Nanolitografi E-beam litografi Nano imprint litografi.
-
Upload
kaleigh-luty -
Category
Documents
-
view
218 -
download
1
Transcript of Nanolitografi E-beam litografi Nano imprint litografi.
![Page 1: Nanolitografi E-beam litografi Nano imprint litografi.](https://reader035.fdocuments.net/reader035/viewer/2022062511/551a9481550346b52d8b5fae/html5/thumbnails/1.jpg)
NanolitografiE-beam litografiNano imprint litografi
![Page 2: Nanolitografi E-beam litografi Nano imprint litografi.](https://reader035.fdocuments.net/reader035/viewer/2022062511/551a9481550346b52d8b5fae/html5/thumbnails/2.jpg)
Mikroskopi
![Page 3: Nanolitografi E-beam litografi Nano imprint litografi.](https://reader035.fdocuments.net/reader035/viewer/2022062511/551a9481550346b52d8b5fae/html5/thumbnails/3.jpg)
SEM (scanning electron microscope)
![Page 4: Nanolitografi E-beam litografi Nano imprint litografi.](https://reader035.fdocuments.net/reader035/viewer/2022062511/551a9481550346b52d8b5fae/html5/thumbnails/4.jpg)
F =-e v x B
Komponenter i SEM
Magnetisk linse
Schottky emitter elektronkilde
![Page 5: Nanolitografi E-beam litografi Nano imprint litografi.](https://reader035.fdocuments.net/reader035/viewer/2022062511/551a9481550346b52d8b5fae/html5/thumbnails/5.jpg)
![Page 6: Nanolitografi E-beam litografi Nano imprint litografi.](https://reader035.fdocuments.net/reader035/viewer/2022062511/551a9481550346b52d8b5fae/html5/thumbnails/6.jpg)
![Page 7: Nanolitografi E-beam litografi Nano imprint litografi.](https://reader035.fdocuments.net/reader035/viewer/2022062511/551a9481550346b52d8b5fae/html5/thumbnails/7.jpg)
![Page 8: Nanolitografi E-beam litografi Nano imprint litografi.](https://reader035.fdocuments.net/reader035/viewer/2022062511/551a9481550346b52d8b5fae/html5/thumbnails/8.jpg)
![Page 9: Nanolitografi E-beam litografi Nano imprint litografi.](https://reader035.fdocuments.net/reader035/viewer/2022062511/551a9481550346b52d8b5fae/html5/thumbnails/9.jpg)
E-beam litografi
- Dedikerede e-beam systemer
- SEM med Raith Gmbh kontrolsystem og ’pattern generator’
DANCHIP
![Page 10: Nanolitografi E-beam litografi Nano imprint litografi.](https://reader035.fdocuments.net/reader035/viewer/2022062511/551a9481550346b52d8b5fae/html5/thumbnails/10.jpg)
Test of nanowire writingE-beam writing+RIE(Nano 9 – Tom+Jeppe)
![Page 11: Nanolitografi E-beam litografi Nano imprint litografi.](https://reader035.fdocuments.net/reader035/viewer/2022062511/551a9481550346b52d8b5fae/html5/thumbnails/11.jpg)
Wires and channels
![Page 12: Nanolitografi E-beam litografi Nano imprint litografi.](https://reader035.fdocuments.net/reader035/viewer/2022062511/551a9481550346b52d8b5fae/html5/thumbnails/12.jpg)
2D grating:Periodicity - 250nm
Optiske strukturerDiffraktive komponenter
![Page 13: Nanolitografi E-beam litografi Nano imprint litografi.](https://reader035.fdocuments.net/reader035/viewer/2022062511/551a9481550346b52d8b5fae/html5/thumbnails/13.jpg)
Nano Imprint Lithography (NIL)
![Page 14: Nanolitografi E-beam litografi Nano imprint litografi.](https://reader035.fdocuments.net/reader035/viewer/2022062511/551a9481550346b52d8b5fae/html5/thumbnails/14.jpg)
![Page 15: Nanolitografi E-beam litografi Nano imprint litografi.](https://reader035.fdocuments.net/reader035/viewer/2022062511/551a9481550346b52d8b5fae/html5/thumbnails/15.jpg)
![Page 16: Nanolitografi E-beam litografi Nano imprint litografi.](https://reader035.fdocuments.net/reader035/viewer/2022062511/551a9481550346b52d8b5fae/html5/thumbnails/16.jpg)
![Page 17: Nanolitografi E-beam litografi Nano imprint litografi.](https://reader035.fdocuments.net/reader035/viewer/2022062511/551a9481550346b52d8b5fae/html5/thumbnails/17.jpg)
Nanowire detektor
Appl. Phys. Lett. 89, 153102 (2006)
![Page 18: Nanolitografi E-beam litografi Nano imprint litografi.](https://reader035.fdocuments.net/reader035/viewer/2022062511/551a9481550346b52d8b5fae/html5/thumbnails/18.jpg)
Focused Ion Beam (FIB) System
![Page 19: Nanolitografi E-beam litografi Nano imprint litografi.](https://reader035.fdocuments.net/reader035/viewer/2022062511/551a9481550346b52d8b5fae/html5/thumbnails/19.jpg)
Focused Ion Beam Writing
As the diagram on the right shows,the gallium (Ga+) primary ion beam hitsthe sample surface and sputters a smallamount of material, which leaves thesurface as either secondary ions (i+ or i-) or neutral atoms (n0). The primary beam also produces secondary electrons (e-).As the primary beam rasters on the samplesurface, the signal from the sputtered ionsor secondary electrons is collected to forman image.
![Page 20: Nanolitografi E-beam litografi Nano imprint litografi.](https://reader035.fdocuments.net/reader035/viewer/2022062511/551a9481550346b52d8b5fae/html5/thumbnails/20.jpg)
• E-beam ~10 nm• FIB ~20 nm• EDX
E-beam og FIB litografi
![Page 21: Nanolitografi E-beam litografi Nano imprint litografi.](https://reader035.fdocuments.net/reader035/viewer/2022062511/551a9481550346b52d8b5fae/html5/thumbnails/21.jpg)
TEM samples
![Page 22: Nanolitografi E-beam litografi Nano imprint litografi.](https://reader035.fdocuments.net/reader035/viewer/2022062511/551a9481550346b52d8b5fae/html5/thumbnails/22.jpg)
FIB skrivningAAU-logo på et hår
![Page 23: Nanolitografi E-beam litografi Nano imprint litografi.](https://reader035.fdocuments.net/reader035/viewer/2022062511/551a9481550346b52d8b5fae/html5/thumbnails/23.jpg)
CVD med FIB stråle
Shinji MATSUI
![Page 24: Nanolitografi E-beam litografi Nano imprint litografi.](https://reader035.fdocuments.net/reader035/viewer/2022062511/551a9481550346b52d8b5fae/html5/thumbnails/24.jpg)
http://www.nanonet.go.jp/english/mailmag/2006/086a.html
![Page 25: Nanolitografi E-beam litografi Nano imprint litografi.](https://reader035.fdocuments.net/reader035/viewer/2022062511/551a9481550346b52d8b5fae/html5/thumbnails/25.jpg)
http://www.nanonet.go.jp/english/mailmag/2006/086a.html
![Page 26: Nanolitografi E-beam litografi Nano imprint litografi.](https://reader035.fdocuments.net/reader035/viewer/2022062511/551a9481550346b52d8b5fae/html5/thumbnails/26.jpg)
http://www.nanonet.go.jp/english/mailmag/2006/086a.html
![Page 27: Nanolitografi E-beam litografi Nano imprint litografi.](https://reader035.fdocuments.net/reader035/viewer/2022062511/551a9481550346b52d8b5fae/html5/thumbnails/27.jpg)
http://www.nanonet.go.jp/english/mailmag/2006/086a.html
![Page 28: Nanolitografi E-beam litografi Nano imprint litografi.](https://reader035.fdocuments.net/reader035/viewer/2022062511/551a9481550346b52d8b5fae/html5/thumbnails/28.jpg)
http://www.nanonet.go.jp/english/mailmag/2006/086a.html
![Page 29: Nanolitografi E-beam litografi Nano imprint litografi.](https://reader035.fdocuments.net/reader035/viewer/2022062511/551a9481550346b52d8b5fae/html5/thumbnails/29.jpg)
FIB skrivningAAU-logo på et hår