Scanning Electron Microscope, SEM

Jingming Long, Nanna Rut Jónsdóttir, Kári Sveinbjörnsson & Guðfinnur

Baldur Skæringsson 12/10/2010

Content

3. Sample preparation3. Sample preparation

2. Device2. Device

1. The principle of SEM1. The principle of SEM

The principle of SEM

0.5~2nm

5~10nm

Device

背向散射電子偵測器

Nitrogen gas inlet

Column

Sample Chamber Door

Controlers

X-Ray Detector

Gold Coater?

Device

Device

Sample preparation

All samples must conduct electricity. To measure a non-conducting sample it must be covered with a thin layer of gold.

Non-conducting samples usually not chemically analyzed. Sulphur cannot be analyzed in a non-conducting sample, Au and S appear at similar places in X-ray.

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Example

Secondary electron Backscattered electron

Example

X ray characteristics analysis of element

Energy dispersive spectrometry EDS

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