PEMTRON PSPEMTRON PS-SERIES SEMSERIES SEM

PEMTRON PS SERIES SEMPEMTRON PS-SERIES SEM

Table type SEM Normal SEM

Small footprint Reasonable price

User-friendly operationHigh-performance equipment

Easy installation of various options

Superior performance Reasonable priceQuick vacuum system

Reasonable price Easy to measure large sample

PS 230MH (M l)PS-210 PS-230MH (Manual) PS-250AH

PS-230AH (Motor)

1) Resolution : 5nm (30kV, SE Image)

2) Magnification : 30x ~ 100,000x

3) Accelerating Voltage : 0.5kV to 30kV (30 steps)

4) Detector : Secondary Electron Image / Backscattered Electron Image *optional4) Detector : Secondary Electron Image / Backscattered Electron Image optionalX-ray Image – High resolution EDS system *optional

5) Electron Gun : Tungsten (W) hair pin type filament (Precentered Cartridge exchange)

6) Lens system : Two-stage Electromagnetic : Condensor LensOne-stage Electromagnetic : Objective Lens

7) Detector type : E-T Detector (SEI), Solid state (4channel-BSE)

8) Stage Movement : 5-axis system (X, Y, Z, R, T 5-axis Motorized)X,Y-axis : 0 to 35mm, Z-axis : 5 to 35mm, R-axis : 360(Continuous) , T-axis : 45

9) Image shift : ± 50 µm at WD 10mm

10) Max specimen size m : 70mm diameter x 30mm height10) Max specimen size m : 70mm diameter x 30mm height

11) Data Display : Accelerating voltage, Spot size step, Magnification, Micron bar, Working distance, Date, Image mode

12) Automatic function : Auto image brightness & Contrast, Auto Focusing, Auto Stigmation, Auto Gun Alignment

13) Vacuum system : Full Automation / High VacuumRotary Pump or Diaphragm pump *optional / Turbo Molecular PumpHigh Vacuum : Start up in 3 minLow Vacuum *optional


15) Easy Operation Function : Navigation system for easy operation by CCD camera imageMultiple sample holder (Max 7 sample stub possible)IR Chamber ScopeIR Chamber Scope

16) Power : 220V +/- 10%, 50/60Hz single phase

17) Consumption : 1.5kW

18) Room Temperature : 15 to 25 °C

19) Relative Humidity : 60% or less

20) Dimension & Weight : W x D x H = 480 x 624 x 722 mm / 100kg








8) Stage Movement : 5-axis system (X, Y, Z, R, T 5-axis Motorized)X-axis : 0 to 50mm, Y-axis : 0 to 40mm Z-axis : 5 to 40mm, R-axis : 360(Continuous) , T-axis : -10 to 90









17) Consumption : 4 kW











8) Stage Movement : 5-axis system (X, Y, Z, R, T 5-axis Motorized)X-axis: 0 to 70mm, Y-axis: 0 to 60mm, Z-axis : 5 to 60mm, R-axis : 360(Continuous) , T-axis : -10 to 90









17) Consumption : 4.5kW




Motion controlFunction controlSEM Image

H.V control / display

Vacuum display

Image control / Image photo

Image capture/ Video recording

Camera color Image

For Navigation control

IR Chamber Scope Live

Image

g

E-beam start S/W

Order of progress : PS-210 (PS-230/250 Camera mounting position is some diffrent)

Home positionImage taken for

navigationDoor openDoor close

Vacuum startE beam ONg E-beam ON

On the color image of the obtained sample holder,

Navigation function

On the color image of the obtained sample holder,If you click on the part you want to measure positionUser convenience function that automatically tracks to that location(Up to 7 samples can be mounted on multi holder)

Ability to select specific magnificationDirect input of desiredDirect input of desired magnification

It is possible to observe in real time whether or not a sample with a high height hits an bj ti lobjective lens.

You can observe in real time whether a collision with the sample occurs (ex : EDS/ BSED : protecting expensive system from collision)

IR Camera ImageIR Camera Image

PEMTRON PSPEMTRON PS-SERIES SEMSERIES SEM

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