PVD Coatings On Glass Final - Home - Lehigh Solar Control Coatings on Glass ... Spectrally...
Transcript of PVD Coatings On Glass Final - Home - Lehigh Solar Control Coatings on Glass ... Spectrally...
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Physical Vapor Deposition of Coatings On Glass
D. J. O’Shaughnessy
Acknowledgements:
Tom Waynar, Andrew Wagner, Ed Kapura, (PPG Industries, Inc.)
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PPG Confidential and Proprietary Information
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Outline
• Solar Control Coatings on Glass
• Magnetron Sputtering
• Vacuum Basics
• Coating Process
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Emissivity and Glass
Emissivity: The relative power of a surface to
absorb and emit heat by radiation.
Glass: High emissivity surface– Efficient heat absorption and radiation
Low-e Coating: Low emissivity surface– Efficient heat reflector and poor heat emitter
– Thin films of metal, metal oxides and others
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Outdoors Indoors
Outdoor long wavelength energy reflected by Low-e coating
Short wavelength
solar energy
transmitted by Low-e
coatingIndoor long wavelength energy reflected by Low-e coating
Low-E Coatings reflect long-wave energy
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Absorbed and
Re-Radiated
Reflected
Solar Heat Gain
Transmitted
Absorbed and
Re-RadiatedInside
+
Solar Heat Gain =
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Spectrally Selective Glazing
Solar energy distribution at sea level for air mass = 2
Spectra
l Irradia
nce
(Watts
/m2
/ mm
)%
Tra
nsm
itta
nce
0
10
20
30
40
50
60
70
80
90
100
Spectral Irradiance
Ideal High Transmittance Spectral Selectivity
Solar IR 50%Visible 46%
2500
300
500
700
900
1100
1300
1500
1700
1900
2100
2300
600
0
200
400
800
1000
1200
1400
Ideal Low Transmittance Spectral Selectivity
Wavelength (nm)
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glassglass
basecoat
silver
primer
topcoat
overcoat
1 Layer Silver
• Silver Layer– provides solar & thermal performance
– reflective in visible and IR
• Dielectric Layers (base and topcoat)
– antireflect the silver layer in the visible
– acts as a nucleation layer for silver
– provide chemically & mechanically durability
– non-absorbing in visible spectrum
– low cost and non-toxic
• Primer (sacrificial) Layer
– protects silver during sputtering process
– provides durability
– stabilizes coating at high temperature
• Overcoat Layer
– (optical) extension of topcoat
– provides additional durability
30 to 80 nm
2.5 to 5.0 nm
2.0 to 3.5 nm
8 to 15 nm
Spectrally Selective Glazing
Dielectric/Silver/Dielectric Stack
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topcoat
glassglass
basecoat
silver
primer
topcoat
overcoat
1 Layer Silver 3 Layer Silver
glassglass
basecoat
silver
primer
centercoat
silverprimer
centercoat
silverprimer
topcoat
overcoat
2 Layer Silver
glassglass
basecoat
silver
primer
centercoat
silverprimer
topcoat
overcoat
topcoat
overcoat
Spectrally Selective Glazing• Multilayer Silver Stack
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Coating Performance%Transmittance vs. Wavelength
(3mm Clear float glass)
0
10
20
30
40
50
60
70
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90
1003
00
40
0
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0
60
0
70
0
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90
0
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00
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00
Wavelength (nm)
%T
Single Silver
Double Silver
Triple Silver
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Coating Performance%Reflectance vs. Wavelength
(3mm Clear float glass)300
400
500
600
700
800
900
1000
1100
1200
1300
1400
1500
1600
1700
1800
1900
2000
2100
2200
2300
2400
2500
Wavelength [nm]
0
10
20
30
40
50
60
70
80
90
100
%R
eflecta
nce
Single Silver
Double Silver
Triple Silver
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Spectrally Selective Glazing
Basic Performance – Solar Control, Low Emissivity Coatings
Number of Silver Layers[metal oxide–silver–metal oxide]
VLT SHGC LSG U-Value
Uncoated 79 0.70 1.13 0.48
1 Layer 73 0.52 1.40 0.31
2 Layers 70 0.38 1.84 0.29
3 Layers 64 0.27 2.37 0.28
Commercial IG Unit: 1-inch units with ½-inch airspace and two 1/4-inch clear lites. Coating on #2 surface.
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Spectrally Selective Glazing
Advantages of high LSG ratio Product
• Allows more daylighting
• Reduces
• utility costs
• capital costs
• carbon footprint
• Enhances design through use of glass
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PPG Confidential and Proprietary Information
Color is Critical to Quality
• Color is a perception!
� Instruments are used to quantify color
� Light source * Object * Observer sensitivity
� Sunlight ~ D65 (6500K)
� The eye has receptors for three primary colors –
Calculate Tristimulus values
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PPG Proprietary
Color Science
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Color Control
0
1
2
3
4
5
6
7
8
9
10
-10 -8 -6 -4 -2 0
b*
a*
Double Silver Rg
PPG Proprietary
•“Spider Diagrams” - effect of variation of the coating layers on color.
• Originally determined by experiment
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Outline
• Solar Control Coatings on Glass
• Magnetron Sputtering
• Vacuum Basics
• Coating Process
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Sputtering
•Sputtering is the removal of material from a
solid target by energetic ion bombardment.
•The ions come from a magnetically confined
plasma created above the target surface.
•Sputter deposition is the process of coating a
substrate with the material removed from a
target by sputtering.
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- Target
Sputter Deposition
Substrate
-+
+ -Gas Atom Gas Ion Electron Target Atom
- - - - - -
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Sputter Rate and Deposition Rate
•Sputter rate refers to how fast material is being
removed from the target
– Sputter rate is different for every material
– Large differential between metal mode vs. reactive
mode
•Deposition rate refers to how fast of that material
is deposited on the substrate
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• Oxidation of cathode targets occurs
� Reduces sputter rate
• Oxide deposition on anodes and surroundings
� Insulates conductive surfaces
� Charge build-up
• Gradient is effected
• Arcing can occur
• Cleaning cycle reduces issue
Reactive Sputtering
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Oxide Rate Enhancement With Argon
0
50
100
150
0 10 20 30 40 50
Ra
te (
nm
in/m
in k
W)
% Ar in chamber
Three cathodes running at 170 A each
Issues: Stability - gradient
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Switching
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Sputter Coating Machine
Vacuum
Chamber
Vacuum Pumps
Process Gas
Cathode
AssemblyTarget T
Anode
Power
Supply
+ _Substrate
User Controls
Entry/Exit
Valve
Line Drive
Rolls
Cooling System
Compressed Air
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Magnetron Sputtering Process
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Plasma
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Outline
• Solar Control Coatings on Glass
• Magnetron Sputtering
• Vacuum Basics
• Coating Process
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PPG Confidential and Proprietary Information
Vacuum Ranges
• Low vacuum (rough vacuum)– 760 torr to 1 torr
• Medium vacuum – 1 torr to 1 x 10-3 torr
• High vacuum – 1 x 10-3 torr to 1 x 10-6 torr
• Very High vacuum – 1 x 10-6 torr to 1 x 10-9 torr
• Ultra High vacuum – Less than 1 x 10-9 torr
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PPG Confidential and Proprietary Information
Ideal vs. Real Vacuum
• There is no such thing as a “Perfect Vacuum”. � Space ~ 1 x 10-18 torr (800 atoms/ft3)
� Best vacuum on earth ~1x10-15 torr
• The 3 main ways undesired gasses get into a vacuum are:
� Leaks
� Outgassing
� Backstreaming
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PPG Confidential and Proprietary Information
Vacuum Gauges
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PPG Confidential and Proprietary Information
Pressure Gauge Ranges
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PPG Confidential and Proprietary Information
Vacuum Pumps
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PPG Confidential and Proprietary Information
Vacuum Pump Ranges
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PPG Confidential and Proprietary Information
Leak Detectors
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Outline
• Solar Control Coatings on Glass
• Magnetron Sputtering
• Vacuum Basics
• Coating Process
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What Is A Glass Coater?
• A coater is a machine that applies a thin film coating to glass
• A Coating Process is everything from putting the glass on the conveyor to getting it back off
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Coating Process Block Diagram
UnloadInspectionExitLocks
CoatingSectionEntry
Locks
DogHouseWasher
Load
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UnloadInspectionExit
LocksCoating
SectionEntry
Locks
Dog
HouseWasherLoad Lehr Freefall
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UnloadInspectionExit
LocksCoating
SectionEntry
Locks
Dog
HouseWasherLoad Robot Load
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UnloadInspectionExit
LocksCoating
SectionEntry
Locks
Dog
HouseWasherLoad Washer
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UnloadInspectionExit
LocksCoating
SectionEntry
Locks
Dog
HouseWasherLoad Doghouse
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UnloadInspectionExit
LocksCoating
SectionEntry
Locks
Dog
HouseWasherLoad
Entry Locks
•The entry lock system consists
of 3 chambers: Lock, Hold, and
Buffer
•This is how we get glass into
the vacuum coating chamber
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UnloadInspectionExit
LocksCoating
SectionEntry
Locks
Dog
HouseWasherLoad Entry Lock
The Lock cycles between atmospheric pressure and vacuum (760 torr to 20 mtorr)
It consists of a chamber with slit valves to hold the vacuum, rolls to transport the glass, pumps to make the vacuum, and vent valves to return to atmospheric pressure
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Entry Hold
UnloadInspectionExit
LocksCoating
SectionEntry
Locks
Dog
HouseWasherLoad
Entry Lock
Pump Cycle
Accumulator Tank(Boom Tank)
EH 2600
Stokes412J
EH 2600
EH 2600
RootsBlower
Stokes412J
Stokes412J
Stokes412J
Stokes412J
Stokes412J
Entry Lock
Vent Filter
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UnloadInspectionExit
LocksCoating
SectionEntry
Locks
Dog
HouseWasherLoad
Entry Lock
Pump Cycle
Accumulator Tank(Boom Tank)
EH 2600
Stokes412J
EH 2600
EH 2600
RootsBlower
Stokes412J
Stokes412J
Stokes412J
Stokes412J
Stokes412J
Entry Lock
Vent Filter
Entry Hold
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UnloadInspectionExit
LocksCoating
SectionEntry
Locks
Dog
HouseWasherLoad Entry Hold
The Hold is always under vacuum (< 20 mtorr)
It is pumped with diffusion pumps and cryogenic pumps
It is the last point where glass can be stopped before it enters the coating chambers
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UnloadInspectionExit
LocksCoating
SectionEntry
Locks
Dog
HouseWasherLoad Entry Buffer
The Buffer is always under high vacuum
It is pumped with diffusion pumps
The glass loads are converted from a batch flow (loads) to continuous flow through the coater through the use of the gap reduction rolls
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UnloadInspectionExit
LocksCoating
SectionEntry
Locks
Dog
HouseWasherLoad Coat Zones
Coater Layout
Ag/Ti
Ag/Ti
Ag/Ti
Oxides
Oxides
Oxides
Oxides
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LocksCoating
SectionEntry
Locks
Dog
HouseWasherLoad Coat Zones
Coat Zone 1 Coat Zone 2 Coat Zone 3
Flange Flange
Conductance Limiting Isolation Tunnel
Drive Rolls
Isolation Pumping Port Process Gas
Inlet
Cathode
T TTTTT
Anode
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Locks
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HouseWasherLoad
Coat Zones
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LocksCoating
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Locks
Dog
HouseWasherLoad Coat Zones
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PPG Confidential and Proprietary Information
UnloadInspectionExit
LocksCoating
SectionEntry
Locks
Dog
HouseWasherLoad Exit Locks
The exit lock system consists of 3 chambers:
Buffer, Hold, and Lock
They compliment the entry lock system and
convert the continuous flow of glass into individual
loads that can be cycled out of the coater
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InspectionUnloadInspectionExit
LocksCoating
SectionEntry
Locks
Dog
HouseWasherLoad
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Quality Control – On Line
• Glass substrate inspected at load station
• All coated glass is visually inspected in an on-line inspection booth for defects and color. Rejects are marked and discarded.
Glass Defects Coating Defects
Edge Damage Color Streaks / Bands
Breakage Voids / Pinholes
Stain Arcs / Lightning Tracks
Primary Defects
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Pinhole Identification In Low-E:
Pinholes can be catalogued to help identify the of source of defects
CZ8 Top oxideCZ6 center oxideCZ1 base oxide (or before)
Glass
Particle
95% 50%
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Quality Control – Off Line
• Coater QC laboratory checks:
� Color
� Light transmission
� Emissivity
� Chemical and mechanical durability
• Checks are made at scheduled intervals and glass is released only if all requirements are met.
• All instruments are calibrated.
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Color Control
0
1
2
3
4
5
6
7
8
9
10
-10 -8 -6 -4 -2 0
b*
a*
Double Silver Rg
PPG Proprietary
•“Spider Diagrams” - effect of variation of the coating layers on color.
• Originally determined by experiment
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Interleaving
Small Plastic beads are applied to
keep the glass from sticking
together after it is packed
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Unload or Pack EndUnloadInspectionExit
LocksCoating
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Product Packaging
• Maintain Superior Product Quality, and Provide a Safe, Efficient, Container for Shipment.
• Reasonable Protection of Coated Glass from Mechanical and Chemical Damage.
• Labeling:
� Product Label
� Direction of Coated Surface
� Finished Stock Ticket
� Glass *Handle with Care*
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Questions
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PPG Confidential and Proprietary Information