Report of the ISO/TC108 Representative to the 7th Meeting of the CCAUV BIPM, Sèvres, October 2010 1

Hans-Jürgen von Martens Representative of ISO/TC 108

Report of the ISO International Observer to the 7th Meeting of the CCAUV

BIPM, Sèvres, October 2010

Recent progress of ISO TC 108/SC 3 towards key comparisons and traceability

in the field of vibration and shock acceleration

Draft Agenda of10/09/2008, item 13.3 - Doc. CCAUV/10-03

ISO/TC 108 Mechanical vibration, shock and condition monitoring

ISO/TC 108/SC 3 Use and calibration of vibration and shock measuring instruments

ISO/TC 108/ SC3/WG 6 Calibration of vibration and shock transducers

Report of the ISO/TC108 Representative to the 7th Meeting of the CCAUV BIPM, Sèvres, October 2010 2

Contents of Doc. CCAUV/10-03

1 Introduction

2 The standard series ISO 16063 “Methods for the calibration of vibration and shock transducers” (state of October 2010)

3 State of the standard series ISO 5347 “Calibration of vibration and shock

pick-ups” (state of October 2010)4 Recent progress in development and application of ISO calibration standards 4.1 Survey on standards 4.2 Measurement ranges and accuracy specified for standard techniques

4.3 Accuracy (uncertainty of measurement) achievable with refined techniques

4.4 Extended measurement ranges of standard methods 4.5 The new standard ISO 16063-41 Calibration of laser vibrometers

5 Summary and conclusions

References

Appendix A The Signal coincidence method (SCM) …

Appendix B Examples of simultaneous measurements of vibrations at high frequencies …

Report of the ISO/TC108 Representative to the 7th Meeting of the CCAUV BIPM, Sèvres, October 2010 3

(Introduction) Metrological application of methods specified in ISO documentary standards(Introduction) Metrological application of methods specified in ISO documentary standards

Motion quantity representing vibration Unit

acceleration metre per second squared m/s²

velocity metre per second m/s

displacement Metre m

angular acceleration radiant per second squared rad/s²

angular velocity radiant per second rad/s

rotational angle radiant rad

• to establish key comparison reference values (KCRVs) in CIPM key comparisons

• to link regional key comparisons (RMO KCs) to the KCRVs

• to realize and disseminate six units of the International System of Units (SI) by NMIs:

Report of the ISO/TC108 Representative to the 7th Meeting of the CCAUV BIPM, Sèvres, October 2010 4

ISO 16063-1Calibration

Basic concepts

Cal. in severe environment

16063-31

16063-21

16063-22

16063-23 1)

5347-12 5347-13 5347-14 5347-15 5347-16 5347-17 5347-18 5347-19

Other calibrationmethods

16063-41 3) Calibration of laser vibrometers

16063-42 1) Cal. of seismometers

Primary Calibration

16063-11

16063-12

16063-13

16063-15

Secondary Calibration

Vibrationinterferometry

Vibrationreciprocity

Shockinterferometry

Angularvibrationinterferometry

Vibrationcomparison

Shock comparison

Angularvibration

comparison

Transverse sensitivity

renumbered after

revision,at present:

5347-14

1) zero stage project, 2) CD 3) FDIS

16063-nn 1)

Dynamic force transducer calibration

16063-43 1)

Cal. of accelerometers by

model based parameter

identification

16063-32 2) Resonancetesting

5347-11 revised

Red marked: Laser interferometry

The standard series ISO 16063 “Methods for the calibration of vibration and

(Section 2) shock transducers” (state of October 2010)

Report of the ISO/TC108 Representative to the 7th Meeting of the CCAUV BIPM, Sèvres, October 2010 5

Number Title Status

5347-0:1987 Basic concepts revised → 16063-1:1998 confirmed 2009

5347-1:1993 Primary vibration calibration by laser interferometry revised → 16063-11:1999 confirmed 2009

5347-2:1993 Primary shock calibration by light cutting withdrawn replaced with 16063-13:2001 confirmed 2006

5347-3:1993 Secondary vibration calibration revised → 16063-21 confirmed 2008 (with Cor.1:2009)

5347-4:1993 Secondary shock calibration revised → 16063-22 confirmed 2008

5347-5:1993 Calibration by Earth’s gravitation confirmed 2009, to be revised

5347-6:1993 Primary vibration calibration at low frequencies withdrawn covered by 16063-11

5347-7:1993 Primary calibration by centrifuge confirmed 2009, to be revised

5347-8:1993 Primary calibration by dual centrifuge confirmed 2009, to be revised

5347-9:1993 Secondary vibration calibration by comparison of phase angles

withdrawn covered by 16063-21

5347-10:1993 Primary calibration by high impact shocks confirmed 2004, to be withdrawn (2010), covered by 16063-13 and 16063-22

5347-20:1997 Primary vibration calibration by the reciprocity method revised → 16063 -12:2002 confirmed 2007 (with Cor.1:2008)

Former standard series ISO 5347 “Methods for the calibration of vibration and

(Section 3) shock pick-ups“- parts for calibration (state of October 2010)

Report of the ISO/TC108 Representative to the 7th Meeting of the CCAUV BIPM, Sèvres, October 2010 6

Number Title Status

5347-11:1993 Testing of transverse vibration sensitivity revised → 16063-31:2009

5347-12:1993 Testing of transverse shock sensitivity confirmed 2009

5347-13:1993 Testing of base strain sensitivity confirmed 2009

5347-14:1993 Resonance frequency testing of undamped accelerometers on a steel block

confirmed 2004, under revision (→16063 -32)

5347-15:1993 Testing of acoustic sensitivity confirmed 2009

5347-16:1993 Testing of mounting torque sensitivity confirmed 2009

5347-17:1993 Testing of fixed temperature sensitivity confirmed 2009

5347-18:1993 Testing of transient temperature sensitivity confirmed 2009

5347-19:1993 Testing of magnetic field sensitivity confirmed 2009, to be revised

5347-22:1997 Accelerometer resonance testing – General methods

confirmed 2009

Former ISO 5347 series “Methods for the calibration of vibration and shock pick-ups“ (parts for testing) and state of revision (June

2010)

Former ISO 5347 series “Methods for the calibration of vibration and shock pick-ups“ (parts for testing) and state of revision (June

2010)

Former standard series ISO 5347 “Methods for the calibration of vibration and

(Section 3) shock pick-ups“- parts for testing (state of October 2010)

Report of the ISO/TC108 Representative to the 7th Meeting of the CCAUV BIPM, Sèvres, October 2010 7

(Section 4) Features of the revised standard (2009) for Testing of transverse vibration sensitivity compared with the former version (1993)

Property ISO 5347-11:1993 ISO 16063-31:2009

Frequency range 20 Hz to 5 kHz 1 Hz to 5 kHz

Vibration generator single-axis vibration exciter single-axis vibration exciter two-axis vibration excitertri-axis vibration exciter

Apparatus not specified Detailed specification

Measurement method not specified • Comparison• Interferometry• others

Procedure not sufficiently specified Detailed specification

Report of the ISO/TC108 Representative to the 7th Meeting of the CCAUV BIPM, Sèvres, October 2010 8

Vibration generator with3D-laser vibrometer

ISO 16063-31:2009 Testing of transverse vibration sensitivity (Section 4) 2 examples of various specifed calibration arrangements

Vibration generator with three laser

interferometers

X-InterferometerY-Interferometer

Z-Interferometer

Adapterfor reflection

Transducerto be tested

Vibrationexciter table

X-Exciter

Z-Exciter

Y-Exciter

Cross-coupling Unit

3D-laser vibrometer

Transducerto be tested

Adapterfor reflection

Vibrationexciter table

Cross-coupling Unit

Z-Exciter

Y-ExciterX-Exciter

Triaxial vibration excitation and measurement by

laser interferometry

Report of the ISO/TC108 Representative to the 7th Meeting of the CCAUV BIPM, Sèvres, October 2010 9

Property ISO 16063-11:1999 ISO 16063-41 (LAYOUT FDIS 2010)

Frequency range 0.4 Hz to 10 kHz “Typically 0.4 Hz to 50 kHz”

provisions for lower and higher

frequencies

Vibration generator Electrodynamic • Electrodynamic• Piezoelectric (→high frequency)

Measurement method Interferometry • Interferometry• Comparison

Interferometer technique Homodyne • Homodyne• Heterodyne (→high frequency)

Terms and test methods Specified in some detail Specified in great detail

Applicability of commercial laser vibrometer standards

Not included Detailed specification

Evaluation of measurement uncertainty

Uncertainty components • Uncertainty components • Example of uncert. evalulation

Features of ISO 16063-41 Calibration of laser vibrometers (Section 4) compared with ISO 16063-11 (accelerometer calibration)

Report of the ISO/TC108 Representative to the 7th Meeting of the CCAUV BIPM, Sèvres, October 2010 10

Comparison between different interferometer methods from 0.4 Hz to 347 kHz

-0,80

-0,60

-0,40

-0,20

0,00

0,20

0,40

0,60

0,1 1 10 100 1000 10000 100000 1000000

Frequency in Hz

Re

l. d

ev

iati

on

in

%

Deviation MF(homodyne) from MF(heterodyne), SAM (PTB, 2006) Deviation Laser vibrometer reading (SPEKTRA) from Reference values, SAM (PTB, 2004)Deviation FCM from SAM (CENAM, 2010)Deviation SCM from SAM (CENAM, 2010)Deviation Laser vibrometer reading from SAM at 100 kHz (CENAM, 2007)

(Section 4) Example of metrological foundation of ISO standard specifications: Prove of applicability of the specified interferometer methods up to 50 kHz

Example of comparisons performed between different interferometer standard methods and techniques - vibration amplitude measurements between 0.4 Hz to 347 kHz Finding: Standard methods are applicable beyond 100 kHz with high accuracy (exp. meas. unc. <1 %).

Report of the ISO/TC108 Representative to the 7th Meeting of the CCAUV BIPM, Sèvres, October 2010 11

Measurement of a displacement amplitude of approximately λ/4 = 158.2 nm at 159.4 kHz using three interferometer methods simultaneously*

* Example result from an experimental investigation performed at CENAM/ Mexico in February 2010 by G. Silva Pineda, A. Ruiz Rueda, R. Vázquez Ovando and L. Muñiz Mendoza in collaboration with H.-J. von Martens

Fringe-counting Method (FCM), Sine-approximation Method (SAM) and Signal Coincidence Method (SCM), simultaneous measurements at 159.4 kHz

156

156.5

157

157.5

158

158.5

159

159.5

160

0 5 10 15 20 25 30

Number of measurement within a measurement series

Dis

plac

emen

t am

plitu

de r

esul

t in

nm

FCM

SAM

SCM

Linear (FCM)

Linear (SAM)

Linear (SCM)

1 %

Report of the ISO/TC108 Representative to the 7th Meeting of the CCAUV BIPM, Sèvres, October 2010 12

The ISO TC 108/SC 3 includes recognized metrologists from NMIs worldwide along with a wide range of manufacturers and users.

The ISO 5347 and 16063 standard series are under continuous development as a prerequisite to ensure world-wide uniformity and traceability in vibration mesurements.

Summary and conclusions

New demands addressed are: calibration of laser vibrometers and of seismometers, parameter identification of accelerometers and dynamic force transducer calibration

Milestones marking great progress for various projects (e.g. ISO 16063-31 published, 16063-41 FDIS stage) were the 29th and 30th SC 3 Meetings (Nov. 2008, Sept. 2010)

New 16063 standards allow special refined versions of the standard methods to be applied, which lead to even smaller uncertainty and/or wider parameter ranges.

ISO TC 108 has acknowledged the BIPM and CCAUV to organize key comparisons based on adequate calibration methods specified in the ISO 16063 series of standards.