Edi

tion

12.

05Precision Surface Grinding Machine

MPS 3-134

G&N Genauigkeits Maschinenbau Nürnberg GmbH, Wetterkreuz 35, 91058 Erlangen,Telefon:+49 (09131) 7576-0, Telefax: (09131) 771291

E-mail: info@grinders.de, Internet: http://www.grinders.de

Specification

GenauigkeitsMaschinenbauNürnberg GmbH

Grinding-

machines

Specification2

MPS 3 - 134

Specification may change without prior notification dueto technical improvement!

Date of release: Jan 2006

GenauigkeitsMaschinenbauNürnberg GmbH

Schleif

maschinenReduction of breakage rates in relation tocell edge roughness

• Manufacturer of Precision Grinding Machines• Machines for grinding applications with

semiconductor material as well as metal, glass,ceramics and other brittle materials

• Also machines for grinding the surfaces of poly-crystalline and mono-crystalline silicon bricks

• By grinding the brick surfaces, the subsurfacedamage of the solar brick is minimized

• The high surface quality of the brick reduces thebreakage rate of the sawed solar cells

General informationGrinder model MPS 3H-134 Single ( high througput) MPS 3H-135/600Material Silicon blocks Silicon blocksBlock diameter or section size 156 x 156 mm 156 x 156 mmIngot length 180 mm or other totaling 300 mm max. 600mmGrinding D46/D28 250 µm D46 one cut 250µm; D15 one cut 50µm

Grinding DataGrinding Wheel D46/D15 combi wheel D46/D15 TWIN modeInfeed per Cut: 50µmTable Speed: 300 mm/min rough/fine in one stepGrinding Coolant: 600 l/h 600 l/h

Surface roughness Ra: 0,1 µm grinding wheel D15 0,1 µm grinding wheel D15

Rmax or Ry: 1 µm 1 µmMicro-cracks: <10 µm <10 µmDimension: X.0 ± 0.4 mm X.0+/- 0.4Angle: 90 ± 0.2 DegreeChampring: e.g.5 ± 0.5 mm e.g.25 +/- 0.5 mmChampring angle: 45 ± 0.3 DegreeWaviness (bow) <=70 µmParallelism <=70 µm

Grinding wheels: D15 > 14.000 blocks, D46 > 7.000 blocks, D91 > 10.000 blocks, D28 > 20.000 blocks

Air 15 m³ /hElectric power: max. 10 kW

Performance specification *All blocks shall be ground on all four sides *All handling of material shall at all times assure that no undue stress of any kind shall be imparted upon the material. *Block size spec after grinding: Dimension: X,0 ± 0,4 mm Angle: 90 ± 0,3 Degree *Blocks shall be chamfered on all four edges lengthwise. *Chamfering acceptance criteria are: Chamfering: 5 ± 0,5 mm Chamfering angle: 45 ± 0,3 Degree Micro-cracks <10 µm Non cracks and chipping, non visible damage.

Reduction of breakage in relation to the roughness of the cell edges

Layout Plan MPS 3H134

Machine height:2100mm (without signal light)2440mm (with signal light)

Average Ra.-value of the grinding wheels [ μm] Steel Ha.-Metal Alu Ceramic Al2O3 Glass Si

# 8000 0,0025

# 4000 0,004

D 3 0,01

D7K 0,005 0,002 0,016

D15K 0,009-0,017 0,01-0,07 0,02-0,08

D15M 0,1

D20K

D20M

D25K 0,11

D25M

D35K

D35M 0,175

D46K 0,009-0,02 0,08-0,2 0,28-0,35 0,07-0,13 0,1-0,25

D46M 0,1-0,15

D76K 0,12-0,18 0,14-0,19 0,05-0,09

D76M

D91K 0,23-0,29 0,2-0,6

D91M 0,22-0,28 0,2-0,8 0,2 0,5-1,2

D107K

D107M

D126K 0,18-0,2 0,37-0,4

D126M 0,5-0,8

B30K 0,04-0,08 0,06

B46K 0,12-0,15 0,25-0,28 0,27-0,3

B76K 0,09-0,13

B107K 0,1-0,15

B126K 0,12-0,15 0,25-0,28 0,27-0,29

1A46J14 0,6-1,5

EK120 0,23-1,0

SC320 0,06-0,16

Surface quality diagram

GenauigkeitsMaschinenbauNürnberg GmbH

G&N GmbH, Wetterkreuz 35, 91058 ErlangenTelefon: +49 9131 7576-0, Telefax: +49 9131 771291, E-Mail: info@grinders.de, Internet: www.grinders.de

Super finishing of mono + poly-crystalline silicon blocks for solar waferGrinding Machine MPS 3-134 single mode

■■■■■ Prepared for robot-loading ofblocks

GrindingMachines

Technical Datablock diameter 156 x 156 mmBlock length 180 - 300 mmFlat gringing spindle

AC motor 7.5 kWSpeed 1430 rpmCombiwheel D46/D15

Chamferring spindleAC motor 2.2 kWSpeed 3000 rpmCombiwheel D46/D15

Block clamping VacuumBlock handling VacuumEl. connection 10 kWWater 80 l/hAir 15m³/hWeight 1600 kgFootprint 3000x 2100 mmHeight 2440 mm

■■■■■ Second grinding spindle for simultaneouslychamferring the edges of the block.■■■■■ chamferring of the edges and grinding of thefaces in the same clamping position (norechucking)■■■■■ Automatic handling (loading, unloading, turning)of the block.■■■■■ Automatic grinding process

High precision flatgrinding machine

with oscillatingtable and two

spindles

G&N GmbH, Wetterkreuz 35, 91058 Erlangen, Germ. (near Nuernberg)Telefon: +49 9131 7576-0, Telefax: +49 9131 771291, E-Mail: info@grinders.de, WWW: http://www.grinders.de

High precision grinding process withtwo wheels high throughput

ready ground block

Raw block1. grindingstep

Block turning 90°

2. grindingstep

Block turning 90°

3. grindingstep

Block turning 90°

4. grindingstep

grinding chamferringD46 / D15,

grinding chamferringD46 / D15,

grinding chamferringD46 / D15,

D46 firstD15 sec

grinding chamferringD46 / D15,

Grinding principle

312/05

1. Technical data and connected loads

1.1 Technical data

1.1.1 Grinding spindles

1.1.1.1Main grinding spindle

Type Twin spindle 90-00720-0016Motor 90-00219-1296Speed 1430 min-1Roughing wheel 90-00625-0966Finishing wheel 90-00625-0100

1.1.1.2 Chamfer grinding spindle

Type single spindle 90-0800-0610Motor 90-00219-1291Speed 3000/3600 min-1Wheel 90-00625-0017/0018

1.1.2 Grinding head infeed

1.1.2.1Main grinding spindle

Vmax up to 15 mm/minResoultion 1μmHeight adjustment for Column (coarse) 150 mmHeight adjustment for Column (fine) 12 mm

1.1.3 Table

Speed up to 10 m/minResoultion 50 μmMax. stroke of table 770 mm

1.1.4 Block clamping system

Vacuum

1.1.5 Block handling system

Vacuum/pneumatic

1.2 Connected loads / consumption

Electrical connection approx.10 kVAVoltage depends on order (standard 400 V 50 Hz)Grinding water1) max. 4 bar, max. 1200 l/h,

Specification4

MPS 3 - 134

Backwash chucks (Ø100mm)1) max. 3 bar, max. 600 l/hCompressed air main supply min. 6 bar, 11 m3/h

Drain

grinding water pipe; 50 mm diameterVacuum pump hose, 1/2"

1.3 Layout / Weights

Base area 5) approx. 3000mm x 2100mmHeight 2100mmWeight 1600 kgworkpiece length 180 - 265 mmworkpiece edge length 125 / 150 / 156 mm

1.4 Water consumption

Vacuum pump ca. 180l/h (city-water)Connecting size 1/2 InchWater pressure supply adjustable up to 2 bar

Coolant and process water up to 20 l/min (DI-water), filtered atConnecting size 3/4 InchWater pressure supply adjustable up to 4 bar

1.5 Compressed air consumption

Operating air min. 6 bar, free of oil and waterAir flow ca. 3 m3/hConnecting size 1/2 InchProcess air min. 6 bar, oil and waterfreemax. process air flow 20 m3/hProcess consumption ca. 5 m3/hConnecting size 1/2 Inch

1.6 Environmental factors

operating temperature 18 - 25 °C6)

relative humidity of air 40 - 70 %, no condensationAltitude 0 NN - 2000 NNnoise level 65 - 75 dB(A)

1) The temperature of the grinding water should not deviate more than ±2°C from room temperature! The water must be filtered by 5 μm.2) The amount of water throughput during backwash impulse is approx. 600 l/h.

The water supply should be adjusted to that amount.3) The pressurized air must be completely free of oil residues, filtered by 5 μm

and prepared by refrigerated dryer.4) The pressurized air must be completely free of oil residues.5) Maximum required base area with open doors.6) During the grinding process the temperature should be kept within a range

of ±2°C to obtain best precision. A clima controlled room is recommended.

512/05

2.Layout Plan

Machine height:2100mm (without signal light)2440mm (with signal light)

Specification6

MPS 3 - 134

fine infeed

limit switch 5S2

limit switch for column downwardsfactory set!

trip cam factory set!

fine infeeddown position

max

. ra

nge

12 m

m

fine infeedupper position

3.Machine parts

3.1 Guide column and fine infeed (downfeed) unit

The column is supported by a linear ball bearing.

The grinding head is supported by slideway.

The upper limit stop of the grinding head infeed is monitored by the limit switch5S1, the lower limit stop by limit switch 5S2.

Fine infeed (downfeed) system (see operating panel Chapter 8 page 2)

712/05

3.2 Grinding spindles and wheels

The grinding spindles is driven by a three phase special balanced motor through apoly-v belt. For adjustment of the belt tension the driving motor can be shifted.

The grinding spindle is assembled in a special spindle carrier. To exchange thegrinding spindle it is necessary to loose the three clamping screws and thighten thethreaded bolts.

Replacement of the ball bearings will be necessary if the grinding finish is no longerup to the required standard or the shaft taper has a run-out of ³ 3...5 μm.

chamferring spindle -outer wheel Ø 125 mm90-00625-0017 -inner wheelØ 90 mm 90-00625-0018

twin spindle-rough-grinding wheel-diameter Ø 220 mm90-00625-0966 -fine-grinding wheel-diameter Ø 200 mm 90-00625-0100,

chamferringspindle motor90-00219-1291

twin spindle motor90-00219-1296

The grinding wheels are diamond wheels.

Specification8

MPS 3 - 134

G&N-Twin- Spindle: G&N-Order No. 90-00720-0016

Grinding wheel-set G&N-Order No. 60-00328-0009(Flange, screws, diamond wheelsand coolant nozzle)

The outer and inner wheels mustbe removed when grinding themagnetic plate!A typical normal wheel,e.g. 90-00326-0225 must be mountedon flange 94-10020-0001 and themounted to the inner wheel flangeposition

Flange for normal wheels G&N-Order No. 94-10020-0001

3.2.1 Twin spindle

Flange

Special Nut with CoolantNozzleWrench Spanner 36

G&N Twin-Spindle

G&N Nr. 90-00720-0016

Diamondwheel(outer twin)

Diamondwheel(inner twin)

912/05

3.3 Machine table and clamping system

The machine table is of oscillating type. The table is driven by a servo motor via aball spindle. The table bearings are high precision roller bearings.

vacuum clamping plate 60-00355-0066

machine table

The clamping system is a vacuum system consisting of the clamping plate and thevacuum system.

Specification10

MPS 3 - 134

3.4 Ingot Handling system

The ingot handlindg system consists of the workpiece deposit and theworkpiecefeeding attachment. The workpiece feeding attachment is driven bypneumatic cylinders, the workpiece is clamped by vacuum during movment.

workpiece feedingattachment 60-00381-0043

water splash guard 60-00382-0171workpiece deposit 60-00366-0040

Function:

1. The loading robot deposits the ingot on the workpiece deposit plate.2. The feeding attachment takes the ingot and puts it onto the clamping plate.3. First grinding cycle.4. The feeding attachment takes the ingot, turns it 90° and puts it back onto theclamping plate.5. Second grinding cycle.6. The feeding attachment takes the ingot, turns it 90° and puts it back onto theclamping plate.7. Third grinding cycle.8. The feeding attachment takes the ingot, turns it 90° and puts it back onto theclamping plate.9. 4th grinding cycle.10. The feeding attachment takes the ingot, takes it out of the grinding area andputs it on the deposit unit.

1112/05

3.5 Machine control panel

The control panel is mounted on a flexible arm and can be moved into any positionrequired during working at the machine.

The panel consists of

Stepcon control unit (Downfeed control);touch screen;Operating keys;Emergency stop.

④

Touch screen

Stepcon Downfeedcontrol

Emergency stop

Operating keys

Specification12

MPS 3 - 134

3.5.1 Touch screen (manual mode)

1 = menu (button to change back to manual mode)2 = override +3 = override -4 = table vacuum on/off5 = table backwash on/off6 = table backblow on/off7 = table backblow on/off8 = splash guard open/closedcontol lamp at the table is on9 = table blowoff on/off10 = table oscillate on/off11 = select table position

- grinding pos.- workpiece length 1 ( 210 mm)- workpiece length 2 ( 240 mm)- workpiece length 3 ( 260 mm)- workpiece length 4 ( 290 mm)

12 = start to position13 = start table cleaning

input override value