Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5....
Transcript of Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5....
![Page 1: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/1.jpg)
Silicon nanomembranes (pnc-Si): Molecular and Cellular
applications James L. McGrathBiomedical EngineeringUniversity of RochesterNanomembrane Research Group
EMBS @ SY!CUSE UNIVERSITY APRIL 23, 2009
Friday, May 22, 2009
![Page 2: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/2.jpg)
NRG 2009
Silicon Nanomembranes(pnc-Si - porous nanocrystalline silicon)
Thinner = faster transport and less sample loss
A. van den Berg and M. Wessling, Nature 445, 726, 2007
15nm thick5-80 nm pores
Friday, May 22, 2009
![Page 3: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/3.jpg)
NRG 2009
Chris Striemer*
Bioengineeing Group Materials Group
Tom Gaborski*
Jess Snyder (Protein separations)Anant Agrawal (Cellular studies)Barrett Nehilla (Cell applications)Henry Chung (Microfluidics)Crowe, Hoffman, Summers (undergraduates)
Dave Fang (Material development)Maryna Kavalenka (Air permeability)
Jim McGrath Philippe Fauchet
SiMPore Inc.*
JP DesormeauxKarl Reisig
Nakul Nataraj
Rick RichmondJamie RoussieFunding
NSF, NIH, CSTI, J&J, NYSTAR, CEIS
Collaborations
Shigeru Amemiya, PITT
Nanomembrane Research Group
RIT: SMFL
Bill Bernhard, URMC
Friday, May 22, 2009
![Page 4: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/4.jpg)
NRG 2009
Outline
Overview of pnc-Si
Transport
Separations
Cell Culture
Other Applications
Friday, May 22, 2009
![Page 5: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/5.jpg)
NRG 2009
Fabrication
Striemer, C.S, et al. 2007, Nature, 445:749-53
Friday, May 22, 2009
![Page 6: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/6.jpg)
NRG 2009
Fabrication RAPID = SECONDS
Striemer, C.S, et al. 2007, Nature, 445:749-53
Friday, May 22, 2009
![Page 7: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/7.jpg)
NRG 2009
Fabrication RAPID = SECONDS
Striemer, C.S, et al. 2007, Nature, 445:749-53
Friday, May 22, 2009
![Page 8: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/8.jpg)
Nanomembrane Research Group [NRG]
physical vapor deposition
6
frontside
Friday, May 22, 2009
![Page 9: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/9.jpg)
Nanomembrane Research Group [NRG]
physical vapor deposition
6
frontsiderf magnetron sputtering
Friday, May 22, 2009
![Page 10: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/10.jpg)
Nanomembrane Research Group [NRG]
physical vapor deposition
6
20 nm sputtered SiO2
15 nm α-Si
frontsiderf magnetron sputtering
Friday, May 22, 2009
![Page 11: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/11.jpg)
Nanomembrane Research Group [NRG]
physical vapor deposition
6
20 nm sputtered SiO2
15 nm α-Si
frontsiderf magnetron sputtering
Friday, May 22, 2009
![Page 12: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/12.jpg)
Nanomembrane Research Group [NRG]
physical vapor deposition
6
20 nm sputtered SiO2
15 nm α-Si
frontsiderf magnetron sputtering
Friday, May 22, 2009
![Page 13: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/13.jpg)
Nanomembrane Research Group [NRG]
physical vapor deposition
6
20 nm sputtered SiO2
15 nm α-Si
frontside
amorphous Si
Friday, May 22, 2009
![Page 14: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/14.jpg)
Nanomembrane Research Group [NRG]
rapid thermal anneal
7
20 nm sputtered SiO2
15 nm α-Si
amorphous Si
frontside
Friday, May 22, 2009
![Page 15: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/15.jpg)
Nanomembrane Research Group [NRG]
20 nm sputtered SiO2
15 nm pnc-Si
rapid thermal anneal
7
700 °C – 1000 °C < 5 minpnc-Si
frontside
Friday, May 22, 2009
![Page 16: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/16.jpg)
Nanomembrane Research Group [NRG]
variety of formats
8
Friday, May 22, 2009
![Page 17: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/17.jpg)
NRG 2009
Sharp Cut-offs and Tunable Pore Sizes
T = 715C
T = 729C
Striemer, C.S, et al. 2007, Nature, 445:749-53
NANOCRYSTALS
NANOPORES
Friday, May 22, 2009
![Page 18: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/18.jpg)
Nanomembrane Research Group [NRG]
pore size & density – rtp temperature
10
20 nm sputtered SiO2
15 nm pnc-Si
Friday, May 22, 2009
![Page 19: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/19.jpg)
Nanomembrane Research Group [NRG]
pore size & density – rtp temperature
10
700 C
20 nm sputtered SiO2
15 nm pnc-Si
Friday, May 22, 2009
![Page 20: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/20.jpg)
Nanomembrane Research Group [NRG]
pore size & density – rtp temperature
10
800 C
20 nm sputtered SiO2
15 nm pnc-Si
Friday, May 22, 2009
![Page 21: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/21.jpg)
Nanomembrane Research Group [NRG]
pore size & density – rtp temperature
10
850 C
20 nm sputtered SiO2
15 nm pnc-Si
Friday, May 22, 2009
![Page 22: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/22.jpg)
Nanomembrane Research Group [NRG]
pore size & density – rtp temperature
10
1000 C
20 nm sputtered SiO2
15 nm pnc-Si
Friday, May 22, 2009
![Page 23: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/23.jpg)
Nanomembrane Research Group [NRG]
pore size & density – rtp temperature
10
1100 C
20 nm sputtered SiO2
15 nm pnc-Si
Friday, May 22, 2009
![Page 24: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/24.jpg)
Nanomembrane Research Group [NRG]
controlling morphology – thickness
11
15 n
m p
nc-S
i
Friday, May 22, 2009
![Page 25: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/25.jpg)
Nanomembrane Research Group [NRG]
controlling morphology – thickness
11
15 n
m p
nc-S
i30
nm
pnc
-Si
Friday, May 22, 2009
![Page 26: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/26.jpg)
NRG 2009
Mechanically Robust
200 µm
Striemer, C.S, et al. 2007, Nature, 445:749-53
Friday, May 22, 2009
![Page 27: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/27.jpg)
NRG 2009
Mechanically Robust
200 µm
15 PSI
Striemer, C.S, et al. 2007, Nature, 445:749-53
Friday, May 22, 2009
![Page 28: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/28.jpg)
NRG 2009
Mechanically Robust
200 µm
15 PSI 0 PSI
Striemer, C.S, et al. 2007, Nature, 445:749-53
Friday, May 22, 2009
![Page 29: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/29.jpg)
NRG 2009
Key Biological Sizes
smallsolutes
1 nm 10 nm 1 um
proteins virus bacteria
10 um
eukaryoticcells
Friday, May 22, 2009
![Page 30: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/30.jpg)
NRG 2009
Key Biological Sizes
smallsolutes
1 nm 10 nm 1 um
proteins virus bacteria
10 um
eukaryoticcells
PNC-SI (5-80 NM)
Friday, May 22, 2009
![Page 31: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/31.jpg)
NRG 2009
Key Biological Sizes
smallsolutes
1 nm 10 nm 1 um
proteins virus bacteria
10 um
eukaryoticcells
PNC-SI (5-80 NM)@ 0.1%-15%
Friday, May 22, 2009
![Page 32: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/32.jpg)
NRG 2009
3 L fluorescent mixture (PBS)
glass co
versl
ipPBS buffer
15 nm thicknc-Si membrane
Species 1 -
50 m silica spacer
Species 2 -
~ 500 mmicroscope
experimentalfield of view
t = 0 min
100 m
Striemer, C.S, et al. 2007, Nature, 445:749-53
Size Based Separation
Friday, May 22, 2009
![Page 33: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/33.jpg)
NRG 2009Striemer, C.S, et al. 2007, Nature, 445:749-53
Size Based Separation
Friday, May 22, 2009
![Page 34: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/34.jpg)
NRG 2009Striemer, C.S, et al. 2007, Nature, 445:749-53
Size Based Separation
Friday, May 22, 2009
![Page 35: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/35.jpg)
NRG 2009Striemer, C.S, et al. 2007, Nature, 445:749-53
Size Based Separation
Friday, May 22, 2009
![Page 36: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/36.jpg)
NRG 2009
Time, min0 1 2 3 4 5 6 7
0.8
0.7
0.6
0.5
0.4
0.3
0.2
0.1
0
Flu
ores
cenc
e in
tens
ity, a
.u.
BSA
Alexa dye
1 nm
7 nm
MEMBRANE A
Striemer, C.S, et al. 2007, Nature, 445:749-53
Size Based Separation
Friday, May 22, 2009
![Page 37: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/37.jpg)
NRG 2009
Time, min0 1 2 3 4 5 6 7
0.8
0.7
0.6
0.5
0.4
0.3
0.2
0.1
0
Flu
ores
cenc
e in
tens
ity, a
.u.
BSA
Alexa dye
1 nm
7 nm
MEMBRANE A
Time, min0 1 2 3 4 5 6 7
BSA
IgG
0.4
0.3
0.2
0.1
0
Flu
ores
cenc
e in
tens
ity, a
.u.
7 nm
14 nm
MEMBRANE B
Striemer, C.S, et al. 2007, Nature, 445:749-53
Size Based Separation
Friday, May 22, 2009
![Page 38: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/38.jpg)
NRG 2009
Alexa dye - charge = 2-
0 1 2 3 4 5 6 7 8 9 10
0.45
0.40
0.35
0.30
0.25
0.20
0.15
0.10
0.05
0
Time, min
Flu
ores
cenc
e in
tens
ity, a
.u.
Amine - DI H2O
Oxide - 100 mM NaCl
Oxide - DI H2O
--------
--------
------
-
-
---
--
--
-- -
Striemer, C.S, et al. 2007, Nature, 445:749-53
Charge Based Separation
Friday, May 22, 2009
![Page 39: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/39.jpg)
NRG 2009
Alexa dye - charge = 2-
0 1 2 3 4 5 6 7 8 9 10
0.45
0.40
0.35
0.30
0.25
0.20
0.15
0.10
0.05
0
Time, min
Flu
ores
cenc
e in
tens
ity, a
.u.
Amine - DI H2O
Oxide - 100 mM NaCl
Oxide - DI H2O
-
-
---
--
--
-- -
Striemer, C.S, et al. 2007, Nature, 445:749-53
Charge Based Separation
Friday, May 22, 2009
![Page 40: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/40.jpg)
NRG 2009
Alexa dye - charge = 2-
0 1 2 3 4 5 6 7 8 9 10
0.45
0.40
0.35
0.30
0.25
0.20
0.15
0.10
0.05
0
Time, min
Flu
ores
cenc
e in
tens
ity, a
.u.
Amine - DI H2O
Oxide - 100 mM NaCl
Oxide - DI H2O
-
-
---
--
--
-- -
++++++++
++++++++
++++++
Striemer, C.S, et al. 2007, Nature, 445:749-53
Charge Based Separation
Friday, May 22, 2009
![Page 41: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/41.jpg)
NRG 2009
Alexa dye - charge = 2-
0 1 2 3 4 5 6 7 8 9 10
0.45
0.40
0.35
0.30
0.25
0.20
0.15
0.10
0.05
0
Time, min
Flu
ores
cenc
e in
tens
ity, a
.u.
Amine - DI H2O
Oxide - 100 mM NaCl
Oxide - DI H2O
-
-
---
--
--
-- -
++++++++
++++++++
++++++
-
-
---
--
--
-- -
Striemer, C.S, et al. 2007, Nature, 445:749-53
Charge Based Separation
Friday, May 22, 2009
![Page 42: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/42.jpg)
NRG 2009
Alexa dye - charge = 2-
0 1 2 3 4 5 6 7 8 9 10
0.45
0.40
0.35
0.30
0.25
0.20
0.15
0.10
0.05
0
Time, min
Flu
ores
cenc
e in
tens
ity, a
.u.
Amine - DI H2O
Oxide - 100 mM NaCl
Oxide - DI H2O
-
-
---
--
--
-- -
-
-
---
--
--
-- -
Striemer, C.S, et al. 2007, Nature, 445:749-53
Charge Based Separation
Friday, May 22, 2009
![Page 43: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/43.jpg)
NRG 2009
Alexa dye - charge = 2-
0 1 2 3 4 5 6 7 8 9 10
0.45
0.40
0.35
0.30
0.25
0.20
0.15
0.10
0.05
0
Time, min
Flu
ores
cenc
e in
tens
ity, a
.u.
Amine - DI H2O
Oxide - 100 mM NaCl
Oxide - DI H2O
-
-
---
--
--
-- -
Striemer, C.S, et al. 2007, Nature, 445:749-53
Charge Based Separation
Friday, May 22, 2009
![Page 44: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/44.jpg)
NRG 2009
Alexa dye - charge = 2-
0 1 2 3 4 5 6 7 8 9 10
0.45
0.40
0.35
0.30
0.25
0.20
0.15
0.10
0.05
0
Time, min
Flu
ores
cenc
e in
tens
ity, a
.u.
Amine - DI H2O
Oxide - 100 mM NaCl
Oxide - DI H2O
-
-
---
--
--
-- -
NaClStriemer, C.S, et al. 2007, Nature, 445:749-53
Charge Based Separation
Friday, May 22, 2009
![Page 45: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/45.jpg)
NRG 2009
Alexa dye - charge = 2-
0 1 2 3 4 5 6 7 8 9 10
0.45
0.40
0.35
0.30
0.25
0.20
0.15
0.10
0.05
0
Time, min
Flu
ores
cenc
e in
tens
ity, a
.u.
Amine - DI H2O
Oxide - 100 mM NaCl
Oxide - DI H2O
-
-
---
--
--
-- -
NaClStriemer, C.S, et al. 2007, Nature, 445:749-53
-
-
---
--
--
-- -
Charge Based Separation
Friday, May 22, 2009
![Page 46: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/46.jpg)
NRG 2009
Scalable, flexible, economical fabrication
Friday, May 22, 2009
![Page 47: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/47.jpg)
NRG 2009
Production Flow
PATTERNING DEPOSITION THERMAL ANNEALING
ETCHING TESTING & APPLICATIONS
PAST
Friday, May 22, 2009
![Page 48: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/48.jpg)
NRG 2009
Production Flow
PATTERNING DEPOSITION THERMAL ANNEALING
ETCHING TESTING & APPLICATIONS
PAST
NEAR FUTURE
ALL FABRICATION TESTING & APPLICATIONS
Friday, May 22, 2009
![Page 49: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/49.jpg)
NRG 2009
Production Flow
PATTERNING DEPOSITION THERMAL ANNEALING
ETCHING TESTING & APPLICATIONS
PAST
NEAR FUTURE
ALL FABRICATION TESTING & APPLICATIONS
MADE POSSIBLE BY PURCHASE OF NEW SYSTEMS
• SURFACE PREP• ANNEALING • DEPOSITION
Friday, May 22, 2009
![Page 50: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/50.jpg)
NRG 2009
UR’s Nanoscience Center
Friday, May 22, 2009
![Page 51: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/51.jpg)
NRG 2009
UR’s Nanoscience Center
MCGRATH LAB
Friday, May 22, 2009
![Page 52: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/52.jpg)
NRG 2009
UR’s Nanoscience Center
MCGRATH LAB
SURFACE PREP, DEPOSITION AND
ANNEALING
Friday, May 22, 2009
![Page 53: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/53.jpg)
NRG 2009
UR’s Nanoscience Center
MCGRATH LAB
SURFACE PREP, DEPOSITION AND
ANNEALING
LITHOGRAPHY
Friday, May 22, 2009
![Page 54: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/54.jpg)
NRG 2009
Manufacturing Possibilities and Challenges
4” wafer
CURRENTLY: 68 INSERTS PER WAFER
Friday, May 22, 2009
![Page 55: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/55.jpg)
NRG 2009
Manufacturing Possibilities and Challenges
4” wafer
CURRENTLY: 68 INSERTS PER WAFER
6” wafer
> 500 INSERTS PER WAFER
Friday, May 22, 2009
![Page 56: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/56.jpg)
NRG 2009
Manufacturing Possibilities and Challenges
0.004 CM2
0.33 CM2
Friday, May 22, 2009
![Page 57: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/57.jpg)
NRG 2009
Manufacturing Possibilities and Challenges
0.004 CM2
0.33 CM2
• LESS THAN 1% OF AREA IS CURRENTLY ACTIVE
• MADE NECESSARY BY ETCHING, MECHANICS, AND DEFECT FREQUENCY
Friday, May 22, 2009
![Page 58: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/58.jpg)
NRG 2009
Manufacturing Possibilities and Challenges
0.004 CM2
0.33 CM2
• LESS THAN 1% OF AREA IS CURRENTLY ACTIVE
• MADE NECESSARY BY ETCHING, MECHANICS, AND DEFECT FREQUENCY
200 microns
Friday, May 22, 2009
![Page 59: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/59.jpg)
NRG 2009
Ultrathin SiN membranesTong, et al. (2004). Silicon Nitride Nanosieve Membrane. Nano Letters 4, 283-287
SiN - 10 nm thick but elaborate and impractical
No demonstrated separations
Appreciated all the potential and issues (air flow, water permeability, and mechanics)
Friday, May 22, 2009
![Page 60: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/60.jpg)
NRG 2009
10 µm-diameter tip Ru(NH3)63+ in 0.1 M KCl
High Diffusive PermeabilityInstrinsic permeability of 5.2 x 10-2 cm/s measured using Scanning Electrochemical Microscopy.
Experimental results & pore histograms are consistent with theory that neglects pore resistance
Between 2-3 orders higher than small molecule diffusion permeability of reconstituted cellulose or PES.
Kim et al. 2008, JACS 130:4230-4231
Shigeru Amemiya
Friday, May 22, 2009
![Page 61: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/61.jpg)
NRG 2009
High Diffusive PermeabilityInstrinsic permeability of 5.2 x 10-2 cm/s measured using Scanning Electrochemical Microscopy.
Experimental results & pore histograms are consistent with theory that neglects pore resistance
Between 2-3 orders higher than small molecule diffusion permeability of reconstituted cellulose or PES.
Kim et al. 2008, JACS 130:4230-4231
Shigeru Amemiya
Friday, May 22, 2009
![Page 62: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/62.jpg)
NRG 2009
High Diffusive PermeabilityInstrinsic permeability of 5.2 x 10-2 cm/s measured using Scanning Electrochemical Microscopy.
Experimental results & pore histograms are consistent with theory that neglects pore resistance
Between 2-3 orders higher than small molecule diffusion permeability of reconstituted cellulose or PES.
Kim et al. 2008, JACS 130:4230-4231
Shigeru Amemiya
Friday, May 22, 2009
![Page 63: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/63.jpg)
NRG 2009
High Diffusive PermeabilityInstrinsic permeability of 5.2 x 10-2 cm/s measured using Scanning Electrochemical Microscopy.
Experimental results & pore histograms are consistent with theory that neglects pore resistance
Between 2-3 orders higher than small molecule diffusion permeability of reconstituted cellulose or PES.
Kim et al. 2008, JACS 130:4230-4231
Shigeru Amemiya
k = 2DNr
Friday, May 22, 2009
![Page 64: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/64.jpg)
NRG 2008
Higher Permeability = Smaller ...
For current devices: active area is 1.8 m2 and transmembrane water flow is ~10 ml/min @ 3 psi.
1000x improved permeability would require only 18 cm2. So 10 dime-sized membranes with mostly (~80%) active area could support both transmembrane flow and match dialysis in the same period of time.
Friday, May 22, 2009
![Page 65: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/65.jpg)
NRG 2008
Higher Permeability = Smaller ...
For current devices: active area is 1.8 m2 and transmembrane water flow is ~10 ml/min @ 3 psi.
1000x improved permeability would require only 18 cm2. So 10 dime-sized membranes with mostly (~80%) active area could support both transmembrane flow and match dialysis in the same period of time.
Friday, May 22, 2009
![Page 66: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/66.jpg)
NRG 2008
… or faster?Alternatively a 6” wafer of mostly active membrane could achieve the same dialysis in 1/10th of the time.
Friday, May 22, 2009
![Page 67: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/67.jpg)
NRG 2008
… or faster?Alternatively a 6” wafer of mostly active membrane could achieve the same dialysis in 1/10th of the time.
THE MATERIAL PROVIDES THE POTENTIAL
REALIZING THIS POTENTIAL IS AN ENGINEERING CHALLENGE
Friday, May 22, 2009
![Page 68: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/68.jpg)
NRG 2009
Cellular Transwell DevicesCO-CULTURE
Friday, May 22, 2009
![Page 69: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/69.jpg)
NRG 2009
Cellular Transwell DevicesCO-CULTURE
DRUG PERMEATION
Friday, May 22, 2009
![Page 70: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/70.jpg)
NRG 2009
Microfluidics
Friday, May 22, 2009
![Page 71: Molecular and Cellular applicationsewh.ieee.org/r1/syracuse/EMBSWeb/Archives/Events/... · 2009. 5. 25. · Silicon nanomembranes (pnc-Si): Molecular and Cellular applications James](https://reader035.fdocuments.net/reader035/viewer/2022071409/610269804fd55d6683157f4b/html5/thumbnails/71.jpg)
NRG 2009
ConclusionsPnc-Si is a new ultrathin nanoporous membrane material. Small membranes can be manufactured on a large scale and incorporated into practical separation devices.
Primary application is to small scale separation of biologicals
High air and liquid permeabilities w/ demonstrated ability to fractionate proteins, nanoparticles, etc.
Viable as a cell-culture substrate. Cell behavior on membranes is normal.
Microfluidics, arrayed membranes for screening applications, electrokinetics, and more …
Friday, May 22, 2009