Roll-to roll printing; making new forms of displays, solar cells and other technologies economically...
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A/Prof Jeffrey Funk Division of Engineering and Technology Management National University of Singapore
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These slides summarize technological trends in roll-to roll printing and how this new form of printing is making new forms of displays, solar cells, and other new technologies. Just like newspapers and magazines that can be printed merely by passing them over rollers that contain the patterns, new forms of displays, solar cells, and other technologies can be roll printed and thus can be cheaply manufactured. Equipment for roll-to roll printer is cheaper than for typical panels such as LCDs. it also benefits from increasing the scale of the substrates and equipment just as LCDs have done.
Transcript of Roll-to roll printing; making new forms of displays, solar cells and other technologies economically...
A/Prof Jeffrey Funk
Division of Engineering and Technology Management
National University of Singapore
Session Technology
1 Objectives and overview of course
2 Two types of improvements: 1) Creating materials that
better exploit physical phenomena; 2) Geometrical scaling
3 Semiconductors, ICs, electronic systems
4 MEMS and Bio-electronic ICs
5 Lighting and Displays (also roll-to roll printing)
6 Nanotechnology, 3D printing and DNA sequencing
7 Human-computer interfaces
8 Superconductivity, fusion, energy storage
9 Solar cells, wind turbines
10 Telecommunications and Internet
This is the Fifth Session in MT5009
Roll to Roll Printing Relevant for many technologies Organic displays including flexible ones
Organic solar cells
Integrated Circuits (maybe with organic materials)
Advantages Very low cost
Disadvantages Much lower resolution than some techniques such as
photolithography
Challenges Find materials that can be easily roll printed and that have
the necessary electronic and other characteristics
For example, nano-particles are a major topic
Introduction to Printed Electronics and Intelligence, Jukka Hast
Roll-to roll (R2R) printing
R2R Process for Manufacturing Active Matrix Backplanes Based on Plasma Processing and Self-Aligned Imprint Lithography
Vacuum deposition of
metals, dielectrics, &
semiconductors
5μ
Multiple mask
levels imprinted
as single 3D
structure
Patterning completed
w/ wet & dry
processes
deposition imprint etch
deposit
spin resist
align/expose
develop
strip/clean
etch
deposit etch imprint
etch mask
Conventional Photo-Lithography SAIL
Source: Roll-to-Roll Manufacturing of Flexible Displays, Hewlett Packard, Phicott
$0.0 $0.5 $1.0 $1.5 $2.0 $2.5 $3.0
Web preparation
Sputter Gate 1 Metal
Align and Expose
SiN, a-Si, N+ dep
Align and Expose
Si RIE & Resist Strip
Ultrasonic Clean
Align and Expose
Sputter Dep/ ITO
Align and Expose
Sputter Dep Interconnect
Align and Expose
Web cost
SAIL solves alignment problem & saves money
$0.0 $0.5 $1.0 $1.5 $2.0 $2.5
Condition web (de-hydro)
Gate metal deposition (Al)
PECVD oxide/nitride/Si/N+ deposition
SD metal deposition (Cr)
Imprint SAIL structure
Wet etch Cr
RIE etch n+&Si&SIN
RIE etch oxide
Plasma etch Al
Thin down 2P (clear gate-pad)
Pre-Cr-etch Cleaning
RIE etch n+&Si&SIN
Thin down 2P (clear gate-pad)
Wet etch Cr
RIE etch n+
Under-cut Al (1-3 um)
RIE etch oxide
Strip-off 2P
Web cost
cost
per
ft2
$0.00
$2.00
$4.00
$6.00
$8.00
$10.00
$12.00
$14.00
$16.00
$18.00
Photolithography SAIL
Cost of Patterning
Backplane materials costs for R2R photolith & SAIL
R2R
SA
IL
R2R
photo
lith (A
GI)
Multiple photoresist applications
dominate photolithography process materials costs
2 3 4 5 6 7 8 9 1010
-3
10-2
10-1
100
eq
uip
men
t co
st
[M$] / t
hro
ug
hp
ut
[cm
2 / S
]
generation
equipment cost scaling comparison: panel stepper vs R2R imprinter
100 mm R2R imprinter
330 mm R2R imprinter
Equipment Cost Comparison for Different Levels of Scale (comparison made at equal throughput)
Scaling similar for R2R printer and panel stepper; cost much lower for R2R Source: Roll-to-Roll Manufacturing of Flexible Displays, Hewlett Packard, Phicott
PECVD Scaling: R2R photovoltaic compared to LCD panel (comparison made at equal throughput)
1 2 3 4 5 6 7 8 9 1010
-2
10-1
100
eq
uip
men
t co
st
[M$] / th
rou
gh
pu
t [c
m2 / S
]
generation
equipment cost scaling comparison: panel CVD vs R2R CVD
330 mm R2R PECVD
1 m R2R PECVD
PECVD: plasma enhanced chemical vapor deposition. Again; benefits from scaling similar for R2R and panel; cost much lower for R2R
Source: Roll-to-Roll Manufacturing of Flexible Displays, Hewlett Packard, Phicott
330mm imprint system Gen10 cluster tool
R2R (L) equipment is still smaller than flat panel display ones (R)
Source: Roll-to-Roll Manufacturing of Flexible Displays, Hewlett Packard, Phicott
Evolution of R2R tool development
2005 2008 2007 2006 2009
13” production solar cell deposition
4” imprinter
13” RIE
13” imprinter
13” wet etcher
10” drum PECVD
Conclusions and Relevant Questions for Your Projects Roll-to roll printing can be much cheaper than other forms
of printing (e.g., photolithographic) and its performance is undergoing rapid improvements
These advantages will increase as the scale of R2R printers are increased
What do these trends mean for Organic displays including flexible ones
Organic solar Cells
Integrated Circuits (maybe with organic materials)
Other applications?
How will roll-to roll printing impact on the cost and thus the usage of these technologies?
Appendix
http://deviceguru.com/euro-project-slashes-flexible-display-costs/
Light emitting electrochemical cells
http://www.oled-info.com/tags/technical-research/frontplane/roll-roll
Observatory Nano ICT Sector Focus Report Printed Electronics April 2010
What kinds of materials can be roll printed?
Do these materials have the right characteristics for the electronic product?
Applications: flexible displays, organic solar cells, amorphous silicon thin-film transistors, liquid crystal displays, or solar-powered flexible displays
