Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white...
Transcript of Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white...
![Page 1: Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white = re!ective black = absorber. bright "eld (BF) dark "eld (DF) low-!are bright "eld](https://reader035.fdocuments.net/reader035/viewer/2022071506/612738ef879372204206c45f/html5/thumbnails/1.jpg)
Designed by CXRO. Manufactured by Intel.
Overview of the SEMATECH Berkeley MET reticle IMO220846 IMO228775
Available to MET users starting 2012.06.01 2012.12.04
![Page 2: Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white = re!ective black = absorber. bright "eld (BF) dark "eld (DF) low-!are bright "eld](https://reader035.fdocuments.net/reader035/viewer/2022071506/612738ef879372204206c45f/html5/thumbnails/2.jpg)
Mask ID: IMO204990Substrate: QuartzML: 2.5-nm Ru-capped 40-pair MLAbsorber: 87-nm TaON/TaNBS film: 70-nm CrN
Mask Info
![Page 3: Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white = re!ective black = absorber. bright "eld (BF) dark "eld (DF) low-!are bright "eld](https://reader035.fdocuments.net/reader035/viewer/2022071506/612738ef879372204206c45f/html5/thumbnails/3.jpg)
white = re!ectiveblack = absorber.
bright "eld(BF)
dark "eld(DF)
low-!are bright "eld(LFBF)
Field types
![Page 4: Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white = re!ective black = absorber. bright "eld (BF) dark "eld (DF) low-!are bright "eld](https://reader035.fdocuments.net/reader035/viewer/2022071506/612738ef879372204206c45f/html5/thumbnails/4.jpg)
Field of view
600-um
200-um
Subfields will be indicated by this graphic
Entire fields will be indicated by this graphic
200-um x 66-um subfield
600-um x 200-um. The majority of the fields on the reticle are 3x3 arrays of a ‘sub-field’ as shown below.
![Page 5: Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white = re!ective black = absorber. bright "eld (BF) dark "eld (DF) low-!are bright "eld](https://reader035.fdocuments.net/reader035/viewer/2022071506/612738ef879372204206c45f/html5/thumbnails/5.jpg)
500 um pad 500 um pad 500 umm pad Illum Monitor Grid 2 Illum Monitor Grid 2
SEMATECH Contact (DF) Contact Bias (DF) Line End and Jog (DF) Contact and Slot (DF) HV and Contact (DF)
SEMATECH Contact (BF) Contact Bias (BF) Line End and Jog (BF) Contact and Slot (BF) HV and Contact (BF)
HV Cleave (DF) LBNL (DF) LBNL (LFBF) Contact and Slot (LFBF) HV and Contact (LFBF)
HV Cleave (LFBF) LBNL (BF) Pseudo PSM 1D Pseudo PSM 2D Pseudo PSM Cleave
SEMATECH Contact (DF) Contact Bias (DF) Line End and Jog (DF) Contact and Slot (DF) HV and Contact (DF)
SEMATECH Contact (BF) Contact Bias (BF) Line End and Jog (BF) Contact and Slot (BF) HV and Contact (BF)
HV Cleave (DF) LBNL (DF) LBNL (LFBF) Contact and Slot (LFBF) HV and Contact (LFBF)
HV Cleave (LFBF) LBNL (BF) Pseudo PSM 1D Pseudo PSM 2D Pseudo PSM VCleave
C1 C2 C3 C4 C5R1
R2
R3
R4
R5
R6
R7
R8
R9
Reticle contents: 9-row x 5-col = 45 fields.
primary primary copy tool maintenance new
![Page 6: Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white = re!ective black = absorber. bright "eld (BF) dark "eld (DF) low-!are bright "eld](https://reader035.fdocuments.net/reader035/viewer/2022071506/612738ef879372204206c45f/html5/thumbnails/6.jpg)
HV and Contact
Contact & Slot
Line End & Jog
Contact Bias
SEMATECH Contact
HV Cleave
LBNL Pseudo PSM
Pseudo PSM Cleave
VLM image
![Page 7: Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white = re!ective black = absorber. bright "eld (BF) dark "eld (DF) low-!are bright "eld](https://reader035.fdocuments.net/reader035/viewer/2022071506/612738ef879372204206c45f/html5/thumbnails/7.jpg)
The following slides show a high-level summary of each field of the reticle.
NOTE: All fields print as a vertically flipped version of what you see here.
For a detailed high-resolution version of each field, use the links on the left
side of the website.
![Page 8: Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white = re!ective black = absorber. bright "eld (BF) dark "eld (DF) low-!are bright "eld](https://reader035.fdocuments.net/reader035/viewer/2022071506/612738ef879372204206c45f/html5/thumbnails/8.jpg)
1:1 horizontal lines. 60-nm half pitch to
12-nm half pitch
1:1 vertical lines. 60-nm half pitch to
12-nm half pitch 1:1 contacts 50-nm half pitch to
16-nm half pitch
1:1 contacts 50-nm half pitch to
16-nm half pitch
HV and Contact (BF)
![Page 9: Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white = re!ective black = absorber. bright "eld (BF) dark "eld (DF) low-!are bright "eld](https://reader035.fdocuments.net/reader035/viewer/2022071506/612738ef879372204206c45f/html5/thumbnails/9.jpg)
HV and Contact (BF)
![Page 10: Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white = re!ective black = absorber. bright "eld (BF) dark "eld (DF) low-!are bright "eld](https://reader035.fdocuments.net/reader035/viewer/2022071506/612738ef879372204206c45f/html5/thumbnails/10.jpg)
1:1 horizontal lines. 60-nm half pitch to
12-nm half pitch
1:1 vertical lines. 60-nm half pitch to
12-nm half pitch 1:1 contacts 50-nm half pitch to
16-nm half pitch
1:1 contacts 50-nm half pitch to
16-nm half pitch
HV and Contact (LFBF)
![Page 11: Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white = re!ective black = absorber. bright "eld (BF) dark "eld (DF) low-!are bright "eld](https://reader035.fdocuments.net/reader035/viewer/2022071506/612738ef879372204206c45f/html5/thumbnails/11.jpg)
1:1 horizontal lines. 60-nm half pitch to
12-nm half pitch
1:1 vertical lines. 60-nm half pitch to
12-nm half pitch 1:1 contacts 50-nm half pitch to
16-nm half pitch
1:1 contacts 50-nm half pitch to
16-nm half pitch
HV and Contact (DF)
![Page 12: Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white = re!ective black = absorber. bright "eld (BF) dark "eld (DF) low-!are bright "eld](https://reader035.fdocuments.net/reader035/viewer/2022071506/612738ef879372204206c45f/html5/thumbnails/12.jpg)
Contact and Slot (BF)
![Page 13: Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white = re!ective black = absorber. bright "eld (BF) dark "eld (DF) low-!are bright "eld](https://reader035.fdocuments.net/reader035/viewer/2022071506/612738ef879372204206c45f/html5/thumbnails/13.jpg)
Contact and Slot (LFBF)
![Page 14: Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white = re!ective black = absorber. bright "eld (BF) dark "eld (DF) low-!are bright "eld](https://reader035.fdocuments.net/reader035/viewer/2022071506/612738ef879372204206c45f/html5/thumbnails/14.jpg)
Contact and Slot (DF)
![Page 15: Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white = re!ective black = absorber. bright "eld (BF) dark "eld (DF) low-!are bright "eld](https://reader035.fdocuments.net/reader035/viewer/2022071506/612738ef879372204206c45f/html5/thumbnails/15.jpg)
Line End and Jog (BF)
![Page 16: Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white = re!ective black = absorber. bright "eld (BF) dark "eld (DF) low-!are bright "eld](https://reader035.fdocuments.net/reader035/viewer/2022071506/612738ef879372204206c45f/html5/thumbnails/16.jpg)
Line End and Jog (DF)
![Page 17: Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white = re!ective black = absorber. bright "eld (BF) dark "eld (DF) low-!are bright "eld](https://reader035.fdocuments.net/reader035/viewer/2022071506/612738ef879372204206c45f/html5/thumbnails/17.jpg)
Line End and Jog (BF) (detail)
![Page 18: Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white = re!ective black = absorber. bright "eld (BF) dark "eld (DF) low-!are bright "eld](https://reader035.fdocuments.net/reader035/viewer/2022071506/612738ef879372204206c45f/html5/thumbnails/18.jpg)
Contact Bias (BF)The subfield contains cells for 57 nm - 10 nm nominal CD in 1 nm increments
Detail on next slide
![Page 19: Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white = re!ective black = absorber. bright "eld (BF) dark "eld (DF) low-!are bright "eld](https://reader035.fdocuments.net/reader035/viewer/2022071506/612738ef879372204206c45f/html5/thumbnails/19.jpg)
Contact Bias (BF) (detail)
Bias from -25% to 25%. Duty cycle from 1:1 to 1:8
![Page 20: Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white = re!ective black = absorber. bright "eld (BF) dark "eld (DF) low-!are bright "eld](https://reader035.fdocuments.net/reader035/viewer/2022071506/612738ef879372204206c45f/html5/thumbnails/20.jpg)
Contact Bias (dark)
Detail on next slide
![Page 21: Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white = re!ective black = absorber. bright "eld (BF) dark "eld (DF) low-!are bright "eld](https://reader035.fdocuments.net/reader035/viewer/2022071506/612738ef879372204206c45f/html5/thumbnails/21.jpg)
Contact Bias (DF) (detail)
Bias from -25% to 25%. Duty cycle from 1:1 to 1:8
![Page 22: Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white = re!ective black = absorber. bright "eld (BF) dark "eld (DF) low-!are bright "eld](https://reader035.fdocuments.net/reader035/viewer/2022071506/612738ef879372204206c45f/html5/thumbnails/22.jpg)
SEMATECH Contact (BF)
![Page 23: Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white = re!ective black = absorber. bright "eld (BF) dark "eld (DF) low-!are bright "eld](https://reader035.fdocuments.net/reader035/viewer/2022071506/612738ef879372204206c45f/html5/thumbnails/23.jpg)
SEMATECH Contact (DF)
![Page 24: Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white = re!ective black = absorber. bright "eld (BF) dark "eld (DF) low-!are bright "eld](https://reader035.fdocuments.net/reader035/viewer/2022071506/612738ef879372204206c45f/html5/thumbnails/24.jpg)
LBNL (BF)
![Page 25: Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white = re!ective black = absorber. bright "eld (BF) dark "eld (DF) low-!are bright "eld](https://reader035.fdocuments.net/reader035/viewer/2022071506/612738ef879372204206c45f/html5/thumbnails/25.jpg)
LBNL (LFBF*)
*contacts are dark-"eld NOT low-!are bright-"eld
![Page 26: Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white = re!ective black = absorber. bright "eld (BF) dark "eld (DF) low-!are bright "eld](https://reader035.fdocuments.net/reader035/viewer/2022071506/612738ef879372204206c45f/html5/thumbnails/26.jpg)
LBNL (DF)
![Page 27: Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white = re!ective black = absorber. bright "eld (BF) dark "eld (DF) low-!are bright "eld](https://reader035.fdocuments.net/reader035/viewer/2022071506/612738ef879372204206c45f/html5/thumbnails/27.jpg)
Pseudo PSM 1D
30 nm - 10 nm HP lines
30 nm - 10 nm HP lines
![Page 28: Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white = re!ective black = absorber. bright "eld (BF) dark "eld (DF) low-!are bright "eld](https://reader035.fdocuments.net/reader035/viewer/2022071506/612738ef879372204206c45f/html5/thumbnails/28.jpg)
Pseudo PSM 2D
30 nm - 10 nm HP contacts
30 nm - 10 nm HP lines
![Page 29: Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white = re!ective black = absorber. bright "eld (BF) dark "eld (DF) low-!are bright "eld](https://reader035.fdocuments.net/reader035/viewer/2022071506/612738ef879372204206c45f/html5/thumbnails/29.jpg)
Pseudo PSM Cleave
30 nm - 10 nm HP lines
![Page 30: Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white = re!ective black = absorber. bright "eld (BF) dark "eld (DF) low-!are bright "eld](https://reader035.fdocuments.net/reader035/viewer/2022071506/612738ef879372204206c45f/html5/thumbnails/30.jpg)
Horizontal block
Vert
ical
blo
ck
HV Cleave (LFBF)
1:3 lines 16 nm - 32 nm
1:1 lines 16 nm - 40 nm HP
100 nm HP dense contacts
16
3216
40
![Page 31: Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white = re!ective black = absorber. bright "eld (BF) dark "eld (DF) low-!are bright "eld](https://reader035.fdocuments.net/reader035/viewer/2022071506/612738ef879372204206c45f/html5/thumbnails/31.jpg)
Horizontal block
Vert
ical
blo
ck
HV Cleave (DF)
100 nm HP dense contacts
![Page 32: Overview of the SEMATECH Berkeley MET reticle IMO220846 ... · BS film: 70-nm CrN Mask Info. white = re!ective black = absorber. bright "eld (BF) dark "eld (DF) low-!are bright "eld](https://reader035.fdocuments.net/reader035/viewer/2022071506/612738ef879372204206c45f/html5/thumbnails/32.jpg)
Illum Monitor Grid 2