40

30

112

70

56

46.7

35

96

60

48

40

30

80

50

40

33.3

25

6,553,600

10,485,760

13,107,200

15,728,640

20,971,520

6,553,600

10,485,760

13,107,200

15,728,640

20,971,520

6,553,600

10,485,760

13,107,200

15,728,640

20,971,520

6,553,600

10,485,760

13,107,200

15,728,640

20,971,520

27

27

27

27

27

27

27

27

27

27

35

35

35

35

35

45

45

45

45

45

50:1

80:1

100:1

120:1

160:1

73

96

107

113

120

15.1

13.2

12.2

11.0

9.0

8.7

7.6

7.0

6.3

5.2

17.7

15.4

13.7

12.2

10.0

27.2

22.0

19.6

18.0

14.7

6.1

5.0

4.6

4.1

3.4

21

35

43

48

48

4.7

4.7

4.7

4.5

3.7

3.0

3.0

3.0

2.6

2.1

6.0

6.0

5.7

5.0

4.1

9.0

9.0

9.0

8.8

7.2

2.1

2.1

2.1

2.0

1.7

120

75

60

50

37.5

6,553,600

10,485,760

13,107,200

15,728,640

20,971,520

17

17

17

17

17

50

40

40

40

40

50

40

40

40

40

40

30

30

30

30

40

30

30

30

30

60

50

50

50

50

200V

100V

200V

200V

200V

2.6 (2.7)

3.95(4.1)

3.95(4.1)

7.7(8.0)

13(13.80)

● Improved output shaft runout accuracy (radial runout & axial runout: less than 0.010mm) Improved structure for high precision surface and shaft runout.● Output shaft resolution is evenly divisible Indexing at 0.01 ° / 0.001 ° / 0.0001 ° ● Optional mounting stand available

3.5

(21) (13)

20°15°

(12)

(14)

1B

1A

(28)(28)

15 MAX

26 1419.5 (63.5)

UL_N.P CE_N.P

(83)

4417.5

R0.4 MAX

C0.5

R0.4 MAX

C0.5

(3)

15°

30°

Ø0.05

12-M4x7

Ø60 Ø107

12-M4×7 6-Ø5.5~6

Ø117

Ø90

Ø95

h7 0 -0

.035

Ø69

h7 0 -0

.030

Ø43

H7+0

.025

0

125.5±1

123±1

(Ø9

4)

(Ø7

6) N.P

Ø17

Ø33

+0.5 -0.2

Ø95

h7 0 -0

.035

R30

+35 0200

Ø4 H7

Motor • Brake Cable

Motor • Brake Connector

Encoder Cable

Encoder Connector

+0.012 0

AWG16-4C+AWG24-2CCable dia. Ø5.6

(Removal Tap)

Housing :350715-1 [AMP]Pin Contact (Motor U • V • W) :350690-1 [AMP]Pin Contact (Brake) :350690-1 [AMP]Pin Contact (Motor PE) :350669-1 [AMP]

Housing :1-1903130-4 [AMP]Tab Contact :1903117-2 [AMP]

Output Rotational Part

Hollo

w Sh

aft D

iamete

r

AWG24-3P+ShieldCable dia. Ø7.7

X 10C1

15 MAX

Motor • Brake Cable

Motor • Brake Connector

Encoder Cable

Encoder Connector

22.5°

15° 15°15° (1

4)

(28)

(12)

(13)

5(6) 28.5

(108)22

Ø45±

0.5

(80)

3.5

28

5.4

170±1

40

(21) 200

(28)

1A1B

Ø90

H7+0

.035

0

Ø132

h7

Ø170

Ø180

h7

Ø225

0 -0.0

40

0 -0.0

40

(Ø17

5)

Ø180

h7

0 -0.0

40

(Ø14

3)

Ø116

Ø203

C0.5

+0.015 0

2-M10

12-M8×12

Ø8 H7

R0.4 MAX

C0.5

8-Ø11~ 11.5

+35 0

R0.4 MAX

Ø0.05

(Removal Tap)

AWG18-4C+AWG24-2CCable dia. Ø7.7

Housing :350715-1 [AMP]Pin Contact (Motor U • V • W) :350547-1 [AMP]Pin Contact (Brake) :350690-1 [AMP]Pin Contact (Motor PE) :350669-1 [AMP]

Housing :1-1903130-4 [AMP]Tab Contact :1903117-2 [AMP]

Output Rotational Part

Hollo

w Sh

aft D

iamete

r

AWG24-3P+ShieldCable dia. Ø7.7

X 8C1

15 MAX

Motor • Brake Cable

Motor • Brake Connector

Encoder Cable

Encoder Connector

144±1

(90)(5)

55

(70.5)19.523.52034

2-M645°

12-Ø6.5~7

R50 

15°15°

Ø35

±0.5

Ø148

h7

0 −0.040

(Ø1

21)

(Ø1

46)

R0.4 MAXR0.4 MAX

C0.5

C0.5

3.5

Ø75

H7+

0.03

0 

0

Ø148

h7

0 −0.040

Ø110

h7

0 −0.035

Ø142Ø175

Ø96

15°

Ø162

12-M6×10

(21)

(28)(28)

(13) 200 +35 0

1A1B

(14)(

12)

+0.012 0Ø6 H7

Ø0.05

AWG20-4C+AWG24-2CCable dia. Ø5.6(Removal Tap)

Housing :350715-1 [AMP]Pin Contact (Motor U • V • W) :350690-1 [AMP]Pin Contact (Brake) :350690-1 [AMP]Pin Contact (Motor PE) :350669-1 [AMP]

Housing :1-1903130-4 [AMP]Tab Contact :1903117-2 [AMP]

Output Rotational Part

Hollo

w Sh

aft D

iamete

r

AWG24-3P+ShieldCable dia. Ø7.7

X 8C1

15 MAX

Motor • Brake Cable

Motor • Brake Connector

Encoder Cable

Encoder Connector

15°22.5°15°15°

(12)

(13)

(4) 19

4

3.5

Ø27±

0.5

(14)

(28)

(21)

(28)

17

4

28.5 (82)127.5 ±1

16.5 (65.5)

1A

1B

(Ø93

)

200 +35 0

(Ø11

4)Ø55

H7+0

.030

0

Ø144 Ø110

Ø115

h7

0 -0.0

35

Ø84

h7 0 -0

.035

Ø115

h7

0 -0.0

35

Ø131

Ø72

C0.5

C0.5

R0.4 MAXR0.4 MAX

8-Ø6.5~ 7

Ø5 H7

UL_N.P

N.PCE_N.P

12-M5×8

2-M6

+0.012 0Ø0.05

R37.5R37.5

Product Features

Size

20A

25A

25A

32A

40A

Gear Ratio

Maximum Torque [Nm]

Maximum Current

Continuous Torque [Nm]

Allowable Continuous

CurrentMaximum

Speed [rpm]Output Resolution

Pulse / RevOne-way

Positioning Accuracy (arc-sec)

Hollow Shaft Dia.

Motor Voltage

Mass*kg

Outline Dimensions

* Value in parenthesis is with brake. Output Encoder Resolution = Encoder Resolution x Reduction Ratio.

(Note) The dimension tolerances that are not specified vary depending on the manufacturing method. Please check the confirmation drawing or contact us for dimension tolerances not shown. (Note) The dimension tolerances that are not specified vary depending on the manufacturing method. Please check the confirmation drawing or contact us for dimension tolerances not shown.

(Note) The dimension tolerances that are not specified vary depending on the manufacturing method. Please check the confirmation drawing or contact us for dimension tolerances not shown.

(Note) The dimension tolerances that are not specified vary depending on the manufacturing method. Please check the confirmation drawing or contact us for dimension tolerances not shown.

Page 3: SHA-CG Series Model Options High Precision SHA-CG ... · The SHA-CG Series actuators is compact, delivers high torque and features a hollow shaft that allows design versatility in

SHA25A-CG

SHA32A-CG

SHA40A-CGSHA20A-CG

AWG20-4C+AWG24-2CCable dia. Ø5.6

(Removal Tap)

Housing :350715-1 [AMP]Pin Contact (Motor U • V • W) :350690-1 [AMP]Pin Contact (Brake) :350690-1 [AMP]Pin Contact (Motor PE) :350669-1 [AMP]

Housing :1-1903130-4 [AMP]Tab Contact :1903111-2 [AMP]

Output Rotational Part

Hollo

w Sh

aft D

iamete

r

AWG28-3P+ShieldCable dia. Ø6

X 7C0.5

50:1

80:1

100:1

120:1

160:1

50:1

80:1

100:1

120:1

160:1

50:1

80:1

100:1

120:1

160:1

50:1

80:1

100:1

120:1

160:1

50:1

80:1

100:1

120:1

160:1

127

178

204

217

229

127

178

204

217

229

281

395

433

459

484

333

548

686

802

841

523

675

738

802

841

34

57

72

81

81

40

66

81

81

81

90

151

178

178

178

92

156

196

235

315

157

260

327

382

382

96

60

48

40

30

112

70

56

46.7

35

96

60

48

40

30

80

50

40

33.3

25

80

50

40

33.3

25

6,553,600

10,485,760

13,107,200

15,728,640

20,971,520

6,553,600

10,485,760

13,107,200

15,728,640

20,971,520

6,553,600

10,485,760

13,107,200

15,728,640

20,971,520

6,553,600

10,485,760

13,107,200

15,728,640

20,971,520

6,553,600

10,485,760

13,107,200

15,728,640

20,971,520

27

27

27

27

27

27

27

27

27

27

35

35

35

35

35

45

45

45

45

45

45

45

45

45

45

50:1

80:1

100:1

120:1

160:1

73

96

107

113

120

15.1

13.2

12.2

11.0

9.0

8.7

7.6

7.0

6.3

5.2

17.7

15.4

13.7

12.2

10.0

18.0

18.0

18.0

17.6

14.3

27.2

22.0

19.6

18.0

14.7

6.1

5.0

4.6

4.1

3.4

21

35

43

48

48

4.7

4.7

4.7

4.5

3.7

3.0

3.0

3.0

2.6

2.1

6.0

6.0

5.7

5.0

4.1

6.0

6.0

6.0

6.0

6.0

9.0

9.0

9.0

8.8

7.2

2.1

2.1

2.1

2.0

1.7

120

75

60

50

37.5

6,553,600

10,485,760

13,107,200

15,728,640

20,971,520

17

17

17

17

17

50

40

40

40

40

50

40

40

40

40

40

30

30

30

30

40

30

30

30

30

40

30

30

30

30

60

50

50

50

50

2.6 (2.7)

3.95(4.1)

3.95(4.1)

7.7(8.0)

13(13.80)

13(13.80)

● Improved output shaft runout accuracy (side runout / shaft runout: less than 0.010mm) Improved structure for high precision surface and shaft runout. Ideal for index table application.● Easily split output shaft resolution Indexing at 0.01 ° / 0.001 ° / 0.0001 ° is possible.● Vertical stand for index application is also available

3.5

(21) (13)

20°15°

(12)

(14)

1B

1A

(28)(28)

15 MAX

26 1419.5 (63.5)

UL_N.P CE_N.P

(83)

4417.5

R0.4 MAX

C0.5

R0.4 MAX

C0.5

(3)

15°

30°

Ø0.05

12-M4x7

Ø60 Ø107

12-M4×7 6-Ø5.5~6

Ø117

Ø90

Ø95

h7 0 -0

.035

Ø69

h7 0 -0

.030

Ø43

H7+0

.025

0

125.5±1

123±1

(Ø9

4)

(Ø7

6) N.P

Ø17

Ø33

+0.5 -0.2

Ø95

h7 0 -0

.035

R30

+35 0200

Ø4 H7

Motor • Brake Cable

Motor • Brake Connector

Encoder Cable

Encoder Connector

+0.012 0

AWG16-4C+AWG24-2CCable dia. Ø5.6

(Removal Tap)

Housing :350715-1 [AMP]Pin Contact (Motor U • V • W) :350690-1 [AMP]Pin Contact (Brake) :350690-1 [AMP]Pin Contact (Motor PE) :350669-1 [AMP]

Housing :1-1903130-4 [AMP]Tab Contact :1903117-2 [AMP]

Output Rotational Part

Hollo

w Sh

aft D

iamete

r

AWG24-3P+ShieldCable dia. Ø7.7

X 10C1

15 MAX

Motor • Brake Cable

Motor • Brake Connector

Encoder Cable

Encoder Connector

22.5°

15° 15°15° (1

4)

(28)

(12)

(13)

5(6) 28.5

(108)22

Ø45±

0.5

(80)

3.5

28

5.4

170±1

40

(21) 200

(28)

1A1B

Ø90

H7+0

.035

0

Ø132

h7

Ø170

Ø180

h7

Ø225

0 -0.0

40

0 -0.0

40

(Ø17

5)

Ø180

h7

0 -0.0

40

(Ø14

3)

Ø116

Ø203

C0.5

+0.015 0

2-M10

12-M8×12

Ø8 H7

R0.4 MAX

C0.5

8-Ø11~ 11.5

+35 0

R0.4 MAX

Ø0.05

(Removal Tap)

AWG18-4C+AWG24-2CCable dia. Ø7.7

Housing :350715-1 [AMP]Pin Contact (Motor U • V • W) :350547-1 [AMP]Pin Contact (Brake) :350690-1 [AMP]Pin Contact (Motor PE) :350669-1 [AMP]

Housing :1-1903130-4 [AMP]Tab Contact :1903117-2 [AMP]

Output Rotational PartHo

llow

Shaft

Diam

eter

AWG24-3P+ShieldCable dia. Ø7.7

X 8C1

15 MAX

Motor • Brake Cable

Motor • Brake Connector

Encoder Cable

Encoder Connector

144±1

(90)(5)

55

(70.5)19.523.52034

2-M645°

12-Ø6.5~7

R50 

15°15°Ø3

5±0

.5

Ø148

h7

0 −0.040

(Ø1

21)

(Ø1

46)

R0.4 MAXR0.4 MAX

C0.5

C0.5

3.5

Ø75

H7+

0.03

0 

0

Ø148

h7

0 −0.040

Ø110

h7

0 −0.035

Ø142Ø175

Ø96

15°

Ø162

12-M6×10

(21)

(28)(28)

(13) 200 +35 0

1A1B

(14)(

12)

+0.012 0Ø6 H7

Ø0.05

AWG20-4C+AWG24-2CCable dia. Ø5.6(Removal Tap)

Housing :350715-1 [AMP]Pin Contact (Motor U • V • W) :350690-1 [AMP]Pin Contact (Brake) :350690-1 [AMP]Pin Contact (Motor PE) :350669-1 [AMP]

Housing :1-1903130-4 [AMP]Tab Contact :1903117-2 [AMP]

Output Rotational Part

Hollo

w Sh

aft D

iamete

r

AWG24-3P+ShieldCable dia. Ø7.7

X 8C1

15 MAX

Motor • Brake Cable

Motor • Brake Connector

Encoder Cable

Encoder Connector

15°22.5°15°15°

(12)

(13)

(4) 19

4

3.5

Ø27±

0.5

(14)

(28)

(21)

(28)

17

4

28.5 (82)127.5 ±1

16.5 (65.5)

1A

1B

(Ø93

)

200 +35 0

(Ø11

4)Ø55

H7+0

.030

0

Ø144 Ø110

Ø115

h7

0 -0.0

35

Ø84

h7 0 -0

.035

Ø115

h7

0 -0.0

35

Ø131

Ø72

C0.5

C0.5

R0.4 MAXR0.4 MAX

8-Ø6.5~ 7

Ø5 H7

UL_N.P

N.PCE_N.P

12-M5×8

2-M6

+0.012 0Ø0.05

R37.5R37.5

Product Features

Size

20A Motor Voltage Rating: 200V

25A Motor Voltage Rating: 100V

25A Motor Voltage Rating: 200V

32A Motor Voltage Rating: 200V

40A(HA-800�-4D/E-200)

Motor Voltage Rating: 200V)

40A(HA-800�-24D/E-200)

Motor Voltage Rating: 200V)

Gear Ratio

Maximum Torque [Nm]

Maximum Current

Continuous Torque [Nm]

Allowable Continuous

CurrentMaximum

Speed [rpm]Output Resolution

Pulse / RevOne-way

Positioning Accuracy (arc-sec)

Hollow Shaft Dia.

Mass*kg

Outline Dimensions * Value in parenthesis is with brake. Output Encoder Resolution = Encoder Resolution x Reduction Ratio.

(Note) The dimension tolerances that are not specified vary depending on the manufacturing method. Please check the confirmation drawing or contact us for dimension tolerances not shown. (Note) The dimension tolerances that are not specified vary depending on the manufacturing method. Please check the confirmation drawing or contact us for dimension tolerances not shown.

(Note) The dimension tolerances that are not specified vary depending on the manufacturing method. Please check the confirmation drawing or contact us for dimension tolerances not shown.

(Note) The dimension tolerances that are not specified vary depending on the manufacturing method. Please check the confirmation drawing or contact us for dimension tolerances not shown.

Page 4: SHA-CG Series Model Options High Precision SHA-CG ... · The SHA-CG Series actuators is compact, delivers high torque and features a hollow shaft that allows design versatility in

SHA-CG Series

Harmonic Drive is a registered trademark of Harmonic Drive LLC.

Harmonic Drive LLCBoston US Headquarters247 Lynnfield StreetPeabody, MA 01960

New York Sales Office100 Motor ParkwaySuite 116Hauppauge, NY 11788

Group CompaniesHarmonic Drive Systems, Inc.6-25-3 Minami-Ohi, Shinagawa-kuTokyo 141-0013, Japan

Harmonic Drive AGHoenbergstrasse, 14, D-6555Limburg/Lahn Germany

San Jose Sales Office333 W. San Carlos Street Suite 1070San Jose, CA 95110

Chicago Sales Office137 N. Oak Park Avenue Suite 410Oak Park, IL 6030

T: 800.921.3332T: 978.532.1800F: 978.532.9406www.HarmonicDrive.net

Rev_07_14_A

Recommended Drivers

REL-230-18 REL-230-18REL-230-36

REL-230-18REL-230-36

REL-230-36REL-230-40

HA-800B-3D/E-200 HA-800B-6D/E-200

HA-800C-6D/E-200

HA-800B-6D/E-100HA-800B-3D/E-200

HA-800B-6D/E-200(HA-800B-24D/E-200)

HA-800C-6D/E-200(HA-800C-24D/E-200)

HA-800C-6D/E-100HA-800C-3D/E-200HA-800C-3D/E-200

CC-Link Commands

General Purpose I/O Commands

Control Modes (Position/Velocity/Current)

Size 20 Size 25 Size 32 Size 40

MECHATROLINK-ⅡCommands

New Product News Vol. 17

Compact, Hollow Shaft Design

The SHA-CG Series actuators is compact, delivers high torque and features a hollow shaft that allows design versatility indemanding applications.

Model OptionsGearhead Cable Orientation Encoder

Brake

Servomotor

Environmental

Option

Harmonic Drive® Gear - CSG Series 50:1 ~ 160:1

Magnetic Absolute Encoder (17 bit)Multi-Turn (16 bit)(Nikon -A Format)

Standard

Option

Standard

Option Side exit

Origin & End Limit Sensor

Mounting Stand IP 65

No Brake

Absolute Encoder: Panasonic format,Mitsubishi format, BiSS C formatIncremental Encoder

200V AC

100V AC72V DC, 48V DC

IP 54Temperature Range 0°C - 40°CUL, CE marking, RoHS

Motor Brake (Integrated without dimension change)

Cross Roller Bearing

Larger size bearing for higher load capacities

Rear exitStandard

Option

Standard

Option

Standard

Option

Standard

Option

StandardOutput Bearing

High Precision SHA-CG Actuators

Direct Drive Motor Performance ~ 80-90% less weight ~ 50% more compact High torque for fast acceleration and positioning

Measurement, Analytical and Test Systems Optical Equipment Machine ToolsApplication Examples

Theta Axis Wafer Dicing Precision Machining (Indexing Device)

The SHA-CG delivers high precision with improved positioning accuracy and surface runout. Ideal for high precision rotary applications such as indexing tables.