Monolithic integration of GaN power transistors integrated with...
Transcript of Monolithic integration of GaN power transistors integrated with...
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October 3-5, 2016
International Workshop on Power Supply On Chip
(PwrSoC 2016)
October 4, 2016
Tatsuo Morita
Automotive & Industrial Systems Company
Panasonic Corporation
Monolithic integration of
GaN power transistors
integrated with gate drivers
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Potential Application for WBG semiconductors
GaN power transistors are suited for high-frequency applications.
600V/15A TO-220
600V/15A SMD
Normally-off GaN Gate Injection Transistor
(GaN-GIT)
Production
Proto-type
30V normally-off GaN-GITs
(developed in 2014)
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Advantages of GaN for Power device
Comparison of material properties
x107 (cm/s)
GaN
Si
SiC
Bandgap (eV)
Maximum
Electric
Field
(MV/cm)
Electron
Mobility
Saturation
drift velocity Baliga’s
FOM
(cm2/Vs)
3
2
1
AlGaN/GaN Hetero-junction FET
GaN inherently has superior material properties for Power switching device
Unique feature of GaN is 2-Dimensional Electron Gas(2DEG) which serves
both high electron density and high electron mobility
High sheet carrier density induced by
polarization effects at the AlGaN/GaN
hetero-interface without any doping
GaN-FET can be fabricated on cost-
effective Si-substrates
Normally-on operation
Drain Source Gate
Un-doped AlGaN
Un-doped GaN
2DEG channel
Si substrate
Super-lattice Buffer
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Normally-off GaN Gate Injection Transistors - GIT -
Gate Injection Transistor (GIT)
Normally-off operation
Vg=0V: p-AlGaN lifts up the potential at the channel.
Vg>Vf: Hole injectction → Electron generation →Large Drain current
Very low RonQg
RonQg of 600V GIT is 0.7 WnC which is 1/13 of that of the latest SJ-MOSFET.
Good Recovery characteritics
GIT can be operated as a free-wheeling diode with very small charging current.
Recovery characteristics
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Power supply
GaN power devices used in Power supply
DC12V Bus
Isolated DC-DC converter
Non-isolated
DC-DC converter
PFC
AC-DC Power Supply
CPU
AC
100-230V
1~
1.2V
Power converter have progressed with overcoming design trade-off among
power density and efficiency, cost.
To make more advanced, GaN-FETs have been actively investigated.
・5MHz/50A GaN POL converter
reported on PCIM2014
・ GaN POL power IC integrated with gate
drivers reported on ISPSD14
1MHz resonant converter
using 600V normally-off GaNs
reported by Fraunhofer ISE
on ECSCRM2012
Totem-pole PFC using GITs
reported by Panasonic
on PCIM2014
Today’s topic
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1 2 5
Frequency (MHz)
0
100
200
300
400
500
600
Siz
e (
mm
2)
Inductor
170nH
GaN
Module
Inductor
350nH
Si-MOS
Module
GaN
70nH
For smaller POL converter
Advantage by increasing frequency
Compact
Increasing frequency greatly helps to reduce the system size.
Low RonQg power device and low parasitic inductance are key
factors.
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30V-class normally-off GaN-GITs
RonQg of developed 30V GaN-GIT is reached to 19.1mΩnC*1.
-> 36% smaller than that of reported Si-MOSFET*2.
*1 H. Umeda, et al., PCIM2014
*2 S. Xu, et al., International Electron Devices Meeting (IEDM) Technical Digests, 145(2009)
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Impact of the parasitic inductance
Parasitic inductance on Power Loop LPower_Loop
Cout
Parasitic inductance on Gate Loop LGate_Loop
Spike voltage t
ILV DS
LoopPowerSpike
_
VDS
IDS
→limit di/dt to keep Vds under BVds
→causes gate oscillation
→generate Noise
→Reduction of Lgate_Loop also effectively increase gate charging speed
Parastic inductance on power loop (LPower_Loop) increase the spike voltage
→It limits di/dt and causes gate oscillation, increase noise.
Parastic inductance on gate loop (LGate_Loop) increase the gate charging time.
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This Work : GaN-based IC with gate driver
This Work
One Chip
GaN-based IC
Inductor (L) Capacitor (C)
High-side
Transistor (Hi)
Low-side
Transistor (Lo) Si-based
Gate Drivers
Conventional
GaN transistors and GaN gate drivers are integrated to a
compact chip
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-4
-2
0
2
4
6
8
10
12
14
GaN
Transistors
Vout
VinVgate driver
Gate
DriversParasitic
Inductors
L
C
L1
L2
L3
L4
Impact of Integration : Small Parasitic Inductances
Switching speed is increased by reduction of parasitic inductances
Simulated turn-on switching
waveform
0 1 2 3
Time (ns)
Vo
ltag
e (
V)
L1~L4 = 4.5nH
12.5V/ns
L1~L4 = 1nH
15.8V/ns
12V ⇒ 1.8V Iout = 6A
2MHz operation
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0.6
0.7
0.8
0.9
1
1.1
1.2
1.3
0 2 4 6 8 10 12
Op
era
tio
n L
oss (
W)
Parasitic Inductance (nH)
L1+L2
(L3=L4=0)
L3+L4
(L1=L2=0)
Parasitic Inductance (nH)
Op
era
tio
n L
os
s (
W)
00.6
2 4 6 8 10 12
0.7
0.8
0.9
1
1.1
1.2
1.312V ⇒ 1.8V
Iout=6A
@ 2MHz
Simulated operation loss
Impact of Integration : Small Parasitic Inductances
Operation loss is reduced by the reduction of parasitic inductances.
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Vout
Iin
tr tf
VG
D-Tr.
E-Tr.1
Vout
Iin Large Wg
E-Tr.4
DCFL
5V
Switching
Power
Device
VG
GaN Gate Driver : DCFL (Direct Coupled FET Logic)
High power consumption in GaN gate driver of DCFL.
Time Chart Circuit Design
High
Short-Circuit
Current
Flowing
Short-Circuit
Current
Charge
Current
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Vout
Iin
tr tf
VG
High
5V
Switching
Power
Device
Buffer
AmplifierDCFL
VoutVG
D-Tr.
E-Tr.1
E-Tr.2
E-Tr.3
Iin Small Wg Large Wg
E-Tr.4
GaN Gate Driver : DCFL with Buffer Amplifier
Low power consumption in GaN gate driver by buffer amplifier.
Time Chart Circuit Design
Low
Short-Circuit
Current
Flowing
Short-Circuit
Current
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AlGaNGaN
Buffer layer
Si Substrate
p-AlGaN
Gate
S D DS
Schottky
Gate
GaN-GIT GaN-HFET
Isolation layer
GaN Device Structure and Characteritics
0
5
10
15
20
25
30
1E-10
1E-8
1E-6
1E-4
1E-2
1E+0
1E+2
-4 -2 0 2 4 6 8
Ro
n (
Ωm
m)
Ids (
A/m
m)
Vgs (V)
GIT
GIT
HFET
HFET
0
Vgs (V)
Ids
(A
/mm
)
2 4 6 8-2-41E-10
1E-8
1E-6
1E-4
1E-2
1E+0
1E+2
0
5
10
15
20
25
30
Ro
n (
Ωm
m)
Device Characteristics Device Structure
D-mode HFET and E-mode GIT are monolithically fabricated.
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Operation Characteristics of GaN Gate Driver
-2
-1
0
1
2
3
4
5
6
-50 0 50 100
Voltage (
V)
time (ns)
Vin
tr=7ns
Pulth Width:50ns
tf=5ns
Vout
Cload:1500pF
0 50 100-50-2
-1
0
1
2
3
4
5
6
time (ns)
Vo
lta
ge
(V
)
GaN gate driver is about 40% faster than Si gate driver.
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0
1
2
3
4
5
6
7
8
9
10
0 20 40 60 80 100
Po
we
r C
on
su
mp
tio
n o
f G
ate
Drive
r [W
]
duty [%]
Without
buffer amplifier
duty (%)
Po
we
r C
on
su
mp
tio
n o
f G
ate
Dri
ve
r (W
)
0 20 40 60 80 100
0
1
2
3
4
5
6
7
8
9
10
t1
t2
Gate Driver
Output Voltage
Low
High
duty ratio
= t1 / t2
With buffer amplifier
98.5%
Reduction
Low Consumption of GaN Gate Driver
Power consumption is reduced about 98.5% by using GaN
DCFL with buffer amplifier.
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GaN-based DC-DC Converter IC
Compact chip size is 5.1mm x 2.3mm
GaN-based IC reduces the system size
High side Transistor
Low side Transistor
Gate Driver
for High side
Gate Driver
for Low side1mm
Chip photograph Module layout with GaN-based IC
Driver
Driver
High-GIT
Low-GITInductor
Inductor
GaN-based IC
Integration
Circuit diagram
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Operating Efficiencies of DC-DC Converter
Peak efficiency of 88.2% is achieved with 12V - 1.8V DC-
DC conversion at 2MHz
70
75
80
85
90
95
0 2 4 6 8 10 12
Eff
icie
ncy
(%)
Load Current (A)
1MHz
2MHz
3MHz
This work
Discrete
12V ⇒ 1.8V DCDC down conversion
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Analyzed operating loss of GaN-based IC
Switching loss have been reduced 15% by using GaN-based DC-
DC converter IC.
80
82
84
86
88
90
0
0.5
1
1.5
2
2.5
1 2
Eff
icie
nc
y (
%)
Op
era
tio
nL
oss (
W)
12V ⇒ 1.8V,
Iout=6A,
@2MHz
Switching Loss
Eoss
Conduction Loss
Discrete This Work
88.2%
0.68W0.80W
87.8%
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Summary
Compact GaN-based DC-DC Converter IC
with High Speed Gate Drivers for
Highly Efficient DC-DC Converters
GaN Gate Driver DCFL with buffer amplifier
Monolithically fabrication of HFET and GIT
High speed switching (tr + tf = 12ns)
GaN-based IC 5.1mm X 2.3mm Compact chip size
Peak Efficiency (12V-1.8V) : 88.2%@2MHz
This work is partially supported by the New Energy
and Industrial Technology Development Organization
(NEDO), Japan, under the Strategic Development of
Energy Conservation Technology Project.