Optical setup & MEMS simulations

Jayan Ozhikandathil

Supervisor: Prof. Yves-Alain Peter Laboratary for Micro and Nanosystems

Département de génie physique - Polytechnique Montréal30-05-2008

Introduction • Measurements:• Reflection and transmission spectra with

normal incidence of white light • Reflection and transmission spectra analysis

as a function of angle of incidence

• Optical setup includes:– A broad band source– Spectroscopy instrument

• High resolution– Optical components

Characterisation setup

detector

camera 2 camera 1

source

polariser

iris

flipmirror

flipmirror

beamsplitter

sample

lens lens

Measurements 1. Reflection

2. Transmission

3. Angular dependence

Rotation stage

XYZ stage

Single axis stage

XYZ stage XYZ stage

Metal (steel )block Metal (steel )block

Microscope objective562 xyz Newport

UTR 120 NewportUMR 12.40

Newport

Microscope objective (58373)

Reflection spectrum as function of θs

2θs

θi

θr

θs

s

D

sample

samplerotation

Optical setup: future tasks

• Realization of complete setup

• Measurements of transmission, reflection spectra and angular dependence on it.

• Studies on polarization dependence on spectra

• Behavior of QD emission on PhC Slab

• Behavior of QD emission with lateral and vertical tuning of double layer PhC

• Behavior of QD emission with vertical tuning of single layer PhC

•

•

•

•

MEMS for the tuning of Photonic crystal

• Tuning of optical properties of PhC slabs can be achieved in a double layer PhC arrangement

SiN

SiNSiO2

Si

Si SiN

SiNSiO2

Si

Si+

-

~

Lateral tuning Vertical tuning

MEMS actuator design using CoventorWare

Undesirable effects due to levitation effects in fields in the vertical axis ~20nm upward

movement noticed

1. Lateral Tuning

Displacement vs. voltage

MEMS Lateral tuning…

• 2. Lateral tuning

Negligible upward movement

Single slab Vertically tunable PhC

+Ve

Single slab tunable PhC Process

Future tasks on MEMS design

Integration of vertical and lateral tuning in a single design– Design of suitable flexures which supports the vertical and later

actuation

Thank you!