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    "AlSiC-Based HybridComposite Tool Kit"

    By Richard W. Adams

    and Mark A. Occhionero

    Ceramics Process Systems

    111 South Worcester St

    Chartley MA 02712-0338

    www.alsic.com

    New England IMAPS 31 Annual Symposium

    Thursday May 6, 2004

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    "AlSiC-Based Hybrid Composite Tool Kit"

    Abstract:AlSiC and multi-component structures provide unique

    thermal management electronic packaging solutions for

    microwave, microelectronics, power electronics, and

    optoelectronics that result in improved product reliability. This

    paper reviews volume AlSiC manufacturing applications today,

    and then describes examples of a wide range of possibilities for

    multi-component, multi-functional thermal management

    structures.

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    AlSiC Packaging for Electronics Thermal Management

    - Basic Parameters

    Controlled Thermal Expansion

    Engineered CTE values - for component and assembly

    compatibility = reliability

    Engineered solutions can create typical CTE values 7-12 ppm/C

    Thermal Dissipation

    High isotropic thermal conductivity, typical = 200 W/mK

    Lightweight

    3 g/cm 3

    Cost Effective Manufacturing Capability - net shape cast

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    CPS AlSiC Fabrication - Defines Properties and Design

    SiC to Al-metal ratio defines thermal expansion

    1st - SiC preform with controlled and variable volume content

    2nd - Infiltrate with Al-metal to form the AlSiC composite

    Thermal conductivity determined by components Electronic Grade SiC 230 - 260 W/mK

    A356.2 Casting Alloy 160 W/mK

    Little influence of ratio of 2 components

    net shape forming

    preform is ~ smaller than final part

    infiltration tool = final dimensions

    eliminates costly machining

    SiC preforminjection molded

    AlSiC productinfiltration casting

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    AlSiC - Metal Matrix Composite Material

    SiC

    SiC particles uniformly distributed

    in continuous Al-matrix

    C S AlSiC nstantaneous C

    9

    emperature ( C)

    In

    n

    n

    u

    C

    E

    (

    /C)

    AlSiC-9

    AlSiC-

    AlSiC-

    ~ vol% SiC

    ~ vol% SiC

    ~ vol% SiC

    See www.alsic.com

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    AlSiC Tools

    Marry Properties to Product Design

    Design Functionality

    Basic AlSiC

    lids

    baseplates

    package system structures

    AlSiC + Concurrent IntegrationTM

    Cooling Tubes - active fluid HOPG / Diamond - passive transfer

    Dielectric Ceramic Inserts - isolation

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    Basic AlSiC Design Pick compatible AlSiC CTE

    Seal rings

    Substrates

    Devices

    Design rules for AlSiC casting

    Draft Angles

    Thicknesses

    Radii

    Al-Rich Areas for conventionalmachining

    See www.alsic.com

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    Basic AlSiC - lids

    Simple to Complex GeometriesApplications:

    MicroprocessorLids

    DSP

    Flip Chip Lids

    Optical Lids

    Volumes100 pcs - 40K/week

    Price Volume/Complexity $ 2 - $ 5 in volumes of

    ~100K/yr

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    Basic AlSiC - lids

    Complex GeometriesProduct is net-shape fabricated -

    no machining

    multiple pedestals

    angled features

    radial alignment features

    septums and walls

    lower cost than machined

    Aluminum alternative

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    Basic AlSiC - Baseplates

    Compatible CTE = unlimited

    thermal cycling of package

    AlN soldered to AlSiC

    Design

    Dome Shape - Side 1

    Compressing a dome shape

    against flat cold plate

    maximizes heat transfer

    Flat - Side 2

    Attachment of flat substrates flat dielectric substrate surface

    convex bow cooler plate surface

    Thomas Schuetze, Herman Berg, OliverSchilling The new 6.5kV IGBT module: areliable device for medium voltageapplications, PCIM September 2001

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    Concurrent IntegrationTM -High Density Interconnect HDI for

    GaAs Microwave Transmit/Receive Packages

    First, dense dielectric ceramic

    ferrules are inserted into the

    QuickCastTM infiltration tooling

    along with the SiC preform.

    Then, the Al-metal, that infiltratesthe SiC preform to form the AlSiC

    composite, hermetically bonds and

    fills the ferrules to form coaxial

    feedthrus. This process is termed

    Concurrent IntegrationTM.

    Dielectric Feedthrus

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    Concurrent IntegrationTM - AlSiC LED Submount

    Alloy Metal InsertsProduct Features:

    multiple pedestals

    angled features

    partially machined to expose Alloy

    4 pads for assembly

    Alloy 4 bonded direct to Al phaseof AlSiC

    Alloy 4 pad

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    Concurrent IntegrationTM - Optoelectronic AlSiC TE

    Cooler Substrate with HOPG

    High Thermal Conductivity Insert

    Product Features:

    Pyrolytic Graphite PG compressively

    encapsulated within AlSiC

    Thermal conductivity 1300 W/mK PG located near heat source/TE

    cooler position.

    Selective use of costly material

    1350 W/mK

    Heat source surface

    1350 W/mKAlSiC laser diode TEC substrate system showing TEC

    mount area top and the cross section showing the

    HOPG insert in the AlSiC composite bottom .

    HOPG 1300 W mK

    AlSiC

    AlSiC

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    Concurrent IntegrationTM - Liquid Flow Thru Cooling

    Cooling Tube or Heat Exchanger

    Product Features:

    Tube intimate within AlSiC casting SiC overmolded onto tube

    Direct bond AlSiC to tube

    Maximize heat transfer AlSiC to tube

    Low cost one step assembly

    CPS Patented process

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    Metallurgical Bonding AlSiC to AlSiC

    BAS

    TOP

    Heat sink and housing are joined by

    Friction Stir Welding.

    Frictio Stir Weldi g

    Bonding of Engineered Al-Rich

    Areas within AlSiC casting

    Al Solder Bo di g Processes

    Various commercially availableDesired Al Skin Present on

    AlSiC

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    QuickCastTM

    High Pressure Precision Aluminum Casting Aluminum-only precision casting

    Tolerances in the +/-0.003 Range

    Low cost tooling

    Rapid product introduction andmoderate production rate

    Option for Concurrent IntegrationTM

    Diamond, PG, etc inserts

    High Output LED light housing

    RV, Boats, Theater, Safety Lighting

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    S mmary "AlSiC-Based Hybrid Composite Tool Kit"

    Basic AlSiC Properties coupled with Concurrent IntegrationTM

    AlSiC = Engineered CTE, Thermal Conductivity, Lightweight

    CPS AlSiC =

    Shape Complexity and Tight Tolerance - net shape

    Attractive Value Proposition for many growing number of Applications

    Concurrent IntegrationTM Presents Thermal Package Design

    Options - limited only to your imagination

    AlN, ZTA, Al2O3, Si3N4 Substrates/Ferrules, etc.

    Stainless steel, alloy 4 , Titanium inserts

    Tubes, Heat exchangers, welded pin fin coolers

    High Thermal Conductivity Diamond, PG

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    Visit the CPS Booth