RF, Ozone Generator / RPS Repair · 4022.437.XXXX X 4022.471.XXXX X ASML PHOTO 3 Week 200mm 300mm...
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SEMICONDUCTOR LEADING SERVICES RF, Ozone Generator / RPS Repair Cubit acquired ISO9001 and 14001
Transcript of RF, Ozone Generator / RPS Repair · 4022.437.XXXX X 4022.471.XXXX X ASML PHOTO 3 Week 200mm 300mm...
SEMICONDUCTOR LEADING SERVICES
RF, Ozone Generator / RPS Repair
Cubit acquired ISO9001 and 14001
SEMICONDUCTOR LEADING SERVICES
Repair Facilities
Repair Item
Sample Repair Procedure
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Contents
Test and Report4
SEMICONDUCTOR LEADING SERVICES
1. Customer
SEMICONDUCTOR LEADING SERVICES
2. Repair Item - Electronic equipment
Item Standards PHOTOS Tool Maker Process Delivery Remarks
LAMBDA POWER SUPPLY
VA-26519 AXCELIS ETCH 3 Week 200mm
GEMINI HV POWER SUPPLY
GEMINI AXCELIS ETCH 3 Week200mm300mm
ACCEL POWER SUPPLY
E11005370A VARIAN IMP 3 Week 200mm
CIRCULATOR S-VC-00615S-39-00615
411-21-1E61INR-244-264
DNSTEL/SEMES
PHOTO(spinner)
3 Week200mm300mm
CIRCULATOR CONTROLLER
INR-244-402 DNS
TEL/SEMESPHOTO(spinner)
3 Week 200mm
SEMICONDUCTOR LEADING SERVICES
2. Repair Item - Electronic equipment
Item Standards PHOTOS Tool Maker Process Delivery Remarks
CL7 BOARD0190-
15489REV001 AMAT CVD 3 Week 300mm
COOLANT MODULE05-08120-01
107484ASML
PHOTO(stepper)
3 Week 200mm
DC POWER SUPPLYK8-DCBOX-TEL-
100 AMT/LAM ETCH 3 Week 200mm
DC POWER SUPPLYCPW2870L5-01
11482XA IMP 3 Week 200mm
DIGITAL DIRECT CONTORLLER
CX1710 CPU 3 Week 200mm
SEMICONDUCTOR LEADING SERVICES
2. Repair Item - Electronic equipment
Item Standards PHOTOS Tool Maker Process Delivery Remarks
END POINT DETECTOR
NEFL-309S TEL PHOTO 3 Week 300mm
FILAMENT POWER SUPPLY
ESL 5-25-1307 ETCH 3 Week 200mm300mm
H/V MODULE
0010-14630 REV.XXX
0190-16690 REV.XXX
0010-39867 REV.XX
AMAT ETCH 3 Week 200mm300mm
HOT PACK SENSOR 0010-10663 TEL ETCH 3 Week200mm300mm
I/O MOTHER BOARD810-495585-
001 ETCH 3 Week 200mm
SEMICONDUCTOR LEADING SERVICES
2. Repair Item - Electronic equipment
Item Standards PHOTOS Tool Maker Process Delivery Remarks
INTERACTIVE DISPLAY
NT20M-DT121-V2 OMRON CLN 3 Week 200mm
LASER POWER SUPPLY
2113-75SLT KLA MI 3 Week 200mm
MCC 2A BOARD
002-1100-10001-9323-01
REV.XXX002-1100-10
REV.XXX
BROOKS ETCH 6 Week 200mm
MONOCHROMETER
H1061/12000010-105560010-09935
H1061
AMT ETCH 3 Week 200mm
MOTOR DRIVER
65BA030EXKTODV468TB
MR-J2S-10BMR-J2S40B1-
EH018
ULVACK-DNS
TEL
PHOTOCLNEDS
3 Week 200mm
SEMICONDUCTOR LEADING SERVICES
2. Repair Item - Electronic equipment
Item Standards PHOTOS Tool Maker Process Delivery Remarks
OPTICAL END POINT DETECTOR
685-510250-010
LAM ETCH 3 Week 200mm
OXYGEN ANALYZER
ICT-0A-01200000092
C7-01-1000-57-1
KOKUSAI/TEL
DIFF 3 Week200mm300mm
PAAC BOARD
4022.471.XXXXX
4022.634.XXXXX
ASML PHOTO3 Week 200mm
300mm
PADC BOARD
4022.437.XXXXX
4022.471.XXXXX
ASML PHOTO 3 Week200mm300mm
PCB ASS'Y ANALOG I/O BOARD
E15002450 REV.X
E15002460 REV.X
VARIAN IMP 3 Week200mm300mm
SEMICONDUCTOR LEADING SERVICES
2. Repair Item - Electronic equipment
Item Standards PHOTOS Tool Maker Process Delivery Remarks
POWER SUPPLY4247-EXXXMSE343B
CANON PHOTO 3 Week 200mm
SAM POWER SUPPLY P63C-30220BI
VARIAN IMP 3 Week 200mm
SERVO AMPLIFIERPV1A015SMTX
XXXAMAT
METALCMP
3 Week200mm300mm
TCU FLOW METERFT-20CB
9808SA10F3P6TEL
PHOTOETCH
3 Week200mm300mm
THERMO CONTROLLER
INR-244-216AINR-244-217B
TEL/KDNS PHOTO 3 Week200mm300mm
SEMICONDUCTOR LEADING SERVICES
2. Repair Item - Electronic equipment
Item Standards PHOTOS Tool Maker Process Delivery Remarks
TRANSPONDER LEADER
TLG-RS232 Brooks All 3 Week 300mm
TS-4000Z PANEL TS4000Z TEL DIFF 3 Week 200mm
TUBE CONTROLLER CX-2000
CX1103CX-1104CX1104A
KOKUSAI DIFF 3 Week 200 mm
UPS CARD0190-07905
REV.001 AMAT Metal 3 Week 200mm
WH POWER BOARD 4022.436.1064 ASML PHOTO 3 Week 200mm
SEMICONDUCTOR LEADING SERVICES
2. Repair Item - Electronic equipment
Item Standards PHOTOS Tool Maker Process Delivery Remarks
NSK MOTOR
0190-14344RS0810FN544RZ0810FN507RS0810FN544
AMT CMP 6Week 200mm
NSK MOTOR DRIVER
EP0810AFX-05 AMT CMP 6Week 200mm
SEMICONDUCTOR LEADING SERVICES
2. Repair Item - RF
Item Standards PHOTOSUnit
MakerProcess Delivery Remarks
RF GENERATOR
RFG SERIES AECVD,ETCH,I
MP2 week
RF GENERATOR
RF(LF)-10S/R, RF-20S/R, RF-30S/R
AE(RFPP)CVD,ETCH,M
ETAL2 week
RF GENERATOR
OEM-1250 ENI ETCH 2 week
RF GENERATOR
OEM-2000,25B ENI ETCH 2 week
RF GENERATOR
GMW-50, NOVA-50 ENI CVD,ETCH 2 week
SEMICONDUCTOR LEADING SERVICES
2. Repair Item - RF
Item Standards PHOTOSUnit
MakerProcess Delivery Remarks
RF GENERATOR
GMW-25
ENI CVD,ETCH 2 week
RF GENERATOR
OEM-28B ENI ETCH 2 week
RF GENERATOR
OEM SERIES ENI CVD,ETCH 2 week
RF GENERATOR
RF-5S.LF-5 AE(RFPP) CVD 2 week
RF GENERATOR
AX-2000/3000 AD-TEC CVD,ETCH 2 week
SEMICONDUCTOR LEADING SERVICES
2. Repair Item - RF
Item Standards PHOTOSUnit
MakerProcess Delivery Remarks
RF GENERATOR
CPS-1001
COMDEL METAL 2 week
RF GENERATOR
CPS-5000 COMDEL METAL 2 week
RF MATCHER AMU SERIES TRAZAR CVD,ETCH 2 week
RF MATCHER SRN1-2 TRAZAR CVD 2 week
RF MATCHER MFM-20SA DAIHEN ETCH 2 week
SEMICONDUCTOR LEADING SERVICES
2. Repair Item - RF
Item Standards PHOTOSUnit
MakerProcess Delivery Remarks
RF MATCHER RMN SERIES
DAIHEN CVD,ETCH 2 week
RF MATCHER MERCURY SERIES AE CVD 2 week
RF MATCHER ATL-100RA ASTEC METAL 2 week
3KW SMARTPOWER
FI20160-1,2,3
MKSETCH(ASHIN
G)2 week
3KW SMART HEAD
FI20162-1,2,3 MKSETCH(ASHIN
G)2 week
SEMICONDUCTOR LEADING SERVICES
2. Repair Item - RF
Item Standards PHOTOSUnit
MakerProcess Delivery Remarks
1.5KW MAGNETRON
HEADSXRHC
MKSETCH(ASHIN
G)2 week
ASTRON I AX7670-
06,16,19,21,30,60 ETC..
MKS CVD2~3
WEEK
ASTRON AX7651, FI20620
ETC… MKS CVD
2~3 WEEK
1.5KW GENERATOR
S15ITBC (AX2115) MKSETCH(ASHIN
G)2~3
WEEK
3KW SMARTMATCH
FI20606,634,FI20045
MKSETCH(ASHIN
G)1 WEEK
SEMICONDUCTOR LEADING SERVICES
3. Repair Facilities - Electronic equipment
100Hz~10
0KHzLCR Meter
(RLC)
MXC-2800
Universal Counter
(Frequency)
QT-100/QT-
200(V-I)
MXG-9810A
Function Generator
(Signal Generator)
EL-1000PElectronic
Load(Load Test)
6303DPower Supply
TOPMAX-
IIROM-Writer(Data Copy)
MXD-4660A
Digital Multimeter(Voltage)
TM-A48MR-PIC
(Data Copy) 6510
OSCILLOSCOPE
(Waveform)
Image StandardItem Image StandardItem
QT-100QT-200
SEMICONDUCTOR LEADING SERVICES
Desc : CirculatorModel : INR-244-*** & S-39-00615 etcEquip Maker : TEL , SEMESProcess : PHOTO
Desc : MONOCHROMETERModel : H1061/1200 Equip Maker : AMATProcess : ETCH
Desc : POWER SUPPLYModel : H1061/1200 Equip Maker :Process: IMP
SEMICONDUCTOR LEADING SERVICES
Desc : PAAC BOARDModel : 4022.471.*****Equip Maker : ASMLProcess : PHOTO
Desc : TS4000ZModel : TS4000Equip Maker : A-80XProcess : DIFF
Desc : NSK MOTORModel : Equip Maker : SANYOProcess : CMP
SEMICONDUCTOR LEADING SERVICES
Desc : ESC CONTROLLERModel :Equip Maker :Process : METAL
Desc : COOLANT MODULEModel : 115734 EtcEquip Maker : ASMLProcess : PHOTO
Desc : POWER SUPPLYModel : VA-26519Equip Maker : AXCELISProcess : ETCH
SEMICONDUCTOR LEADING SERVICES
Desc : PCB ASS'Y I/O BOARDModel : E15002450 , E15002460Equip Maker : Process : IMP
Desc : POWER SUPPLYModel : P31A-1507CBEquip Maker : AMETEKProcess : IMP
Desc : DC POWER SUPPLYModel : VA-26531Equip Maker : AMATProcess : ETCH
SEMICONDUCTOR LEADING SERVICES
Desc : DC POWER SUPPLYModel : K8-DCBOX-TEL-100Equip Maker : Process : ETCH
Desc : SERVO AMPLIFIERModel : PV2A015SM61P50 EtcEquip Maker : Process : CMP
Desc : SERVO AMPLIFIERModel : PU0A015EM11S00 EtcEquip Maker : Process : IMP
SEMICONDUCTOR LEADING SERVICES
Desc : POWER SUPPLYModel : H07008Equip Maker : Process : WET
Desc : DC POWER SUPPLYModel : 0190-03358-002Equip Maker : AMATProcess : ETCH
Desc : POWER SUPPLYModel : VI-PU03-EYW EtcEquip Maker : Process : METAL , CVD
SEMICONDUCTOR LEADING SERVICES
Desc : PRESSURE PANEL ASS'YModel : 564-480375-001Equip Maker : Process : PHOTO
Desc : POWER SUPPLY DIST BOARDModel : 3M81-010120-12Equip Maker :Process : METAL
Desc : E-CLAMP POWER SUPPLYModel : E19003380Equip Maker : Process : IMP
SEMICONDUCTOR LEADING SERVICES
Desc : NT PANELModel : 2880061Equip Maker : Process : WET
Desc : WATLOW ANAFAZEModel : 263-15798-00Equip Maker :Process : CVD
Desc : ACCEL POWER SUPPLYModel : E11005671Equip Maker : Process : IMP
SEMICONDUCTOR LEADING SERVICES
Desc : CONTROL BOARDModel : PB-6Equip Maker : AXCELIS Process : ETCH
Desc : EXHAUST LEAKAGE PCBModel : E15002030Equip Maker :Process : IMP
Desc : SERVO PANELModel : HTK270-M2Equip Maker : Process : IMP
SEMICONDUCTOR LEADING SERVICES
Desc : GATE WAYModel : 810-800060-004Equip Maker :Process : ETCH
Desc : TOUCH SCREENModel : UF7710-2-TEL1Equip Maker :Process : ETCH
Desc : PPCA BOARDModel : 4022.471.7370Equip Maker : ASMLProcess : PHOTO
SEMICONDUCTOR LEADING SERVICES
Desc : LAMP CONTROL BOARDModel : 490821Equip Maker : AXCELISProcess : ETCH
Desc : EPD TOUCH SYSTEMModel : MPM800FEquip Maker :Process : CMP
Desc : EPD DETECTORModel : 1003338Equip Maker : AMATProcess : ETCH
SEMICONDUCTOR LEADING SERVICES
Desc : CP TEMP CONTROLLERModel : KCE-53WS-AEquip Maker : Process : PHOTO
Desc : UV BULB POWER SUPPLYModel : PFHC-2600Equip Maker :Process : ETCH
Desc : MCC 2A BOARDModel : 002-1100-10Equip Maker : Brooks AutomationProcess : ETCH
SEMICONDUCTOR LEADING SERVICES
Desc : WH POWER BOARDModel : 4022.436.1064Equip Maker : ASMLProcess : PHOTO
Desc : TRANSPONDER LEADERModel : TLG-RS232Equip Maker :Process : ETCH
Desc : TIM CONTROLLERModel : 13373Equip Maker : Brooks AutomationProcess : PHOTO
SEMICONDUCTOR LEADING SERVICES
SEMICONDUCTOR LEADING SERVICES
3. Repair Facilities - Electronic equipment[Board Check] [Controller Check]
[Circulator Test Bench]
[Monochrometer Test Bench]
SEMICONDUCTOR LEADING SERVICES
3. Repair Facilities - RF
SEMICONDUCTOR LEADING SERVICES
3. Repair Facilities - RF
WATT METER (BIRD MODEL : 4421)
UTF-10
AE RFG5500 FINAL TEST
DUMMY LOAD 50Ω 5kW (OHAMBER Substitute)
DISPLAYPART
CONTROLPART
OPERATION
RF POWERSENSOR
RF GENERATOR RF MATCHER RF GENERATORDDL(Dynimix Dummy Load)
RF Power Sensor RF Power Sensor
RF Power Meter DDL Controller
Tool
1. Power : 208V 3Φ
208V 1Φ
110V 1Φ
2. PCW : Cooling
3. AIR
Matcher
RF Generator RF Matcher
SEMICONDUCTOR LEADING SERVICES
4. Repair Procedure - Electronic equipment
EVALUTION SHEET
UNIT CONDITIONMODULE CHECK
Jig TEST
TEST SHEETEstimate sheet
DIAGNOSISResult
NO
Problem
No Problem
CHECK
UNITS PICK-UP
UNIT DIAGNOSIS
REPLACEMENT PART
PACKING /Delivery
CUSTOMERCALL
UNIT TEST
Electronic equipment
SEMICONDUCTOR LEADING SERVICES
4. Repair Procedure - RF
EVALUTION SHEET
UNIT CONDITIONMODULE CHECK
AGING TESTMIN 12 HOURS
TEST SHEETEstimate sheet
DIAGNOSISResult
YES
NO
ProblemNo
Problem
CHECK
UNITS PICK-UP
UNIT DIAGNOSIS
REPLACEMENT PART
CALIBRATION
PACKING /Delivery
CUSTOMERCALL
UNIT TEST
RF Generator
SEMICONDUCTOR LEADING SERVICES
4. Repair Procedure - RFCUSTOMER
CALL
EVALUTION SHEET
NOCONTROLLERCALIBRATION
YES
Problem
NO
YES
No Problem
UNIT CONDITIONMODULE CHECK
CHECK
UNIT PICK-UP
UNIT DIAGNOSIS
REPLACEMENT PART
HARDWARE CALIBRATION
RF TEST
RF Matcher
PACKING /Delivery
TEST SHEETEstimate sheet
DIAGNOSISResult
SEMICONDUCTOR LEADING SERVICES
4. Report - Electronic equipment
SEMICONDUCTOR LEADING SERVICES
4. Report
SEMICONDUCTOR LEADING SERVICES
Ozon generator repair
SEMICONDUCTOR LEADING SERVICES
Repair Flow Chart
-.Tool for Repair & Test
A. Utility: Chiller(Neslab:HX-900 Model) – PCW 5deg ~ 24deg Variable High purity : O2 Gas: 99.999% High purity : N2: 99.999% AVR: 3Phase 208V Ozone Killer B. tool list : MFC Controller O2 MFM(10000sccm) DVM Ozone Generator controller Chart recorder
SEMICONDUCTOR LEADING SERVICES
Repair Flow Chart
-. Failed toll return (Samsung -> MKS Korea)
A. Inspection 1. record the returned tool condition. 2.Open the Cover and check Generator. 3.Flow the PCW check the leak condition inside the Generator. 4.Check leak inside generator gas line by ga60psi pressurizing leak 5. connect to power to check shot and Generator alarm condition . 6.contact to PC to check the controller alarm list Generator. 7.Use MFM to check MFC flow rate.
SEMICONDUCTOR LEADING SERVICES
. Utility hook up
1. O2 Inlet pressure: 60PSI 2. N2 Inlet pressure: 70PSI 3: N2 different pressure: O2 flow rate , 1:10000 = N2:O2 rate 4: Cell Pressure: 20~30PSI 5: AC Power connect (3 Phase 208VAC) 6: PCW connect (5 deg ~18 deg connect , Number of Cell - flow rate flow) 7: O3 outlet line(vent line) connect
SEMICONDUCTOR LEADING SERVICES
Ozone Cell Check
Ozone Cell Check & B/D Check
SEMICONDUCTOR LEADING SERVICES
-. Repair process1. Remove utilities Hook-up when inspection2. check the alarm and do repair.3. If MFC have problem, do repair and Calibration.-. Test processAfter hook-up the Utility , connect the Generator test controller with Generator.Perform test as attached Ozone spec.<Att-1 >. Ozone spec AX8560
SEMICONDUCTOR LEADING SERVICES
-. Function test(signal check)1. PCW temp alarm check2 .PCW water flow alarm check3. External alarm check4. Cell temp alarm check5. Ozone set/actual voltage check6. MFC set/actual voltage check7. Ozone set/actual check8. Ozone power output voltage check
-. Use Software Generator operation & alarm check1.Change Generator alarm limit value by AX8560 software for confirming alarm generation (PCW flow rate, temp, cell temp)2. Use Software to do Generator operation test. (Ozone set and ON/Off)3. After check the software version inside Controller , use New version to upgrade.4. Use PID adjust setting to control Response time.
SEMICONDUCTOR LEADING SERVICES
-. Burn-in test
After all repair and TESTOzone power: 100%Gas flow rate: process flow rate,Check any concentration change during 24 Hrs test.
SEMICONDUCTOR LEADING SERVICES
