Provider of Advanced Lithography and Semiconductor Thin ... · are in High technology innovation,...
Transcript of Provider of Advanced Lithography and Semiconductor Thin ... · are in High technology innovation,...
Noel Technologies
Provider of Advanced Lithography and Semiconductor Thin Film Services
Noel Technologies
Keith Best – Biography
Over the last 27 years, Keith Best has held a variety of semiconductor processing and applications positions for both device manufacturing and capital equipment companies, of which 11 years were with ASML Special Applications. Keith specializes in Photolithography and Process integration for the “more than Moore” application markets. He is currently the Director of Photolithography at Noel Technologies. Keith holds a B.Sc. Honors Degree in Materials Science from the University of Greenwich, UK. He has numerous publications and holds 16 US patents in the areas of Photolithography and Process integration.
Abstract
Over the past few years there has been a paradigm shift in the nature of manufacturing in Silicon Valley. What was once a manufacturing hub, is now a center for research and development. In this new era, many of the local Semiconductor manufacturing companies have adapted their approach to focus on the “More than Moore” Application markets and providing wafer processing services to generate additional revenue. These new “specialty” foundries are agile and capable of supplying high quality devices and wafer processing services. This, coupled with the wealth of engineering experience, can readily supply solutions to enable new technologies. This talk provides an insight into how these specialty foundries operate and examples of unique problems they can solve to help R&D centers progress to volume manufacturing and bridge the so called “valley of death”.
Noel Technologies
Specialty foundries Enabling the transition from lab to fab
Outline
• Brief History • Markets • Applications • Processing Challenges • The “Valley of Death” • Specialty Foundries • Enabling Technologies • Conclusions
History
Pioneering ------------------------> Fairchild 8 ---------> “Fair Children” & Moore’s Law
Shockley Labs 1956 Mountain View, CA
“Traitorous 8” 1957 - Fairchild
Intel
Noel Technologies
Silicon Valley – From Fruit to Gold
New Era – Silicon Valley
Fruit again?
The original Shockley building at 391 San Antonio Road, Mountain View, California, was a produce market in 2006
Life beyond Fruit
• The Silicon Valley landscape has changed dramatically, we are now returning to our R &D roots • Valley jobs are not in high volume manufacturing, they are in High technology innovation, application focused • The Valley’s engineering talent is adapting to this new environment, where market forces are shaping the future beyond Silicon ICs
Markets
“More than Moore” Applications
Solar
Lab on a Chip
Micro mirror arrays
Thin Film Heads HDD
Flexible electronics Optoacoustic Microphones
MEMS - Gyroscopes
LEDs
Material Handling Challenges
Small Pieces Perforated wafers Flexible thin substrates
Small substrates e.g. InP Transparent substrates Curved Surfaces
Processing Challenges
Cantilevers “T” Gates Waveguides
Photonic Crystals Lithography in 3D Nanotubes
Valley of Death
Power Solar Analog
RF LEDs
Photonics
Bio Chips
Passives
MEMS
Collaborative Zone
Collaborative Zone
What are Specialty Foundries?
Facilities that provide wafer processing services; from single steps, to complete product build, basically 3 types:
• Integrated device manufacturers (IDMs) who open up part of their fab for “more than Moore” activity • Researchers who work within the University network – R&D • Small and Medium Enterprises (SME) utilize in house processes and “ad hoc” networks: Universities and other SMEs to produce new products e.g. Noel Technologies
What are Specialty Foundries?
Provide customized processing services to researchers and industry:
• Significantly less material restrictions than CMOS facilities • Thin and Thick substrates • Transparent and perforated substrates • Double side processing • Substrate dimension requirements – pieces to 300mm, later 450mm
Model Cost Time to Market
IP Ownership Collaboration
IDMs Low Intermediate Negotiated Yes
University Labs Low Proof of concept
Typically shared
Research driven
SMEs (Noel Technologies)
Low Fast “Your IP is your IP”
Yes
Captive Foundry
High Fast, restricted to mainstream
Company Selective
Specialty Foundry Models
• California Universities have been increasing their capabilities • R & D efforts are utilizing equipment built for manufacturing • UCSB, UC Berkeley, UCLA, Stanford (SNF) have opened their doors to industry to provide access to researchers • Industrial researchers can develop next technology node prototype devices prior to ramping up • In some cases, Universities have more equipment capabilities than industry, however, collaboration is key to success
University Labs
• From Lab tools to Fab tools - UCSB
ASML 5500/300 DUV Resolution 0.15um
University Labs
• From Lab tools to Fab tools - UCLA
SVG 88 Series wafer track UCLA
Headway Spinner - UCLA
University Labs
• From Lab tools to Fab tools - UCLA
University Labs
ASML 5500/200 i-line Resolution 0.35um
Automated CD SEM
Enabling Technologies
To address material handling challenges, Noel Technologies co-developed a unique Mobile Electrostatic Carrier (MESC) with Beam Services Inc.
Lithography Carriers
Existing Temporary Bonding Solutions
Existing Temporary Bonding Lithography Solutions
2” wafer mounted on 4” Silicon carrier with H20 droplets
Dump rinse removal Method – Capillary action
Hot Plate removal – Steam method
Enabling Technologies Beam Services MESC
• Low voltage, High Performance: 200+ hrs 400V charge • Electrostatic force holds substrate in position on carrier
Design requirement - ASML
• Handling – Must be able to cycle through system without hang ups • Functionality - Must bond to target substrate firmly and cycle through system without sliding on carrier • Flatness: <2um TTV • Mechanical reproducibility: Substrate placement must be repeatable, within the capture range of the alignment system
Lithography Carriers
Testing Results
• 4” and 8” quartz mobile carriers were successfully used on ASML systems at Stanford University & SVTC • Completed multiple cycles validating handling compliance with scanners and steppers • 6” and 8” mobile carriers successfully used on ASML, Canon, Nikon and GCA systems
Conclusions
• A new era, beyond fruit, requires the same pioneering attitude as the “Fairchild 8” – go where no one has gone before • Crossing the “Valley of Death” - Collaboration between SMEs and the University network provides a cost effective bridge from “lab to fab” • New enabling technologies are providing pioneers with the tools they need to develop new products
• UC Berkeley, Marvell, Nanolab - http://nanolab.berkeley.edu • UC Santa Barbara - http://www.nanotech.ucsb.edu • Stanford Nanofab (SNF) - http://snf.stanford.edu • UC Los Angeles - http://www.isnc.cnsi.ucla.edu • Beam Services Inc. http://www.beamservices.com • Steve Kent – Noel Technologies
Acknowledgements
Noel Technologies, Inc. is a Silicon Valley based specialty foundry focused on process development, optimization, quality and delivery. An ISO 9001 registered facility, Noel Technologies offers process development and fabrication from 50mm up to 300mm
Specialty Foundry