I N DU S T R I E S F E AT U R E S B EN E F I T S

Applied SmartFactory®

MES 300works® Full-AutoComprehensive and powerful MES 300works meets automatedmanufacturing challenges in the semiconductor industry.Incorporates engineering best practices, exceeds user expectations and reduces time to market.

Semiconductor front-end wafer manufacturing

Wafer-level traceability & full product genealogy from raw wafer start

Lot management during wafer process

Process Plan Management

Durable Material Management

Customizable business operations

Equipment Management

Rapid implementation with out-of-the-box pre-packaged functionality

Reduces deployment time forfaster ramp-up

Improves response time to market changes and plant conditions

Achieves low cost of ownership through extensible and flexible platform

INDUSTRY CHALLENGESAs manufacturing and automation continues to grow with complexity in the semiconductor

industry, it is essential that the MES handles the dynamics of an ever-changing market and

production environment. The MES must be robust to plan, direct, and monitor large

manufacturing operations while efficiently manage data transfer from business systems:

INTEGRATION INTEGRATION

INTEGRATIO

N

IN

TEGR

ATION

MaterialControl

EquipmentAutomation

Dispatching

Full-Auto

Scheduling

Run To Run

SPC

FaultDetection

MaintenanceManagement

RecipeManagement

SmartFactory MES 300works

Full-Auto

• Meet demanding operating requirements• Provide flexibility and reliability• Support extensions and integration• Scale to support extreme levels of production volume

Manufacturing Hub in SmartFactory CIM

SMARTFACTORY MES 300WORKS FULL-AUTO

SmartFactory Solutions with

Pre-built automation logic that executes on a proven Applied platform, increasing speed-to-value for customers and provides quicker deployment times.

SMARTFACTORY MES 300WORKS FULL-AUTO

SOLUTION DESCRIPTIONSmartFactory MES 300works Full-Auto is a comprehensive MES that monitors and

streamlines the flow of materials throughout the manufacturing facility. MES 300works

Full-Auto supports common automation scenarios to optimize factory control while

addressing anomaly handling.It accelerates new facility ramps and enables quality products

to arrive at market on-time. Using pre-built industry-specific scenarios and a task-oriented

user interface, 300works Full-Auto can typically be deployed in 90 days, accelerating return-

on-investment, improving product quality and productivity, while cutting operating costs.

APPLIED’S TECHNOLOGY EXPERT ADVANTAGE

Applied’s domain experts staffed around the globe, have extensive experience in

implementing the pre-integrated SmartFactory CIM with MES 300works Full-Auto and

complementary SmartFactory offerings, including: Maintenance Management, Equipment

Automation, Fault Detection, Dispatching, FullAuto, Material Control, SPC, Run-to-Run,

Recipe and more!

Comprehensive and in Depth Modules supporting Full Auto Manufacturing

Applied SmartFactory MES 300works Solution in CIMEnterpriseIntegration

MES300works

ManufacturingIntegration

FactoryMonitor Board

ReportFabTransferAlarmSign OffERP

MaintenanceManagement

EquipmentAutomation Dispatching Full

AutomationScheduling SPC R2RFaultDetection

DataCollection Auto MonitorWork-In-Process

Sampling

Season Furnace Monitor Reticle Management OCAP

EquipmentCarrier Dummy Constraint Photo Resist Pilot Lot

UserManagement

ParameterManagementContamination Q-Time Probe Card Tool Recovery

MES RecipeLot ManagementProcess Plan Transport

WaferSelection

Wafer LevelTraceability

PartManagement

WorkInstruction

Run Card

Wafer AcceptanceTest

Wet TankControl

Randomization

MaterialControlSystem

Recipe

3050 Bowers Avenue, Santa Clara, CA 95054-3298 (408) 727-5555© Applied Materials, Inc. 2021. Applied Materials, the Applied Materials logo, and Applied SmartFactory are registered trademarks, and EngineeredWorks is a trademark of Applied Materials, Inc. in the U.S. and other countries. All rights reserved. All other trademarks are the property of their respective owners. Printed in the U.S.A.

Achieve Rapid implementation and Continuous Improvement with 300works Full-Auto

Focus on Full Automation in CIM

300works Full-Auto provides comprehensive MES capabilitiesto cover scenarios ranging from manual to full automationmanufacturing operations with suite of built-in automation scenarios.

Built-In Manufacturing Business Template

Ready-to-deploy business templates provide features andtransactions to support common manufacturing scenarios as wellas complex exceptions based on real manufacturing use cases.

Pre-Integration Enablement for Full Automation Factory

Applied Materials is the sole supplier of all pre-integratedcomponents in the 300works-based SmartFactory CIM, includingintegration of the SmartFactory CIM applications and integrationto other enterprise systems.

Comprehensive Product Management

Various product management features enable users to respond to factory situations in real-time, improving lot and wafer execution efficiency while minimizing delays.

PACKAGE CONTENTSMES 300works Full-Auto provides deployment-ready MES packages

for semiconductor front-end manufacturing.

SOFTWARE• SmartFactory MES 300works Full-Auto EngineeredWorks

• SmartFactory MES FACTORYworks® Base

• FACTORYworks Enablement Pack for 300works Full-Auto:

• Inventory

• OCAP

• SPACE Integration

• DTPF Kit

SERVICES, TRAINING & SUPPORT• On-site deployment

• Customization services for integration

• Training: Installation, modeling, and run-time operations

• User workshops

Learn more aboutApplied SmartFactory