제 13 장 CMOS Process

Integration

1. CMOS 단면도 (예제)

2. 0.5μm CMOS Process

▢ Device Structure

▢ Mask Sequence

① Well mask

② Active mask

③ NVT mask

④ PVT mask

⑤ PLY mask

⑥ NSD mask

⑦ PSD mask

⑧ Contact mask

⑨ Metal-1 mask

⑩ VIA mask

⑪ Metal-2 mask

⑫ Pad mask

=> piranha cleaning