Paul Shore , Paul Morantz1,2 Roger Read , Xavier …... Rapid fabrication of advanced optics 1 foot2...
Transcript of Paul Shore , Paul Morantz1,2 Roger Read , Xavier …... Rapid fabrication of advanced optics 1 foot2...
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Rapid fabrication of advanced optics1 foot2 per hour
Paul Shore1,2, Paul Morantz1,2 Roger Read1,2, Xavier Tonnellier2,Paul Comley2, Renaud Jourdain2, Marco Castelli1
1Loxham Precision Limited2Cranfield University Precision Engineering Institute
Cranfield, Bedfordshire, England
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Established Royal Air Force Base Cranfield in 1937
Revised as the UK’s College of Aeronautics in 1946
Broadened activity and renamed Cranfield Institute of Technology in 1969
Rebranded as Cranfield University in 1996
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Turnover of £170 million per annum
2500 staff : 2500 PhD/MSc students
Manage the UK’s Military Defence Academy
Retain Aircraft design/build accreditation
Own and operate a Grade 3 Airfield
Strategic partners to: Rolls Royce, BAe Systems, Boeing, Airbus Defence and Space
Approved supplier for ESA, NASA, ESO and NPL programmes
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Talk structure
1. Cranfield previous mirror activities
2. 1 foot2 per hour
3. Rapid freeform process chain
4. Freeform surface grinding
5. Reactive atom plasma surface figuring
6. Summary
3/26
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Large Diamond Turning Machine for producingX ray Astronomy Mirrors
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Chandra X ray Space Telescope
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CUPE CIDI measuring machines made for Hughes Danburyfor the “Chandra” X ray space telescope
Ref; CUPE 1991
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James Webb Space Telescope - MIRI Instrument Spectrometer Mirrors
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JWST MIRI image slicer and re-imaging mirrors
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mK Ultra Precision Temperature Controllers
0.1°C
1 hour
milli Kelvin Controllers
Loxham Precision’s ultra precision temperaturecontrollers are based on the most advanced thermal management technologies offering:
o Sub milli-Kelvin resolution controlo Multiple channelso Matched performance temperature sensorso High response cooling technologyo Advanced fluid heater technologyo Remote heater and sensor positioningo Advanced control functions
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Production rate : 1 foot2 per hour( 1 metre2 per 10 hours)
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Lithography - EUV
microlithography Systems
Fusion – High power laser optics
Telescopes -
ELT Space – Earth orbiters
Freeform optics
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UPS Project Rapid Process Chain
Stage 1
Fixed abrasive grinding
Stage 3
Ion beam figuring
1 mm form accuracy
1 μm form accuracy
10 nm form accuracy
Stage 2
Computer control polishing
0.5 - 1 μm form accuracy
1 10 100 1000 10000 100000
IBF
Fixed abrasive
grinding
CCP
MRF
10000
1000
100
10
1
Surface Figuring Rate [mm2/second]
Form
acc
ura
cy[n
m]
RM
S
BoX
grinding
RAP
RAPBoX grinding Robotic
polishing
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Rapid Process Chain
Stage 1Stage 3
1 mm form accuracy
1 μm form accuracy
10 nm form accuracy
Stage 2
Robotic polishing
0.01- 1 μm form accuracy
RAPBoX grinding
Grinding:
• Remove min 1mm depth
• Output visible by full aperture
interferometry (P-V < 3 um)
• Minimum sub-surface damage
Requirement: 10 hours per 1m2 (1ft2 per hour or 1 E-ELT segment per day)
Polishing:
• Remove SSD
• 1 nm RMS roughness
• Form accuracy <0.5 um P-V
(as time allows)
Re-active atom plasma:
• Remove min 2 um depth
• Form accuracy 10nm
• Degrade roughness < 2 nm RMS
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Freeform surface grinding at 1 foot2 per hour( 1 metre2 per 10 hours)
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BoX® Freeform grinding/measuring machine
Work-piece qualityForm accuracy: < 1 um RMSSub-surface damage: < 5 umRoughness: 100 - 200 nm(Zerodur data)
Processing rateGrind time: 10 hrs/m2
Measurement time: 4 hrs/m2
Load/set/unload time: 1 hour
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EELT Mirror segment
Watch Youtube video
Search “Loxham Precision”
https://www.youtube.com/watch?v=TBvFTmYzUYQ
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• ELT segment SPN01 (15:15)
• Material – Zerodur
• 580,000 measurement points
• Data to within 0.5mm of edge
Results:• Surface map (CMM)
• RMS < 1 µm, P-V < 5.5 µm
• No visible edge chipping
• No attributable cavity effect
BoX® EELT Mirror segment (1)
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• ELT segment SPN04 (16:15)• Material – ULE• Grinding cycle 20 hours• Max MMR 187.5mm3/sec
Results:
• Surface map (CMM)
• 580,000 measurement points
• RMS < 0.6 µm
• PV < 4.5 µm
BoX® EELT Mirror segment (2)
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BoX® NiF Wedge Optic Lenses
420 mm
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BoX® Adaptive grinding oflightweight mirror structures
Thinned from 6mmto 1.3 mm shell thickness
Grinding time: 16 hoursMeasurement time: 4 hours
Form accuracy : 0.48um RMSSSD : 5umRoughness:0.15um RMS
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BoX® Adaptive grinding oflightweight mirror structures
0.4um RMS, 4.6 um P-V(before error correction)
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Robotic polishing
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Reactive Atom Plasma (RAP) Processing:A New Tool for the Rapid Shaping
and Smoothing of Optical Materials
Dr. Peter S. FiskeDr. Jeff Carr
Dr. Andrew ChangDr. Jude Kelley
RAPT IndustriesLivermore, California
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Courtesy Carr
Ar Ar
CF4
FF
FFF
FC
C
C
Ar
Ar
ArAr
ArAr
Ar
Ar
Ar
Ar
Excitation Region
Plasma Discharge
Copper coils for
Inductively-
coupled energy
source
Plasma (main)
gasReactive precursor
gas
Si, SiO2, SiC…
Quartz
tube
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Reactive Atom Plasma FiguringHelios 1200
Chamber for 1.2 m
optical component
Optical component
PyrometerICP torch
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Iterative figuring procedure
Final form accuracy down to λ/30 rms
CNC-code generation with optimized tool-path and
thermal adaption
Error map
Interferometric
measurement
Edge extension De-convolution (modified)
RAP process
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RAP process capability
• 1.2 m capacity• 3 axes CNC through Fanuc 30i• Low cost operation • Compact machine size
Refs1: Jourdain et al., (2011). “Fast 3D Figuring of Large Optical Surfaces Using Reactive Atom Plasma (RAP) Processing”, 2nd EOSConference on Manufacturing of Optical Components, Munich (D), May 2011.2: Castelli et al., (2010). “Initial Strategies for 3D RAP Processing of Optical Surfaces Based on a Temperature Adaptation Approach”36th Matador Conference, Manchester, section:18, pp 569-572 , July 2010
Processed materials:
• Fused silica
• ULE
• SiC
•Silicon
• Borosilicate
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Tool-path algorithm
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RAP figuring process0.5 um depth of cut
Fused Silica
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RAP figuring process0.5 um depth of cut
Fused Silica
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RAP figuring capability
420mm x 420mm x 40mm ULE substrate
• Concave spherical geometry – 3 m ROC.
• 400 mm clear aperture.
• Ground on BoX to ~2.2 μm PV form accuracy.
• Polished to 2.4 μm PV form accuracy.
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Large scale figuring results:optic #001/1
Initial figure error Residual figure error
PV: 2.4 μm PVr: 2.3 μm RMS: 373 nm PV: 450 nm PVr: 282 μm RMS: 45 nm
- Mean processing time: 51 min - three iterations total processing time 2.5 hours
- Residual figure error: 43 nm rms
- 89% overall convergence
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Large scale figuring results:optic #001/2
Initial figure error Residual figure error
- Mean processing time: 49 min – two iterations total processing time 1.5 hours
- Residual figure error: 31 nm rms
- 77% overall convergence
PV: 780 nm PVr: 723 nm RMS: 137 nm PV: 350 nm PVr: 230 nm RMS: 31nm
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RAP processing rate
• Removal depth of 1µm
• 420 mm x 420mm surface
• 2 iteration process
• Average MMR 1.5 mm3/min
• Figuring time ~ 3 hours
• x10 times faster than IBF
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Reactive plasma summary
RAPT Machine
• 1.2 m capacity
• 3 axes CNC through Fanuc 30i
• Low cost operation
• Compact machine size
Processed materials:
• Fused silica
• ULE
• SiC
•Silicon
• Borosilicate
Processing capability
• < 30nm RMS
• 10 hours per metre2
• 400mm mirror in 2 hours
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PSD Analysis
2 x Main pitch Main pitch I
Main pitch II
AFTER SECOND FIGURE CORRECTION
2 x Main pitch Main pitch
AFTER FIRST FIGURE CORRECTION
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Present research focus
[12] Castelli M. Advances in Optical Surface Figuring by Reactive Atom Plasma(PhD thesis), Cranfield University, 2013.
Ref:
(Results carried out by Castelli [12])
Reduce the MSF structures
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Thermo-chemical CFD simulationTemperature distribution
Overview of the CFD investigation.3D drawing of the plasma figuring torch (left);2D CFD simulation illustration of flow temperature in the nozzle (right).
10 μm
T/K
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Summary• Freeform grinding 1ft2 per hour is doable
• Error correction enables <1 um RMS form(Even for thin LW substrates)
• Plasma processing is promising to alleviatebottle-neck surface figuring process stage
• Plasma figuring at 1ft2 per hour to 30nm RMS is already doable
• Plasma figuring at 1ft2 per hour to 10nm RMS is our next milestone
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AcknowledgementsUK’s Engineering and Physical Sciences Research CouncilUK’s Astronomy Technology CentreMcKeown Precision Engineering Foundation
Collaborators: Qioptiq Ltd, G&H plc, Airbus Space and Defence, SSTL, ESO, ESA, Fanuc, RAPT Industries, University of Cambridge, Cranfield Precision, Optic Glyndwr, UCL, Zeeko, Aerotech
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CFD simulationModel set-up
Schematic diagram of calculation areas(Picture from Jourdain)
Zone B
Zone A
Domains: (Zone B)Based on the ICP torch and De-Laval nozzle made by RAPT
Assumptions: 1. A one-fluid model;2. In local thermal equilibrium (LTE);3. Negligible EM field calculations and chemical equilibrium;4. Thermally expansible and mechanically incompressible;5. Fluid: axisymmetric, uniform, steady and turbulent plasma
with negligible viscous dissipation.
Boundary conditions:
Stage Parameter Input value
Inlet Velocity 25.76 m/s (from calculation)
Temperature 6000K (based on [8])
Pressure 101280pa (from calculation)
Wall Temperature 350K (from estimation)
Outlet Pressure 101325pa (room pressure)
Temperature 300K (room temperature)
12/26
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µ4 diamond machining system
Fully automated & integrated:4 axis diamond turning5 axis diamond millingTool loadingWorkpiece loading
Machine size and supply0.6m x 0.6m x 1.0m, portableFully integrated control electronicssingle-phase supply “plug-and-play” chilled water and compressed air
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µ4 diamond machining system
Tests in brass
Roughness: 3nm Ra, 6nm Sa
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BoX® Induced Sub-surface Damage
Evaluation technique:
• Polished tapered grooves
• Etched HF, target removal 1µm
• Groove depth - contact profilometery
• Crack observation using optical microscope
Grinding Conditions Cluster depth (µm) Last fracture depth(µm)
Zerodur® ULE® Zerodur® ULE®
Rough cut (D76) 5 8.5 8 18.5
Semi-finish cut (D46) 4 4.5 7.5 9
Finish cut (D25) 3 4 4 8
Ref: Tonnellier, T. et al. 2008, Sub-surface damage issues for effectivefabrication of large optics, Proc of SPIE Vol. 7018, pg 701836-1 to 701836-10
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BoX® NiF Wedge Optic Lenses
4 off lenses groundGrinding time: 8 hoursForm accuracy : 1um RMSSSD : 10 um
Last fracture depth
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Pure argon plasma: (Photo from an experiment from [19])
Temperature distribution (right)(Photograph from modeling from [19])
BackgroundICP modelling
[13] Morsli EI, Proulx P. Journal of Physics D:Applied Physics, 2007, 40: 308-394.
[14] Murphy A.B., Boulos M.I., et al. Advancedthermal plasma modelling., 2008, 12(3-4).
[15] Morsli EI, Proulx P. Journal of Physics D:Applied Physics, 2007, 40(16): 4810.
[19] Xue S, Lakaf Y, Gravelle D and Boulos M ICanadian Chemical Engineering Conf.(Sherbrooke, Canada)
ICP torch (Tekna PL35) with a De-Laval nozzle
Ref:
Temperature distributionfrom a repeated trial of the validation
Axial profile of the temperature along the centreline in [15] and in the repeated trials
Temperature distribution inICP torch with supersonicnozzle [15]
Axial profile of the pressure along the centreline in [15] and in the repeated trial
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µ4 diamond machining system
µ4 machining system
Fully automated & integrated:4 axis diamond turning5 axis diamond millingTool loading
Workpiece loading
Machine size and supply0.6m x 0.6m x 1.0m, portableFully integrated control electronicssingle-phase supply “plug-and-play” chilled water
![Page 53: Paul Shore , Paul Morantz1,2 Roger Read , Xavier …... Rapid fabrication of advanced optics 1 foot2 per hour Paul Shore 1,2, Paul Morantz1,2 Roger Read , Xavier Tonnellier2, Paul](https://reader034.fdocuments.net/reader034/viewer/2022050717/5e489e107fab7459a13544f7/html5/thumbnails/53.jpg)
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before
polishing
after 4
polishing
runs
after 9
polishing
runs
Cusp condition parallel to polishing direction