Precision Vacuum Transmitter

Variation of ＳＣＭ２１００

SCM2100

SCM2100-TPSCM2100 -H

SCM2100-H-TP

SCM2100 -HH

New Product Vacuum Sensor

Jewelry came to sensing element

Saffire TM is Crystal sapphire diaphragm

Newly developed Sapphire element

Sapphire Element

New Material toward next generationConvert flex pressure of sapphire into electronic signalHighest stability due to high temperature immunity of sapphireProvide high stability in range from low to high temperatureHigh anti-corrosivenessPackaged by Tem-Tech’s own technology

Capacitance sensor

Upper electronic pole

Built-in Temp. sensor

Real sized picture

Signal terminalStandard Electronic pole

Structure of sapphire diaphragm

Advantage of rectangular diaphragm

Rectangular sapphire Sensor

Conventional diaphragm

Since detecting diaphragm is situated

at the upper side, Ion matter is blown

onto the diaphragm and deposited

Since the diaphragm is rectangular and situated vertically, less deposition of Ion matter on The diaphragm is seen.

Relative sensing at both sides of diaphragm minimizes off-set.

When the deposition increased, off-set came out and due to it sufficient sensitivity would lose.

Sensing Diaphragm

4．ＳＣＭ２１００ Structure　　　　D－SUB　

MKS Connector Compatibility

CV Conversion and ASIC Device

MCU ,Analog Circuit

Sapphire Sensor Element

Baffle Board

ＶＣＲ Connector

ＫＦ-16、TUBE etc

High TEMP Model

UP to 200℃

Original Floating Heater construction

High performance at 0.015 to 0.2 Torr（High vacuum)

0℃　　　　　10℃　　　　　20℃　　　　30℃　　　　　40℃　　　　50℃　

10T Range Calibration Data

MKS　（10Torr)

627B

45℃

high Accuracy

SCM2100 10Torr

-10

10

30

50

70

90

0 1000 2000 3000 4000 5000 6000 7000 8000 9000 10000

OUT(mV)

Err

or(m

V)

0.2%reading

sample1

sample2

sample3

sample4

One sensor with very high resolution and stability provides functions of multi-ranges　2ch as option

10V

10Torr500Torr

6V

4V

2V

8V

2Ch OUTPUT Range

10Torr500Torr

㈱テムテック研究所

Modeling:

SCM2100- Model- Sw- Range -Fitting

V :VCR 1/2 (8 VCR) FemaleK :KF-16, (NW 16KF)

OPTIONKF-25 ICF-34 ,others

Pressure Ranges:

11T: 10Torr20T: 20Torr12T: 100Torr13T: 1000Torr

OPTION X kPaA

_ : Normal Type H : 100℃　HeatingHH : 150℃　Heating

_ : No Relay SWTP : with Relay SW

　

Piston gauge

Standard pressure gauge　DHI　RPM4　

Calibration Station

Standard pressure gauge　RPM４　Accuracy　0.008% reading

Serial P3-54553 Date calibrated　　06/DEC

http://www.dhinstruments.com/