Power Quality Switch Sag

August, 2006 1Sags Happen

Power QualitySoftSwitching Technologies

8155 Forsythia Street

Middleton, WI 53562


PQ Terms

Clean Power

Transient Sag

Swell Interruption

Dirty Power


Transients

Equipment effectsInsulation breakdown

Electrical damage Process lockups

PLC errors


Sag (1 phase)

Equipment effectsShutdowns

Ghosts errorsRandom lockups

Reduced life


Sag (2 phase)

Equipment effectsShutdowns

Ghosts errorsMotor stallsReduced life


Sag (3 phase)

Equipment effects Process Shutdowns

VFD failurePower supply damage

Reduced life


Swell

Equipment effectsMotors Overheating

Random Breaker tripsInsulation breakdown

Reduced life


Interruptions(1 Phase)

Equipment effectsRandom Shutdowns

Motor FailuresTripped breakersRandom lockups





Reduced life


IEEE Standard P-1159


Power Quality Variations


Semi F47-0606


Semi F47-0606

SemiconductorEquipment andMaterialsInternational

Facilities47- seq. number06- month06- year

F47-0606


Semi F47-0606

Primary focus of the specification is Process Equipment:Etch Equipment (Dry & Wet)

Film Deposition Equipment (CVD & PVD)Thermal Equipment

Surface prep and clean equipmentPhotolithography Equipment (Scanners, Stepper & tracks)

Ion Implant equipmentMetrology equipment

Automated Test equipmentChemical mechanical polishing/planarization equipment

Note: All process tools should be considered.


Semi F47-0606

Secondary focus of the specification is subsystems:Power SuppliesRF Generators

Ultrasonic GeneratorsComputers & communication systems

Robots & factory interfacesAC contactor & relay coilsChillers and cryo pumps

Pumps & blowersAdjustable speed drives

Note: subsystems can cause primary tools to shut off due to interlocks


Semi F47-0606

SEMI F47

0%

10%

20%

30%

40%

50%

60%

70%

80%

90%

Duration of Sag (seconds)

Pe

rce

nt

Vo

lta

ge

Re

ma

inin

g

recommended

required0.2 0.51 cycle 1 10


What does it mean to:

USERS OEM’S FACILITIES

Best practice for tool uptimeBalance of cost vs. protectionNo damaged toolsIncreased Wafer ProductionLess wafer reworkImproved quality

Mandated by userRide-thru, no BatteriesMarket advantageOption: up charge $$$Third Party Validation

No shutdowns on Chillers, compressors, Vacuum pumps, exhaust fansFewer internal complaints from Reduced maintenance battery freeExtended life on equipment: drives power supplies, motors, ect…


Equipment Sensitivity


I-Grid/I-Sense


Models:V3480A00V3120A00

Under: $1000.00

I-Sense voltage event recorder


What is the I-Grid?

• Independent Web based power grid monitoring network for Voltage Sags

• Over 2,500 monitors tracking voltage and frequency in real time around the world

• Synchronized to GMT for absolute “sequence of events” monitoring

• Linked to National Weather Service


Domestic I-Sense Monitoring Locations


0

10

20

30

40

50

60

70

<.1 sec <.25 sec <.5 sec <.75 sec < 1 sec < 1.5 sec < 2 sec < 5 sec < 15 sec

Power Quality is defined in Milliseconds

Significant power quality events (<80% nominal) from major I-Grid customers over the past 3 years (22,038 total events).

98% of events are less than 2 seconds


National Perspective


Phoenix Metro Area (69% sag)

8 monitors recorded an event on 12/08/2004 within one tenth of a second


Power Grid is Interconnected


Close-up on the Grid: Coors Brewing


February 12, 2006 Northeast Blizzard Radar ImageEvents occurred in Canada, New York, New Jersey, Delaware, Maryland and Virginia

Weather

During the recent Northeast Blizzard, 74 significant (< 80%) Voltage Sags were recorded by I-Sense monitors ranging from Canada to Virginia


Summary of Events:All Events

96%

2%

2%

22.6

24

18

0

5

10

15

20

25

80-88% 60% - 80% Below 60%

Average Disturbances Per Monitor Less than Two Seconds

Example PQ Report – Auburn, AL – 2005

Figure 1. Summary of Events: Multiple Monitor Average- During the calendar year 2005, 3 manufacturing locations in the Auburn, AL area recorded an average of 68 power disturbances per site. - Of all the events, 96% could have been protected by the DYSC technology. - Average disturbances per monitor are listed below:

Figure 2. Summary of Events: Less than Two Seconds-Of the average 64.6 disturbances per site that were below two seconds, it is likely that 22.6 events did not impact production, 24 events were probable production mishaps, and 18 events definitely caused production downtime.

OK: Typical automation equipment will not be affected by these events. Some very sensitive equipment may be affected, but in general, these events should not be counted as having an impact on a typical automation system.

Probable: Typical automation equipment such as relays, solenoids, contactors, PLCs, and HMI, screens will usually “error out” or trip off during these events and many times are blamed on faulty automation equipment.

Definite: Almost all automation equipment will be impacted by these events. Very few electrical devices live through an event in this range except possibly the lights

Average Disturbances per Monitor: 68

Events Less than Two Seconds 64.6

Events between 2 Seconds and 15 minutes 1.6

Events Greater than 15 minutes 1.6

Event Impact Definition

OK Probable Definite

3 MonitorsWithin GreaterAuburn Area


What Causes Voltage Sags?

Shouldn’t the Utilities Clean up their act?


Power Quality phenomena costs the continuous process and fabrication industries in this country over $100B annually.*

Today’s automated factory has more computing power than the average IT Department and factories don’t run well on “dirty power.”

Premium Power is not Clean Power

98% of all “dirty power anomalies” are voltage sags lasting less than 2 seconds

Voltage sags cause extensive unscheduled downtime

Did You Know…


Mother Nature


Drunk’n Utility Poles


Old Man Winter


Equipment Failures


Overgrown Trees


Equipment Operators


Fires

Power Quality Switch Sag

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