Nanolithography using DI Nanolithography Software for Explorer
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Nanolithography using DI Nanolithography Software for Explorer PMMA C6 spun at 4000 RPM onto a Si(100) Substrate: thickness ~ 200 nm Baked at 115 o C for 30 seconds Pattern scratched onto surface: Previously used NSC A tip did the actual writing T-B ~ -5 nA, Setpoint = 5 nA With feedback off, a relative z offset of 100 nm was added to the z scanner to move the tip closer to the surface Write speed was 1m/s After Befor e
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Before. After. Nanolithography using DI Nanolithography Software for Explorer. PMMA C6 spun at 4000 RPM onto a Si(100) Substrate: thickness ~ 200 nm Baked at 115 o C for 30 seconds Pattern scratched onto surface: Previously used NSC A tip did the actual writing T-B ~ -5 nA, Setpoint = 5 nA - PowerPoint PPT Presentation
Transcript of Nanolithography using DI Nanolithography Software for Explorer
Nanolithography using DI Nanolithography Software for Explorer
PMMA C6 spun at 4000 RPM onto a Si(100) Substrate: thickness ~ 200 nm Baked at 115oC for 30 seconds Pattern scratched onto surface:
Previously used NSC A tip did the actual writing T-B ~ -5 nA, Setpoint = 5 nA With feedback off, a relative z offset of 100 nm was added to the z scanner to move
the tip closer to the surface Write speed was 1m/s
AfterBefore
Nanolithography: OU Symbol
Nanolithography: OU Symbol - Zoom in
Nanolithography: OU Symbol - Line Scan
Nanolithography: OU Symbol - 3D View
Nanolithography: Luke -first write
Nanolithography: Vertical and Horizontal lines
Nanolithography: Tip image Before and After
