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Carbon-Nanotube-Templated Metallic Microstructures for MEMS: Preparation and Characterization
Richard Hansen
Micro-electro-mechanical Systems (MEMS)
Motivation
CNT-M
CVI Process
CVI Challenges
Materials Properties
Conclusion
MEMS Fabrication Processes
DRIE
Deep reactive-ion etching
LIGALithographie, Galvanoformung,
Abformung (Lithography, Electroplating, and Molding)
Motivation
CNT-M
CVI Process
CVI Challenges
Materials Properties
Conclusion
Carbon-Nanotube-Templated Microfabrication
Motivation
CNT-M
CVI Process
CVI Challenges
Materials Properties
Conclusion
Carbon-Nanotube-Templated Microfabrication
Motivation
CNT-M
CVI Process
CVI Challenges
Materials Properties
Conclusion
CVI Using Metal Carbonyl Precursors
Heating Electrodes
Metal Carbonyl
CNT Sample Cartridge Heater
Gas
Motivation
CNT-M
CVI Process
CVI Challenges
Materials Properties
Conclusion
High Tensile Stress in Deposited Metal Film
1 mm
Motivation
CNT-M
CVI Process
CVI Challenges
Materials Properties
Conclusion
Extent of Infiltration
Motivation
CNT-M
CVI Process
CVI Challenges
Materials Properties
Conclusion
200 μm
200 μm
200 μm 1 μm
1 μm
1 μm
Structure of Metal film in CNT composite materials
The metal oxycarbide puts metal atoms in an FCC structure with C or O at their octahedral sites (Lattice constant of about 4.16 Å)
TEM Analysis Powder Diffraction
30 35 40 45 50 55 60 65 70 75 80 852Theta (°)
0
1000
2000
3000
Inte
nsity
(co
unts
)
Motivation
CNT-M
CVI Process
CVI Challenges
Materials Properties
Conclusion
Materials Properties of CNT composite materials
Cantilever Setup
Young’s Modulus on the order of 10 GPa
4-Point Probe Setup via the Van der Pauw Method
Resistivity on the order of 100 μΩm
Motivation
CNT-M
CVI Process
CVI Challenges
Materials Properties
Conclusion
Conclusion
Versatile Process
High-Aspect-Ratio
Materials Properties Dominated By Filler Material
Motivation
CNT-M
CVI Process
CVI Challenges
Materials Properties
Conclusion