Semi s22 0706-rpt

Form QF1307S220706RT, Rev 0 DRAFT

SEMI® S22-0706

Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment

Final Evaluation Report

ApplicantEaton Corporation

Model No: M16 and M22 Series

See page 8 for a list of part number covered

Equipment Name: Emergency stop switches

Evaluation Report File No. 31070191.002

Issue Date: February 26, 2010

TUV Rheinland of North America 12 Commerce Road

Newtown, Connecticut 06470 Web: www.tuv.com

SEMI® S22-0706

Evaluation Report

Eaton Corporation

M16 and M22 series Emergency stop switches

Report/file no.: 31070191.002

Page: 2 of 73 Form QF1307S220706RT Rev: 0 Dated Oct 2006

TUV Rheinland of North America Austin, Texas location 2324 Ridgepoint Drive Austin, Texas 78754 USA

Web: www.tuv.com

Applicant: Eaton Corporation

Applicant Address: 4201 North 27th street, Milwaukee, WI 53216-1807 USA

Type of Equipment: Emergency shutdown switches, components

Type or Model No.: M16 and M22 series, See page 8 for exact models covered

Trademark: Eaton

Serial No.: Not applicable, components switches do not have a serial numbers

Place of Evaluation: TUV Rheinland office; Austin, Texas 78754

Date of Evaluation: February 24, 2010

Requirement: SEMI® S22-0706 Guideline

Evaluated by:

March 22, 2010

_________________________ _____________Signature dateName: Charles D. Goertz / Senior Engineer / TÜV Rheinland

Reviewed by:

March 22, 2010

_________________________ _____________signature dateName: Udo Heinz / Division Manager / TÜV Rheinland

SEMI® S22-0706

Evaluation Report

Eaton Corporation




Table of Contents:

Attached Documents

Attachment 1: Test Data Form for the M16 and M22

Management Summary:..................................................................................................... 4

Compliance Statement: ..................................................................................................... 4

Scope of Evaluation: ......................................................................................................... 4

Summary of Assessment Results: ................................................................................... 5

Evaluator Qualifications:................................................................................................... 5

Table of Verdict Abbreviations: ........................................................................................ 5

Evaluation Report Notice: ................................................................................................. 6

Referenced Standards and Requirements: ..................................................................... 6

Risk Assessment Matrix: .................................................................................................. 7

Product / System Description:.......................................................................................... 8

Facilities Connections:...................................................................................................... 9

Detailed Summary of Assessment Findings: ................................................................ 10

Recommendations:.......................................................................................................... 10

Product / System Photographs: ..................................................................................... 10

Point-by-Point Assessment Comments:........................................................................ 13

SEMI® S22-0706

Evaluation Report

Eaton Corporation




Management Summary

Compliance Statement

This equipment conforms with the applicable requirements of SEMI® S22-0706.

Scope of Evaluation

The M16 and M22 series switches were evaluated on February 24, 2010 at Austin, Texas 78754 USA. The evaluation was performed with the assumption that the equipment is to be installed in the both the United States and Europe.

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Summary of Assessment Results

Section Title ConformsDoes Not

Conform

Not

Applicable

Information

Needed

8 General considerations

9 Facilities electrical connection

10 Protection against electric shock

11 Protection against risk of electric fire

12 Bonding to the protective conductor

13 Safety circuits

14 Interface control

15 Electrical enclosures

16 Conductors and cables

17 Wiring practices

18 Electric motors ¼ horsepower & larger

19 Accessories and lighting

20 Markings

21 Technical documentation

22 Testing

Evaluator Qualifications

TUV Rheinland provides manufacturers with reliable and comprehensive assessment and certification services to ensure that their products are safe for the industries, environments and people who depend on them. TUV Rheinland is a EU Notified Body, a Nationally Recognized Testing Laboratory (NRTL) in the United States, as well as an ISO 9000/ISO 14001 registrar. TUV Rheinland, based in Cologne, Germany, is a global player in product safety testing and certification. The company was founded in 1872 and employs at 300 locations over 10,000 people in 50 countries. TUV Rheinland is an active participant in the development of SEMI® guidelines, including SEMI® S22

Table of Verdict Abbreviations

The equipment has been evaluated for conformance with each section of the SEMI® S22 Guideline. The evaluation results are indicated by one of the following verdict abbreviations in each subsection of the SEMI® S22 Guideline text in this report. The full verdict text and the supporting rationale for the evaluation result are provided in the comment section of each subsection.

C (Conforms): The equipment conforms to the section or to the intent of the section. Where it is

determined that the equipment conforms "to the intent" this will be stated with supporting rationale. (The results of a risk assessment indicating no significant risk may be used in determining that the equipment conforms to the intent of the section.)

X (Does Not Conform): The equipment conforms to neither the section nor to the intent of the section. Non-conformances are assigned a risk ranking based on categories identified in Table 1 of SEMI® S10-1103.

N (N/A): This section is not applicable to this equipment.

I (Information Needed): More information is needed to determine whether the equipment conforms to the section or to the intent of the section. (This verdict may only be used in Interim Reports)

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Evaluation Report Notice

This evaluation report is valid only for the model and serial number tested, and may be considered representative of those units, which are identical in construction to the system evaluated or differ in ways described in the “Scope” section of this report. This evaluation report is not a substitute for a certification and does not authorize the affixing of a TUV-Mark to the machine without a certificate from TUV Rheinland.

Any safety changes, revisions, or corrections should be submitted to the original testing body - “TUV Rheinland.”

According to the European safety laws, the machine manufacturer is ultimately responsible for the machine’s compliance, tests, documentation and declaration of conformity and for on-going conformity of any subsequent machines. To ensure effective protection of the user (operator), no contracts or agreements that reduce or limit the manufacturer’s liability are allowed between the equipment manufacturer and the buyer.

This evaluation report may not be duplicated in extracts without the permission of TUV Rheinland.

Referenced Standards and Requirements

The following standards and requirements were used or referenced in the evaluation:

SEMI® S22-0709 (this document)

SEMI® S2-0709 Environmental, Health, and Safety Guideline for Semiconductor

Manufacturing Equipment

SEMI® S8-0705 Safety Guidelines for Ergonomics Engineering of Semiconductor

Manufacturing Equipment

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Evaluation Report

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Risk Assessment Matrix

The seriousness of each discrepancy is ranked accordance with the following matrix, which is derived from SEMI® S10-1103.

LIKELIHOODRISK ASSESSMENT

MATRIX FREQUENTA

LIKELYB

POSSIBLEC

RARED

UNLIKELYE

CATASTROPHIC 1 VH VH H M L

SEVERE2 VH H M L L

MODERATE 3 H M L L VL

SEVERITY MINOR

4 M L L VL VL

Discrepancies have been assessed using the following “Severity Grouping”:

1 – Catastrophic - Failure is capable of producing: One or more fatalities; System or facility loss; or Chemical release with acute, lasting environmental or public health impact.

2 – Severe - Failure is capable of producing: Disabling injury/illness; Major subsystem loss or facility damage; or Chemical release with temporary environmental or public health impact.

3 – Moderate - Failure is capable of producing: Injury requiring medical treatment or restricted work activity (OSHA recordable); Minor subsystem loss or facility damage; or Chemical release triggering external reporting requirements.

4 – Minor - Failure is capable of producing: Injury requiring first aid only; Non-serious equipment or facility damage; or Chemical release requiring routine cleanup without monitoring.

Discrepancies have been assessed using the following “Likelihood Grouping”:

A – Frequent - More than 1%.

B – Likely - More than 0.2%, but no more than 1%.

C – Possible - More than 0.04%, but no more than 0.2%.

D – Rare - More than 0.02%, but no more than 0.04%.

E – Unlikely - Not more than 0.02%.

NOTE: Likelihood relates to the occurrence of a mishap, not to the exposure to a hazard.

Discrepancies are ranked according to the following “Risk Assessment Categories” which are determined from the above matrix:

VH – Very High

H – High

M – Medium

L – Low

VL – Very Low

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Equipment / System Description

Equipment / system overview:

This project is for the evaluation of component switches which will be used as “emergency off switches”. The part numbers below are the units in the M22 and M16 series that have been evaluated. The part number consists of actuators, guards, contact blocks and surface mount enclosures. The parts are components intended to be built into an end assembly. The component switches have been approved by a Nationally Recognized Testing Laboratory in the United States.

Model variants and options:

M22-PV E-STOP PUSH-PULL

M22-PVT E-STOP TWIST-RELEASE

M22-XGPV YEL GUARD RING FOR E-STOP

M22-K01 CONTACT BLOCK 1NC SCREW TERM

M22-K01D CONTACT BLOCK 1LONC SCREW TERM

M22-K01-B25 Same as M22-K01 but bulk pack of 25 units

M22-1Y1-PG SURFACE MOUNT ENCLOSURE 1-ELEMENT YEL

M22-K10 CONTACT BLOCK 1NO SCREW TERM

M22-KC01 CONTACT BLOCK 1NC SCREW TERM BASE MOUNT

M22-KC10 CONTACT BLOCK 1NO SCREW TERM BASE MOUNT

M22-CK01 CONTACT BLOCK 1NC CAGE CLAMP

M22-CK01D CONTACT BLOCK 1LONC CAGE CLAMP

M22-CK11 CONTACT BLOCK 1NO/1NC CAGE CLAMP

M22-PVT45P E-Stop Push-Pull/Twist To release, 45mm operator

M22-PVT60P E-Stop Push-Pull/Twist To release, 60mm operator

M22-PVLT45P Illuminated E-Stop Push-Pull/Twist To release, 45mm operator

M22-PVLPT60P Illuminated E-Stop Push-Pull/Twist To release, 60mm operator

M22-K01SMC10 NC Self-Monitoring Contact Block

M22-KC01SMC10 NC Self-Monitoring Contact Block, Base Mount

M22-K02SMC10 2 NC Self-Monitoring Contact Block

M22-KC02SMC10 2 NC Self-Monitoring Contact Block, Base Mount

M16-Q25PV E-Stop, Push-Pull

M16-E01 NC Contact Block

M16-E10 NO Contact Block

Equipment / system use or application:

These components switches are designed to be built into an end product. They will be used for an “Emergency off” circuit in an end product.

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Features that were not evaluated:

None

Additional information / remarks:

None

Facilities Connections:

1

No facilities connections,

The switches are rated by UL at 10 amps up 600 volts AC and 1 amp up 250 volts DC.

The switches are rated per IEC 60947: 230/400/500 volts AC at 6/4/2/A and 24 V/110/240 volts DC 2 3/0.8/0.3 A.

2

3

4

5

6

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Detailed Summary of Assessment Findings

Items that do not conform to the SEMI® Guideline(s):

(Items specified with risk rank, i.e. “RISK = (severity grouping number)(likelihood grouping letter) – (risk assessment category name)” in accordance with SEMI S10)

None.

Recommendations

None.

Additional Information / Remarks

None.

Product / System Photographs

See photo attachment 4 of the SEMI S-2 report 31070191.001

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Evaluation Report

Eaton Corporation




SEMI® S22-0706

SAFETY GUIDELINE FOR THE ELECTRICAL DESIGN OF SEMICONDUCTOR MANUFACTURING EQUIPMENT

Point-by-Point Assessment Comments

8. General Considerations

8.1

C

Design safety assessment

The risks associated with the electrical design, construction, and operation of the equipment should be considered as part of the overall safety assessment of the equipment. This assessment should include a fault analysis with consideration given to, but not limited to, electric shock or fire and failures of components, subsystems, and systems.

The M16 and M22 conform to the section because the risks associated with its electrical design as well as its construction and operation has been considered during the course of the evaluation of the equipment.

8.2

C

Faults, failures and errors

The following are some of the types of faults that should be considered:

a) Faults and failures on the equipment’s circuits, and

b) Possible human error associated with operator, maintenance, and service activities

NOTE 18: This is not intended to be a comprehensive list of all possible types of faults.

a) C The M16 and M22 conform to the section because the design considered faults and failures of the equipment circuits.

b) C The M16 and M22 conform to the section because the design also considered possible human error.

8.3

C

Design safety strategy

The order of precedence for resolving identified hazards and satisfying equipment safety considerations should be as follows:

a) Design to eliminate hazards

b) Incorporate safety devices

c) Provide hazard alerts or warning signals, and finally

d) Develop administrative procedures and training (administrative procedures may include the use of personal protective equipment)

A combination of these approaches can also be used.

NOTE 19: See SEMI S2 for additional information.

a) C The M16 and M22 conform to the section because the first design strategy was to eliminate hazards in the design.

b) N Section is not applicable to the M16 and M22 because the hazards were eliminated in the design.

c) N Section is not applicable to the M16 and M22 because the hazards were eliminated in the design.

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d) N Section is not applicable to the M16 and M22 because the hazards were eliminated in the design.

8.4 Electrical Components

8.4.1

C

Where failure of components and assemblies could result in an unacceptable increase in risk of electric shock, fire, or personnel injury, those components and assemblies should be certified by an accredited testing laboratory and used in accordance with the manufacturer’s specification and conditions of the certification, or otherwise evaluated to the relevant component standard(s). This applies to components that handle hazardous voltage or hazardous electrical power or are used in a safety circuit.

NOTE 20: Reference SEMI S2 for discussions of acceptable risk.

The M16 and M22 conform to the section because these component switches have been evaluated by an accredited testing laboratory, UL to ANSI/UL 508, report E29184.

8.4.2

NComponents should be provided with overcurrent protection in accordance with Section 11.

Section is not applicable to the M16 and M22 because this is an end product requirement.

8.4.3

NComponents should be securely mounted according to the conditions of their certification, if applicable, and their manufacturer’s instructions.


8.5 Electrical Supply

8.5.1

NThe equipment should be designed to operate safely when connected to its specified electrical supply.

Section is not applicable to the M16 and M22 because there are no facilities connections.

8.5.2

NInterruptions in the facilities electrical supply should not lead to an increased risk of fire, electric shock, or other hazardousconditions.


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8.6

N

Uninterruptable Power Supplies (UPS)

This subsection applies to UPSs with outputs greater than: 30 volts rms, 42.4 volts peak; 60 volts dc; or 240 volt-amps.

Whenever a UPS is provided with the equipment, its location and wiring should be clearly described within the relevant manufacturer supplied documentation that covers installation and maintenance.

The section is not applicable to the M16 and M22 because they do not incorporate any UPS.

8.6.1

N

Power from the UPS should be interrupted when any of the following events occur:

a) The emergency off actuator (EMO button) is pushed; or

b) The main equipment disconnect is opened.

EXCEPTION: Upon emergency off (EMO) activation, the UPS may supply power to the EMO circuit, safety related devices, and data/alarm logging computer systems as described in the exception clauses of paragraph 13.3.3.

a) N The section is not applicable to the M16 and M22 because they do not incorporate any UPS. b) N The section is not applicable to the M16 and M22 because they do not incorporate any UPS.

8.6.2

N

The UPS may be physically located within the footprint of the equipment provided that the UPS is within its own enclosure, which may be the enclosure provided with the UPS and considered in the certification of the UPS. The UPS circuits may also be supplied from a facility source outside the equipment served. If this is the case, then all the considerations discussed for the facilities main disconnecting means in section 9 should be taken in to account for power supplied to the UPS circuits.


8.6.3

NThe UPS should be certified by an accredited testing laboratory.


8.6.4

NThe UPS wiring and terminals should be identified as "UPS Supply Output", or equivalent, at each termination point where the UPS wiring may be disconnected.


8.7

COperating Environment

The electrical equipment should be suitable for the environment in which it is intended to be used.

The M16 and M22 conform to the section because they are suitable for use in EMO circuits in an end product.

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8.8

N

Electromagnetic Capability (EMC)

A system malfunction, as a result of the presence of anticipated electromagnetic disturbances that will be present in the end use environment, should not result in an unacceptable risk. Products that are compliant with either SEMI E33 or the EMC Directive (89/336/EEC) are considered to be compliant with this criterion.

The section is not applicable to the M16 and M22 because they are not a source of EMC emissions.

8.9 Contaminants

8.9.1

C

Electrical equipment should be adequately protected against the entrance of solid bodies and liquids likely to be present that may increase the risk of electric shock or fire as a result of a single-point failure or reasonably foreseeable operational error.

The M16 and M22 conform to the section because they are adequately protected against entrance of solid bodies and liquids that are likely to be present in a integrated circuit manufacturing facility. An enclosure is required for some of the switches. An evaluation needs to be performed in the end application in the end product design.

8.9.2

NElectrical insulation should be protected against chemical environments that may lead to deterioration, or be capable of withstanding the environments to which it will be exposed.

Section is not applicable to the M16 and M22 because this evaluation needs to be performed on the end product when the chemical environments are known.

8.10

N

Ionizing and Non-ionizing Radiation

Personnel should be adequately protected against the hazards associated with ionizing and non-ionizing radiation. Compliance to the ionizing and non-ionizing radiation sections of SEMI S2 serves as verification of compliance.

Section is not applicable to the M16 and M22 because they do not use or produce ionizing or non-ionizing radiation.

8.11

N

Vibration, Shock, and Bump

Protection should be provided against likely unsafe consequences from the effects of vibrations, shocks and bumps caused by operations of the equipment, or disturbances of this type that will be present in the semiconductor manufacturing, testing, and assembly environment.

NOTE 21: See the SEMI S2 seismic sections for considerations.


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8.12

C

Transportation and Storage

Packing for shipment should prevent damage from humidity, vibration, and shock that may affect the safety of the equipment.

EXCEPTION: Installation considerations for checking safety related aspects of the system that may be impacted during transportation and storage may be used instead of the packing stipulations of paragraph 8.12.

The M16 and M22 conform to the section because they are adequately packaged.

8.13

C

Provisions for Handling

Provisions for lifting and handling sub-systems that may cause injury when moved or lifted during maintenance or service should be provided and documented in the system manuals. See SEMI S8 for further information.

The M16 and M22 conform to the section because they are component switches that can easily be handled.

8.14

N

Lockout (electrical energy isolation)

Lockable energy isolation devices should be designed into equipment to provide for safety during service and maintenance tasks. Where it is expected that it will be necessary or beneficial to work on separately operable parts of the equipment, a separate lockable energy isolation device may be provided for each such part.


8.15

N

Suspension of Safeguards

General energy isolation, local energy isolation, or safe work procedures should be used when there is a suspension of safeguards. These procedures should be defined in the maintenance manual.


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9. Facilities Electrical Connection

9.1 Incoming Supply Conductors

9.1.1

N

Equipment should be designed to receive incoming electrical power from the facility to a single feed location which terminates on the specified main disconnecting means. This main disconnecting means, when opened, should remove all electrical power in the equipment from the load-side of the main disconnecting means.

EXCEPTION 1: Equipment with more than one electrical feed should be provided with provisions for energy isolation (“lockout”) for each feed and be marked with the following text, or the equivalent, at each main disconnecting means: “WARNING: Risk of Electric Shock or Burn. Disconnect all [number of feed locations] sources of supply prior to servicing.”

EXCEPTION 2: Multiple units mounted separately with no shared hazards and without interconnecting circuits with hazardous voltages, energy levels, or other potentially hazardous conditions may have: separate sources of power and separate supply circuit main disconnecting means; or separate EMO circuit, where all the above are clearly identified.

NOTE 22: If general lockout cannot be performed for a specific maintenance of service task the guideline in Section 8.15 should be followed.


9.1.2

N

Field installed supply conductors should be connected directly to the main disconnecting means with no connection to terminal blocks or other devices.

EXCEPTION: This does not apply where the plug of a cord is the main disconnecting means. However, if the plug of the cord is not the main disconnecting means then field installed supply conductors should be connected directly to the main disconnecting means with no connection to terminal blocks or other devices.


9.1.3

N

Terminals with hazardous potentials present after the main disconnecting means is placed in the “Off” isolation position should be identified with an appropriate hazard warning label. The label should be placed inside the electrical enclosure adjacent to the terminals.


9.1.4

NThe supply overcurrent protection should be rated adequately to protect components connected to the supply circuit that do not otherwise have adequate overcurrent protection.


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9.1.5

N

The equipment should be provided with main [supply] overcurrent protection devices rated with an interrupting capacity of at least 10,000 rms symmetrical amperes interrupting capacity (AIC) for circuits rated 240VAC or less, and at least 14,000 rms symmetrical amperes interrupting capacity (AIC) for circuits rated more than 240VAC.

EXCEPTION 1: Cord connected single phase equipment, rated no greater than 2.4kVA, may have overcurrent protection devices with an interrupting capacity of at least 5,000 rms symmetrical amperes interrupting capacity. When this exception is used, the installation manual should inform the user of the lower AIC protection provided by the equipment.

EXCEPTION 2: An equipment subsystem (e.g. mini-environment ventilation) rated no greater than 2.4kVA, may have overcurrent protection devices with interrupting rating of at least 5,000 rms symmetrical amperes interrupting capacity (AIC).


9.1.6 Identification of Facilities Connections

9.1.6.1

N

Where a neutral conductor is used it should be clearly indicated in the equipment schematic drawings and the facilities supply connection should be labeled “N” or “Neutral”.

EXCEPTION: This marking is not necessary in cord connected equipment where the cord is not installed in the field.


9.1.6.2

N

At each incoming supply point, the protective earthing conductor terminal should be identified by the earthing symbol (see IEC 60417 symbol 5019). In addition to the earthing symbol, other appropriate letter designations may be applied (e.g. “PE”, “GND”).


9.1.6.3

NInstallation instructions should be provided for the correct identification and installation of the individual phases in a three-phase system when the improper connection of phases could result in hazardous unintended rotation or sequence.


9.1.6.4

N

Each unearthed phase conductor in 3-phase AC power circuits should be clearly indicated in the equipment schematic drawings, and the facilities incoming supply connection should be identified with one of the following schemes adjacent to the input terminals:

“LI”, “1,2”, and “L3”,

“R”, “S”, and “T”, or

“A”, “B”, and “C”.


9.2 Equipment Protective Earthing Connection

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9.2.1

NA protective earthing conductor should enter the equipment in association with the incoming supply conductors.


9.2.2

NThe protective earthing conductor should be copper.


9.2.3

NThe protective earthing conductor should be sized in accordance with the tables in Appendix 1. See Appendix 1, Tables A1-1 through A1-5 for protective earthing conductor sizes.


9.2.4

NThe protective earthing [grounding] terminal should be dedicated for the sole purpose of connecting the protective earthing conductor to the equipment protective conductors and bonding system.


9.2.5

NThe protective earthing conductor and its connection to the protective earthing conductor terminal should also comply with the protective bonding section of this safety guideline (See Section 12).


9.2.6

N

The protective earthing conductor should not be used as an intentional current carrying conductor for the power delivery circuit. Currents in the protective earthing conductor from EMC filters are permissible. The protective earthing conductor may also carry currents that result from incidental inductive and capacitive coupling.


9.2.7

NThere should be no connection between the supply neutral conductor and the protective earthing conductor or the protective earthing system inside the electrical equipment.


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9.3 Main Disconnecting Means

9.3.1

NThe main energy isolation capabilities (equipment main disconnecting means) should be in a location that is readily accessible and should be lockable only in the de-energized position.


9.3.2

N

For equipment with multiple incoming electrical feeds all of the main disconnecting means should be grouped in one area or a marking should be installed at each supply circuit main disconnecting means location indicating the number of all other supply circuit main disconnecting means.

NOTE 23: Grouping main disconnecting means in one area is preferred.


9.3.3

N

Supply conductor connections to the main disconnecting means should comply with one of the following:

a) The connections should be located in a separate electrical enclosure installed on or adjacent to the equipmentenclosing the main disconnecting means only. Parts on the supply side of the main disconnecting means in the equipment which remain energized when the main disconnecting means is switched off should be guarded (finger-safe) to prevent accidental contact by service personnel; or

b) The connections should be located in the main electrical enclosure located near the top, with adequate bending space provided for supply conductor installation and no equipment located above the supply terminals. Parts on the supply side of the main disconnecting means in the equipment which remain energized when the main disconnecting means is switched off should be guarded (finger safe) to prevent accidental contact by service personnel: or

c) The connections should be located in the main electrical enclosure, where other equipment is mounted above the supply terminals. Parts on the supply side of the main disconnecting means in the equipment which remain energized when the main disconnecting means is switched off should be guarded to prevent accidental contact by service personnel or by a tool that may be dropped from above. The opening should be such that a 1-mm (0.04 inch) rod cannot come intocontact with the energized parts.

EXCEPTION: Machines with a power consumption totaling 1 492 Watts (2 HP) or less may be connected to a remotely mounted main disconnecting means through a flexible cord, cable, or conduit provided that the main disconnecting means is in sight from, readily accessible to, and no more than 6 m (20 feet) from the machine operator work station.

a) N Section is not applicable to the M16 and M22 because there are no facilities connections. b) N Section is not applicable to the M16 and M22 because there are no facilities connections.c) N Section is not applicable to the M16 and M22 because there are no facilities connections.

9.3.4

N

Wire bending space should be provided for the facility supply conductors at the main disconnecting means as specified by Appendix 1,Tables A1-1 through A 1-5.

EXCEPTION: Equipment that meets the wire bending space requirements of NFPA 70 will also meet these criteria.


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9.3.5

N

When placed in the OFF position the main disconnecting means should satisfy the following criteria:

a) All unearthed conductors of the supply circuit should be disconnected simultaneously.

b) Earthed conductors (neutral or grounded) should not be disconnected.

EXCEPTION: The earthed conductor (neutral) may be disconnected provided that it is simultaneously disconnected with the unearthed conductors.

NOTE 24: Some jurisdictions require disconnection of the earthed conductor (neutral).

a) N Section is not applicable to the M16 and M22 because there are no facilities connections. b) N Section is not applicable to the M16 and M22 because there are no facilities connections.

9.3.6

NThe main disconnecting means should have a minimum of two marked positions “Off” (isolated) and “On”. These positions should be clearly marked with IEC 60417 symbol 5008 for “Off” and IEC 60417 symbol 5007 for “On”.


9.3.7

NThe actuator of the equipment’s main disconnecting means should be readily accessible and a maximum of 2 meters above the standing surface, measured from the center of the grip.


9.3.8

N

Each facility main disconnecting means for the incoming electrical supply should be mechanically or electrically interlocked, or both, with the electrical disconnect enclosure door.

EXCEPTION 1: A main disconnecting means used only for maintenance of lighting circuits within electrical enclosures should not be interlocked with the electrical enclosure door. A hazard warning label should be provided when exposed parts may be energized within the main disconnect enclosure when the enclosure door is open.

EXCEPTION 2: Where an attachment plug is used as the main disconnecting means.

EXCEPTION 3: Where a remotely mounted main disconnecting means is provided, a tool is required to open the equipment enclosure door, and a hazard warning label is attached to the electrical enclosure warning of hazardous voltage inside and advising isolation of the power before opening.

EXCEPTION 4: The considerations stated in paragraph 9.3.8 do not apply to equipment rated less than 5KVA that has the other protections against electric shock stipulated in this document.


9.3.9

NThe main disconnecting means (lock-out) handle should not disengage from the main disconnecting means when the enclosure door is opened.


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9.3.10

N

Interlocking should be provided between the main disconnecting means and its associated door to prevent both of the following:

a) Closing of the main disconnecting means while the enclosure door is open, unless the interlock disconnecting power is overridden by a deliberate action (see Section 13), and

b) Closing of the main disconnecting means until the door hardware is fully closed.

NOTE 25: A mechanical interlock is preferable to an electrical interlock.


9.4 Cord and Plug Connections used as Facility Connection

9.4.1

N

When a cord and plug connection is intended to be used as a main disconnecting means, it should either be capable of being under the exclusive supervision of the person carrying out the work, or be provided with a means for lockout. See discussion of conductors and cables in Section 16.


9.4.2

NIf a supply cord is provided with the system, the cord, as well as the installation instructions, should comply with applicable local codes where it will be installed, or the equipment should have provisions for hard wiring using a raceway.


9.4.3

NIf there are provisions for hard wiring, a cord and plug should not be used as a main disconnecting means.


9.4.4

N

If the cord and plug is used for the main disconnecting means the equipment should also have an on-off control.

NOTE 26: Uses preferred for cord and plug connection to the facility include:

a) Equipment with an attachment plug and powered from a receptacle outlet to connect movable equipment to facilitate frequent interchange, and

b) The fastening means and mechanical connections of the equipment are designed to permit removal for maintenance or service.

NOTE 27: Materials are restricted by paragraph 16.3.1.


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10. Protection Against Electric Shock

10.1

C

General

The electrical equipment should provide protection to persons against electric shock under normal operating conditions and under any reasonably foreseeable single fault condition.

The M16 and M22 conform to the section because protection is provided in normal operating conditions and under any reasonably foreseeable single fault conditions. The switches have been evaluated by UL to ANSI/UL 508, report number E29184.

10.2 Protection Against Electric Shock During Normal Operation

10.2.1

N

Where operator access to a hazardous voltage is controlled through the use of a grounded conductive or non-conductive enclosure, that enclosure should either:

1) Require a tool to open and be labeled with the hazard against which it protects personnel, or

2) Be interlocked.

Reference Jointed Finger Probe Access Test. Reference IEC-61010-1 Annex B for the test finger.

NOTE 28: IEC 60529 “Degrees of Protection Provided by Enclosures” may be used as a reference.

Section not applicable to the M16 and M22 because there are no enclosures on these component switches.

10.2.2

NSpacing between uninsulated energized parts and conductive enclosures should be maintained in compliance with Appendix 1 Tables A1-12 and A13 or determined to be adequate by dielectric testing in accordance with Section 22.

Section not applicable to the M16 and M22 because this is an end product requirement.

10.2.3

C

Energized parts protected by insulation should be completely covered with insulation that can be removed only by destruction. Such insulation should be capable of withstanding the mechanical, chemical, electrical, and thermal stresses to which it may be subjected under normal operation.

The M16 and M22 conform to the section because the insulation meets the requirement of basic or reinforced insulation as required.

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10.2.4

C

Protection Against Electric Shock Hazards Resulting from Fault Conditions – Use of measures to prevent the occurrence of a hazardous touch voltage may include one or more of the following:

a) Double or reinforced insulation may be used to prevent a hazardous touch voltage through contact with exposed conductive parts that results from the failure of basic insulation of the energized parts of that circuit,

b) Electrical separation (clearance and creepage) may be used to prevent a hazardous touch voltage through contact with exposed conductive parts that results from the failure of basic insulation of the energized parts of that circuit,

c) Automatic disconnection of the supply of any circuit affected by the occurrence of an insulation failure that results in a ground fault may be used to prevent contact with a hazardous voltage.

NOTE 29: See definition of GFCI

a) C The M16 and M22 conform to the section because hazardous touchable voltages are separated from the AC mains by double or reinforced insulation.

b) N Section not applicable to the M16 and M22 because there are no exposed conductive partsc) N Section not applicable to the M16 and M22 because automatic disconnection is not used.

10.3 Maintenance and Service Personnel Potential Exposure to Hazards

10.3.1

N

Energized Electrical Work – The equipment should be designed to minimize the need to calibrate, modify, repair, test, adjust, or maintain equipment while it is energized, and to minimize work that should be performed on components near exposed hazardous energized circuits. The equipment design should move as many tasks as practical from Type 4 to Types 1, 2, or 3. Routine Type 4 tasks, excluding troubleshooting, should have specific written instructions in themaintenance manuals. General safety procedures (e.g., appropriate PPE and barriers) for troubleshooting, including Type 4 work, should be provided in the maintenance manual.


10.3.2

N

Protection of Service Personnel – Service personnel should not be exposed to inadvertent contact with hazardous potentials or hazardous energy levels. This may be accomplished by using touch safe terminals or providing additional barriers over exposed terminals.


10.3.3

NManual Adjustment – Equipment requiring manual adjustment should be so designed that adjustment does not expose personnel to electrical or mechanical hazards.


10.3.4

NAccess – Maintenance and service access should be provided for maintaining and servicing equipment.


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10.3.5

N

Internal Barriers – Non-conductive or earthed (grounded) conductive physical barriers or equivalent means should be provided:

a) Where it is necessary to reach over, under or around, or in close proximity to hazards,

b) Where dropped objects could cause short circuits or arcing,

c) Where failure of liquid fittings from any part of the equipment could result in the introduction of liquids into electrical parts,

d) Where maintenance or service tasks are likely to allow inadvertent contact with un-insulated energized parts containingeither: potentials greater than 30 Volts rms, 42.4 Volts peak, or 60 Volts DC; or power greater than 240 volt-amps in dry locations.

NOTE 30: Removable nonconductive and noncombustible covers are preferred.

a) N Section is not applicable to the M16 and M22 because this is an end product requirement. b) N Section is not applicable to the M16 and M22 because this is an end product requirement.c) N Section is not applicable to the M16 and M22 because this is an end product requirement. d) N Section is not applicable to the M16 and M22 because this is an end product requirement.

10.3.6

N

Test Points – When test points are provided they should satisfy the following:

a) Located to provide unobstructed access,

b) Marked or identified in the documentation,

c) Protected against incidental contact, and

d) Provide adequate access for a test probe.

a) N Section is not applicable to the M16 and M22 because this is an end product requirement. b) N Section is not applicable to the M16 and M22 because this is an end product requirement.c) N Section is not applicable to the M16 and M22 because this is an end product requirement. d) N Section is not applicable to the M16 and M22 because this is an end product requirement.

10.3.7

N

Isolated Power Systems – This section applies only to 50-60 Hz AC applications operating at a hazardous voltage.

NOTE 31: The common purpose for using isolated power systems is to reduce sources of electronic noise by notdeliberately referencing the output circuit conductors to earth (ground).

NOTE 32: Auto transformers do not provide electrical isolation.

Section is not applicable to the M16 and M22 because there are no isolated power systems.

10.3.7.1

N

All accessible conductive components that are likely to become energized under fault conditions should be effectively bonded to the protective earthing conductor.

EXCEPTION: If the process technology requires conductive parts that are not grounded when they are inaccessible, but grounded when they are accessible, then the intent of paragraph 10.3.7.2 is satisfied by ensuring such conductive parts are grounded when they become accessible.

Section is not applicable to the M16 and M22 because there are no isolated power systems.

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10.3.7.2

N

Isolated circuits should meet the following:

a) The transformer or power supply, and any components (devices) connected to their output, should be clearly labeled adjacent to the isolated circuit(s) or on the enclosure to warn operators and service personnel of the unearthed condition, and,

b) Ground detection lights, a ground-fault circuit-interrupter (GFCI), or a line isolation monitor should be installed in the output circuit to indicate an isolated conductor ground-fault condition. This will aid in the detection of ground faults in isolated power systems.

a) N Section is not applicable to the M16 and M22 because there are no isolated power systems. b) N Section is not applicable to the M16 and M22 because there are no isolated power systems.

10.3.8

N

Protection Against Residual Voltages – Stored electrical energy should be drained [discharged] to less than ahazardous energy level. See section 22 for test method.

EXCEPTION: Batteries that produce a hazardous electrical power or hazardous voltage do not need to be discharged, but other provisions for safe servicing should be made and provided in the system documentation.

Section not applicable to the M16 and M22 because there is no stored electrical energy.

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11. Protection Against Risk of Electrical Fire

11.1

CMeasures should be provided in the design of the equipment to protect against the risk of electrical fire as a result of any reasonably foreseeable single fault due to component failure or abnormal operating conditions.

The M16 and M22 conform to the section because their design is such that it will protect against the risk of electrical fire as a result of any reasonably foreseeable fault due to component failure or abnormal operating condition. The switches are approved by a Nationally Recognized Testing Laboratory. The switches have been evaluated by UL to ANSI/UL 508, report E29184.

11.2

NThe installation documentation should include the necessary data for selecting the facility supply overcurrent protective device and the facility supply conductors.

Section not applicable to the M16 and M22 because they are component switches and do not consume any power. No overcurrent protection is required just for the switches.

11.3

N

All conductors except protective earthing conductors, protective conductors, and earthed (for example, neutral) conductors should be protected against overcurrent conditions by protective devices suitably chosen as discussed in the remainder of this section.

EXCEPTION: The earthed conductor (neutral) may be disconnected by an overcurrent device for valid safety and design reasons, providing that it is disconnected simultaneously with the unearthed conductors.

Section not applicable to the M16 and M22 because there are no conductors in these switches.

11.4

N

Circuit overcurrent protection devices should not exceed the ampacity of the conductors they protect.


11.5

NThe overcurrent protection device protecting a single conductor or group of conductors should be located at point where the conductor(s) receive their supply (see Appendix 2), unless all of the following conditions are met:


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11.5.1

N

For a conductor no longer than 3 m (10 ft):

a) The current carrying capacity of the conductor is equal to or greater than the load current.

b) The conductor is enclosed in an electrical enclosure or duct.

c) The conductor terminates in an overcurrent protective device.

a) N Section not applicable to the M16 and M22 because there are no conductors in these switches. b) N Section not applicable to the M16 and M22 because there are no conductors in these switches.c) N Section not applicable to the M16 and M22 because there are no conductors in these switches.

11.5.2

N

For a conductor longer than 3 m and no longer than 7.5 m (25 ft):

a) The current carrying capacity of the conductor is equal to or greater than the load current.

b) If the conductor is longer than 3 m (10 ft), the current carrying capacity of the conductor is at least one third the currentcarrying capacity of the conductor from which it is supplied or one third of the maximum current permitted by the overcurrent protective device that protects the conductor from which it is supplied.

c) The conductor is enclosed in an electrical enclosure or duct.

d) The conductor terminates in an overcurrent protective device.

a) N Section not applicable to the M16 and M22 because there are no conductors in these switches. b) N Section not applicable to the M16 and M22 because there are no conductors in these switches.c) N Section not applicable to the M16 and M22 because there are no conductors in these switches. d) N Section not applicable to the M16 and M22 because there are no conductors in these switches.

11.6

NCircuit overcurrent protection of discrete devices should not exceed 125% of amperage rating of the device. See section 18 for motor protection.


11.7

N

Circuits that cannot be characterized as serving [specific] discrete devices should be provided with overcurrent protection at 125% of maximum nominal load or the next largest standard size of overcurrent device, unless it can be demonstrated that no risk of electrical fire is present in the event of fault conditions (e.g., power limited).


11.8

NAll receptacle outlets and connectors as well as the circuits supplying these receptacles should have overcurrent protection in accordance with their rating.

Section not applicable to the M16 and M22 because there are no outlets or connectors

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11.9

NLocal Lighting Circuits

Overcurrent protection for lighting circuits should not exceed 15 amperes.

Section not applicable to the M16 and M22 because there are no local lighting circuits.

11.10 Transformers

11.10.1

NTransformers that operate at 50/60 Hz, that have a primary rated 600 VAC or less, and have no integral thermalprotection should have overcurrent protection in accordance with the applicable row of Table A1-14.

Section not applicable to the M16 and M22 because there are no transformers.

11.10.2

N

Transformers that operate at 50/60 Hz, that have a primary rated 600 VAC or less, and are equipped with thermal protection provided by the transformer manufacturer that interrupts the primary current in the event of an overload, should be protected in accordance with Table A1-14 or A1-15.

NOTE 33: Where current ratings are not given by the manufacturer, calculation methods to help determine them are provided in Related Information 1 and 2.

Section not applicable to the M16 and M22 because there are no transformers.

11.11 Overcurrent Protective Devices

11.11.1

N

Overcurrent Devices – All overcurrent protective devices should be selected and applied with proper consideration being given to the following:

a) Maximum available fault current,

b) Interrupting rating of the device,

c) Voltage rating,

d) Load characteristic,

e) Normal operating current, and

f) Circuit in-rush characteristics.

a) N Section not applicable to the M16 and M22 because there are no overcurrent devices. b) N Section not applicable to the M16 and M22 because there are no overcurrent devices.c) N Section not applicable to the M16 and M22 because there are no overcurrent devices. d) N Section not applicable to the M16 and M22 because there are no overcurrent devices.e) N Section not applicable to the M16 and M22 because there are no overcurrent devices. f) N Section not applicable to the M16 and M22 because there are no overcurrent devices.

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11.11.2

NCircuit breakers and circuit protectors are preferred over fuses as overcurrent devices because they can be reset.

Section not applicable to the M16 and M22 because there are no overcurrent devices.

11.11.3

NFuse holders and fuses should be of a type that is designed to be mounted to a panel or component rail.

NOTE 34: So-called ‘in-line’ fuse holders do not meet this criteria.

Section not applicable to the M16 and M22 because there are no overcurrent devices.

11.11.4

N

Panel-mounted fuse holders and fuses should satisfy the following:

a) Fuses in screw-type fuse holders should be used as overcurrent protection in only single-phase circuits using a neutral conductor;

EXCEPTION: Fast-acting fuses in multi-phase circuits may be used where they can enhance safe design.

b) If electric shock due to incidental contact by maintenance or service personnel may occur, a touch-safe fuse holder should be used;

c) Fuse holders that have exposed metal when the cap is removed (non-shockproof fuse holders) should have the line conductor connected to the end terminal and the load conductor connected to the side terminal; and

d) Fuse holders should not move in a way that will loosen electrical connections when a fuse is replaced.

a) N Section not applicable to the M16 and M22 because there are no overcurrent devices. b) N Section not applicable to the M16 and M22 because there are no overcurrent devices. c) N Section not applicable to the M16 and M22 because there are no overcurrent devices. d) N Section not applicable to the M16 and M22 because there are no overcurrent devices.

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11.11.5

N

Circuit breakers and circuit protectors should satisfy the following:

a) The circuit breaker or circuit protector should be manually operable and should clear a fault even if the handle mechanism is held closed;

b) The “ON” and “OFF” position should be clearly marked. The handle should be mounted with the handle up for the “ON” position;

c) If the circuit breaker is mounted on a vertical surface it should be in a vertical or horizontal orientation only. If mountedin a vertical orientation, the handle should be up for the “ON” position. If mounted in a horizontal orientation, the handle should be to the right for the “ON” position. If mounted in two columns, horizontally oriented, the handles should be toward the center for the “on” position; or clearly marked indicating the “ON” and “OFF” positions.

d) If the circuit breaker is mounted on a horizontal surface it should be mounted so that the on position is to the right of the surface or center if there are two columns; or it should have its “ON” and “OFF” position clearly marked.

e) Overcurrent protection should be provided in all unearthed conductors.

NOTE 35: It is preferred that the supply conductors of the circuit be connected to the top of the circuit breaker or circuit protector where practical. Circuit breakers and circuit protectors marked with “line” and “load” terminals should be installed in accordance with the markings.

a) N Section not applicable to the M16 and M22 because there are no overcurrent devices. b) N Section not applicable to the M16 and M22 because there are no overcurrent devices.c) N Section not applicable to the M16 and M22 because there are no overcurrent devices. d) N Section not applicable to the M16 and M22 because there are no overcurrent devices.e) N Section not applicable to the M16 and M22 because there are no overcurrent devices.

11.12 Electrolytic Capacitors

11.12.1

N

Large capacitor venting recommendations: Capacitors that are greater than 25.4 mm (1.0 in.) in diameter or are capable of storing more than four Joules should be self-vented or protected from rupture by equivalent means. A capacitor vent should be unobstructed for a minimum of 5.1 mm (0.2 in.). Capacitors mounted horizontally should have vent holes

positioned in the upper half of the enclosure (9, 12, 3 o’clock positions).

Section not applicable to the M16 and M22 because there are no capacitors used.

11.12.2

NCapacitors should have containment provisions within the capacitor itself or be shielded such that vapors or debris will not become hazardous to personnel.


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11.12.3

NCapacitor terminals should be insulated or protected from short circuits by tools. Lacquer and sealing compounds should not be relied upon to provide protection.


11.13

N

Abnormal Temperatures Under Fault Conditions - Heaters or other circuits which, under any reasonably foreseeable single fault condition, are capable of causing abnormal temperatures that create a hazardous condition with an unacceptable level of risk, should be provided with over temperature protection to detect these abnormally elevated temperatures and interrupt the source of energy driving them. Equivalent means of protection are acceptable.

Section not applicable to the M16 and M22 because there are no heaters or other circuits which are capable of causing abnormal temperatures.

11.14

NIn addition to satisfying the criteria of this document, the criteria of SEMI S3 should be satisfied when applicable.

Section not applicable to the M16 and M22 because there are no heated chemical baths.

11.15

N

Some device loads vary widely depending upon their operating conditions and operating history (such as ceramic resistive heating elements). The load values used to select overcurrent protection devices should account for the full load range during worst case, normal operating conditions.

Section not applicable to the M16 and M22 because there are no devices with widely varying device loads.

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12. The Protective Earthing System

12.1

N

Bonding - All accessible non-current carrying conductive components that may become energized under reasonably foreseeable single fault conditions, and as a result increase the risk of electric shock, should be bonded to the protective earthing system.

NOTE 36: Non-safety related bonding conductors (e.g., bonding conductors for EMC concerns) are not subject to this section.

Section is not applicable to the M16 and M22 because there is no protective earthing system on the component switches.

12.2

NParts Not Bonded to the Protective Earthing System - If non-current carrying conductive parts do not constitute a hazard under single fault conditions, it is not necessary to bond them to the protective earthing system.


12.3 Protective Earthing System

12.3.1

N

General – The protective earthing system consists of those components that provide electrical continuity between the protective earthing conductor terminal and non-current carrying frames, enclosures, or components that are stipulated to be maintained at an earth potential under both normal operating conditions and single fault conditions in accordance with paragraph 12.1.


12.3.2

N

Protective Conductors – Copper conductors or structural members with bonding jumpers should be used for bonding to the protective earthing system.

EXCEPTION: Conductors other than copper that have equivalent ampacity to copper conductor can be used for protective conductors.


12.3.2.1

NWhen a protective conductor is used in this way, its size should be compatible with the protective conductor ampacity given in Tables A1-1 through A1-5 that is a function of the ampacity of the current carrying conductor it is associated with.


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12.3.2.2

N

Bus bars, and/or the equipment frame may be used as protective conductors. When bus bars or the equipment frame is used, their geometry and material should provide the same ampacity as that stipulated for the protective conductor in Tables A1-1 through A 1-5.


12.3.3

N

Hinges, slides, and other moving parts of enclosures should not be relied on as part of the protective earthing system.

EXCEPTION: Hinges are acceptable if the enclosure and its hinges have been identified as suitable for bonding by an accredited testing laboratory.


12.3.4

NRaceways, wireways, and cable trays should not be used as protective conductors, except to effect their own connection to the protective bonding circuit as may be stipulated by paragraph 12.1.


12.3.5

NIt is preferred that a protective conductor be routed with the associated current carrying conductors whenever possible.


12.3.6

NThe protective earthing system should not be intentionally used as a current carrying conductor, except as permitted by Section 9.2.6.


12.3.7

N

Continuity of the Protective Earthing System – The protective earthing system should be permanent, electrically continuous and capable of carrying any ground fault current likely to be imposed. See Section 22.3 “Earthing Continuity and Continuity of the Protective Bonding Circuit” for the appropriate test method.


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12.3.8

NConnection and bonding points to protective conductors should be designed so that their current carrying capacity is not impaired by mechanical, chemical, or any other influence that may degrade their current carrying capacity.


12.3.9

NMounting hardware and cover screws that may be removed for normal servicing should not be used for terminating the protective conductor to a component or part of the enclosure.


12.3.10

N

Machine parts, other than accessories or attachments, having metal-to-metal bearing surfaces should be considered as bonded to the protective earthing system. Parts separated by a nonconductive fluid or gas should not be considered as bonded.


12.3.11

NWhen a part is removed, the continuity of the protective earthing system for the remaining parts should not be interrupted.


12.3.12

N

Exclusion of Switching Devices from the Protective Bonding Circuit – The protective earthing system should not incorporate switching or interruption devices.

EXCEPTION: For technologies requiring isolated potentials (i.e. no ground reference) during operation, ground interrupting devices are acceptable provided the device automatically provides continuity of the protective earthing system when the related components are accessible and that the device is fault tolerant.


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12.3.13

N

Interruption of the Protective Earthing System – Where the continuity of the protective earthing system can be interrupted by means of connectors (e.g., plug and socket connections), and this could result in increased risk of electric shock, the following considerations should be satisfied:

a) The protective earthing system should be interrupted only after the energized conductors have been interrupted, and

b) The continuity of the protective earthing system should be re-established before any energized conductor is reconnected.

a) N Section is not applicable to the M16 and M22 because there is no protective earthing system on the component switches.

b) N Section is not applicable to the M16 and M22 because there is no protective earthing system on the component switches.

12.4 Bonding Terminations to The Protective Earthing System

12.4.1

NThe protective conductors should be bonded to a single designated termination (the protective earthing conductor terminal) that will not be disturbed by any other conductor terminations.


12.4.2

NAll non-conductive coatings, such as paint or enamel, should be removed from contact surfaces where protective conductors terminate.


12.4.3

N

Terminals for bonding conductors to the protective bonding system should be ring terminal with non-captive hardware or flanged fork with captive hardware. Where routine removal is anticipated, flanged fork with captive hardware is preferred. For bonding with protective circuit, it is preferred that a lock or star washer be included.


12.4.4

NTerminal lugs used to make connections to the protective earthing system do not need to be insulated.


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12.5

NCord and plug connected equipment should pass a leakage current test in accordance with the test described in Section 22.


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13. Safety Circuits

13.1

N

General - Transformers or power supplies should be used for supplying safety circuits. Such transformers should have electrical isolation between the primary and the secondary windings. Safety circuits should be designed using non-hazardous voltage and power levels consistent with the correct operation of the control circuit.

NOTE 37: See paragraph 13.3.3 Exception 2 for specific EM0 function exception.

Section is not applicable to the M16 and M22 because there are no safety circuits on the component switches. The safety circuits described here are an end product requirement.

13.2 Start Functions

13.2.1

NStart functions should operate by energizing the relevant circuit.


13.2.2

NPrevention of Unexpected Start-up – The engineering design should prevent unexpected start-up.


13.3 Emergency Off

13.3.1

N

The equipment should have an “emergency off” (EMO) circuit. An EMO actuator (e.g., button), when activated, should place the equipment into a safe shutdown condition, without generating any additional hazard to personnel or the facility.

EXCEPTION 1: Cord- and plug-connected single phase equipment, rated no greater than 240 Volts line-to-line/l50 Volts line-to-earth and no greater than 2.4 kVA, where the hazards are only electrical in nature, do not need to have a separate EM0 circuit if the main disconnecting means is readily accessible to the operator and maintenance personnel. This maindisconnecting means should be red and labeled indicating its On/Off status.

EXCEPTION 2: Assemblies that are not intended to be used as stand-alone equipment, but rather within an overall integrated system, and which receive their power from the end-user system, may not have a separate emergency off circuit. The assembly’s installation manual should provide clear instructions to the equipment installer to connect the assembly to the integrated system’s emergency off circuit.

NOTE 38: It is recommended that the emergency off function not reduce the effectiveness of safety devices or of deviceswith safety-related function (e.g.. magnetic or braking devices) necessary to bring the equipment to a safe shutdowncondition effectively.


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13.3.2

N

EMO Interfaces – External EMO interfaces should be provided where the equipment is likely to be integrated and is likely to have shared hazards with other assemblies in the end user’s facility. If an external EMO interface is provided, the supplier should include instructions for connecting to the interface.


13.3.3

N

EMO Function – Activation of the emergency off circuit should de-energize all hazardous voltage and all power greater than 240 volt-amperes in the equipment beyond the main power enclosure.

EXCEPTION 1: A non-hazardous voltage EM0 circuit (typically 24 Volts) may remain energized.

EXCEPTION 2: Safety related devices (e.g., smoke detectors, gas/water leak detectors, pressure measurement devices, etc.) may remain energized from a non-hazardous power source.

EXCEPTION 3: A computer system or PLC performing data/alarm logging and error recovery functions may remain energized, provided that the breaker and receptacle supplying the power to the computer system are clearly labeled as remaining energized after EMO activation. Hazardous energized parts that remain energized after EMO activation should be insulated or guarded to prevent contact by personnel.

Exception 4: Multiple units mounted separately with no shared hazards and without interconnecting circuits with hazardous voltages, energy levels or other hazardous conditions may have:

separate sources of power and separate supply circuit disconnect means if clearly identified, or

separate EMO circuits, if they are clearly identified.


13.3.4

C

EMO Design – The design of the EMO circuit should include all of the following:

a) The EMO circuit should not include features that are intended to enable it to be defeated or bypassed;

b) The EMO circuit should consist of electromechanical components;

c) Resetting the EMO switch should not re-energize circuits, equipment, or subassemblies that create a hazard to personnel or the facility;

d) The EMO circuit should shut down the equipment by de-energizing rather than energizing control components; and

e) The EMO actuator should be self-latching.

EXCEPTION 1: Solid-state devices and components may be used, provided the system or relevant parts of the system are evaluated and found suitable for use. The components should be evaluated and found suitable considering abnormal conditions such as over voltage, under voltage, power supply interruption, transient over voltage, ramp voltage, electromagnetic susceptibility, electrostatic discharge, thermal cycling, humidity, dust vibration and jarring. The final removal of power should be accomplished by means of electromechanical components.

NOTE 39: For equipment intended for use in locations where fire or explosion hazards may exist, it is recommended that a pneumatic or intrinsically safe EMO circuit be considered.

a) N Section is not applicable to the M16 and M22 because there are no safety circuits on the component switches. The safety circuits described here are an end product requirement.

b) N Section is not applicable to the M16 and M22 because there are no safety circuits on the component switches. The safety circuits described here are an end product requirement.

c) N Section is not applicable to the M16 and M22 because there are no safety circuits on the component switches. The safety circuits described here are an end product requirement.

d) N Section is not applicable to the M16 and M22 because there are no safety circuits on the component switches. The safety circuits described here are an end product requirement.

e) C The M16 and M22 conform to the section because theses components EMO switches are self latching.

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13.3.5

C

EMO Identification – The EMO identification should include the following:

a) The emergency off actuator should be red and mushroom shaped;

b) A yellow background for the EMO should be provided;

c) All Emergency Off actuators should be clearly labeled as “EMO,” “Emergency Off,” or the equivalent, and should be clearly legible from the viewing location. The label may appear on the actuator or on the yellow background; and

d) Emergency Off buttons should be located or guarded to minimize accidental activation.

a) C The M16 and M22 conform to the section because operators of these components EMO switches are red and mushroom shaped.

b) C The M16 and M22 conform to the section because when the surface mount enclosure is used, it has a yellow background. Otherwise, this is an end product requirement,

c) C The M16 and M22 conform to the section because EMO actuators are available with EMO inscribed on them. In the end product a label can be used in the background around the switch labeling the switch in an equivalent manner.

d) C The M16 and M22 conform to the section because guards are available M22-XGPV. Otherwise, this is an end product requirement,

13.3.6

CEMO Location and Size – Emergency Off buttons should be readily accessible from operating and regularly scheduled maintenance locations and appropriately sized to enable activation by the heel of the palm.

The M16 and M22 conform to the section because the actuators are sized to be activated by the palm of the hand. The locations are a requirement of the end product.

13.3.7

NNo operator or regularly scheduled maintenance location should require more than 3 meters (10 feet) travel to the EMO button.

Section is not applicable to the M16 and M22 because the location of the EMO switches is a requirement of the end product.

13.4

NOperating Modes - When a system has more than one operating mode, and operating mode selection can result in a hazardous condition, mode selection should be restricted to trained service or maintenance personnel.

Section is not applicable to the M16 and M22 because this requirement is an end product requirement.

13.5

NSuspension of safeguards should satisfy Section 8.15.


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13.6 Safety Controls

13.6.1

N

Hold-to-run Controls – Hold-to-run controls should only be used if a hazard analysis determines that they are an appropriate and adequate means to mitigate a hazard. When hold-to-run controls are used, they should necessitate continuous actuation of the control devices to achieve operation.


13.6.2

N

Two Handed Controls – When dual series-connected hand controls are used to isolate the operator from hazards, the hand controls and/or control circuit should comply with the following:

a) The hand controls should be momentary contact switches with black or green heads. Each hand control should be protected against unintended operation;

b) Each hand control should be arranged by design, construction, and/or separation so that the use of both hands is needed to start the machine cycle. Preferably, they are mounted at least 610 mm (24 in.) apart at the same height;

c) Two hand controls should be designed so that both hand controls need to be depressed within one second of each other for the machine to cycle and both hand controls need to be held depressed until the hazard no longer exists; and

d) The control system should incorporate an anti-repeat feature that limits the machine to one cycle for each depression of the hand controls. The control system should incorporate an anti-tie-down feature that demands the release of both hand controls between cycles.

a) N Section is not applicable to the M16 and M22 because there are no safety circuits on the component switches. The safety circuits described here are an end product requirement.

b) N Section is not applicable to the M16 and M22 because there are no safety circuits on the component switches. The safety circuits described here are an end product requirement.

c) N Section is not applicable to the M16 and M22 because there are no safety circuits on the component switches. The safety circuits described here are an end product requirement.

d) N Section is not applicable to the M16 and M22 because there are no safety circuits on the component switches. The safety circuits described here are an end product requirement.

13.6.3

NCombined Start und Stop Controls – Controls that alternately initiate and stop motion should only be used when no hazardous condition can arise from their operation.


13.7 Safety Interlock Circuits

13.7.1

N

Protection against Fault Conditions - When a single point failure can result in an unacceptable level of risk, a safety interlocking circuit or other suitable means should be provided to protect against the consequences of that single point failure.


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13.7.2

N

Safety Interlock Function – Safety interlock systems should be designed such that, upon activation of the interlock, the equipment, or relevant parts of the equipment, is automatically brought to a safe condition. Each safety interlock, when activated, should alert the operator immediately.

NOTE 40: Timing is relevant to risk; a safe condition includes bringing the equipment to a safe state before the hazard can be accessed by personnel.

EXCEPTION: If a safety interlock triggers the emergency off (EMO) circuit, or otherwise removes power to the user interface, notification to the operator is not needed.

NOTE 41: An explanation of the cause is preferred upon activation of a safety interlock


13.7.3

N

Safety Interlock Design – Electromechanical devices and components are preferred. Solid-state devices and solid-state components may be used, provided that the safety interlock system, or relevant parts of the system, are evaluated for suitability for use in accordance with the appropriate standards. The evaluation for suitability should take into consideration abnormal conditions such as overvoltage, undervoltage, power supply interruption, transient overvoltage, ramp voltage, electromagnetic susceptibility, electrostatic discharge, thermal cycling, humidity, dust, vibration, jarring, or interfacing to a network.

EXCEPTION: Where the severity of a reasonably foreseeable mishap is deemed to be Minor per SEMI S10, a software-based interlock may be considered suitable.


13.7.3.1

N

FECS may be used in conjunction with electromechanical or solid state devices and components provided the programmable safety control system conforms to an appropriate standard for electronic safety systems. Components of the FECS should be tested and certified according to the requirements of the standard used. Examples of internationally recognized electronic safety systems standards include IEC 61508, ISO 13849-1 (EN 954-1), ANSI/ISA SP84.01, DIN/V/DVE-0801.

NOTE 42: Paragraph 8.4.1 states additional assessment criteria for safety-related components and assemblies.

NOTE 43: A FECS is a sub-system to a (PES) Programmable Electronic System. IEC 61508 is the preferred standard for complex PES.]


13.7.4

NSafety Interlock Override – The safety interlock system should be designed to minimize the need to override safety interlocks during maintenance activities.


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13.7.5

N

When maintenance access to areas protected by safety interlocks is necessary, safety interlocks that can be defeated may be used, provided that they require an intentional operation to bypass. Safety interlocks that safeguard operator tasks should not be able to be defeated without the use of a tool. Upon exiting or completing the maintenance mode, all safety interlocks should be automatically restored.


13.7.6

NIf a safety interlock is defeated, the maintenance manual should identify administrative controls to safeguard personnel or to minimize the hazard.


13.7.7

NThe restoration of a safety interlock should not automatically initiate machine motion or operation where this can give rise to a hazardous condition.


13.7.8

N

Safety Interlock Circuit Connection – To reduce the risk of interlocks not functioning correctly from short circuiting of the device or wiring to ground, switches, contacts, and other safety interlock control devices should not be connected to the earthed side of the circuit.


13.7.9

NShunt Trip Circuits – Shunt trips should not be used as safety interlocks because they are not fail-safe.


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13.8 Multiple Points of Control

13.8.1

N

Where multiple points of control are provided on a system, hardware based device which meets the considerations of paragraph 13.7 should be used to ensure a single point of control when multiple points of control can cause an unacceptable risk.


13.8.2

NThe control point selection hardware-based device should either be lockable or be able to be under the immediate control of the person(s) exposed to the hazard.


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14. Interface Control

14.1

NHand Control Devices - Hand control devices should be located so that their intended use does not cause an unacceptable risk.

Section is not applicable to the M16 and M22 because this requirement is an end product requirement to be evaluated in the end product.

14.1.1

NHand control devices should be designed and mounted to minimize inadvertent operation if an unacceptable risk could result from inadvertent activation.


14.1.2

N

Control devices should withstand the stresses of normal use and foreseeable misuse. Considerations should be given to normal operation as well as fault conditions. Factors such as chemical exposure to insulation, mechanical and thermal stress, radiation, and other environmental factors that may result in unacceptable risks, should be taken into account.


14.2 Push-actuators (buttons)

14.2.1

NColors – The color of the start/on actuator should be white, gray, black, or green. Green is preferred. Red should not be used for the start/on actuator.

Section is not applicable to the M16 and M22 because these devices are not start/on actuators.

14.2.1.1

CThe color red should be used for EMO actuators. A Yellow background for the EMO should be provided. Refer to paragraph 13.3.

The M16 and M22 conform to the section because when these EMO actuators are red in color. The yellow background is applied in the end product.

14.2.1.2

NNon-EMO actuators should be differentiated from the EMO actuator.


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14.2.1.3

N

The colors for stop/off actuator should be red, black, gray or white. A red, non-mushroom shaped actuator is preferred. Green should not be used for the stop/off actuator.

NOTE 43: NFPA 79 prefers that all pushbuttons for STOP or OFF functions be colored red, but will permit black, white, orgray.


14.2.1.4

NContact push-actuators that cause operation while they are actuated and cease the operation when they are released should be colored white, gray, or black. The colors red, yellow, and green should not be used.


14.2.1.5

NReset push-actuators should be colored blue, white, gray, or black. Reset push-actuators should not be colored the same as stop/off actuators.

Section is not applicable to the M16 and M22 because this is end product requirement.

14.2.2

NMarkings – All controls should be marked with their functional identification in accordance with Section 20.3.


14.3 Indicator Lights and Displays

14.3.1

NColors – Indicator light lenses should be color-coded in accordance with Tables A 1-8 to A1-10 in Appendix 1.


14.3.2

NFlashing Lights – Flashing lights should be used when the application requires a compelling safety indication to the operator. Single LED indicators should not be used for this application.


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14.3.3

NIlluminated Push-actuators – Illuminated push-actuators should be color-coded in accordance with Appendix 1 Tables A1-8 to A1-10. The color red for the emergency off actuator should not depend on the illumination.

Section is not applicable to the M16 and M22 because this is end product requirement.

14.4

N

Actuator design and mounting

Actuators used to initiate a function should be designed and mounted to minimize inadvertent activation if an unacceptable risk could result from that inadvertent activation.


14.5

N

Disconnects

All main disconnecting means should meet the considerations of Section 9.3.6. The means of energy isolation for maintenance and servicing should be consistent with procedures described in the manuals.


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15. Electrical Enclosures

15.1 Construction of Electrical Enclosures

15.1.1

NElectrical enclosures should provide protection against contact with hazardous voltages as defined in Section 10 of this guideline.

Section is not applicable to the M16 and M22 because there are no electrical enclosures.

15.1.2

N

Electrical enclosures should prevent the ingress of substances that may cause electrical faults within the electrical enclosure. These substances may be emitted by the equipment under fault conditions or would be expected in the equipment's intended use environment.

NOTE 45: Facilities activation of sprinklers is not intended to be covered under this paragraph.


15.1.3

N

Electrical enclosures should have a complete bottom sufficient to prohibit the emission of molten material or burning insulation under fault conditions.

NOTE 46: Baffling or equivalent construction techniques can be used to satisfy paragraph 15.1.1 through 15.1.3 and still meet the functional needs of adequate ventilation.


15.1.4

N

Electrical enclosures should be of suitable substantial construction to withstand normal intended use and reasonably foreseeable misuse. Enclosure walls and covers should have adequate strength to withstand deflection that reduceselectrical clearances below an acceptable value or prevent contact with energized parts. Enclosures should be evaluated by inspection or testing in accordance with the enclosure test criteria in paragraph 22.14.


15.2

N

Access

All panels providing access to electrical components should be located and mounted to facilitate:

a) Accessibility and maintenance, and

b) Protection against the external influences that may result in safety hazards.

NOTE 47: This section only applies to circuits that handle hazardous voltage or power.

a) N Section is not applicable to the M16 and M22 because there are no electrical enclosures. b) N Section is not applicable to the M16 and M22 because there are no electrical enclosures.

15.3 Location and Mounting

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15.3.1

N

All components within electrical enclosures should be placed and oriented so that they can be identified without moving components or the wiring. Components should not be mounted on panels that are intended to be removed for routine maintenance.

EXCEPTION 1: Moveable panels are acceptable if they are well bonded, secured to the equipment, and the supply wires are routed such that moving the slide panel will not deteriorate their insulation.

EXCEPTION 2: Devices supplied with non-hazardous voltages and power levels may be mounted on normally removable panels.


15.3.2

NComponents should be located to permit inspection for correct operation and routine maintenance without dismantling equipment or parts of the machine.


15.3.3

NWhere a special tool is necessary to remove an electrical component, the tool should be supplied.


15.3.4

NWhere electrical components are connected through plug-in arrangements, their association should be made clear by type (shape), marking, or reference designation, whether singly or in combination.


15.3.5

NPlug-in devices that are handled during normal operation should be provided with non-interchangeable features where the lack of such a feature can result in an unacceptable risk.


15.3.6

NCreepage and clearances should meet the criteria of basic insulation between primary parts and the earthed electrical enclosure for the working voltages involved (See Appendix 1 Tables A1-12 and A1-13).


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15.3.7

N

When components that handle hazardous voltage and hazardous power are mounted on swing panels, the swing panels that have those components mounted on them should swing open adequately to provide access. The wiring that flexes during servicing should be provided with additional mechanical protection at all points where it is flexed.

EXCEPTION: Wiring that passes the flexing test described in paragraph 22.16 does not need to have additional mechanical protection.


15.4

N

Component Identification

Components should be labeled on the surface of the panel where the component is mounted so the component may beidentified from the documentation as discussed in Section 21.

EXCEPTION: Engineering documentation that provides a layout of the electrical enclosure with component identification may serve this function.


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16. Conductors and Cables

16.1

N

General - Conductors and cables should be rated for the voltage and load current at which they are used. Properovercurrent protection in accordance with Section 10 and section 11 should be provided. Conductor insulation or covering should also be rated to withstand any external influences that they may be subjected to under normal operating conditions, as well as under single fault conditions (e.g., the presence of water, corrosive substances, mechanical stress, and thermal stress).

Section is not applicable to the M16 and M22 because these are components switches. The conductor and cable requirements are an end product requirement.

16.2

N

Conductor Construction - Wire conductors should be constructed of copper. Conductors should be constructed of materials compatible with the materials and ratings of the devices they will be connected to and the environment in which they will be used.

NOTE 48: Most of the components used in the semiconductor industry are not compatible with aluminum wiring.


16.2.1

N

Conductor Ampacity – Conductors should meet one of the following considerations:

a) Be certified by an accredited testing laboratory to be used in a manner other than that described in Tables A1-1 through A1-6 in Appendix 1 and used in accordance with their certification; or

b) Be sized in accordance with Tables A1-1 through A1-6 in Appendix 1.

EXCEPTION: Conductors that have been demonstrated to be adequate for their application by testing in accordance with IEC 61010.

a) N Section is not applicable to the M16 and M22 because these are components switches. The conductor and cable requirements are an end product requirement.

b) N Section is not applicable to the M16 and M22 because these are components switches. The conductor and cable requirements are an end product requirement.

16.2.2

N

Printed Circuit Boards – Printed wire assemblies of flame-retardant material should be allowed in place of conductor assemblies provided that they are within electrical enclosures and are mounted in such a way as to minimize flexing or stress. All printed circuit boards should have a flammability rating of V-l or better (See IEC 60707 or UL 94); or a rating of FR-4 or FR-5 (ANSI/IPC 2221).


16.2.3

NBus Bars – Non-insulated bus bars should be sized according to Appendix 1, Table A 1-7.


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16.2.4

N

Insulation – The insulation on each conductor should be rated to take into account:

a) The electrical, thermal and mechanical strength for the maximum voltages and currents that can be applied to the conductor,

b) The worst environment (e.g., temperature, pressure, humidity, vibration and pollution) where the conductor may be routed, and

c) Resistance to flame spread



C) N Section is not applicable to the M16 and M22 because these are components switches. The conductor and cable requirements are an end product requirement.

16.2.5

NNatural rubber and materials containing asbestos should not be used as insulation.


16.2.6

N

Hazards Associated with Insulation – Where the insulation of conductors and cables can constitute hazards due to the propagation of fire or the emission of toxic or corrosive fumes under single fault conditions, additional protections should be provided or alternative conductor or cable assemblies should be considered.


16.2.7

N

Dielectric Strength of Wire arid Cable Insulation – A test mark from an accredited testing laboratory on the wire or cable may be used to demonstrate suitability of the wire when it is used in accordance with its voltage rating. An alternate means of compliance can be obtained by the test described below. Cables and wires operating at a nominal voltage of higher than 50 V AC or 120 V DC should withstand a dielectric test voltage of 1000 V plus two times their working rated voltage or 2000 V AC for 5 minutes, whichever is higher. This test for dielectric breakdown should be applied between the wire or cable conductor and foil wrapped around the conductor insulation.


16.2.8

N

Insulation Strength – The mechanical strength and thickness of the insulation should be such that the insulation cannot be damaged in normal operation or as a result of reasonably foreseeable abuse, so as to fail to provide adequate protection.


16.3 Flexible Cables

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16.3.1

N

Flexible cords, cables and power cord sets are permitted inside electrical enclosures for internal wiring:

a) When equipped with an attachment plug and powered from a receptacle outlet inside the electrical enclosure to connect one or more assemblies to primary power inside the enclosure; and

b) When the insulation on the individual conductors of the flexible cord or cable are suitable for the application without consideration of the outer jacket insulation; and

c) When the AC flexible cord, AC power cord set, AC receptacles, and AC appliance coupler are all used in accordance with their ratings.

NOTE 49: Power cord sets arc preferred over non-detachable cords to facilitate replacement of assemblies without modifying or removing the flexible cord.



C) N Section is not applicable to the M16 and M22 because these are components switches. The conductor and cable requirements are an end product requirement.

16.3.2

N

Exposed flexible cords and cables installed along the structure of the equipment or system or in the chassis of the machinery is allowable when they are not subject to physical damage from normal operations. Exposed cables should be installed to closely follow the surface and structural members of the machinery.


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17. Wiring Practices

17.1 Connections and Routing

17.1.1

N

All connections should be secured against accidental loosening. Terminals should be sized appropriately for the conductors that are being terminated. The connection of two or more conductors to one terminal is allowable only where the terminal is designed and identified for that purpose. All soldered connections should be mechanically secured before soldering. Terminals on terminal blocks should be clearly identified to correspond with markings on the diagrams, or terminal identification should be provided in system manuals or another equivalent means of identification should be provided.

Section is not applicable to the M16 and M22 because these are components switches. The wiring practices are an end product requirement.

17.1.2

NThe installation of flexible conduits and cables should be such that liquids drain away from the fittings.


17.1.3

NTerminal blocks should be mounted and wired so that the internal and external wiring does not cross over the terminals.


17.1.4

NConductors and cables should be connected from terminal to terminal without splices.


17.1.5

N

Where circuits operate at different voltages, the conductors of each voltage level should be separated by suitable barriers, or routed separately and secured, or all conductors grouped or bundled together should be insulated for the highest voltage present in the group or bundle.


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17.1.6

NConductors smaller than 1/0 AWG [53 mm2] should not be connected in parallel to the same terminations to attain the necessary ampacity.


17.1.7

N

Conductors should not be exposed to temperatures greater than their temperature rating. If the wire termination has a lower temperature rating than the conductor, the lower temperature rating should be used to evaluate the suitability of the conductor.


17.2

N

Terminal Lugs

It is preferred that terminal lugs be used according to the following:

a) Ring (or ring-tongue) – Preferred for terminations not routinely disconnected for access and service.

b) Flat forked (or flat spade) – Not preferred for terminating hazardous potentials or hazardous energy levels and not suitable for bonding or earthing (grounding).

c) Flanged fork (or flanged spade) – Preferred for terminations that are routinely disconnected for access and service.

d) Male/Female Disconnect (or Tab) – Preferred only for termination to fixed male tabs on components or panels that are rarely disconnected.

e) Blade Terminal, Pin Terminal or Ferrule – Preferred only for components not compatible with ring lugs that are rarely disconnected. Preferred over stranded wire with no terminal.

NOTE 50: The preferences expressed in this Section do not supersede criteria stated elsewhere in the document.

a) N Section is not applicable to the M16 and M22 because these are components switches. The wiring practices are an end product requirement.

b) N Section is not applicable to the M16 and M22 because these are components switches. The wiring practices are an end product requirement.

c) N Section is not applicable to the M16 and M22 because these are components switches. The wiring practices are an end product requirement.

d) N Section is not applicable to the M16 and M22 because these are components switches. The wiring practices are an end product requirement.

e) N Section is not applicable to the M16 and M22 because these are components switches. The wiring practices are an end product requirement.

17.3

N

Attachment Plugs, Cord Connectors, and Receptacles

If an unacceptable risk can result from misconnection, then receptacles and cord connectors should not accept an attachment plug with a different voltage or current rating.


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17.3.1

NOnly female cord connectors should be used to supply power.


17.3.2

NReceptacles should be rated for at least 125 % of the maximum rated design load (current) intended for the circuit.


17.3.3

NEach receptacle should be individually bonded to the protective earthing system.


17.3.4

NSeries connection of the protective conductor from receptacle to receptacle should not be used.


17.3.5

N

Convenience receptacles accessible from the exterior of the equipment should be protected by a ground-fault circuit-interrupter (GFCI).

NOTE 51: A receptacle that is used to supply power to a subsystem is not a convenience receptacle.


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17.4

N

Multi-Outlet Assemblies

Only multi-outlet assemblies certified by an accredited safety testing laboratory should be used. These assemblies should be used in accordance with the manufacturer’s specifications and accredited laboratory’s conditions of the certification.

EXCEPTION: Multi-outlet assemblies that satisfy all the following criteria may be used:

a) Receptacles are certified by an accredited safety testing laboratory and used in accordance with the manufacturer’s specifications and conditions of the certification.

b) Enclosure passes the tests in section 22.14

c) Enclosure is constructed of metal or a polymeric material with a minimum flammability rating of V-1 (see IEC 60707 or UL 94), FM 4910 or UL 2360 Class 1.

d) Conductive multi-outlet assembly enclosures are connected to the protective earthing system.

e) Each receptacle has a contact connected to the protective earthing system.






17.5 Identification of Conductors

17.5.1

NEach conductor should be identified by a number, letter, color, a combination of the above or other scheme consistent with the product documentation.


17.5.2

NWhere color is used for the sole means of identification, it is acceptable to apply appropriate colored tape or sleeve at the conductor ends. The tape or sleeve should be wrapped around, or otherwise reliably secured to, the conductor.


17.5.3

N

Identification of the Protective Conductor – Electrical wiring for protective conductors should be labeled for easy identification at both ends of the wire. The protective conductor should be readily distinguishable by shape, location, marking, or color.


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17.5.3.1

N

When color alone is used to identify the protective conductor, the bicolor combination green and yellow should be used throughout the length of the conductor. The bicolor combination green and yellow should be such that on any 15 mm length, one of the colors covers at least 30 % and not more than 70 % of the surface of the conductor with the other color covering the remainder of the surface.

EXCEPTION: Solid green can be used to identify protective conductors if the documentation describes this means of identifying protective earth.


17.5.3.2

NGreen and yellow or green alone should not be used to identify any other conductor.


17.5.4

N

Identification of the Earthed (Neutral) Conductor – Where color alone is used to identify the earthed (neutral) conductor, white or gray should be used.

EXCEPTION: Light blue will be acceptable if the earthed (neutral) conductor is identified by an additional means.

NOTE 52: Light blue may not be accepted in some jurisdictions.


17.5.4.1

NWhite, gray, and light blue should not be used to identify any other conductors.


17.5.5

NIdentification of Other Conductors – Where color alone is used to identify other conductors, black should be used for all unearthed AC and DC power circuits.


17.6 Wiring Inside Electrical Enclosures

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17.6.1

NWiring that carries hazardous voltage located inside enclosures should be securely routed to avoid mechanical abuse during maintenance or troubleshooting.


17.6.2

NWiring should be protected from contact with liquids that may be present under reasonably foreseeable single fault conditions, unless the wiring is suitably rated for a wet environment.


17.6.3

NWires should be routed away from sharp edges or surfaces that may degrade their insulation.


17.6.4

NWire guides may be used for wire routing. However, these guides should be constructed so as not to adversely affect the insulation of the wires they secure.


17.7 Wiring Outside Electrical Enclosures

17.7.1

N

Conductors external to the electrical enclosure(s) should be enclosed in suitable ducts, raceways, or run in suitable multi-conductor cable. Fittings used with ducts, raceways, or multi-conductor cable should be suitable for the anticipated physical environment. Cables should not be subjected to physical stress (e.g. pinching, crushing, foot traffic, or abrasion).


17.7.2

N

Flexible conduit or flexible multi-conductor cable should be used where it is necessary to employ flexible connections to pendant push-actuator stations. The weight of the pendant stations should be supported by means other than the flexible conduit or the flexible multi-conductor cable, except where the conduit or cable is specifically designed for that purpose.


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17.7.3

N

Cables that exit an electrical enclosure should be provided with adequate strain relief to ensure a mechanical pull cannot dislodge the cable's termination points. Compliance is verified by conducting a strain relief test in accordance with Section 22.7 Strain Relief Test.


17.7.4

N

Flexible cables installed in or on machines should be protected to avoid insulation breakdown due to normal operating conditions, single fault conditions, or foreseeable misuse. Some of the factors that should be considered are:

a) Moving machine parts,

b) Brackets or cable guides on the machine,

c) Abrasion,

d) Exposure to liquids and gas,

e) Exposure to radiation, and

f) Temperature deviations.

NOTE 53: Natural rubber can be degraded by chemicals normally present in semiconductor fabrication facilities.






f) N Section is not applicable to the M16 and M22 because these are components switches. The wiring practices are an end product requirement.

17.7.5

N

Where cables are subject to movement or are routed close to moving parts, precautions should be taken to maintain a space of at least 25 mm (1 inch) between the moving parts and the cables. Where that distance is not practicable, fixed barriers should be provided between the cables and the moving parts.


17.7.6

N

Where flexible conduit is adjacent to moving parts, the construction and supporting means should satisfy the following:

a) It should prevent damage to the flexible conduit under normal operating conditions.

b) It should prevent damage to the insulation on the wire inside the conduit under single fault conditions.



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17.7.7

NPlug/Receptacle Combinations – Where equipment is portable, connections to it should be made through a polarized plug/receptacle combination.


17.7.8

N

Field wiring terminals connected at the time of installation should meet the wire bending space criteria in Appendix 1, Tables A1-1 through A1-5.



17.7.9 Ducts and Connection Boxes

17.7.9.1

NGeneral – Cables used in ducts should be suitably rated.


17.7.9.2

N

Fill of Ducts and Raceways – The total cross sectional area of conductors permitted in raceways and ducts should not exceed 50 % of the interior cross sectional area of the raceway or duct.

NOTE 54: All other limiting factors for wires and cables should be taken into account. For example, temperature limitations may reduce the number of allowable conductors.


17.7.9.3

NConduit and Fittings – Non-flexible and flexible conduit and fittings should be suitable for the anticipated conditions of use. Conduits should be securely held in place and supported at each end.


17.7.9.4

NFittings should be compatible with the conduit and appropriate for the application.


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17.7.9.5

NFittings should be secured by a means that requires a tool to remove.


17.7.9.6

NConduit bends should be made in such a manner that the conduit should not be damaged and the internal diameter of the conduit should not be effectively reduced.


17.7.9.7

NConnection Boxes – Connection boxes should provide protection against the intrusion of substances that may damage insulation or may cause ground-faults.


17.7.9.8

NThe size of the connection box should be sufficient to allow dissipation of heat generated during normal operation.


17.8

N

Subsystem Interconnection

Conductors that are connected between subsystems at the time of installation should have wire bending space inaccordance with Section 9.3.4 and phase identification in accordance with Section 9.1.6.3.



17.9

N

Conductors

Conductors should be designed so that their current carrying capacity is not impaired by mechanical, chemical, or any other influences.


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18. Electric Motors 186 Watts (1/4 Horsepower) and Larger

18.1Informative

General

The considerations provided in this section apply to electric motors and their electrical enclosures. This includes the considerations for overcurrent protection. This section applies to AC and DC motors, 600 V or less, 186 Watts (1/4 HP) and larger.

18.1.1

NRemotely installed (e.g., in a chase or sub-floor) motors should have a means of disconnecting all unearthed conductors within sight of and not more than 3 meters (10 feet) travel distance of the motor.

Section is not applicable to the M16 and M22 because there are no motors.

18.1.2

N

Motors should be protected from ingress of liquids that may lead to increased risk of electric shock or fire. The motor terminations to supply conductors should be in the motor housing or a separate enclosure provided for this purpose.

NOTE 55: Assessment of risk generally involves consideration of single-fault tolerance (see Sections 7.4 and

10.1).

Section is not applicable to the M16 and M22 because there are no motors

18.1.3

N

The motor should be marked with the manufacturer’s name and part number. The motor should be marked with directional arrows, if lack of this information could result in a safety concern.

NOTE 56: Phase identification is one method of identifying correct connection for motor direction.


18.1.4

N

Motors should be marked with their voltage, current and frequency rating.

EXCEPTION: This information can be provided in support documentation if it can be traced to the manufacturer's name and part number on the motor.


18.1.5

NUnder-voltage protection should be provided for all motors that could initiate hazardous equipment motion when power is returned after an under-voltage condition.


18.2 Motor Mounting and Compartments

SEMI® S22-0706

Evaluation Report

Eaton Corporation




18.2.1

NEach motor and its associated couplings, belts and pulleys, or chains, should be so mounted that they are adequately guarded and may be serviced without putting personnel at risk of injury.


18.2.2

NConstruction should ensure proper cooling and that any rise in temperature remains within the limits of the motors' insulation class.


18.2.3

NApplicable points on the motor should be accessible for lubrication, maintenance, and replacement.


18.2.4

NSufficient air circulation to maintain temperature within the motor rating should be provided.


18.3

NMechanical Brakes - Where the operation of a mechanical brake increases the potential for entrapment or other hazards, a method of brake release should be provided.


18.4 Protection of Motors

18.4.1

N

Overcurrent protection should be provided for motors. This protection should be sufficient to protect against overcurrent conditions due to faults in the insulation, locked rotor, or overload conditions. The overcurrent protection should open all unearthed conductors.


SEMI® S22-0706

Evaluation Report

Eaton Corporation




18.4.2

N

Where an overcurrent protection device may permit motor starting and still provide overload protection it may be used for both purposes. However, a single device may not be suitable for both overcurrent and overload. In such cases two separate devices should be used; one suitable device for short circuit and ground-fault protection and the other for overload protection.


18.4.3

N

Overload protection should be in the form of one of the following:

a) Overload relay,

b) Thermal protection internal or external to the motor, or

c) Impedance protection.

a) N Section is not applicable to the M16 and M22 because there are no motorsb) N Section is not applicable to the M16 and M22 because there are no motorsc) N Section is not applicable to the M16 and M22 because there are no motors

18.4.4

N

The incoming circuit or feeder to power conversion equipment, included as part of an adjustable speed drive system, should be based on the rated input to the power conversion equipment. Unless the power conversion equipment is certified by an accredited testing laboratory to indicate that overload protection is included and suitable for the motor, additional overload protection should be provided.


18.4.5

NOver-speed protection should be provided in cases where over-speed may cause a hazardous condition.


SEMI® S22-0706

Evaluation Report

Eaton Corporation




19. Accessories and Lighting

19.1 Attachment Plugs and Receptacles

19.1.1

N

One conductor of all equipment lighting and maintenance lighting circuits should be bonded to the equipment protective earthing system in accordance with paragraph 19.1.2 or paragraph 19.1.3. See paragraph 17.6.3 for conductor identification.

Section is not applicable to the M16 and M22 because there are no accessories or lighting.

19.1.2

NWhere the lighting circuit is supplied by a separate transformer, the earthing should occur at the transformer.


19.1.3

NWhen the protective conductor is connected to a screw-shell lamp holder, it should be connected to the screw shell.


19.1.4

NThe conductors connected to stationary lights used as an integral part of the equipment should be suitable for their application.


19.1.5

N

Equipment work lights should not contain switches or receptacles such that exposure to liquids or other substances may increase the risk of electric shock or fire.

NOTE 57: Switches or receptacles should be located where liquids or other substances will not increase the risk of electric shock.


19.2 Attachment Plugs and Receptacles

19.2.1

NAttachment plugs and receptacles should be rated and labeled for the applied voltage and current.


SEMI® S22-0706

Evaluation Report

Eaton Corporation




19.2.2

NWhere used in circuits of 300 Volts or more, attachment plugs and receptacles should be rated for the application (load break or no-load break), and constructed to contain any are generated when a connection is made or broken.


19.2.3

NAttachment plugs and receptacles should be designed or installed to prevent the ingress of substances that may increase the risk of electric shock or fire.


19.2.4

N

Receptacles internal to the electrical enclosure should be permitted only for maintenance equipment or AC power distribution within the enclosure to assemblies designed and approved for cord-and-plug connection. See Section 17.3 for more details regarding receptacles.


SEMI® S22-0706

Evaluation Report

Eaton Corporation




20. Markings

20.1 General

Hazard alert signs, nameplates, markings, and identification plates should have sufficient durability to withstand the anticipated physical environment where the equipment will be installed.

20.2

N

Hazard Alert Signs

Enclosures should be labeled to inform the end user of the hazards that they enclose. These labels should comply with SEMI S1.

EXCEPTION: This labeling is not necessary where the enclosures are interlocked with non-defeatable interlocks to disconnect the hazards in question.

Section is not applicable to the M16 and M22 because no hazard alert signs are necessary on these component switches.

20.3

N

Functional Identification

Control devices, visual indicators, and displays should be clearly and durably marked with their functions either on, oradjacent to, the items. Refer to paragraph 14.2.2, Markings.

Section is not applicable to the M16 and M22 because these requirements are for the end product. These components switches are not required to have such markings.

SEMI® S22-0706

Evaluation Report

Eaton Corporation




20.4

C

Equipment Nameplate

A permanent nameplate should be attached to the main electrical enclosure or equipment where it is plainly visible after installation. This nameplate should include the following information:

a) The manufacturer’s name and address,

b) The equipment name, model, and serial number,

c) Supply voltage,

d) Number of phases,

e) Number of wires,

f) Frequency,

g) Full-load current,

h) Ampere rating of the largest motor or load,

i) Short-circuit rating of the equipment or its industrial control panel,

j) Ampere rating of the overcurrent protective device where furnished as part of the equipment, and

k) The electrical diagram number(s) or the number of the index to the electrical diagram (bill of material).

a) C The M16 and M22 conform to the section because the name plate label or the packaging has the manufacturer’s information.

b) C The M16 and M22 conform to the section because the name plate label or the packaging has the model number. The component switches do not have serial numbers.

c) C The M16 and M22 conform to the section because the electrical components have the maximum rated voltage marked on the units.

d) N Section is not applicable to the M16 and M22 because these are components switches and the phase marking are not relevant.

e) N Section is not applicable to the M16 and M22 because the connections are described in the tech sheets.

f) N Section is not applicable to the M16 and M22 because the components switches are not frequency dependent.

g) C The M16 and M22 conform to the section because the maximum current is marking on the electrical components.

h) N Section is not applicable to the M16 and M22 because there are no motors.i) N Section is not applicable to the M16 and M22 because there are no industrial control panels.j) N Section is not applicable to the M16 and M22 because there are no overcurrent protective

devices.k) N Section is not applicable to the M16 and M22 because there are no electrical diagrams for these

component switches,

20.5

N

Multiple supplies

Where more than one incoming supply circuit is to be provided, the nameplate should state the above information for each supply circuit.

EXCEPTION: Where the only load is a single motor or motor controller, the motor nameplate is permitted to serve as the electrical equipment nameplate when it is plainly visible.

Section is not applicable to the M16 and M22 because there are no multiple supplies.

SEMI® S22-0706

Evaluation Report

Eaton Corporation




20.6

C

Full Load Current

The full-load current shown on the nameplate should not be less than the full-load currents for all motors and other equipment that may be in operation at the same time under normal conditions of use. Where unusual loads or duty cycles require oversized conductors, the necessary capacity should be included in the full-load current specified on thenameplate.

The M16 and M22 conform to the section because the maximum current is marked on the electrical components.

20.7

N

Overcurrent Marking

Where overcurrent protection is provided in accordance with paragraph 9.1.5, the equipment should be marked “overcurrent protection provided at machine supply terminals.” A separate nameplate may be used for this purpose.

Section is not applicable to the M16 and M22 because overcurrent protection is not provided.

20.8

N

Reference Designations

All enclosures, assemblies, control devices, and components should be plainly identified with the same reference designation as shown in the technical documentation or identified through equivalent means.

Section is not applicable to the M16 and M22 because there are no circuit diagrams.

SEMI® S22-0706

Evaluation Report

Eaton Corporation




21. Technical Documentation

21.1

C

Installation Diagram - The installation instructions should give all the information necessary for complete installation and safe start up of the system. This should include:

a) A comprehensive description of the equipment, installation and mounting, and the connection to the electrical supply or supplies, and

b) An explanation of the equipment’s installation instructions including facilities supply conductors.

c) The short circuit current rating of the equipment or its industrial control panel, for each supply circuit from the facility to the equipment.

a) C The M16 and M22 conform to the section because the technical sheet shipped with the switches has sufficient description.

b) C The M16 and M22 conform to the section because the technical sheet shipped with the switches is sufficient for installation instructions.

c) N Section is not applicable to the M16 and M22 because these components switches have no facility connections.

21.2

N

Block (system) Diagrams and Functional Diagrams - When it is necessary to facilitate the understanding of the principles of operation, a block (system) diagram should be provided. A block (system) diagram symbolically represents the electrical equipment together with its functional interrelationships without necessarily showing all of the interconnections.

Section is not applicable to the M16 and M22 because diagrams are not necessary for these components switches.

21.3

N

Circuit Diagrams - Circuit diagrams or schematics for power distribution, EMO and interlock circuits should be provided, Where a block (system) diagram does not sufficiently detail the elements of the electrical equipment for safe installation and servicing, circuit schematics should be furnished.

Section is not applicable to the M16 and M22 because circuit diagrams are not necessary for these components switches.

21.4

N

Operating Instructions - The end user documentation should include operating instructions detailing proper procedures for operation of the equipment. Particular attention should be given to the safety measures provided and to the improper methods of operation that are anticipated.

Section is not applicable to the M16 and M22 because operating instructions are not necessary for these components switches.

SEMI® S22-0706

Evaluation Report

Eaton Corporation




21.5

N

Maintenance Instructions - The technical documentation should contain maintenance instructions detailing procedures for servicing and maintaining the equipment. Attention should be given to how these procedures may be performed safely. A preventative maintenance schedule should be provided with the equipment.

Section is not applicable to the M16 and M22 because no maintenance is to be performed on these components switches.

21.6

N

Functional Description of Interlocks - A functional description of interlocks should be provided which provides sufficient detail to explain their operation.

Section is not applicable to the M16 and M22 because there are no interlocks.

21.7

NMethod for Identifying Replacement Parts - A method of identifying parts that are anticipated to be replaced by the user should be included in the instructions provided with the equipment.

Section is not applicable to the M16 and M22 because there are no parts that are anticipated to be replaced.

21.8

CTranslations - Where required by law, the information should be provided in the primary language of the location in which the equipment is to be used. However, the language in which the information was created should be identified.

The M16 and M22 conform to the intent of the section because if necessary, the technical sheet will be translated.

21.9

N

Applicable to All Documentation - The document reference designation system should be in accordance with IEC 61346-1; or a reference key should be provided.

NOTE 58: Additional criteria pertaining to installation, operation, and maintenance instructions are provided in SEMI S2 and SEMI S13.

Section is not applicable to the M16 and M22 because there are no circuit diagrams.

SEMI® S22-0706

Evaluation Report

Eaton Corporation




22. Testing

22.1

CGeneral - The tests outlined in this document are to be performed by trained and qualified personnel who have knowledge of the techniques and the test apparatuses described herein.

The M16 and M22 conform to the section because it has been subjected to the testing by suitably qualified personnel.

22.1.1

CAll test equipment should be calibrated and traceable to a calibration standards organization (e.g., National Institute of Standards and Technology (NIST) in the United States or the National Metrology Institute in Japan).

The M16 and M22 conform to the section because all test equipment used for the tests is calibrated and fully traceable.

22.1.2

CThe calibration interval for test equipment should be appropriate to the test equipment; usually this should not exceed one year.

The M16 and M22 conform to the section because the calibration interval for all equipment used for the tests to the equipment is appropriate to the test equipment and no more than one year.

22.1.3

N

Except where noted otherwise, the equipment should be tested under the least favorable conditions within the manufacturer's operating specifications. These conditions include:

a) Supply potential,

b) Supply frequency,

c) Position of movable parts,

d) Operating mode (e.g., full temperature conditions, motors in operation), and

e) Adjustment of thermostats, regulating devices, or similar controls in operator-accessible areas.

NOTE 59: Least favorable conditions are those conditions in the manufacturer's operating specifications under which the equipment is least likely to pass the test.

a) N Section is not applicable to the M16 and M22 because these components switches consume no electrical power but only switch the power on or off.

b) N Section is not applicable to the M16 and M22 because these components switches consume no electrical power but only switch the power on or off.

c) N Section is not applicable to the M16 and M22 because there are no movable parts that would affect the evaluation.

d) N Section is not applicable to the M16 and M22 because there are no special operating modes. e) N Section is not applicable to The M16 and M22 because there are no such devices.

22.1.4Informative

To determine the least favorable supply potential for a test, consider:

a) Multiple-nominal rated potentials (e.g., 120/240 V), and

b) Extremes of nominal rated potential rages (e.g., 208-240 V).

NOTE 60: Consideration of the tolerance on a nominal rated potential (e.g., 120 ±5 %) is not necessary.

NOTE 61: Some standards (e.g., IEC 61010-1 and IEC 60950) may specify 90 % and 110 % of any rated supply voltage.

SEMI® S22-0706

Evaluation Report

Eaton Corporation




22.1.5Informative

To determine the least favorable supply frequency for a test, consider the nominal frequencies as specified (e.g., 50Hz, 60Hz, or 50/60Hz).

NOTE 61: Consideration of the tolerance on a nominal rated potential (e.g., 50 ±0.5Hz) is usually not necessary.

22.1.6Informative

As an alternative to carrying out the tests on the complete system, tests may be conducted on circuits, components and sub-assemblies independent of the equipment, provided that results of the tests would be representative of those performed as part of the assembled equipment.

EXCEPTION: The leakage current and earthing (grounding) continuity tests identified in Sections 22.2 and 22.3 should be completed only on fully assembled equipment.

22.2 to22.16

Tests

See attached SEMI S22 test data forms for requirements of each test and results for the equipment evaluated.

22.17

C

Reporting Test Results

Include the following information on the test data form:

a) Name, model and serial number of the equipment

b) Date of test(s)

c) Name(s)/signature(s) of tester(s)

d) Complete test methods and conditions

e) Complete test results

Complete test equipment information and actual operating mode that was used for the test should be clearly documented. Where components are tested separately or only parts of the overall system are operational, this should be documented as a condition for the test results reported. This information may be on the test data form(s) or incorporated in the test report.

a) C The M16 and M22 conform to the section because the name and model is on the forms. The component switches are not serialized.

b) C The M16 and M22 conform to the section because the test dates are on the forms. c) N The M16 and M22 conform to the section because the name and signature of the tester is on the

forms.d) C The M16 and M22 conform to the section because the complete test methods and conditions are

on the forms.e) N The M16 and M22 conform to the section because the test results are on the form.

End of Evaluation Report

SEMI® S22-0709 Electrical Test Data Forms

31070191.002 Attachment 1

Page 1 of 26

Tested by: Charles D. Goertz Date of test: February 24, 2010 Company name: Eaton Corporation

Equipment model no.: M16 and M22 Series

Equipment serial no.: Switches are not serialized

Form REV0 August 2006 (RG)

Summary of the verification tests and their applicability to the equipment The tests set out in this document are those of Section 22 of the SEMI® S22 Guideline and have been applied to the subject equipment as part of the SEMI® S2 evaluation. The following abbreviations are used in the table below (under ‘Result’) and throughout the Test Data Forms. Rationale for tests which do not apply to the equipment is provided under ‘Comments’. C = Conforms or Meets the Intent N = Not Applicable X = Does Not Conform nor Meet the Intent I = Information Needed Section Test Result Comments

22.2 Leakage Current Test for Cord-and-Plug Equipment N Component switch, not pluggable

22.3 Earthing Continuity and Continuity of the Protective Bonding Circuit Test N No grounding

22.4 Starting Current Test N No connection to AC mains

22.5 Input Test N No connection to AC mains

22.6 Dielectric Test C Test data filed

22.7 Strain Relief Test N No power cords

22.8 Transformer Output Short Circuit Test N No transformers

22.9 Power Supply Output Short Circuit Test N No power supplies

22.10 Safety Circuit Function Test N No safety circuits

22.11 Safety Circuit Disconnection Test N No safety circuits

22.12 Capacitor Stored Energy Discharge Test N No capacitors

22.13 Temperature Test N Temperature test to be run in end product

22.14 Strength of Electrical Enclosures Test C Test data filed

22.15 Finger Probe Test N No openings

22.16 Wire Flexing Test N No Flexing wires

SEMI® S2 §27.3 Sound Pressure Level Survey N No sound produced

SEMI® S2 §24 Ionizing Radiation Survey N No ionizing radiation

SEMI® S2 §25

Non-ionizing Radiation Survey N No non-ionizing radiation



Page 2 of 26


Equipment model no.: M16 and M22 Series


Form REV0 August 2006 (RG)

Product or equipment and its sections subjected to the tests

Equipment Under Test (EUT)

EUT Equipment / sub-system name or type designation Comments

1 M22-K01 2 M22-K01D 3 M22-K01-B25 4 M22-1Y1-PG 5 M22-K10 6 M22-KC01 7 M22-CK01 8 M22-Ck01D 9 M22-CK11 10 M22-K01SMC10 11 M22-KC01SMC10 12 M22-K02SMC10 13 M22-KC02SMC10 14 M16-E01 15 M16-E10

Remarks The above models in the M16 and M22 series are the only units that have applicable test requirements per SEMI S-22. Except for the M22-1Y1-PG, the above models in the above have electrical contacts. These models were subjected to the dielectric strength test. Since these models are approved by a Nationally Recognized Testing Laboratory, all other testing was waived. The M22-1Y1-PG is the only model that would have an enclosure. It was subjected to the testing of 22.14, Strength of Electrical Enclosures Test. All models passed the appropriate testing.



Page 3 of 26


Equipment model no.: M16 and M22 series


Signature: _____________________________ Form REV0 August 2006 (RG)

22.2 Leakage Current Test for Cord-and-Plug Equipment

Test applicability and intent The test

Test equipment A 1 500 ohm resistor shunted by a 0.15µF capacitor (impedance network) and true RMS voltmeter with an accuracy of 1.0%. The impedance network may be a separate assembly or incorporated within the leakage current measuring equipment [e.g. leakage current meter].

Test method For equipment connected to the facility branch circuit with a cord-and-plug (plug/socket combination), ensure that the equipment is isolated [from ground/earth] (e.g., by placing the equipment on a wooden or other non-conductive surface). Connect the equipment to its rated source of supply and with the protective earthing [equipment grounding] conductor disconnected, operate it at the least favorable conditions specified by the manufacturer. Connect the impedance network [or measuring instrument] between each accessible metal part and the protective earthing conductor. In determining the accessibility of energized, remove all doors, panels etc. that are to be removed by the operator during normal operation. Using a RMS voltmeter, measure the voltage drop across the impedance network and calculate the leakage current using the formula: I leakage = Voltage measured

1 500 ohms

Acceptance criteria The maximum calculated [measured] leakage current does not exceed 3.5 mA.

Column explanatory keys for Table 1, Test locations and results 1 = Accessible conductive part monitored 2 = Measured voltage across the impedance network OR leakage current read directly from leakage measuring equipment 3 = Leakage current as calculated from measured voltage across the impedance network

Table 1 – Test locations and results Measured values2

EUT Test No. Test location1 Voltage

(V) Read directly

(mA)

Calculated value3

(mA) Result

1 1 N 1 2 N 3 3 N 3 4 N

Remarks The M16 and M22 are component switches and are not cord connected.

Test and measurement equipment used Type of equipment Manufacturer Model number Serial number Validity

N N N N N



Page 4 of 26





22.3 Earthing Continuity and Continuity of the Protective Bonding Circuit Test

Test applicability and intent The test is carried out on equipment that employs protective grounding (earthing), i.e. Class 1 or Grounded equipment. EXCEPTION: The grounding continuity test need not be made where accessible metal surfaces are not likely to become energized in a single fault condition.

Test equipment Low range ohmmeter with a range to measure 0.1 ohm with an accuracy of 1%.

Test method Disconnect the equipment from the supply. Measure the resistance between the protective earth/grounding terminal and each accessible metal part on the equipment using the low-range ohmmeter. Note: other requirements (e.g., IEC 60204-1, IEC 61010-1) may require the test to be made at a higher current in the form of a ‘bonding test’ using the current injection method (typically 10A or 25A with measurement of voltage drop across the circuit). The result table below incorporates a column for test current.

Acceptance criteria The resistance between the protective earth/grounding conductor terminal and each accessible part of the equipment shall not exceed 0.1 ohm.

Column explanatory keys for Table 1, Test locations and results 1 = Protective bonding circuit part or accessible conductive part 2 = Current injected (if applied) 3 = Voltage drop and calculated impedance (injected current method) or indicated resistance/impedance 4 = Minimum cross-sectional-area of any conductor within the protective bonding circuit branch to the tested part

Table 1 – Test locations and results Measured values3

EUT Test No. Test location1

Test current2

(A) Voltage drop

(V) Impedance

(Ω)

Conductor4

(mm2/AWG) Result

1 1 N 1 2 1 3 4 5 6 7

Remarks The M16 and M22 are component switches and are do not cord have a connection to earth ground.


N N N N N



Page 5 of 26





22.4 Starting Current Test

Test applicability and intent The test is carried out on equipment that may be subject to nuisance tripping of its overload or overcurrent protective devices owing to excessive inrush currents. The test is typically applied to equipment incorporating large motor devices etc. Note: It is recommended that the peak inrush starting current is measured using an appropriate measuring device and recorded in Table 2 of 22.5 (Input Test).

Test equipment None.

Test method The equipment is started in accordance with the manufacturer’s instructions three times from a completely stopped condition. Ensure that the time interval between successive starts is sufficient to allow the equipment to return to ambient conditions.

Acceptance criteria None of the equipment’s overload or overcurrent protection devices shall activate during the test.

Column explanatory keys for Table 1, Test locations and results 1 = Circuit/load under investigation 2 = Peak current during the test 3 = 1, 2 and 3 starts of the equipment/machine or circuit: ‘P’ = Pass (no overcurrent device(s) tripped), ‘F’ = Fail (overcurrent device(s) tripped)

Table 1 – Test locations and results Applied starts3 EUT Test

No. Test location1 (circuit started)

Peak current2 (A) 1 2 3

Result

1 1 N 2 3

Remarks The M16 and M22 are component switches and do not consume any power. The units are rated at 10 amps at 600 VAC and 1 amp at 250 VDC. The end application must not exceed these ratings.


N N N N N



Page 6 of 26





22.5 Input Test

Test applicability and intent The test is applied to equipment possessing a nameplate electrical rating(s).

Test equipment True RMS current or equivalent power measuring equipment, with an accuracy of 3.0%.

Test method The input current/power of the equipment is measured when operated under maximum normal operating load conditions (i.e., with all motors, heaters, etc. running at manufacturer’s specified maximum loading conditions.

Acceptance criteria The measured current or power does not exceed 110% of the full load value specified on the equipment nameplate.

Column explanatory keys for Table 1, Test locations and results 1 = Supply phase (line); use ‘A’ for single-phase, ‘A’ & ‘B’ for bi-phase and ‘A’, ‘B’ & ‘C’ for three-phase 2 = Line voltage 3 = Phase voltage 4 = Phase to earth/ground voltage (same as Phase – Neutral voltage in supply systems other than IT types)

Table 1 – Applicable voltages



Page 7 of 26





Voltage

EUT Test No. Phase1

Phase – Phase2 Phase – Neutral (Grounded conductor)3 Phase – Earth (Ground)4

1 1 1 A 1 2 B 1 3 C

Column explanatory keys for Table 2, Test locations and results 1 = Supply phase (from Table 1) 2 = Peak (inrush) current, if applicable 3 = steady-state current (effective/average value) 4 = Measured power (using Wattmeter) 5 = Volt Ampere product (from Voltmeter and Ammeter) 6 = ‘full load current’ value (from equipment nameplate)

Table 2 – Test locations and results Measured current (A)

EUT Test No. Phase1 Starting2

(peak inrush) Running3 (steady)

Watts4 (W or kW)

Calculated5 (VA or kVA)

Equipment rating6

(A, W, VA) Result

1 1 A N 1 2 B N 1 3 C N

Remarks The M16 and M22 are component switches and do not consume any power. The units are rated at 10 amps at 600 VAC and 1 amp at 250 VDC. The end application must not exceed these ratings.


N N N N N



Page 8 of 26





22.6 Dielectric Test

Test applicability and intent The test is carried out on equipment that is supplied at hazardous voltage (generally at anything more than AC30V r.m.s. or DC60V.

Test equipment A timing device with an accuracy of +/- 5 seconds and a dielectric withstand tester with a means of indicating test potential, as well as an audible or visual indicator of electrical breakdown, or an automatic reject feature. If an AC test potential is used, the test equipment should include a transformer having a sinusoidal output rated at ≥500VA unless provided with a voltmeter that directly measures applied output potential.

Test method With the equipment disconnected from its supply, apply a dielectric withstand potential of at least 1500 Volts AC (r.m.s.) or 2121 Volts DC between live metal parts of the primary (supply) circuit(s) and dead metal (accessible conductive) parts (commonly the equipment’s PE/Ground terminal). Surge suppression components and devices, and certified electronic components (e.g., power supply units) may be disconnected for the test. For the test, the following conditions need to be set: the equipment should be at its maximum operating temperature (have attained thermal equilibrium) switches placed in the “ON” position circuits through contacts be completed by manually engaging or bypassing the contacts

Achieve the test potential gradually, starting from zero volts and holding at the test value for a period of one minute. Note: a grounded circuit (neutral) conductor, if used, is considered a live (primary circuit) part. Note: line to earth/ground filter components may be connected within the equipment. To prevent tripping of the test equipment owing to excessive leakage, the DC dielectric specified above may be used as an equivalent.

Acceptance criteria The equipment does not exhibit any evidence of dielectric breakdown.

Column explanatory keys for Table 1, Test locations and results 1 = Applied location of first test electrode 2 = Applied location of second test electrode 3 = Voltage applied

Table 1 – Test locations and results Test location

EUT Test No. From1 To2

Test voltage3 (AC rms / DC) Result

1 1 Electrical connections Foil wrapped around unit 2200 VAC C 2

Remarks Except for the M22-1Y1-PG, the models listed on page 2 were subjected to a dielectric strength test. The units were wrapped in aluminium foil. Spacing was maintained around the electrical connections. A voltage of 2200 VAC (1000 VAC plus twice the rated voltage) was applied between the electrical connections and the foil. All units passed this testing.


HI-Pot Tester Biddle 1-T00A5 24458 07/15/10



Page 9 of 26





22.7 Strain Relief Test

Test applicability and intent The test verifies that fixed supply cords or cables that are external to the equipment enclosures are adequately secured to prevent mechanical stress such as pull or twist being transmitted to terminals or interior wiring.

Test equipment A timing device with an accuracy of +/- 5 seconds and a force gauge with an accuracy of 1.0% of full scale and a calibrated weight or force gauge to apply a force of 156N (35lb) +/- 10%. A supporting surface to support the equipment.

Test method A direct pull of 156 N (35lb) is applied to the cord or cable from the least favourable angle. The force is gradually increased to the prescribed level and maintained for a period of one minute.

Acceptance criteria The cord or cable does not become displaced to the extent that stress could be applied to the internal connections.

Column explanatory keys for Table 1, Test locations and results 1 = Name or designation cord or cable tested 2 = Location on EUT of cord or cable tested (if not evident from Name in column 1)

Table 1 – Test locations and results Identification of cable or cord tested

EUT Test No. Name1 Location2

Result

1 N 2 3 4 5 6

Remarks The M16 and M22 are component switches and do not have any strain relief.


N N N N N



Page 10 of 26





22.8 Transformer Output Short-circuit Test

Test applicability and intent The test is carried out to ascertain that transformers constituting power sources possess an adequate degree of overcurrent/short-circuit protection. Such protection may be integral or external to the relevant sub-unit.

Test equipment A timing device with an accuracy of +/- 5 seconds and a short-circuit jumper conductor suitable for carrying the short circuit current.

Test method With the equipment in its standby condition, short-circuit the output (secondary winding) of each power transformer. Note: The short-circuit jumper conductor is connected after any overcurrent protective device(s) present in the transformer secondary circuit. EXCEPTION 1: Transformers with an output overcurrent device which is listed or recognized by a nationally recognized testing laboratory and rated not more than 125% of the maximum output current need not be subjected to the test. EXCEPTION 2: A thermally-protected or impedance-protected transformer that is certified by an accredited testing laboratory need not be subjected to the test.

Acceptance criteria A hazardous condition (e.g. insulation damage, smoke, fire, or the emission of molten material) does not exist within 8 hours, or before activation of overcurrent protection, thermal protection, or other protective circuit/device whichever occurs first.

Column explanatory keys for Table 1, Test locations and results 1 = Transformer identification data 2 = Particular power output (e.g., voltage tap or winding name) tested 3 = Outcome of test including events, their times from start of the test and non-hazard statement as applicable

Table 1 – Test locations and results

EUT Test No.

Name / circuit or equipment designation of transformer1

Name or designation of particular output2 Observations3 Result

1 N 2 3 4

Remarks The M16 and M22 are component switches and do not have any transformers.


N N N N N



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22.9 Power Supply Output Short-circuit Test

Test applicability and intent The test is carried out to ascertain that power supply units possess an adequate degree of overcurrent/short-circuit protection. Such protection may be integral or external to the relevant sub-unit.

Test equipment A timing device with an accuracy of +/- 5 seconds and a short-circuit jumper conductor suitable for carrying the short circuit current.

Test method With the equipment in its standby condition, short-circuit the output of each power supply, one at a time. NOTE: The short-circuit jumper conductor is connected after any overcurrent protective device(s) present in the power supply output circuit. EXCEPTION: A power supply that is certified by an accredited testing laboratory and used in accordance with the manufacturer’s instructions need not be subjected to the test.

Acceptance criteria A hazardous condition (e.g. insulation damage, smoke, fire, or the emission of molten material) does not exist within 8 hours, or before activation of overcurrent protection, thermal protection, or other protective circuit/device whichever occurs first.

Column explanatory keys for Table 1, Test locations and results 1 = Power supply identification data 2 = Particular power output (e.g., voltage or rail name) tested 3 = Outcome of test including events, their times from start of the test and non-hazard statement as applicable


EUT Test No.

Name / circuit or equipment designation of power supply1

Name or designation of particular output2 Observations3 Result

1 N 2 3 4

Remarks The M16 and M22 are component switches and do not any power supplies.


N N N N N



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22.10 Safety Circuit Function Test

Test applicability and intent The test is carried to verify the functionality of each safety circuit on the equipment.

Test equipment Depends on the safety devices being tested.

Test method Activate each safety circuit (e.g., EMO, E-Stop, end-of-travel sensors, loss of exhaust sensors, light curtains, safety interlocks etc.) by actuation/resetting and check for the correct equipment response.

Acceptance criteria The following apply: - Upon activation of EMO circuits all hazardous voltage and all power greater than 240VA in the equipment beyond (except for) the main power enclosure (that contains the main disconnect device etc.) should be de-energized, except where permitted by SEMI® S2 - Actuation of Emergency Stop (EMS) or safety interlock circuits to cause the equipment, or the relevant parts of the equipment, to be automatically brought to a safe condition (safe shutdown condition) - Resetting of the safety circuit not to cause the system to resume operation.

Column explanatory keys for Table 1, Test locations and results 1 = Name of safety circuit 2 = System response (observations) during test 3 = Reset of system necessary to restore power or hazard (name of reset control)


EUT Test No. Safety circuit1 Outcome of test2 System reset3 Result

1 N 1 2 N

Remarks The M16 and M22 are component switches and do not have any safe circuits within the units.


N N N N N



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22.11 Safety Circuit Conductor Disconnection Test

Test applicability and intent The test is carried to verify that each conventionally configured safety circuit fails to safety in the event of the circuit being interrupted (broken wire connection etc.). Note: The test may not be relevant to safety circuits configured using sophisticated architecture and that are evaluated by other means, e.g. those utilizing functional safety techniques.

Test equipment None (disconnection of conductors by hand).

Test method Disconnect the connector/lead in turn of each independent safety circuit (e.g., EMO, EMS, end-of-travel sensors, loss of exhaust sensors, door interlocks etc.).

Acceptance criteria The following apply: - The interruption of the safety circuit causes the equipment, or the relevant parts of the equipment, to be automatically brought to a safe condition (safe shutdown condition) as if the safety device in the circuit had been actuated. - Reconnecting the conductor/replacing the connector not to cause the system to resume operation.

Column explanatory keys for Table 1, Test locations and results 1 = Name of safety circuit 2 = System response (observations) during test 3 = Reset of system necessary to restore power or hazard and (control name)


EUT Test No. Safety circuit1 Outcome of test2 System reset3 Result

1 N 2 N

Remarks The M16 and M22 are component switches and do not have any safe circuits within the units.


N N N N N



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22.12 Capacitor Stored Energy Discharge Test

Test applicability and intent The test is carried out on equipment with conductors that are connected to capacitor(s) storing an energy level of 20 J or more under normal conditions. Such conductors (at a safe voltage) may be accessible to maintenance/service personnel after the removal of equipment covers or protective barriers. The test is relevant to equipment having Electrical Work Type 1 tasks, or Type 1 tasks involved with sub-unit/system isolation. EXCEPTION: The test does not apply if a tool is necessary to remove a panel to reach the capacitor and the enclosure is marked with a hazard warning specifying the required discharge time to less than 20J, with a maximum permitted duration of 5 minutes. Note: J = ½CV2 where J is the energy in Joules, C is the capacitance in Farads, and V is the potential in Volts Note: The purpose of the test is to establish whether capacitors themselves or feeding circuits discharge to a safe level within a set period, taken to be the duration necessary for access to relevant conductors following disconnection of the equipment from the supply. The test concerns energy level in relation to potential burn and emission hazards associated with short-circuiting such conductors.

Test equipment A timing device with an accuracy of ± 1 second and a DC voltmeter with a sensitivity of 1% or better so as to have minimal effect upon the measurement.

Test method Monitor the voltage on each relevant conductor/capacitor. Disconnect (operate the main disconnect) the equipment from the supply and record the voltage across the conductor/capacitor terminals after 10 seconds.

Acceptance criteria The charged energy source (or feed capacitor(s)) is discharged to less than 20J within 10 seconds of the equipment being disconnected from the supply.

Column explanatory keys for Table 1, Test locations and results 1 = Name or designation of circuit or capacitor source tested 2 = Voltage (d.c.) measured voltage 10 seconds after isolation/disconnection of the EUT 3 = Stored energy at 10 seconds as calculated using the above formula


EUT Test No.

Test location1 (circuit or capacitor)

Measured voltage at 10s2 (V)

Calculated stored energy3 (J) Result

1 1 N 1 2 1 3

Remarks The M16 and M22 are component switches and do not have any capacitors within the units.


N N N N N



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22.13 Temperature Test

Test applicability and intent The test is made to verify that the equipment does not exhibit excessive temperatures on external enclosure surfaces, heated internal surfaces accessible to service/maintenance personnel, and that the ambient temperature levels affecting important internal components/sub-units are not beyond the manufacturer’s safety specifications. Note: Surfaces of accessible parts at higher temperatures may require advisory/caution marking per SEMI® S1.

Test equipment A timing device with an accuracy of ± 5 seconds and a thermometer with a full range resolution of 0.1°C.

Note: Measurements may be made by the use of multiple thermocouples, spot monitoring (single probe moved to all locations) or, for wound devices, the measurement of winding resistance (resistance method), whatever method is the most appropriate.

Test method The equipment is supplied at its least favourable supply conditions and operated under the manufacturer’s maximum design load (as per the INPUT TEST) for 8 hours or until thermal equilibrium is reached, whatever is the earlier. When thermal equilibrium is attained, the temperature at the relevant locations on the equipment is recorded. Note: Thermal equilibrium is considered to have been attained when three successive readings taken at equal intervals of 5 minutes or 10% of the total test time elapsed previous to the start of the first interval, whichever is longer, indicate that there is no temperature change of the part.

Acceptance criteria The measured temperatures do not exceed the values listed in Table 1 (reproduced on the page following the next page), or do not exceed the respective limits for critical components used or are in compliance with the surface limits of any applied product standards/requirements. Note: Surfaces that are accessible to personnel must be evaluated according to SEMI® S2, Table 1. “Potentially Hazardous Surface Temperatures” (reproduced on the page following the next page).

Column explanatory keys for Table 1, Test locations and results 1 = Test (measurement) location 2 = Measurement point: S = Surface; A =Ambient (air temperature) 3 = Absolute temperature as measured 4 = Mathematically corrected absolute temperature 5 = Absolute temperature limit of device or component



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Table 1 – Test locations and results [TEST 1]

EUT Test No. Location monitored1 Point type2

(S / A) Measured3

(°C) Corrected4

(°C) Limit5 (°C) Result

1 1 N 2

Remarks [TEST 1] Since the M16 and M22 are approved by a Nationally Recognized Testing Laboratory, temperature testing was waived. A temperature test in the end application needs to be performed to ensure that sufficient air flow is present to ensure that the switches do not overheat.


N N N N N



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22.13 Temperature Test (continued)

Table A1-11 (SEMI® S22) – Maximum Temperature Limits Parts of the Equipment Temperature Limit (°C)

Knife switch blade and contact jaws 55

Fuse and fuse clip 110

Rubber and thermoplastic insulated conductors See NOTE 1

Field wiring terminals:

Equipment marked for 60oC or 60/75oC supply wires 75

Equipment marked for 75oC supply wires 90

Buses and connecting straps or bars 125

Capacitors See NOTE 2

Power switching semiconductors See NOTE 3

Printed wiring boards See NOTE 4

Motors and Transformers See NOTE 5

NOTE 1: The temperature as marked on the conductor. NOTE 2: The temperature marked on the capacitor. NOTE 3: The case temperature for the applied power dissipation recommended by the semiconductor manufacturer as marked on the conductor. NOTE 4: The operating temperature of the board as specified by the board manufacturer. NOTE 5: The rated temperature of the motor or transformer as specified by the manufacturer, if provided. When not provided, use appropriate standards such as IEC 61010-1 for guidance.

Table 1 (SEMI® S2) – Potentially Hazardous Surface Temperatures (reference) Maximum Surface Temperature (°C)

Accessible Parts Metal Glass, porcelain,

vitreous material Plastic, rubber

Handles, knobs, grips, etc., held or touched for short periods (5 seconds or less) in normal use 60 70 85

Handles, knobs, grips, etc. held continuously in normal use 51 56 60 External surfaces of equipment, or parts inside the equipment, that may be touched 65 80 95



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22.14 Strength of Electrical Enclosures Test

Test applicability and intent 30N Steady Force Test: Test applies to the mechanical strength of electrical enclosures.

250N Steady Force Test: Test applies to the deflection resistance of electrical enclosure panels.

Test equipment Force gauge.

Test method 30N Steady Force Test: The enclosure walls and covers are subjected to a steady force of 30 N ±3 N for period of 5 seconds applied by means of a straight un-jointed version of a test finger to the part, on or within the complete equipment, or on a separate sub-assembly.

250N Steady Force Test: The panel is subjected to a steady force of 250 N ±10 N for period of 5 seconds, applied to the enclosure, fitted to the equipment by means of a suitable test tool providing contact over a circular plane surface 30 mm in diameter.

Acceptance criteria 30N Steady Force Test: If the straight un-jointed test finger penetrates the material or opening, it should not be possible to touch any hazardous energized parts inside the enclosure with the jointed or un-jointed test finger.

250N Steady Force Test: If flexing of the enclosure panel occurs, it should not cause shorting or reduction of a clearance distance to less than that stipulated between the enclosure and hazardous energized parts inside.

Column explanatory keys for Table 1, Test locations and results 1 = Enclosure/panel name 2 = Applied force (30N for 30N Test; 250N for 250N Test) 3 = Outcome of test including any deflection measurement


EUT Test No. Test location1 Applied2

(N) Observations / Enclosure deflection3 Result

1 1 M22-1Y1-PG 250 None C 1 2

Remarks None.


Force Gauge Shimpo FGE100 E9570029 11/29/10



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22.15 Finger Probe Test

Test applicability and intent The test is applied to determine that electrical enclosures are ‘finger safe’.

Test equipment IEC Finger Probe (see IEC 61010-1).

Test method The jointed test finger is applied without force in every possible position to all outer surfaces, including the bottom. Any enclosure panels that are not secured by a means that requires a tool to open are opened and the finger probe is applied.

Acceptance criteria If the finger probe cannot touch any conductive part that is energized with a hazardous voltage under normal operating conditions, then this is an acceptable result.

Column explanatory keys for Table 1, Test locations and results 1 = Enclosure section or part tested 2 = Outcome of test including any entry/contact made by the test finger probe


EUT Test No. Test location1 Observations2 Result

1 1 N 1 2 N

Remarks There are no openings in the M22-1Y1-PG.


N N N N N



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S2 §27.3 Sound Pressure Level Survey

Test applicability and intent The test is relevant to all equipment producing appreciable levels of audio noise during normal operation. Such acoustic noise is commonly the result of moving parts, pneumatic exhausts, jets etc. EXCEPTION: In lieu of an actual noise-level test report on the equipment, an alternative performance guarantee may be submitted if it is based on established noise ratings for the same type of equipment.

Test equipment Noise Level Meter with an “A” Freq. weighting and a slow response setting.

Test method Noise level tests, where required, should be conducted at the supplier’s location or in an appropriate test room with the equipment installed and operated to simulate normal operating conditions. The measurement technique should be ANSI S1.13 (R1976), Acoustical Society of America STD 4 (ANSI S3.17), or ANSI S1.4. Measurements should be taken at 1m (3.3 ft) intervals, 360o around the equipment and 3.5m (11.5 ft) away from walls and sound reflecting objects. The measuring equipment should be held 1.5m (4.9 ft) above the ground and 1m (3.3 ft) away from the equipment surface. For operator-attended equipment, measurements should be taken at the operator location(s) 1.5m (4.9 ft) above the floor or work surface for a standing workstation and 1.2m (4 ft) for a sitting workstation.

Acceptance criteria 80 dBA continuous or intermittent sound pressure level, slow response and 120 dB instantaneous (impulse) sound pressure level.

Column explanatory keys for Table 1, Test locations and results 1 = Measurement location 2 = Measured absolute sound pressure value 3 = Corrected value of sound pressure through application of Table 2, SEMI S2 (reproduced below)

Table 1 – Test locations and results Sound Pressure Level (dBA)

EUT Test No. Test Location1

Measured2 Corrected3 Result

1 N Remarks The M16 and M22 are component switches and do not produce any noise.



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S2 §27.3 Sound Pressure Level Survey (continued)

Table 2 (reference) – SEMI® S2, correction figures Background (ambient) level may be subtracted using an accepted method. If the sound pressure level difference is less than 3 dBA, the contribution of the source from the background cannot be adequately distinguished. Also, the survey results would not be valid for background (ambient) values over 80 dBA.

Differences between sound pressure level measured with noise source operating and background (ambient)sound

pressure level (dBA)

Correction to be subtracted from the sound pressure level measured with the noise source operating to obtain the sound pressure level due to noise source alone (dBA)

3 3.0 4 2.5 5 1.7 6 1.3 7 1.0 8 0.8 9 0.6 10 0.4


N N N N N



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S2 §24 Ionizing Radiation Survey

Test applicability and intent This test applies to equipment that produces ionizing radiation in the following categories: X-Radiation Gamma Radiation

Test equipment Ion chamber (or equivalent) instrument.

Test method Operator areas: Direct dose rate measurement with an ion chamber (or equivalent) calibrated to ±10% of true dose rate at surface of equipment (or at the closest approach) in all areas where the operator may have access with the ionizing radiation source active. Maintenance and service areas: Direct dose rate measurement with an ion chamber (or equivalent) calibrated to ±10% of true dose rate during simulated maintenance and service procedures. Measurements should be made at the surface emitting the ionizing radiation or the closest approach to the emitting surface with the ionizing radiation source active. Note: for these measurements, panels and/or shields should be removed only if removal is required for maintenance or service activities.

Acceptance criteria The measured levels of optical energy do not exceed the values listed in Table A4-1 of SEMI S2, Appendix 4 (reproduced below).

Column explanatory keys for Table 1, Test locations and results 1 = Location of measurement 2 = Area in terms of access to personnel: OP = Operator area; MS= Service/Maintenance area 3 = Measured values with equipment/radiation generator ON (active) and (OFF) inactive (background level measurement) 4 = Unit of measurement and limit 5 = Emission limit (see Table A5-1 OR Table A5-2, SEMI S2 (reproduced below))



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S2 §24 Ionizing Radiation Survey (continued)

Table 1 – Test locations and results Measured3

EUT Test No. Test location1 Area

type2 ON OFF Unit4 Limit5 Result

N

Remarks The M16 and M22 series switches do not produce nor use ionizing radiation

Table A4-1 (SEMI® S2), Radiation Emission Limits

Ionizing Radiation Type Emission Limit in microsievert / hr

(µSV/h) or (millirem / hr) Area type


N N N N N



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S2 §25 Non-ionizing Radiation Survey

Test applicability and intent This test applies to equipment that produces non-ionizing radiation, except laser sources, in the following categories: Static electrical and magnetic (0Hz) Sub-radio frequency (1 Hz to 3 kHz) Power frequency (50 Hz or 60 Hz) Radio Frequency fields (3 kHz to 300 GHz)

Test equipment Various – see Table A5-2 5 (reproduced below).

Test method As described below for each category of field Static (0Hz) fields Use a Hall effect probe at each location (use 3-axis probe or make three mutually orthogonal

measurements at each location. Measure field at exterior locations (2 to 3 cm from the surface). Locate 5 gauss (G) line to post pacemaker warnings and 30 G to identify where flying tools, etc. and dislocations of magnetisable prosthesis could become a hazard.

Sub-radio frequency fields 1 Hz to 3 kHz

Use a displacement sensor. Determine the maximum filed strength and orientation at the surface of the equipment (2 to 3 cm). Remove field perturbations by using a long non-conductive handle extension or remote fibre optic readout. Locate 1 kV/m line to post pacemaker warnings.

1Hz to 3kHz Use a loop sensor at each location. The sensor should be almost contacting the equipment surface. Identify 1G line to post pacemaker warnings.

Power Frequency fields See Sub radio frequency Electric Field Testing Method, but probe is positioned as needed to determine

distance to 1kV/m. See Sub radio frequency Magnetic Field Testing Method, but probe is positioned as needed to determine

distance to 1G pacemaker criterion. Radio Frequency fields 3 kHz to 100 kHz

Contact instrument vendor for suitable instrument based on frequency and emission characteristics. Measurement of induced and contact currents for frequencies lass than 100 MHz should be made when approaching 20% of the applicable electric field emission limit.

100kHz to 100MHz

Contact instrument vendor for suitable instrument based on frequency and emission characteristics. Measurement of induced and contact currents for frequencies less than 100 MHz should be made when approaching 20% of the applicable electric field emission limit.

3kHz to 300MHz

Use a diode rectifier of displacement sensor at each location. Measurements should be made at 20 cm from the surface.

3kHz to 300MHz

Use a diode rectifier or thermocouple at each location. Measurements should be made at 20 cm of the surface.

300MHz to 300 GHz

Use a diode rectifier or thermocouple at each location. Measurements should be made at 20 cm of the surface.

Acceptance criteria The measured levels of optical energy do not exceed the values listed in Table A5-1 or Table A5-2 (optical energy) of SEMI S2, Appendix 5 (reproduced below).

Column explanatory keys for Table 1, Test locations and results 1 = Location of measurement 2 = Area in terms of access to personnel: OP = Operator area; MS= Service/Maintenance area 3 = Measured values with equipment/radiation generator ON (active) and (OFF) inactive (background level measurement) 4 = Unit of measurement and limit 5 = Emission limit (see Table A5-1 and A5-2, SEMI S2 (reproduced below))



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S2 §25 Non-ionizing Radiation Survey (continued)

Table 1 – Test locations and results Measured3

EUT Test No. Test location1 Area

type2 ON OFF Unit4 Limit5 Result

N

Remarks The M16 and M22 are component switches and do not produce any non-ionizing radiation.

Table A5-1 (SEMI® S2), Non-ionizing Radiation Emission Limits Access limit

Energy Category

Physical Quantity

measured (units)

Operator areas

Maintenance and service areas

Pacemaker Labelling

Level

Static

0 Hz Magnetic Field

Strength 8mT 40mT 0.5mT

Sub-RF 1Hz to 3kHz

Electric Field Strength

1-100Hz 5kV/m*

100 Hz -3 kHz 500,000/f(Hz) in V/m

1-100Hz 5kV/m*

100 Hz - 3 kHz 500,000/f(Hz) in V/m

1kV/m

Sub-RF 1Hz to 3kHz

Magnetic Field Strength

1-300 Hz 12/f (Hz) in mT

300Hz - 3kHz 0.04mT (400mG)

1-300 Hz 12/f (Hz) in mT

300Hz - 3kHz 0.04mT (400mG)

0.1mT

Power Frequency


1kV/m 2kV/m 1kV/m

Power frequency


0.02mT 0.1mT 0.1mT

RF Field 3kHz to 100kHz

Induced current and contact current (mA)

Frequency-dependent: 180f(kHz) in mA through both feet 90f through each foot

90f for contact. where f is in MHz.

Frequency-dependent: 400f (kHz) in mA through both feet,

200f through each foot 200f for contact.

Where f is in MHz.

Not relevant

RF Field 100kHz to 100MHz

Induced current and contact current (mA)

18mA through both feet 9mA through each foot 9mA contact

40mA through both feet 20mA through each foot

20mA contact

Not relevant

RF Field 3kHz to 300MHz


Frequency dependent 20% of Uncontrolled limit in Table 2 of

C95.1

Frequency dependent. 20% of Controlled limit in Table 1 of

C95.1

Not relevant

RF Field 3kHz to 300GHz


Frequency dependent 20% of Uncontrolled limit in Table 2 of

C95.1

Frequency dependent. 20% of Controlled limit in Table 1 of C95.1

Not relevant

RF Field 3MHz to 300GHz

Power Density Frequency dependent. 20% of Uncontrolled limit in Table 2 of C95.1

Frequency dependent. 20% of Controlled limit in Table 1 of C95.1

Not relevant

NOTE 1: It is assumed that electric and magnetic fields exist separately at frequencies below 300 MHz. It is assumed that electric and magnetic fields exist as a combined entity (electromagnetic radiation) at higher frequencies. Two evaluations are needed at frequencies<300 MHz and only one (usually made by measuring the electric field) at higher frequencies. NOTE 2: 1 gauss (G) = 79.55 amperes per meter (A/m). 1 tesla (T) = 10,000G, 1 millitesla (mT) = 10G.



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S2 §25 Non-ionizing Radiation Survey (continued)

Table A5-2 (SEMI® S2), Optical Energy Radiation Emission Limits

Energy Category

Physical Quantity

measured (units)

Access limit Testing method

Infrared Energy

700 nm - 1 mm

(e.g., heating lamps)

Irradiance W/m2

(See NOTE 1, 2 and 3)

Radiance W/m2

Wavelength dependant 20% of applicable exposure limits

(see reference 1)

Use thermocouple, thermopile, pyroelectric, photoelectric sensors. Direct measurements locating the maximum irradiance and orientation of the energy at the closest approach the view port(s) or accessible leakage point(s)

Visible Light 400 nm - 700 nm

(e.g., heating lamps)

Irradiance µW/m2

(See NOTE 1, 2 and 3)

Radiance W/m2

Wavelength dependant 20% of applicable exposure limits

(see reference 1)

Use thermocouple, thermopile, pyroelectric, photoelectric sensors. Direct measurement locating the maximum irradiance and orientation of the light energy at the closest approach to view port(s) or accessible leakage point(s)

Ultraviolet Energy

315 nm - 400 nm

(e.g., plasma, stepper)

Irradiance mW/m2

(See NOTE 1 and 2)

Radiance W/m2

0.2mW/cm2 Use photoelectric detectors with filters and or controlled phosphors. Direct measurements locating the maximum irradiance and orientation of the energy at the closest approach to the view port(s) or accessible leakage point(s)

Ultraviolet Light

180 nm - 315 nm

(e.g., plasma, stepper)

Effective Irradiance

mW/m2

(See NOTE 4) W/m2

0.02µW/m2 Use photoelectric detectors with filters and or controlled phosphors (See NOTE 5). Direct measurements locating the maximum irradiance and orientation of the energy at the closest approach the view port(s) or accessible leakage point(s)

NOTE 1: “Irradiance” is essentially the same as “power density.” NOTE 2: Lamp manufacturer data can sometimes be used to estimate and evaluate exposures using a spreadsheet. NOTE 3: These guidelines cover visible, IR-A, and IR-B, and are frequency dependent. Separate evaluations may be needed for thermal or photochemical retinal hazards and infrared eye hazards. NOTE 4: “Effective irradiance” is irradiance adjusted to account for the wavelength-dependent biological hazard. Permissible exposure time = 0.003 J/cm2 divided by the effective irradiance. NOTE 5: Instrumentation is commercially available that accounts for the wavelength dependence of the standard and gives results in effective irradiance.


N N N N N

Semi s22 0706-rpt

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