Precision Linear Motorized Stages
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Precision Linear Motorized Stages
Proteep MallikOPTI 521 Tutorial Presentation
December 4, 2006
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OPTI 521 Tutorial Presentation 2April 19, 2023
Precision Linear Motorized Stages
Long travel (~2m) High precision (~nm level) Stepper drives Parker Motion products
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OPTI 521 Tutorial Presentation 3April 19, 2023
Outline Motion Control
what, where and why? System Components
stage (long range) motor (servo vs stepper) controller computer/software
Examples vendors specifications cost
Parker Motion System Linear sliders and stages 6K controller Computer & monitor
Null test system Conclusions
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OPTI 521 Tutorial Presentation 4April 19, 2023
Motion Control Precise positioning of optics and mechanics Used in:
laser machining, weldingprinting, patterningwafer fabrication, lithography robotics… and of course, in many optical systems
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OPTI 521 Tutorial Presentation 5April 19, 2023
Motion Control Why motorized?
repeatable, precise and smooth moving heavy parts automation easy to manage complex systems less manpower
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OPTI 521 Tutorial Presentation 6April 19, 2023
System Components-overall system
ROTARY BRAKE
SHAFT BRAKE
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OPTI 521 Tutorial Presentation 7April 19, 2023
System Components-stage
•Range of travel (~ 2m)
•Precision (~ nm)
•Repeatability (~ sub nm)
•Stiffness (extruded Al, excellent)
•Motor requirements (torque, efficiency)
•Cost (~$5000)
•Ease of operation (cabling, computer control)
•Mount on large, flat surface (minimum deflection)
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OPTI 521 Tutorial Presentation 8April 19, 2023
System Components-motor
Servo Ironcore, ironless, slotless Typical repeatability ~1nm, resolution ~0.01nm Needs position encoders Very smooth, fast motion for large loads AC or DC, high voltage Expensive (~$5000 +)
Stepper Multi-pole motors N-bit encoders (2N bits/step) Repeatability ~10nm, resolution ~sub nm No need for position encoder Easier maintenance and lower cost than servo
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OPTI 521 Tutorial Presentation 9April 19, 2023
System Components-controllers
•Interfaces user to linear stage
•via computer or remote control
•Drive, encoder, limit and communication inputs
•Programmable
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OPTI 521 Tutorial Presentation 10April 19, 2023
System Components-computer
•RS-232 or ethernet communication
•Software from manufacturer
•Programming via Active X or other windows platforms
•Industrial computers, touchscreen control monitors
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OPTI 521 Tutorial Presentation 11April 19, 2023
Vendors
Parker Automation (Parker Hannifin, Daedal Positioning, Compumotor)
Aerotech Velmex Newmark
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OPTI 521 Tutorial Presentation 12April 19, 2023
Specifications
Image
$1800$800$5000$2000$25,000$15,000Cost
150kg16kg630kg1000kg50kg135kgMax Load
4μm2.5μm1.3μm0.1nm0.4μm0.5μmRepeatability
6μm(not given)(not given)0.06nm0.001μmResolution
2m0.8m2m1.5m1.2m1mTotal Travel
BiSlideXSlide406XR400STABL2000ALS5000
Velmex(stepper)
Parker(stepper)
Aerotech(servo)
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OPTI 521 Tutorial Presentation 13April 19, 2023
Parker Automation400ST Square Rail Sliders 406XR Series Sliders
Drive and Motor Screw with stepper motor Linear bearing, ballscrew & motor
Total Travel 1.5m 2m
Max acceleration 20m/s2 20m/s2
Repeatability 0.1nm 1.3μm
Maximum Load 1000kg 630kg
Stage Weight 25kg 2.7kg
Size 2m X 0.2m X 0.12m 2.3m X 0.15m X 0.05m
Cost $2000 Up to $5000
www.parkermotion.com
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OPTI 521 Tutorial Presentation 14April 19, 2023
Parker Automation
•Workstations
•Ethernet communication with controllers
•Controllers can be used in client-server modes
•Controllers can be connected to each other via ethernet hub
•Touchscreen monitors
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OPTI 521 Tutorial Presentation 15April 19, 2023
Null Test System
3-axis stage
Tilt stage
CGH positioning stage
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OPTI 521 Tutorial Presentation 16April 19, 2023
Null Test System
6K8 Controller
Drivers (7)
Computer communication
Input Power Supply
•5A drivers/motors
•20A, 120V AC input power
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OPTI 521 Tutorial Presentation 17April 19, 2023
Conclusions
Precision motion control a reality and necessity
3 choices to make: stage, motor, controller Complete automation via computer and
available software