P recision E ngineering R esearch G roup
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Transcript of P recision E ngineering R esearch G roup
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Precision Engineering Research Group
Massachusetts Institute of Technology
An Instrument to Measure the Force-Displacement Characteristics of MEMS Mechanisms
Supervisors: Alexander H. Slocum, Jeffrey H. Lang
Jin Qiu, Joachim Sihler, Jian Li
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In itia l shape as etchedw ith no in ternal stress.
Second stable positionafter snap through
in itia l apex height d0
Actuation forcecauses deflection
Snap through
current
Bistable Relay Principle Precision Engineering Research Group
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Snap Through of Bistable Beam Precision Engineering Research Group
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Front side Back side
Precision Engineering Research Group
Fabrication Imperfectness
Unpredictable tapering of the DRIE process requires post manufacture minitoring to verify mechanical properties
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Prototype (parts mostly made with the waterjet) Precision Engineering
Research Group
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Prototype Close-ups Precision Engineering Research Group
Data acquisition unit with reference flexure, amplification lever, and displacement sensos
Needle used for mechanical contact
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FMEMS
F()
F
Fundamental Goal:Measure the stiffness of a MEMS flexure
MEMS flexure
0 1 2 3 4 5 6 7 8 9
0 1 2 3 4 5 6 7 8 9
9 8 7 6 5 4 3 2 1 0
9 8 7 6 5 4 3 2 1 0
reference flexure
FMEMS
d d1
MEMS flexure
=d2-d1
FMEMS=kref * d2
kMEMS=FMEMS /
MEMS flexure reference flexure
Fundamental F-D curve principle Precision Engineering Research Group
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Functionality of the Amplification Lever Design Precision Engineering
Research Group
d 2
a
d1
b
l
M EM S flexurereference flexure
b
t
F M dM
d2+d2 d 1+d1
d2d1
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HP Barcode Readers as Displacement Sensor
10 nm resolution
bar codereader 1
bar codereader 2
d1 d2
d
m irror1
m irror2
d=d1-d2
d
i
4.5 m m3 m m 6 m m
linearrange
0.5 m m
Reference: Colin J.H. Brenan et al.: “Characterization and use of a novel optical position sensor for microposition control of a linear motor” , Rev. Sci. Instrum. 64(2), February 1993.
Precision Engineering Research Group
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Displacement Sensors 2 and 3 in differential configuration
Precision Engineering Research Group
Displacement Sensor 1
Fundamental Principle Animation
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Actual Measurement Data
Force error +/- 6.5 % (not to scale)
displacement error +/- 10 nm (not to scale)
Precision Engineering Research Group
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Pictures of Prober Tips Precision Engineering Research Group
Flextester
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Market Potential Precision Engineering Research Group
Bistable microrelay used in automotive applications:
•20 milion cars/year (20*106 relays/year)•5 % of cars/year using it (1*106 relays/year)•20 relays/car/year (20*106 relays/year)•1000 relays/wafer (20*103 wafers/year)•200 days per year=========================================100 wafers/day !