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STANFORD NANO SHARED FACILITY

GENERAL CLEANROOM MANUAL

The Flexible Cleanroom (FCR)

Spilker Building

Rooms 131A-K

Stanford Nano Patterning Cleanroom (NPC)

Spilker Building

Rooms 005 and 006

Revised September, 2017

Table of Contents

Emergency Numbersii

Flexible Cleanroom (FCR)iii

Nano Patterning Cleanroom (NPC)iii

1. Lab Basics1

1.1 Tool Training1

1.2 Layout of the Lab2

1.3 Laboratory Access and Hours of Operation2

1.4 Equipment Responsibility3

1.5 Broken Equipment3

1.6 Gowning Procedure4

1.7 General Cleanroom Practices (both Labs)5

1.8 Laboratory Etiquette6

1.9 Visitors7

1.10 Personal Tools, Belongings and Equipment8

2. Lab Safety8

2.1 Cleanroom Staff Responsibilities8

2.2 Lab User Responsibilities8

2.3 General Cleanroom Safety8

2.4 Safety Considerations10

2.5 Appropriate Street Clothing and Shoes10

2.6 Eye Protection10

2.7 Personal Protective Equipment11

2.8 Buddy System11

2.9 Special Health Concerns11

3. Facility Hazards Overview11

3.1 Chemical Hazsards11

3.2 Electrical Hazards11

3.3 Other Hazards12

4. Chemical Safety Information12

4.1 Manufacturers Chemical Labels12

4.2 Secondary Use Labels12

4.3 Required Lab/Cleanroom Specific Labels12

4.4 Safety Data Sheets (SDS)13

5. Chemical Hazard Classes13

5.1 Liquid Chemical Hazard Categories13

5.1.1 Solvents13

5.1.2 Corrosives14

5.1.3 Oxidizers14

5.1.4 Water Reactive Chemicals14

5.1.5 Flammables15

5.1.6 Toxic/Poison15

5.1.7 Non-toxic15

5.2 Resists and Other Chemicals15

5.2.1 Other Chemicals in the Flexible Cleanroom16

5.3 Miscellaneous Materials16

6. Chemical Storage17

6.1 Background17

6.1.1 Flammables17

6.1.2 Corrosives17

6.1.3 Oxidizers17

6.2 General Use Chemicals17

6.3 Introducing New Chemicals18

6.4 Personal Chemical Storage18

7. Chemical Handling18

7.1 Personal Protective Equipment18

7.2 Safe Operating Procedures19

7.3. Chemical Exposure19

7.4 Transporting Chemicals to/in the Lab19

7.5 Chemical/Hazardous Waste Collection and Disposal19

7.6 Solid Hazardous Waste Disposal21

7.7 Chemical Spills21

8. Emergency Information22

8.1 Emergency Equipment22

8.2 Emergency Exit Information22

8.3 General Emergency Response23

8.4 Posted Emergency Response Procedures23

8.5 Life threatening medical emergency23

8.6 Evacuations23

8.6.1 Building Evacuation23

8.6.2 Laboratory Evacuation24

8.6.3 Wet Bench Room Evacuation and Isolation24

8.6.4 Odors in the Lab24

8.6.5 Lab Fire24

8.6.6 Fire Alarms25

8.6.7 Electrical Power Outage25

8.6.8 Major Earthquake25

8.6.9 Water on Floors25

9. Reporting Accidents25

9.1 Incident Reporting25

9.2 Follow-up26

10. Medical Providers or Work Related Injuries26

Appendix A: Working with Hydrofluoric Acid (HF)27

Appendix B: Chemicals in the Nano Patterning Cleanroom28

Appendix C: Flexible Cleanroom Map29

Appendix D: Nano Patterning Cleanroom Map30

Emergency Numbers

Emergency Phone NumbersFrom Campus PhoneFrom Cell Phone

Life Threatening Emergency9-911650-321-4433

EH&S Emergency Line (chemical spills)x5-9999650-725-9999

Health & Safety Info 24 hourx3-0448650-723-0448

Facilities Quick Response (broken pipe)x3-2281650-723-2281

Stanford Hospital Emergency Roomx3-5111650-723-5111

Vaden Student Health Centerx4-2273650-724-2273

California Poison Control 9-1-800-222-1222 800-222-1222

Flexible Cleanroom (FCR)

Room 131A 6507252292

Room 131C (yellow room) 6507252293

Room 131G (Microfab Shop)6507259183

Phone in hallway outside of lab 6507252283

Tom Carver (Lab Mgr.) office x31861 6507231861

Tom Carver cell (emergencies) 915107927691 5107927691

Anthony To (Building Manager) x2-8306 650-272-8306

Address of this Lab: Flexible Cleanroom,

Rooms 131 AK,

Spilker Building # 04040

348 Via Pueblo

Stanford, CA 94305

Nano Patterning Cleanroom (NPC)

CAD Computer Station 650-723-8584

JEOL Desk 650-723-8586

Nova Nano SEM650-723-8587

Cliff Knollenberg (Desk)cknollen@stanford.edu 650-723-1675

Shiva Bhaskaran (Desk) bshiva@stanford.edu 650-498-5653

Rich Tiberio (Desk)tiberio@stanford.edu 650-725-2299

Anthony To (Building Manager) anthony.to@stanford.edu 650-272-8306

Address of this Lab: Stanford Nano Shared Facilities Rooms 006 A-H (basement)

Spilker Building #04-040

348 Via Pueblo

Stanford, CA 94305

Stanford Nano Shared Facilities General Cleanroom Manual

iii

SNSF General Cleanroom Manual

Page 17

Ver. 1.1Sept. 2017

1. Lab Basics

Setting up a Badger Account at SNSF:

All users must have and maintain a valid SNSF Badger account. You must verify that your account is active before requesting training within the Flexible Cleanroom or the Nano Patterning Cleanroom. If you have not completed this step, refer to http://snsf.stanford.edu/about/join.html to join SNSF and create a Badger account.

SNF Users: Please note here that SNSF Badger is separate from SNF Badger!

All new users are required to review the Stanfords Chemical Hygiene Plan prior to working in the lab. https://ehs.stanford.edu/manual/chemical-hygiene-plan

1.1 Tool Training

Many of the pieces of equipment in the lab require additional handson training. Many of the machines have a person in charge or staff member whom is the first person you should talk to. Never use a machine that you have not been trained on even if you think you know how to use it already, because each machine has its own little quirks and special problems you will need to learn about.

In the Flexible Cleanroom

You will need to be checked off by the person in charge on the operation of a machine before you can use it. At the discretion of the person in charge of that machine (or of the Lab Supervisor), you may be checked off on that machine by another person familiar with the machine or by demonstrating prior experience and knowledge of that particular machine. If you have been checked out on one machine, it doesn't necessarily give you the right to check someone else out on that machine. Check first with the person in charge before training anyone new yourself.

The Ion Milling Machine, Oerlikon Leybold Univex Sputter, and possibly other new machines, are reserved and monitored via the Badger user interface. Most other machines are first come, first serve.

On the following page is a list of who is in charge of some of the major pieces of equipment in the Flexible Cleanroom:

Oerlikon Leybold Univex Sputter: Tom Carver, carver@stanford.edu 650 7231861

Intlvac Ion Milling Machine: Cliff Knollenberg, cknollen@stanford.edu 650-7231675

Quintel Mask Aligner: Carsten Langrock, langrock@stanford.edu 7230464

Karl Suss Mask Aligner: John Bartel, jbartel@stanford.edu 650 7252407

Plasma Etcher: Tom Carver, John Bartel

Knowledgeable users: John Bartel , jbartel@stanford.edu 650 7252407

Olympus Microscope (in yellow room): Volunteers?

Knowledgeable users: Carsten Langrock, langrock@stanford.edu

Rapid Thermal Annealer: Volunteers?

Everything else: Check with Tom Carver carver@stanford.edu 650 7231861

In the Nano Patterning Cleanroom

The Person In Charge is usually a staff member who provides maintenance and trainings on the tool. Contact them regarding tool training for the Badger interlocked tools below. On some of the smaller and simpler tools, a written list of instructions is available for user to review. If after reviewing these directions they do not feel comfortable on a machine, they may contact a staff member for additional training.

JEOL e-beam writer: Rich Tiberio tiberio@stanford.edu

Nova SEM: Cliff Knollenberg cknollen@stanford.edu

KJ Lesker e-beam Evaporator: Shiva Bhaskaran bshiva@stanford.edu

Keyence 3D Lase Confocal Microscope: Shiva Bhaskaran bshiva@stanford.edu

Oxford RIE: Usha Raghuram usha@stanford.edu or Cliff Knollenberg cknollen@stanford.edu

Cressington Sputter Coater: Cliff Knollenberg cknollen@stanford.edu

1.2 Layout of the Lab

The cleanrooms are accessible only from their respective gowning rooms.

In the Flexible Cleanroom:

You will see four doors which lead from the cleanroom to narrow service chases. These service chases are not clean. They act as the return path of laminar flow air which circulates through the lab. Do not enter these service chases from the cleanroom, because the dirty floors in them will contaminate your booties. When its necessary to move chemicals from the storage cabinets in the service chases to the cleanroom, please see Tom Carver. There are pass-throughs to use for passing chemicals or other things back and forth between the service chases and the cleanroom. There is also a passthrough to pass things into the cleanroom from the gowning room without having to completely gown up. The yellow room is where