Plasma and Sheath - Seoul National University
Transcript of Plasma and Sheath - Seoul National University
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Introduction to Nuclear Engineering, Fall 2018
Plasma and Sheath
Fall, 2018
Kyoung-Jae Chung
Department of Nuclear Engineering
Seoul National University
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Motions in uniform electric field
Equation of motion of a charged particle in fields
ππππππππππ
= ππ π¬π¬(ππ, ππ) + ππ Γ π©π©(ππ, ππ) ,ππππππππ
= ππ(ππ)
Motion in constant electric field
For a constant electric field π¬π¬ = π¬π¬ππ with π©π© = 0,
Electrons are easily accelerated by electric field due to their smaller mass than ions.
Electrons (Ions) move against (along) the electric field direction.
The charged particles get kinetic energies.
ππ(ππ) = ππππ + ππππππ +πππ¬π¬ππππππ ππ2
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Motions in uniform magnetic field
ππππππππππ
= ππππ Γ π©π©
πππππ£π£π₯π₯ππππ
= πππ΅π΅0π£π£π¦π¦
πππππ£π£π¦π¦ππππ = βπππ΅π΅0π£π£π₯π₯
πππππ£π£π§π§ππππ = 0
ππ2π£π£π₯π₯ππππ2 = βππππ2π£π£π₯π₯ ππππ =
ππ π΅π΅0ππ
Motion in constant magnetic field
For a constant magnetic field π©π© = π΅π΅0ππ with π¬π¬ = 0,
Cyclotron (gyration) frequency
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Motions in uniform magnetic field
Particle velocity
π£π£π₯π₯ = π£π£β₯ cos ππππππ + ππ0π£π£π¦π¦ = βπ£π£β₯ sin ππππππ + ππ0π£π£π§π§ = 0
Particle position
π₯π₯ = ππππ sin ππππππ + ππ0 + π₯π₯0 β ππππ sinππ0π¦π¦ = ππππ cos ππππππ + ππ0 + π¦π¦0 β ππππ cosππ0π§π§ = π§π§0 + π£π£π§π§0ππ
Larmor (gyration) radius
ππππ =π£π£β₯ππππ
=πππ£π£β₯ππ π΅π΅0
Guiding center
π₯π₯0,π¦π¦0, π§π§0 + π£π£π§π§0ππ
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Gyro-frequency and radius
The direction of gyration is always such that the magnetic field generated by the charged particle is opposite to the externally imposed field. diamagnetic
ππππππ = 2.80 Γ 106 π΅π΅0 Hz π΅π΅0 in gauss
ππππππ =3.37 πΈπΈπ΅π΅0
cm (πΈπΈ in volts)
For electrons
For singly charged ions
ππππππ = 1.52 Γ 103 π΅π΅0/πππ΄π΄ Hz π΅π΅0 in gauss
ππππππ =144 πΈπΈπππ΄π΄
π΅π΅0cm (πΈπΈ in volts,πππ΄π΄ in amu)
Energy gain?
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Motions in uniform E and B fields
Equation of motion
ππππππππππ
= ππ π¬π¬ + ππ Γ π©π©
Parallel motion: π©π© = π΅π΅0ππ and π¬π¬ = πΈπΈ0ππ,
πππππ£π£π§π§ππππ = πππΈπΈπ§π§
π£π£π§π§ =πππΈπΈπ§π§ππ ππ + π£π£π§π§0
Straightforward acceleration along B
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π¬π¬Γπ©π© drift
Transverse motion: π©π© = π΅π΅0ππ and π¬π¬ = πΈπΈ0ππ,
Differentiating,
πππππ£π£π₯π₯ππππ
= πππΈπΈ0 + πππ΅π΅0π£π£π¦π¦
πππππ£π£π¦π¦ππππ
= βπππ΅π΅0π£π£π₯π₯
ππ2π£π£π₯π₯ππππ2 = βππππ2π£π£π₯π₯ππ2π£π£π¦π¦ππππ2 = βππππ2
πΈπΈ0π΅π΅0
+ π£π£π¦π¦
Particle velocity
π£π£π₯π₯ = π£π£β₯ cos ππππππ + ππ0π£π£π¦π¦ = βπ£π£β₯ sin ππππππ + ππ0 β
πΈπΈ0π΅π΅0
π£π£ππππ
πππΈπΈ =π¬π¬ Γ π©π©π΅π΅ππ
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DC magnetron
A magnetron which is widely used in the sputtering system uses the π¬π¬Γπ©π© drift motion for plasma confinement.
What is the direction of π¬π¬Γπ©π© drift motion?
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Motions in gravitational field
Generally, the guiding center drift caused by general force ππ
If ππ is the force of gravity ππππ,
ππππ =1ππππ Γ π©π©π΅π΅ππ
ππππ =ππππππ Γ π©π©π΅π΅ππ
What is the difference between πππΈπΈ and ππππ?
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π΅π΅π΅π΅β₯π©π©: Grad-B drift
The gradient in |π©π©| causes the Larmor radius to be larger at the bottom of the orbit than at the top, and this should lead to a drift, in opposite directions for ions and electrons, perpendicular to both π©π© and π΅π΅π΅π΅.
Guiding center motion
πππ»π»π΅π΅ = Β±12 π£π£β₯ππππ
π©π© Γ πππ΅π΅π΅π΅ππ
π΅π΅π΅π΅
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Curved B: Curvature drift
The average centrifugal force
Total drift in a curved vacuum field (curvature + grad-B)
ππππππ =πππ£π£β₯2
π π πποΏ½ππ = πππ£π£β₯2
πΉπΉπππ π ππ2
Curvature drift
πππ π =1ππππππππ Γ π©π©π΅π΅ππ =
πππ£π£β₯2
πππ΅π΅πππΉπΉππ Γ π©π©π π ππ2
πππ π + πππ»π»π΅π΅ =πππππΉπΉππ Γ π©π©π π ππ2π΅π΅2
π£π£β₯2 +12 π£π£β₯
2
π΅π΅ β1π π ππ
π΅π΅ π΅π΅π΅π΅ = β
πΉπΉπππ π ππ2
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π΅π΅π΅π΅β₯π©π©: Magnetic mirror
Adiabatic invariant: Magnetic moment
Magnetic mirror
As the particle moves into regions of stronger or weaker π΅π΅, its Larmorradius changes, but ππ remains invariant.
ππ = πΌπΌπΌπΌ =12πππ£π£β₯
2
π΅π΅
12πππ£π£β₯0
2
π΅π΅0=
12πππ£π£β₯ππ
2
π΅π΅ππ
π£π£β₯ππ2 = π£π£β₯02 + π£π£β₯02 β‘ π£π£02
π΅π΅0π΅π΅ππ
=π£π£β₯02
π£π£β₯ππ2 =π£π£β₯02
π£π£02= sin2ππ
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Motions in a dipole magnetic field
Trajectories of particles confined in a dipole field
Particles experience gyro-, bounce- and drift- motions
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Boltzmannβs equation & macroscopic quantities
Particle density
Particle flux
Particle energy density
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Particle conservation
ππππππππ
+ π΅π΅ οΏ½ ππππ = πΊπΊ β πΏπΏ
The net number of particles per second generated within Ξ© either flows across the surface Ξ or increases the number of particles within Ξ©.
For common low-pressure discharges in steady-state:
Hence,
πΊπΊ = πππππ§π§ππππ , πΏπΏ β 0
π΅π΅ οΏ½ ππππ = πππππ§π§ππππ
The continuity equation is clearly not sufficient to give the evolution of the density ππ, since it involves another quantity, the mean particle velocity ππ.
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Momentum conservation
ππππππππππππ
+ ππ οΏ½ π΅π΅ ππ = πππππ¬π¬ β π΅π΅ππ βππππππππππ
Convective derivative Pressure tensor isotropic for weakly ionized plasmas
The time rate of momentum transfer per unit volume due to collisions with other species
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Equation of state (EOS)
An equation of state is a thermodynamic equation describing the state of matter under a given set of physical conditions.
ππ = ππ ππ,ππ , ππ = ππ(ππ,ππ)
Isothermal EOS for slow time variations, where temperatures are allowed to equilibrate. In this case, the fluid can exchange energy with its surroundings.
The energy conservation equation needs to be solved to determine p and T.
ππ = ππππππ, π»π»ππ = πππππ»π»ππ
Adiabatic EOS for fast time variations, such as in waves, when the fluid does not exchange energy with its surroundings
The energy conservation equation is not required.
ππ = πΆπΆπππΎπΎ,π»π»ππππ
= πΎπΎπ»π»ππππ
πΎπΎ =πΆπΆπππΆπΆπ£π£
(specific heat ratio)
Specific heat ratio vs degree of freedom (ππ) πΎπΎ = 1 +2ππ
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Equilibrium: Maxwell-Boltzmann distribution
For a single species in thermal equilibrium with itself (e.g., electrons), in the absence of time variation, spatial gradients, and accelerations, the Boltzmann equation reduces to
οΏ½ππππππππ ππ
= 0
Then, we obtain the Maxwell-Boltzmann velocity distribution
ππ π£π£ =2ππ
ππππππ
3π£π£2πππ₯π₯ππ β
πππ£π£2
2ππππ
ππ ππ =2ππ
ππππππ
1/2πππ₯π₯ππ β
ππππππ
The mean speed
οΏ½Μ οΏ½π£ =8ππππππππ
1/2
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Particle and energy flux
The directed particle flux: the number of particles per square meter per second crossing the π§π§ = 0 surface in the positive direction
Ξπ§π§ =14πποΏ½Μ οΏ½π£
The average energy flux: the amount of energy per square meter per second in the +z direction
πππ§π§ = ππ12πππ£π£2π£π£π§π§
ππ
= 2ππππΞπ§π§
The average kinetic energy ππ per particle crossing π§π§ = 0 in the positive direction
ππ = 2ππππ
π£π£π‘π‘π‘ =ππππππ
1/2
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Diffusion and mobility
The fluid equation of motion including collisions
In steady-state, for isothermal plasmas
ππππππππππππ
= ππππππππππππ
+ ππ οΏ½ π΅π΅ ππ = πππππ¬π¬ β π΅π΅ππ βππππππππππ
ππ =1
πππππππππππππ¬π¬ β π΅π΅ππ =
1ππππππππ
πππππ¬π¬ β πππππ΅π΅ππ
=ππ
πππππππ¬π¬ β
ππππππππππ
π΅π΅ππππ = Β±πππ¬π¬ β π·π·
π΅π΅ππππ
In terms of particle flux
πͺπͺ = ππππ = Β±πππππ¬π¬ β π·π·π΅π΅ππ
ππ =ππ
ππππππβΆ Mobility π·π· =
ππππππππππ
βΆ Diffusion coefficient
ππ =ππ π·π·ππππ βΆ Einstein relation
Drift Diffusion
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Ambipolar diffusion
The flux of electrons and ions out of any region must be equal such that charge does not build up. Since the electrons are lighter, and would tend to flow out faster in an unmagnetized plasma, an electric field must spring up to maintain the local flux balance.
The ambipolar diffusion coefficient for weakly ionized plasmas
Ξππ = +πππππππΈπΈ β π·π·πππ»π»ππ Ξππ = βπππππππΈπΈ β π·π·πππ»π»ππ
Ambipolar electric field for Ξππ = Ξππ
πΈπΈ =π·π·ππ β π·π·ππππππ + ππππ
π»π»ππππ
The common particle flux
Ξ = βπππππ·π·ππ + πππππ·π·ππππππ + ππππ
π»π»ππ = βπ·π·πππ»π»ππ
π·π·ππ =πππππ·π·ππ + πππππ·π·ππππππ + ππππ
β π·π·ππ +πππππππππ·π·ππ β π·π·ππ 1 +
TeTi
~ππππTe
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Steady-state plane-parallel solutions
Diffusion equationππππππππ
β π·π·π»π»2ππ = πΊπΊ β πΏπΏ
volume source and sink
For a plane-parallel geometry with no volume source or sink
βπ·π·ππ2πππππ₯π₯2
= 0 ππ = πΌπΌπ₯π₯ + π΅π΅
For a uniform specified source of diffusing particles
βπ·π·ππ2πππππ₯π₯2 = πΊπΊ0 ππ =
πΊπΊ0ππ2
8π·π· 1 β2π₯π₯ππ
2
ππ =Ξ0π·π·
ππ2 β π₯π₯
B.C. Ξ π₯π₯ = 0 = Ξ0ππ π₯π₯ = ππ/2 = 0
B.C. symmetric at π₯π₯ = 0
ππ π₯π₯ = Β±ππ/2 = 0
The most common case is for a plasma consisting of positive ions and an equal number of electrons which are the source of ionization
π»π»2ππ +πππππ§π§π·π· ππ = 0 where, π·π· = π·π·ππ and πππππ§π§ is the ionization frequency
ππ0 is determined
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Boltzmannβs relation
The density of electrons in thermal equilibrium can be obtained from the electron force balance in the absence of the inertial, magnetic, and frictional forces
Setting π¬π¬ = βπ΅π΅Ξ¦ and assuming ππππ = ππππππππππ
Integrating, we have
ππππππππππππππ
+ ππ οΏ½ π΅π΅ ππ = βπππππππ¬π¬ β π΅π΅ππππ β ππππππππππππ
πππππππ΅π΅Ξ¦ β πππππππ΅π΅ππππ = πππππ΅π΅ ππΞ¦ β ππππππlnππππ = 0
ππππ ππ = ππ0expππΞ¦ ππππππππ
= ππ0expΞ¦ ππ
TeBoltzmannβs relation for electrons
For positive ions in thermal equilibrium at temperature Ti ππππ(ππ) = ππ0exp βΞ¦(ππ)
Ti
However, positive ions are almost never in thermal equilibrium in low pressure discharges because the ion drift velocity π’π’ππ is large, leading to inertial or frictional forces comparable to the electric field or pressure gradient forces.
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Debye shielding (screening)
Coulomb potential
Screened Coulomb potential
Ξ¦ ππ =ππ
4ππππ0ππ
Ξ¦ ππ =ππ
4ππππ0ππexp β
πππππ·π·
π»π»2Ξ¦ = βππππ0ππ0
1 β ππππΞ¦/ππππππ βππ2ππ0ππ0ππππππ
Ξ¦ =Ξ¦πππ·π·2
Poissonβs equation
Debye length
πππ·π· =ππ0ππππππππ2ππ0
1/2
=ππ0Teππππ0
1/2
Plasma
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Debye length
πππ·π· cm =ππ0Teππππ0
β1 2
= 743Te eV
ππ0 cmβ3 = 7434
1010 β 0.14 mm
The electron Debye length πππ·π·ππ is the characteristic length scale in a plasma.
The Debye length is the distance scale over which significant charge densities can spontaneously exist. For example, low-voltage (undriven) sheaths are typically a few Debye lengths wide.
+
-
--
--
+
+
+
+
Ξ»D
Quasi-neutrality?
Typical values for a processing plasma (ne = 1010 cm-3, Te = 4 eV)
It is on space scales larger than a Debye length that the plasma will tend to remain neutral.
The Debye length serves as a characteristic scale length to shield the Coulomb potentials of individual charged particles when they collide.
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Quasi-neutrality
The potential variation across a plasma of length ππ β« πππ·π·ππ can be estimated from Poissonβs equation
We generally expect that
Then, we obtain
π»π»2Ξ¦~Ξ¦ππ2 ~
ππππ0
ππππππ β ππππ
Ξ¦ β² Te =ππππ0πππππππ·π·ππ2
ππππππ β ππππππππ
β²πππ·π·ππ2
ππ2 βͺ 1
ππππππ = ππππPlasma approximation
The plasma approximation is violated within a plasma sheath, in proximity to a material wall, either because the sheath thickness s β πππ·π·ππ, or because Ξ¦ β« Te.
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Plasma oscillations
Electrons overshoot by inertia and oscillate around their equilibrium position with a characteristic frequency known as plasma frequency.
Equation of motion (cold plasma)2 2
02
0
ex e
d n em eE
dt
2 20
20
0ee
d n e
mdt
Electron plasma frequency
ππππππ =ππ0ππ2
ππππ0
1/2
If the assumption of infinite mass ions is not made, then the ions also move slightly and we obtain the natural frequency
ππππ = ππππππ2 + ππππππ2 1/2 where, ππππππ = ππ0ππ2/ππππ0 1/2 (ion plasma frequency)
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Plasma frequency
Plasma oscillation frequency for electrons and ions
ππππππ =ππππππ2ππ = 8980 ππ0 Hz ππ0 in cmβ3
ππππππ =ππππππ2ππ = 210 ππ0/πππ΄π΄ Hz ππ0 in cmβ3,πππ΄π΄ in amu
Typical values for a processing plasma (Ar)
ππππππ =ππππππ2ππ = 8980 1010 Hz = 9 Γ 108 [Hz]
ππππππ =ππππππ2ππ = 210 1010/40 Hz = 3.3 Γ 106 [Hz]
Collective behavior
ππππππππ > 1 Plasma frequency > collision frequency
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Criteria for plasmas
Criteria for plasmas:
πππ·π· βͺ πΏπΏ
ππππππππππ > 1
πππ·π· β« 1
πππ·π· = ππ43πππππ·π·3
The picture of Debye shielding is valid only if there are enough particles in the charge cloud. Clearly, if there are only one or two particles in the sheath region, Debye shielding would not be a statistically valid concept. We can compute the number of particles in a βDebye sphereβ:
Plasma parameter
Ξ = 4πππππππ·π·3 = 3πππ·π·
Coupling parameter
Ξ =Coulomb energyThermal energy =
ππ2/(4ππππ0ππ)ππππππ
~Ξβ2/3
Wigner-Seitz radius ππ = 3 4ππππππ/3
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Formation of plasma sheaths
Plasma sheath: the non-neutral potential region between the plasma and the wall caused by the balanced flow of particles with different mobility such as electrons and ions.
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Plasma-sheath structure
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Collisionless sheath
Ion energy & flux conservations (no collision)
Ion density profile
12πππ’π’(π₯π₯)2 + ππΞ¦(π₯π₯) =
12πππ’π’π π 2 ππππ π₯π₯ π’π’ π₯π₯ = πππππ π π’π’π π
ππππ π₯π₯ = πππππ π 1 β2ππΞ¦(π₯π₯)πππ’π’π π 2
β1/2
Electron density profile
ππππ(π₯π₯) = πππππ π expΞ¦(π₯π₯)
Te
Setting πππππ π = πππππ π β‘ πππ π
ππ2Ξ¦πππ₯π₯2 =
πππππ π ππ0
expΦTe
β 1 βΞ¦β°π π
β1/2
where, ππβ°π π β‘12πππ’π’π π 2
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Bohm sheath criterion
Multiplying the sheath equation by ππΞ¦/πππ₯π₯ and integrating over π₯π₯
οΏ½0
Ξ¦ππΞ¦πππ₯π₯
πππππ₯π₯
ππΞ¦πππ₯π₯
πππ₯π₯ =πππππ π ππ0
οΏ½0
Ξ¦ππΞ¦πππ₯π₯ exp
Ξ¦Te
β 1 βΞ¦β°π π
β1/2
πππ₯π₯
Cancelling πππ₯π₯βs and integrating with respect to Ξ¦
12
ππΞ¦πππ₯π₯
2
=πππππ π ππ0
TeexpΦTe
β Te + 2β°π π 1 βΞ¦β°π π
1/2
β 2β°π π β₯ 0
π’π’π π β₯ππTeππ
1/2
β‘ππππππππ
1/2
β‘ π’π’π΅π΅ (Bohm speed)
β°π π β‘1
2πππππ’π’π π 2 β₯
Te2
Bohm sheath criterion
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Presheath
To give the ions the directed velocity π’π’π΅π΅, there must be a finite electric field in the plasma over some region, typically much wider than the sheath, called the presheath.
At the sheathβpresheath interface there is a transition from subsonic (π’π’ππ < π’π’π΅π΅) to supersonic (π’π’ππ > π’π’π΅π΅) ion flow, where the condition of charge neutrality must break down.
The potential drop across a collisionless presheath, which accelerates the ions to the Bohm velocity, is given by
12πππ’π’π΅π΅
2 =ππTe
2 = ππΞ¦ππwhere, Ξ¦ππ is the plasma potential with respect to the potential at the sheathβpresheath edge
The spatial variation of the potential Ξ¦ππ(π₯π₯) in a collisional presheath (Riemann)
12 β
12 exp
2Ξ¦ππ
TeβΞ¦ππ
Te=π₯π₯ππππ
The ratio of the density at the sheath edge to that in the plasma
πππ π = ππππππβΞ¦ππ/Te β 0.61ππππ
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Sheath potential at a floating Wall
Ion flux
Electron flux
Ξππ = πππ π π’π’π΅π΅
Ξππ =14πππππποΏ½Μ οΏ½π£ππ =
14πππ π οΏ½Μ οΏ½π£ππexp
Ξ¦ππTe
Ion flux = electron flux for a floating wall
πππ π ππTeππ
1/2
=14πππ π
8ππTeππππ
1/2
expΞ¦ππTe
Wall potential
Ξ¦ππ = βTe2 ln
ππ2ππππ
Ion bombarding energy
Ξ¦ππ β β2.8Te for hydrogen and Ξ¦ππ β β4.7Te for argon
β°ππππππ =ππTe
2 + ππ Ξ¦ππ =ππTe
2 1 + lnππ
2ππππ
a few πππ·π·π π
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High-voltage sheath: matrix sheath
The potential Ξ¦ in high-voltage sheaths is highly negative with respect to the plasmaβsheath edge; hence ππππ~πππ π ππΞ¦/Te β 0 and only ions are present in the sheath.
The simplest high-voltage sheath, with a uniform ion density, is known as a matrix sheath (not self-consistent in steady-state).
Poissonβs eq.
ππ2Ξ¦πππ₯π₯2 = β
πππππ π ππ0
Ξ¦ = βπππππ π ππ0
π₯π₯2
2
Setting Ξ¦ = βππ0 at π₯π₯ = π π , we obtain the matrix sheath thickness
π π =2ππ0ππ0πππππ π
1/2
In terms of the electron Debye length at the sheath edge
π π = πππ·π·π π 2ππ0Te
1/2
where, πππ·π·π π = ππ0Te/πππππ π 1/2
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High-voltage sheath: space-charge-limited current
In the limit that the initial ion energy β°π π is small compared to the potential, the ion energy and flux conservation equations reduce to
12πππ’π’2(π₯π₯) = βππΞ¦(π₯π₯)
ππππ π₯π₯ π’π’ π₯π₯ = π½π½0ππ π₯π₯ =
π½π½0ππ β
2ππΞ¦ππ
β1/2
Poissonβs eq.
ππ2Ξ¦πππ₯π₯2 = β
ππππ0
(ππππ β ππππ) = βπ½π½0ππ0
β2ππΞ¦ππ
β1/2
Multiplying by ππΞ¦/πππ₯π₯ and integrating twice from 0 to π₯π₯
Letting Ξ¦ = βππ0 at π₯π₯ = π π and solving for π½π½0, we obtain
βΞ¦3/4 =32
π½π½0ππ0
1/2 2ππππ
β1/4
π₯π₯
π½π½0 =49 ππ0
2ππππ
1/2 ππ03/2
π π 2Child law:Space-charge-limited current in a plane diode
B.C. οΏ½ππΞ¦πππ₯π₯ π₯π₯=0
= 0
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High-voltage sheath: Child law sheath
For a plasma π½π½0 = πππππ π π’π’π΅π΅
Child law sheath
Potential, electric field and density within the sheath
Ξ¦ = βππ0π₯π₯π π
4/3
πππππ π π’π’π΅π΅ =49ππ0
2ππππ
1/2 ππ03/2
π π 2
π π =2
3ππ0Teπππππ π
1/2 2ππ0Te
3/4
=2
3πππ·π·π π
2ππ0Te
3/4
πΈπΈ =43ππ0π π
π₯π₯π π
1/3
Assuming that an ion enters the sheath with initial velocity π’π’ 0 = 0
ππ =49ππ0ππππ0π π 2
π₯π₯π π
β2/3
πππ₯π₯ππππ = π£π£0
π₯π₯π π
2/3where, π£π£0 is the characteristic ion velocity in the sheath
Ion transit time across the sheathπ₯π₯ πππ π =
π£π£0ππ3π π
3ππππ =
3π π π£π£0
π£π£0 =2ππππ0ππ
1/2