Polymer Microfabrication: Methods and Application
Transcript of Polymer Microfabrication: Methods and Application
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KIT – University of the State of Baden-Wuerttemberg and National Research Center of the Helmholtz Association
Institute for Applied Materials & Department of Microsystems Engineering (IMTEK) at University of Freiburg
www.kit.edu
Polymer Microfabrication: Methods and Application
Thomas Hanemann
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Overview
Definitions and relevant polymer properties Curing of prepolymers Technical classification Thermal properties
Rapid Prototyping/Additive Manufacturing Stereolithography 3D-Printing
Master fabrication Polymer Microreplication
Hot Embossing Injection Moulding
Thomas Hanemann
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Polymer Microcomponents
Large size, high precision, high accuracy, larger shot weights (g-range) (DVD, Blu Ray) Small size, high precision, high accuracy smaller shot weights (mg/g-range)
DVD: 4.7 GB Track pitch: 0.74 µm Min. pit length: 0.4 µm
Blu ray Disc: 25 GB Track pitch: 0.32 µm Min. pit length: 0.15 µm
7 mg
Thomas Hanemann
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Definitions and relevant polymer properties
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Microfabrication
Reactive processing UV-curing (thermal-curing) Stereolithography Nanoimprint Reaction moulding
Melt processing Hot Embossing Extrusion Injection Moulding
Thomas Hanemann
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Technical Classification
Reversible plastizising/melting possible
Reversible plastizising/melting impossible
Thomas Hanemann
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Classification
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Phase transitions
Temperature
Glassy state (solid)
Glass transition temperature range (softening range)
Rubber/melting state
Melting range (semi-crystalline thermoplastics)
Melting state
Amorphous thermoplastics
Semicrystalline thermoplastics
Glassy state (solid) Rubber state
Thomas Hanemann
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Phase transitions and mechanical properties
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Thermal limit
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Thermal expansion
Linear coefficient of thermal expansion (mm/(mm K))
αpolymer > αmetal > αceramic TLL∆∆
=α
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Flow behaviour - Rheology
Thomas Hanemann
Polymer microfabrication: Injection Molding and Hot Embossing (Melt processing):
Shear viscosity
important during injection
Stretching viscosity
important during demolding Polymers
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Rapid Prototyping Additive Manufacturing
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Rapid Prototyping: Transformation of a conceptional design into a solid prototype
Rapid Tooling: Direct fabrication of molding or casting tools for small scale production
Rapid Manufacturing: Direct small scale fabrication without moulding
Rapid Prototyping
Thomas Hanemann
Optical Methods:
Stereolithography (SLA)
3D-Printing:
Multi-Jet Modeling (MJM)
Fused Deposition Modeling (FDM)
Selective Laser Sintering (SLS)
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Stereolithography (SLA)
Thomas Hanemann
• 3D Systems, Valencia, CA • Patent 1986 • Epoxides, Acrylates
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3D-data model sliced model layer for mask projection
physical model
Mask projection via DLPTM-Technology from Texas Instruments.
Mini-Stereolithography
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Hearing aids
Mini-Stereolithography
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Rapid Micro Product Development
layer thickness > 1 µm
resolution in any direction > 10 µm
accuracy > 1 µm layers
materials: acrylics, epoxies
smallest component size: 1 x 10 x 10 µm³
maximum component size: 50 x 50 x 50 mm³
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Rapid Micromanufacturing
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Fused Deposition Modeling (FDM)
Thomas Hanemann
https://store.makerbot.com
Print Technology: Fused Filament Fabrication Build Volume: 28.5 x 15.3 x 15.5 cm³ Best layer resolution: 100 µm Positioning Precision: XY: 11 µm; Z: 2.5 µm Filament Diameter: 1.75 mm Nozzle Diameter: 0.4 mm
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Multi-Jet-Modeling
Thomas Hanemann
Mode Build Volume (XYZ) Resolution (XYZ) Materials
High Quality 298 x 185 x 203mm / 11.75 x 7.3 x 8" 328 x 328 x 606 DPI Acrylate
Ultra-High Quality
127 x 178 x 152mm / 5 x 7 x 6" 656 x 656 x 800 DPI Acrylate
Phase-Change-Processing: Printing UV-Curing
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Source: DSM Somos
Applications
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Master (mould) fabrication
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Micromechanical machining
Laser Micromachining
Electrodischarge Machining (EDM)
Lithography - Electroplating
Master (mould) fabrication
Thomas Hanemann
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Polymer Microreplication
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Hot Embossing Process
Molding Heating Demolding
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Polymers for Hot Embossing
PEEK Tmold ~ 350°C
LCP Tmold ~ 310°C
POM Tmold ~ 130°C
PP Tmold ~ 150°C
PC Tmold ~ 180°C
PMMA Tmold ~ 170°C
PSU Tmold ~ 230°C
PVDF Tmold ~ 175°C
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Gallery
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Commercial Equipment
Obducat
EV 520HE, EVG
Suss NPS 200
Wickert WMP 1000
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Roll-to-Roll Technologies
+ very fast
+ continous
+ in-line process
- complex machinery
- restricted to low aspect ratios
- small parameter window
Epigem, UK
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2. Holding
3. Demolding, Plastication
1. Injection
Injection molding - macro
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Aspects of the miniaturisation of the injection molding process:
■ smallest shot weights down to 1 mg
■ large flow length to width ratio
■ size of the microstructures in the same range like vents & venting channels
■ cold molding tools result in solidifying of the polymer resin prior to a complete mold filling
Micro-Injection Molding
TM: Molding temperature TD: Demolding temperature
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Machinery Concepts - the Improved Conventional Approach ■ conventional injection molding machinery with
full electric drive
■ suitable for clean room production
■ enhanced shot weight control
■ enhanced position control +/- 0.01 mm
DVD optical pick up system: lens holder
Closing Evacuation Temp. >> Tg
Injection
Cooling
Demolding
Micro-Injection Molding
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Machinery Concepts - the real “Micro“ Approach
Concept: - integrated construction of a small injection unit with an all electric machinery and peripheral equipment
Micro-Injection Molding
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Comparison
High fix costs for injection molding requires large numbers to get reasonable prices
Low automation, long cycle times are responsible for lower limit in hot embossing
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Resumé
Polymers offer a huge variety of different properties
Established construction rules
Established master structure fabrication methods
Rapid Prototyping possible
Mass fabrication methods established
Thomas Hanemann