Overview of the SemiconductorEmergency Response Forum

(SERF) Manual

Duane Caldwell

Corp. Safety Program Manager, Seagate Technology

Jeffrey Williams

Sr. Environmental Engineer, Department of Defense

SSA2000 Arlington, VA

Introduction

• Presentation will not distribute copies ofmanual or provide details of all sections ofmanual

• Presentation will:– inform attendees of SERF activities,

opportunities & products (e.g., the manual &benchmarking results)

– highlight ERT Best Practices from the manual

– solicit additional active participants

Part One Agenda

• SERF History

• Participating Companies

• ERT Program Structure– Scope of Operations

– Program Requirements

– Program Incentives

• ERT Program Basics– Incident Command

– Emergency Operations Centers

SERF History

• 1995 - SEMATECH hosted a meeting formembers to discuss issues/concerns withemergency response operations

• AMD (Greg Linenfelser) led follow-upmeetings and distribution of a survey in1996. SERF named. Participationexpanded beyond SEMATECH whileremaining a sponsored working group.

SERF History (cont.)

• At SEMATECH under Steve Burnett,additional surveys of best practicesoccurred. Latest survey occurred in 1997.

• SERF manual developed by groupconsensus. At SSA 1998, multi-companyteams were formed to write text for agreedupon chapter headings. Teams werebalanced with respect to size and skills ofparticipants ERT teams.

SERF History (cont.)

• Editing at SEMATECH continued through1998 into 1999.

• SERF Manual published in 1999 throughefforts of 35 companies and 45 participants

• SERF begins exploration of transition fromSEMATECH to SSA sponsorship.

Participating Companies

• AMD

• Allegro Microsystems

• Analog Devices

• Atmel

• Cherry Semiconductor

• Cypress Semiconductor

• Fairchild Semiconductor

• Harris Semiconductor

• Hewlett-Packard

• Honeywell

• IBM

• Intel

• Integrated Device Technologies

• Lucent Technologies

• M/A COM

• Mitsubishi

• Motorola

• National Semiconductor

• NEC

• Nortel

• Philips Semiconductor

• Ramtron

• RF Microdevices

• Rockwell

• Samsung

• SEMATECH

• Silicon Systems

• Symbios

• Texas Instruments

• TSMC

• Unitrode

• UMC

• US Department of Defense

• VLSI Technologies

Scope of ERT Operations

• SERF identified industry scope ofoperations with respect to:– Chemical spills/gas releases

– Fire

– Medical

– Natural disaster

– Security

– Odors

– Evacuations

ERT Charters of Operation

• SERF discussed charters of operation– Ensure evacuation of all personnel

– Information dissemination

– Notifications

– Response to event

– Alarm Response

ERT Program Requirements

• SERF developed guidance for ERT memberrequirements– Physical

– Medical surveillance

– Language

– Skills retention

– Availability/shift coverage

– Union Issues

ERT Program Incentives

• SERF identified industry wide status ofERT program incentives– Voluntary participation v. job description

– Financial compensation range

– Non-financial compensation items

Incident Command System

• SERF established guidance for use of theIncident Command System (ICS)– Developed and used by fire departments

– Provides for unified command of response

– Addresses operations, administration, support

– Ensures proper lines of communication

– Ensure proper span of control

– Applicable on large and small scale responses

Incident Command System

S afety O fficer M ed ica l O fficer

In form ation O fficer

E n try Team L ead er B ack -u p Team L ead er D econ Team L ead er

O p eration s O fficer L og is tics O fficer

In c id en t C om m an d er

Emergency Operations Centers

• SERF identified typical varieties ofoperations centers during response– Incident Command Post

– Central Control Room

– Staging Area

– Response Site

Part Two Agenda

• ERT Response Triggers– Defining Emergencies

– Setting Goals for Response

– Developing Action Plans

• ERT Response & Mitigation– Various Scenarios

• Program Resources

• Case Study & Conclusion

ERT Response Triggers

• Quick, effective, and efficient emergencyresponses start with:– Early detection of problems,

– Quick definition of the situation and its hazards,

– Implementation of comprehensive action plans.

Defining Emergencies:Investigation of Problem Reports

• SERF provides guidance for investigatingproblem reports and defining responses.– Odors, unidentified

– Medical incidents

– Gas alarms and odors

– Chemical spills

– Fire and Smoke incidents

Defining Emergencies:Gathering Data

• SERF provides guidance for gathering dataessential to defining events and identifyinghazards.– Nature of the event

– Types of hazards

– Contributing conditions (e.g., perforated floors,air flow patterns, sensitive populations, etc.)

– Missing or injured employees

Setting Response Goals:Essential Activities

• SERF provides guidance for setting goalsand objectives for responses.– Rescue

– Quantification of Hazards (e.g., airconcentrations of contaminants)

– Observation of Conditions (e.g., open drains,ignition sources, damaged equipment)

– Corrective Action

– Protect (People, Environment, Property)

Developing Action Plans:Assembling Response Resources

• SERF provides guidance for determiningresources required for successful entries andresponses.– Personnel and Teams

– PPE

– Monitoring Equipment

– Tools and Supplies

– Decontamination Stations

Developing Action Plans:Model Scenario Flow Charts

• SERF provides example flow charts fromoperating fab sites for various scenarios.– Chemical Release

• Non-specific

• Hazardous liquid or solid

– Smoke and Fire/Explosion

– Tornado/Severe Weather

– Bomb Threat

– Building Evacuation

Developing Action Plans:Disaster Planning

• Planning Process & Guidance– Analyze Hazards

– Survey Organization

– Develop Emergency Management Organization

– Identify Emergency Functions

– Develop Response Tools (e.g., checklists)

– Develop Capability

– Maintain & Evaluate Readiness

– Revise

Developing Action Plans:Business Resumption Planning

• Recovery Planning Process & Guidelines– Identify Critical Business Functions

– Perform a Risk Analysis

– Document the Recovery Procedures

– Training & Validation

ERT Response & Mitigation:Techniques & Guidelines

• SERF lists techniques and guidance forresponding to and mitigating varioushazardous conditions.– Gas Releases/Fires (e.g, SiH4 and ClF3)

– Chemical Spills (by hazard class)

– Injuries/Illnesses (universal precautions)

– Natural & Technological Disasters (e.g.,earthquakes, severe weather, power failure)

– Bomb Threats

ERT Response & Mitigation:Techniques & Guidelines

• SERF describes examples ofdecontamination techniques and procedures.– Equipment

– Personnel

• SERF discusses training techniques andcurriculum, and provides some examples ofdrill scenarios and evaluations.

Program Resources:References

• Glossary

• Guidance for Developing ERT Documents– site & system maps

– contact lists

– equipment lists & manuals

• List of Recommended Books

• List of Recommended Internet Sites

• SERF Member Company Contacts

Program Resources:Hazardous Materials Inventory

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a m p l e H M I S F o r m . x l s

Program Resources:ERT Equipment Inventory

S a m p l e E R T Equ ipment Inven to ry

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Program Resources:Emergency Contact Matrix

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E m e r g e n c y C o n t a c t Ma t r i x

Case Study:Chemical Release Flow Charts

n iden t i f i ed Chemica lRe lease . jpg

Re lease Class i f ica t ion . jpg

Haza rdous Mate r i a l Re lease . jpg

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Conclusion

• SERF depends on active participation froma wide range of companies and geographicregions.

• The SERF Manual is a first draft ofconsensus practices and sample documentsthat should be expanded and refined, usingan even larger group of contributors.

SERF Contacts

• Interested parties should contact:– Peter Monti, Department of Defense

301.688.0120

– Lori Strong, SSA

703.790.1745