Micro-scale energy harvesting systems and materials energy harvesting systems and materials...

NiPS Laboratory – Department of Physics and Geology – University of Perugia

Micro-scale energy harvesting systems and materials

Francesco CottoneNiPS laboratory, Department of Physics and Geology,

Università di Perugia, Italy

Micro Energy 2017 Gubbio 3rd – 7th July 2017


Outline

Micro Energy 2017 - Cottone Francesco 2

• Microscale energy harvesters: potential applications and challenges

• A new concept of efficient MEMS-based electrostatic wideband vibration energy harvester

• Piezoelectric micro-pillars for energy harvesting

• Magnetic Shape Memory Alloy for energy harvesting

• Conclusions


Microscale energy harvesters and potential applications


MEMS-based drug delivery systems

Bohm S. et al. 2000

Body-powered oximeter

Leonov, V., & Vullers, R. J. (2009).

D. Tran, Stanford Univ. 2007

Heart powered pacemaker

Pacemaker consumption is 40uW.

Beating heart could produce 200uW of power

Micro-robot for remote monitoring

A. Freitas Jr., Nanomedicine, Landes Bioscience, 1999

The input power a 20 mg robotic fly is 10 – 100 uW


Microscale energy harvesters and potential applications


Chang. MIT 2013Jeon et al. 2005

D. Briand, EPFL 2010 ZnO nanowires Wang, Georgia Tech (2005)

EM generator, Miao et al. 2006

Cottone F., Basset P. ESIEE Paris 2013

Mitcheson 2005 (UK)Electrostatic generator 20Hz 2.5uW @ 1g

2005 2015


Microscale energy harvesters: scaling issues


First order power calculus with William and Yates model

h

w

l

outV

22

n n

E hC

l

3

3

Ewhk

l

3 322 2

2

2

0.32( / 4) 0.32( / 4)

4 ( ) 816

si mo si moeel

n m e n m

n m

si

lwh l lwh lm AP A A

E hC

l

30.32 0.32( / 4)

eff beam tip si sim m m lwh l

At max power condition e=m

By assuming

1

0.01

/ 200

/ 4

m

A g

h l

w l

2 4/ 800 0.32 64

16

200

si moel

n m

si

P A lE

C





NEMS-VEHsMEMS-VEHs

MEMS-VEHs

NEMS-VEHs

• Power A2l4 where A is the acceleration and l the linear dimension





h

w

l

• Low efficiency off resonance

• High resonant frequency at miniature scales

outV

22

n n

E hC

l

3

3

Ewhk

l

Boudary conditions C1

doubly clamped 1,03

cantilever 0,162

Boudaryconditions Uniform load Point load doubly clamped 32 16

cantilever 0,67 0,25


Low-frequency MEMS electrostatic VEH


Prototype fabrication process

Y. Lu, F. Cottone, S. Boisseau, F. Marty, D. Galayko, and P. Basset, Appl. Phys. Lett. 2015.


Comb capacitor

ds

ks

kst

ms

mb

g0

V0

RL

y

xs

xb

electrodes

vibrations

dst

Lc

xmax


2 2

max2 2

2 2

2 2

( ), if

, if / 2

s s ss s st s s

s

b bb b b s b c b

d x dx dU x d ym d d m x x

dt dt dx dt

d x dx d ym d m x x L r

dt dt dt

0L

dR C V V V

dt

2 2

0 max

2 2

0 max

1 1( ) if

2 2( )

1 1( ) if

2 2

s s s s

s

s st s s s

k x C x V x x

U x

k k x C x V x x

00 2 2

0

2( )s r f f

s

g hC x N l

g x





bottom glassbottom glass

bottom glass

HF etching

Al mask patterning

doped Si

Si DRIE

resist

Anodic bonding

Insert tungsten micro-ball

HF etching (double side)

Acrylic glue bonding of top glass

top glass cover

top glass cover

Prototype fabrication process

Silicon DRIE etching process

2nd Version with ELECTRETS:experimental set-up of the corona charging on the parylene electret layer

Fabricated at ESIEE Paris, Université de Paris-Est


MEMS e-VEH at work


Experimental test

Micro ball

Silicon mass

( 1) ( )b bi b b sisf

b s

e m v m em vv

m m

Micro ball

Silicon mass

Micro ball

Silicon mass

Impact time

tn-1tnti

Working principle

Velocity Amplified Energy HarvesterAt Stoke Institute, University of Limerick, Ireland


F. Cottone et al., 2014 IEEE 27th Int. Conf. MEMS, 2014.

First experimental results


Cmax/Cmin = 3

Cap

acit

ance

(F)

Time (s)

Experimental: Sine sweeping 10 – 120 Hz @ 0.3 g / RL = 5 MOhm

Power gain up to 525%


Numerical simulations


Generated power by the impactingball in the range of 1-40 Hz

Generated power by the resonantsilicon mass around 150 Hz

Numerical: sine sweeping 10 – 120 Hz @ 0.3 g / RL = 5 MOhm

No power is generated in the rangeof 1-40 Hz without the impactingmicroball

Generated power by the resonantsilicon mass around 150 Hz


Cavity upper and lower walls

Micro-ball

Numerical simulations


Numerical: walking man / acc = 0.4 grms / Average Power: 1.34 µW


Numerical and experimental results


Numerical: running man / acc = 1.33 grms

Long cavity = Lc = 8.5 mmAverage Power: 15 µW

Short cavity = Lc = 1.5 mmAverage Power: 1.34 µW

• For large cavity Lc = 8.5 mm, the travelling range of the micro-ball is very large, impacts are less frequent but the it produces voltage spikes up to 50 V


0,01

0,10

1,00

10,00

100,00

1,00 3,00 5,00 7,00 9,00 11,00

Pow

er (

µW

)

Lc/d

Walking

Running

Device optimization


Power Vs normalized cavity length Lc/2r

Lc d

• The plot shows the generated power for different cavity length ratio Lc /d over ball diameter at same walking and running acceleration

• It has been found that the power increases for larger Lc when running.

Running RMS acc: 1.33 grmsWalking RMS acc: 0.4 grms

CAVITY LENGTH Lc: 1.5 – 8.5 mm

Max Power: 15µWMax Power density: 143µW/cm3

Bias voltage: 20 V


Experimental results of e-VEH with electrets


without micro-ball with micro-ball



Experimental results of e-VEH with electrets



TEST with hand shaking of the transientoutput voltage and extracted energy.

(a) Vbias=21 V, a=2.0 grms, f=6.5 Hz;(b) Vbias=46 V, a=2.0 grms, f=4.7 Hz

A 47-µF capacitor has been also charged through a bridge diode rectifier to 3.5 V to supply a wireless temperature sensor node.


Performance comparison


Vibration type

MEMS Direction

Accel. (gRMS)

Main input Freq. (Hz)

Vbias (V)

Power (uW)

Power Density (uW/cm3)

Man walking X 0.39 4.15 20 1.34 13.40Man walking Y 0.27 2.1 20 0.793 7.93Man walking Z 0.41 2.44 20 1.15 11.50Man running Z 1.20 3.3 20 14.9 142.00

P. D. Mitcheson, et al, Proceedings of the IEEE, vol. 96, pp. 1457-1486, 2008.

Almost 1 order of magnitude higher than average power density of previous works



Piezoelectric micro-pillars

Microfibre-Nanowire:

Wang(2008)

Yang(2009)

Piezoelectric ribbon:



ZnO forestZnO Pillar

Why ZnO• Non-toxic bio-compatible• Wurzite structure• Easy to fabricate• Vast morfology





Hydrotermal synthesisLength: 15 mThickness: 4 – 6 um

A. Di Michele, G. Clementi, M. Mattarelli and F. Cottone - Unpublished




Length: 17 mThickness: 5umFirst mode: 10.9 Mhz

Stress-strain equations

Strain-charge form

t

E

T

S s T d E

D d T E

G. Clementi - M. Thesis



MSMA energy harvesting

0 2 4 6 8 100

5

10

15

Po

wer

[

W]

Resistance [k]

Hbias

= 0.19 T

Hbias

= 0.40 T

Hbias

= 0.10 T

Hbias

= 0.54 T

0 0.1 0.2 0.3 0.4 0.5 0.620

40

60

80

100

120

140

Bias field [T]

RM

S v

olt

age

[mV

]

0 500 1000 1500 2000 2500 30000

20

40

60

80

100

120

140

Frequency [Hz]

RM

S v

olt

age

With MSMA

Without MSMA

FEM analysis

20 40 60 80 1000

20

40

60

80

100

120

140

Frequency [Hz]

RM

S v

olt

age

NiMnGa

M.A.A. Farsangi, F. Cottone, H. Sayyaadi, M.R. Zakerzadeh, F. Orfei, and L. Gammaitoni, Appl. Phys. Lett. 110, 103905 (2017).


Conclusions


o A new concept of nonlinear MEMS electrostatic VEH as been proosed for low-frequency and wideband energy harvesting with high efficiency below 60 Hz down to 10 Hz.

o A numerical model has been developed in order to simulate the system behavior. The effect of the micro-ball impact is in agreement with the experimental results.

o The MEMS e-VEH shows very high power density tests indicate up to 142 W/cm3

that open the possibility for self-powered biomedical devices such as pacemaker recharging with human motion.

o Piezoelectric micro-pillars are under investigation for energy harvesting and sensing application. Base IDE electrodes setup will enable higher performance.

o MSMA-based structural energy harvesting has been proven to work. Additional work is required.


Acknowledgments


The authors acknowledge the support of

• EU Horizon 2020 Programme (Grant n. 644852, PROTEUS)

• FP7 Marie Curie I (IEF) (Grant n. 275437, NEHSTech)

• FP7 (Grant n. 611004, ICT-Energy).

• Fondazione Cassa di Risparmio di Perugia (Bando a tema Ricerca di Base 2016, Project Code: 2016.0106.021.

• P. Basset • F. Marty • D. Galayko• T. Bourouina

• G. Clementi• A. Di Michele• M. Mattarelli• L. Gammaitoni

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