NC Applications in Manufacturing GSNU. GSNU- Dept. of Mechanical and Aerospace Engineering CMP...
Transcript of NC Applications in Manufacturing GSNU. GSNU- Dept. of Mechanical and Aerospace Engineering CMP...
NC Applications in Manufacturing
GSNU
GSNU- Dept. of Mechanical and Aerospace Engineering GSNU
CMP (Chemical Mechanical Polishing)
Toyoda Float Polishing Machine
Table Speed: 100 RPM
Wafer Carrier Speed: 75 RPM
Down Pressure: 5 psi
Polishing plate
Wafer carrier
GSNU- Dept. of Mechanical and Aerospace Engineering GSNU
Process Setup
Side view Wafer carrier view
Polishing Tool Strasbaugh 6ECWafers 5 Patterned Oxide
Pressure (3, 5, 8) psiTable/Carrier Speed (30/27, 50/45, 80/72) rpm
Slurry Type Cabot Semi-sperse D7000Slurry Flowrate 150 ml/min
Elapsed Polish Time (15, 60 Seconds) Relative Hersey
Number(0.8, 1.2, 2.1, 3.5, 5.6)
GSNU- Dept. of Mechanical and Aerospace Engineering GSNU
Wafer-Pad ContactSmall Film Thickness
Increasing Line Density
Large Film Thickness
GSNU- Dept. of Mechanical and Aerospace Engineering GSNU
고에너지빔 공정 레이저빔 (LBM) 전자빔가공 (EBM) 플라즈마빔가공 (PBM)
GSNU- Dept. of Mechanical and Aerospace Engineering GSNU
레이저빔가공레이저빔가공(LBM)
Laser Beam Machining
<< 주요 특징주요 특징 >>(1) 정확도 , 반복도 , 자동화의 용이성(2) 광섬유의 활용으로 유연화(3) 간단한 고정구 , 짧은 설치시간 , 컴퓨터제어(4) 사용에 주의
GSNU- Dept. of Mechanical and Aerospace Engineering GSNU
< 적용분야 >(1) 전자 , 자동차산업 – 절단 , 드릴링(2) 용접작업(3) 표면처리(4) 마킹
GSNU- Dept. of Mechanical and Aerospace Engineering GSNU
레이저 유형 동작모드 [W]사용전력루비 P 50
Nd:유리 P 50Nd:YAG, CW/P 600
Alexandrite, CW/P 100CO2 CW/P 25000
* P : , CW: 펄스파 연속파* Nd : Niodimium
* YAG : Ytrium-Aluminium-Garnet
용도 공작물 재료 레이저종류절삭 금속 PCO2, CWCO2, Nd:YAG, 루비
플라스틱 CWCO2
세라믹 PCO2
드릴링 금속 PCO2, CWCO2, Nd: , 유리 루비플라스틱 엑시머
마킹 금속 PCO2, Nd :Y A G플라스틱 엑시머세라믹 엑시머
표면처리 금속 CWCO2
용접 금속 PCO2, CWCO2, Nd:YAG, Nd: , 유리 루비
GSNU- Dept. of Mechanical and Aerospace Engineering GSNU
cutting
welding Cladding( 피복 )
Heat treating
GSNU- Dept. of Mechanical and Aerospace Engineering GSNU
perforatingMarking-rubber
kiss-cutting
engraving
Applications
GSNU- Dept. of Mechanical and Aerospace Engineering GSNU
Web-processing
showerheadslitting
Applications
GSNU- Dept. of Mechanical and Aerospace Engineering GSNU
NC Control
GSNU- Dept. of Mechanical and Aerospace Engineering GSNU
Laser - Galvanometer Control
GSNU- Dept. of Mechanical and Aerospace Engineering GSNU
Backlight Unit Patterns
가공 영역 : 13”, 14”, 15” 등
폭 : 50 ㎛ ~ 250 ㎛
깊이 : 25 ㎛ ~ 125 ㎛
프리즘 각도 : 90 도 가 광학적으로 이상적
GSNU- Dept. of Mechanical and Aerospace Engineering GSNU
Groove Shapes : V-cut vs. Laser
V-cut Laser
GSNU- Dept. of Mechanical and Aerospace Engineering GSNU
Material Effect on Pattern
압출성형 사출성형
GSNU- Dept. of Mechanical and Aerospace Engineering GSNU
243.8 266.3318.2
42.2 46.0 57.1 68.7103.9
193.4 212.3
0
100
200
300
400
5 7.5 10 12.5 15
Output P ower (W)
Dim
ensi
on (
μm)
Width Depth
Source CO2
Wavelength ( m )
10.6
Output Power (W)
0~50
Power Stability 5%
Beam Size (mm)
0.34
Operation Mode
Continuous Wave
Mode Quality TEM00
Power SupplyAC200V+10%,
50Hz
Power Consumption
(kW)2.2
Test Result
GSNU- Dept. of Mechanical and Aerospace Engineering GSNU
Optical Properties
050
100150
200250
300
20
30
40
50
60
70
1000
1500
2000
2500
X
Luminance Measured Data
Y
Lum
inan
ce
050
100150
200250
300
20
30
40
50
60
70
0
5000
10000
X
Luminance Measured Data
YLu
min
ance
- 인쇄 방식에 비해 약 2~3 배의 휘도
- 균일도는 패턴조정으로 달성가능