Series 354 Granville-Phillips Micro-Ion Vacuum Gauge ...?Micro-Ion Vacuum Gauge Module with Analog...

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Transcript of Series 354 Granville-Phillips Micro-Ion Vacuum Gauge ...?Micro-Ion Vacuum Gauge Module with Analog...

  • Series 354

    Installation, Operation, and Maintenance Instructions

    GRANVILLE-PHILLIPSHELIX TECHNOLOGY CORPORATION

    Granville-Phillips Micro-IonVacuum Gauge Modulewith Analog Output

  • Series 354

    Installation, Operation, and Maintenance Instructions

    To order products online:

    Email: www.helixtechnology.com

    For customer service, 24 hours per day, 7 days per week, every day of the year (including holidays):

    Toll-free within U.S.A., phone: 18003674887

    For customer service, 8 AM to 5 PM Mountain Time, weekdays (excluding holidays):

    Toll-free within U.S.A., phone: 18007766543

    Within U.S.A., phone: 13036524400

    FAX: 13036522844

    Email: salessupport@helixtechnology.com

    2002, 2004, Helix Technology Corporation. All rights reserved. Micro-Ion, Conductron, and Convectron are registered trademarks of Helix Technology Corporation. Granville-Phillips is a trademark of Helix Technology Corporation. All other trademarks and registered trademarks are the properties of their respective owners.

    GRANVILLE-PHILLIPSHELIX TECHNOLOGY CORPORATION

    Granville-Phillips Micro-IonVacuum Gauge Modulewith Analog Output

  • Series 354

    1Granville-Phillips Micro-Ion Vacuum Gauge Module with Analog Output

    Installation, Operation, and Maintenance Instructions

    Instruction Manual Catalog No. 354004-04

    This manual is for use only with the following catalog numbers:

    The # symbol represents a variable in the catalog number.

    For assistance in using or servicing this instrument contact:Helix Technology Corporation

    Colorado Operations

    Customer Service Department

    6450 Dry Creek Pkwy

    Longmont, Colorado 80503-9501 USA

    Micro-Ion, Convectron, and Granville-Phillips are registered trademarks of Helix Technology Corporation.

    354001 354002 354019 354025 354047

    20354001 20354002 20354007 20354014 20354015 20354019

    Telephone: 303-652-4400Toll free in USA: 1-800-776-6543FAX: 303-652-2844email: salessupport@helixtechnology.com

    (20)354###-##-#

    D,E,F,G,H,K,L,MT,M,P

    Y,T

    001,002,014,015,019,025,046,047,049

    Copyright Helix Technology Corporation 1996-2004

    Revised: April 2004

    GRANVILLE-PHILLIPS

    All Rights Reserved

  • 2

    Declaration of ConformityIn accordance with ISO/IEC Guide 22 and EN45014

    The undersigned declares that the products specified above conform to the checked Directive(s) and Standard(s) when installed in accordance with the manufacturers specifications.

    Larry K. CarmichaelDirector of EngineeringDate: 02/18/02

    Helix Document Number: 013697-106

    Product Name(s): Granville - Phillips Series 354 Micro-Ion Vacuum Gauge Module with Analog Output

    Product Number(s): 354001 354002 354019 354025 35404720354001 20354002 2035401920354007 20354014 20354015The # symbol represents a variable in the part number.

    Option(s): N/A

    Conformance toDirective(s):

    EMC Directive89/336/EEC COUNCIL DIRECTIVE of 03 May 1989 on the approximation of the laws of the Member States relating to electromagnetic compatibility.Low-Voltage Directive73/23/EEC COUNCIL DIRECTIVE of 19 February 1973 on the harmonization of the laws of the Member States relating to electrical equipment designed for use within certain voltage limits. Amended by 93/68/EEC.

    ApplicableStandard(s):

    EMC DirectiveEN 50081-2: EMC Generic Emission Standard, Part 2: Industrial Environment, 1994.EN 50082-2: EMC Generic Immunity Standard, Part 2: Industrial Environment, 1995.EN 61326: Electrical Equipment for Measurement, Control and Laboratory Use - EMC Requirements, 1997. Emissions: Class A. Immunity: Annex A - Immunity Test Requirements for Equipment Intended for Use in Industrial Locations.

    Low-Voltage DirectiveEN 61010-1: Safety Requirements for Electrical Equipment for Measurement, Control, and Laboratory Use, Part 1: General Requirements, 1993; A2, 1995.

    (20)354###-##-#

    D,E,F,G,H,K,L,MT,M,P

    Y,T

    001,002,014,015,019,025,046,047,049

    X

    X

    X

    X

  • 3Micro-Ion Vacuum Gauge Module with Analog Output

    Table of Contents

    Chapter 1 Safety Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51.1 Safety Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51.2 Damage Requiring Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61.3 Warranty Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81.4 Service Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81.5 FCC Verification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81.6 Canadian Users . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

    Chapter 2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92.2 Mounting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92.3 Fittings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 102.4 Grounding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 102.5 I/O Cable Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

    Chapter 3 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 133.1 Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 133.2 Gauge ON/OFF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 133.3 Power Indicator LED . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 143.4 Emission Current . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 143.5 Analog Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

    3.5.1 Analog Output for Catalog Number 20354015 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 173.5.2 Analog Output for Catalog Numbers 354019 and 20354014 . . . . . . . . . . . . . . . . . . . . . . . . . . . 18

    3.6 Gas Sensitivity Correction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 193.6.1 Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19

    3.7 Overpressure Shutdown . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 193.8 Very-High and Ultra-High Vacuum Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 193.9 Degas . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20

    3.9.1 Degas for Catalog Numbers 20354014 and 354019 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 203.10 Filament Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20

    3.10.1 Filament Selection for Catalog Numbers 20354014 and 354019 . . . . . . . . . . . . . . . . . . . . . . . . 203.11 Specifications for the Micro-Ion Gauge Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21

    Chapter 4 Service and Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 234.1 Service Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 234.2 Damage Requiring Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 244.3 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 254.4 Ion Gauge Continuity Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 264.5 Fuse Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 284.6 Gauge Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .