Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini...

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Micropattern on CMOS pixels NIKHEF Maximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers Saclay CEA-DAPNIA Paul Colas Yannis Giomataris Arnaud Giganon Univ. Twente/Mesa+ Jurriaan Schmitz CERN/Medipix Constm Erik Heijne Xavie Llopart Michael Campbell Thanks to: Wim Gotink Joop Rovenkamp Arnaud Giganon Harry van der Graaf NIKHEF SECOND WORKSHOP ON LARGE TPC FOR LOW ENERGY RARE EVENT DETECTION LPNHE - Paris VI and VII Universities PARIS, France 20 December 2004

Transcript of Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini...

Page 1: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

Micropattern on CMOS pixels

NIKHEF Maximilien ChefdevilleAuke-Pieter ColijnAlessandro FornainiHarry van der GraafPeter KluitJan TimmermansJan Visschers

Saclay CEA-DAPNIA Paul ColasYannis GiomatarisArnaud Giganon

Univ. Twente/Mesa+ Jurriaan Schmitz

CERN/Medipix Constm Erik HeijneXavie LlopartMichael Campbell

Thanks to:Wim GotinkJoop RovenkampArnaud Giganon

Harry van der Graaf

NIKHEF

SECOND WORKSHOP ON LARGE TPCFORLOW ENERGY RARE EVENT DETECTION

LPNHE - Paris VI and VII Universities  PARIS, France 20 December 2004

Page 2: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

Time Projection Chamber (TPC): 2D/3D Drift ChamberThe Ultimate Wire (drift) Chamber

E-field(and B-field)

Wire Plane+Readout Pads

track ofchargedparticle

Wire plane

Pad plane

Page 3: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

Giomataris & Charpak1995: Micromegas

Ideally: a preamp/shaper/discriminator channel below each hole….

Let us eliminate wires:• wireless wire chambers• better granularity

Page 4: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

1996: F. Sauli: Gas Electron Multiplier (GEM)

Page 5: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

The MediPix2 pixel CMOS chip

256 x 256 pixelspixel: 55 x 55 μm2

per pixel: - preamp- shaper- 2 discr.- Thresh. DAQ- 14 bit counter

- enable counting- stop counting- readout image frame- reset

We apply the ‘naked’ MediPix2 chipwithout X-ray convertor!

Page 6: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

Problem

With wires: measure charge distribution over cathode pads:c.o.g. is a good measure for track position;With GEMs or Micromegas: narrow charge distribution(only electron movement)

wireavalanche

Cathode pads

GEMMicromegas

Solutions: - cover pads with resistive layer- ‘Chevron’ pads- many small pads: pixels

Page 7: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

DriftSpace

GEM foils

MediPix CMOS pixel sensorBrass spacer blockPrinted circuit boardAluminium base plate

Our GEM-equipped TPCWe have constructed a small test TPC equipped with three GEM foils whichcan be read out by means of the MEDIPIX2 CMOS pixel sensor.The GEM foils were obtained from the CERN/Sauli/GEM group;hole-to-hole distance (hexagonal geometry): 140 µm, hole diameter 85 µm,fiducial surface 100 mm x 100 mm, thickness 50 µm.The drift volume (vol. 100x100x100 mm3) is surrounded by square wire loops,spaced 6.3 mm, put at decreasing potential. Three GEM foils are placed 7.4 mmbehind the plane of the bottom wire loop; the distance between GEM foils is 1.6 mm.The anode plane, at ground potential, is 6.6 mm below the third GEM foil.

A new readout for the TESLA TPC:Each GEM hole gets its own preamp/shaper/discriminator:

Page 8: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

Cathode foil

Gem foils

Support plate

Medipix 2

Drift Space

The MediPix2 pixel CMOS chip

We apply the ‘naked’ MediPix2 chipwithout X-ray convertor!

Page 9: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

First events, recorded on March 29, 2003.Drift space irradiated with 55Fe quantaGas: Ar/Methane 90/10

Page 10: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

No source; exposed 0.01 s No source; exposed 2 s No source; exposed 2 s

No source; exposed 0.1 s 90Sr source; exposed 0.01 s

Fiducial field:14 x 14 mm2

Collected ionisationin 14 x 14 x 100 mm3

during exposure timeGas: Ar/Isobutane 90/10

Feb 9, 2004

Page 11: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

MediPix2 pixel sensorBrass spacer blockPrinted circuit boardAluminum base plate

Micromegas

Cathode (drift) plane

55Fe

Baseplate

Drift space: 15 mm

With Paul Colas & Yannes Giomataris:MediPix2 & Micromegas

Very strong E-field above (CMOS) MediPix!

Page 12: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

MediPix modified by MESA+, Univ. of Twente, The Netherlands

Pixel Pitch: 55 x 55 μm2

Bump Bond pad: 25 μm octagonal75 % surface: pacivation SiNNew Pixel Pad: 45 x 45 μm2

Insulating surface was 75 %Reduced to 20 %

Page 13: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.
Page 14: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.
Page 15: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

We always knew, but never saw: the conversion of 55Fe quanta in Ar gas

No source, 1sNo source, 1s5555Fe, 1sFe, 1s

5555Fe, 10sFe, 10s

Friday 13 (!) Feb 2004: signals from a 55Fe source (220 e- per photon); 300 m x 500 m clouds as expected

14 mm

The Medipix CMOS chip facesan electric field of 350 V/50 μm

= 7 kV/mm !!

Page 16: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

Eff = e-Thr/G

Thr: threshold setting (#e-)G: Gas amplification

Single electron efficiency

0.00

0.20

0.40

0.60

0.80

1.00

0 1000 2000 3000 4000

Threshold setting (number of electrons)

Eff

icie

ncy

(-)

G=500

G=1000

g=2000

g=4000

g=8000

Expon. (G=500)

Expon. (G=1000)

Expon. (g=2000)

Expon. (g=4000)

Expon. (g=8000)

single-electron avalanche distribution

0

0.0005

0.001

0.0015

0.002

0 1000 2000 3000 4000

electrons in avalanche

Pro

b(n

)

G=500

G=1000

G=2000

G=4000

G=8000

Expon. (G=500)

Expon. (G=1000)

Expon. (G=2000)

Expon. (G=4000)

Expon. (G=8000)Prob(n) = 1/G . e-n/G

• no attachment• homogeneous field in avalanche gap• low gas gain

No Curran or Polyadistributions but simply:

Single electron efficiency

Page 17: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

New trial: NIKHEF, March 30 – April 2, 2004Essential: try to see single electrons from cosmic muons (MIPs)

Pixel preamp threshold: 3000 e-Required gain: 5000 – 10.000

New MedipixNew Micromegas

Gas: He/Isobutane 80/20Ar/Isobutane 80/20He/CF4 80/20

…… It Works!

Page 18: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

He/Isobutane80/20Modified MediPix

Sensitive area:14 x 14 x 15 mm3

Drift direction:Verticalmax = 15 mm

Page 19: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

He/Isobutane80/20Modified MediPix

Page 20: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

He/Isobutane80/20Modified MediPix

Page 21: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

He/Isobutane80/20Non ModifiedMediPix

Amaricium Source

Page 22: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

He/Isobutane80/20Modified MediPix

Page 23: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

He/Isobutane80/20Modified MediPix

δ-ray!

Page 24: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

For TPCs: all primary electron info is used, onlydiffused by diffusion!

• Simulations: TPC performance in view of single electron detection:

• spatial resolution (= momentum resolution)• precision dE/dX by cluster counting (M. Hauschild)• multi track separation• corrections for scattering• δ-ray suppression

Low diffusionlow number of clusters?

• Form collaboration to develop TimePix CMOS pixel chip:

• based on MediPix: change pixel counters into TDCs• require full scale! Submit costs 150 kE for 6 wafers…• MediPix Consortium (CERN based) likes to design TimePix1

Page 25: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

INtegrate (Micromegas) GRID and pixel sensor

‘Micromegas’

By ‘wafer post processing’at MESA+, Univ. of Twente

InGrid

InGrid + Pixel chip=

GridPix

Page 26: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

Integrate GEM/Micromegas and pixel sensor: InGrid

‘GEM’ ‘Micromegas’

By ‘wafer post processing’

Page 27: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.
Page 28: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.
Page 29: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.
Page 30: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

First InGrid has been delivered

Wafer dia.: 100 mm30 fields with a variety of pillar (spacer) geometry

Page 31: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

HV breakdowns: issue for InGrid 2

4) Protection Network

1) High-resistive layer

2) High-resistive layer

3) ‘massive’ pads

Page 32: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

Vernier, Moire, Nonius effect

Pitch MediPix: 55 μmPitch Micromegas: 60 μm

Periodic variation in gain per 12 pixels

Focussing on (small) anode padContinues anode plane is NOT requiredReduction of source capacity!

Non-modified MediPixModified MediPix has much less Moire effect

No charge spread over2 or 4 pixels

Page 33: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.
Page 34: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.
Page 35: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

Modified

Non Modified

InGrid: perfect alignment of pixels and grid holes!Small pad: small capacitance!

focusing De-focussingLow E-fieldLow gas gain

Page 36: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

GridPix could become a general way toreadout gaseous chambers

Other applications of GridPix:

- μ-TPC- Transition Radiation Detectors- GOSSIP: vertex detector for intense radiation environment

Page 37: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

CMOS pixel array

MIP

Micromegas (InGrid)

GOSSIP: Gas On Slimmed SIlicon Pixels

Drift gap: 1 mmMax drift time: 15 ns

MIP

CMOS chip

Cathode foil

Page 38: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

GOSSIP?

AgeingEfficiencyPosition resolutionRate effectsRadiation hardnessHV breakdownsPower dissipationMaterial budget

Page 39: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

AgeingRemember the MSGCs……

Little ageing:

• the ratio (anode surface)/(gas volume) is very high w.r.t. wire chambers

• little gas gain: 5 k for GOSSIP, 20 – 200 k for wire chambers

• homogeneous drift field + homogeneous multiplication field versus 1/R field of wire. Absence of high E-field close to a wire: no high electron energy; little production of chemical radicals

Confirmed by measurements (Alfonsi, Colas)

But: critical issue: ageing studies can not be much accelerated!Now being set-up with X-ray generator (Panalytical/Philips)

Page 40: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

Spatial resolution: pixels down to 20x 20 μm2 may be useful

After all: TPC! 3D track info

Counting rate in Super LHC (no Si Vertex compatitor) :10 tracks/ (cm2 25 ns): ions reach grid within 10 – 30 ns

Radiation hardness:- Replace electron-hole pair generation in Si by gas + gas amplification- Sufficient signal charge to eliminate low-noise amplifiers in pixels- CMOS readout circuit: only digital gates (130 nm technology)

Material budget: only slimmed Si (40 μm), 1 mm gas

Cooling: CMOS chip power < 0.1 W/cm2: use gas flow as cooling…..

If it works: interesting for ATLAS, CMS, LHCb, ALICE, D0 etc

Page 41: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

How to proceed?

- InGrid 1 available for tests:- rate effects (all except change in drift direction)- ageing (start of test)

Proof-of-principle of signal generator: Xmas 2004!

- InGrid 2: HV breakdowns, beamtests with MediPix (TimePix1 in 2005)

- TimePix: convincing 5 institutes to participate (we have 3 already!)

- GOSSIPO: CMOS chip for Multi Project Wafer test chip in 130 nm tech.

- Apply InGrid 2 on ATLAS FE Pixel chip: GOSSIP proof-of-principle

Dummy wafer

Page 42: Micropattern on CMOS pixels NIKHEFMaximilien Chefdeville Auke-Pieter Colijn Alessandro Fornaini Harry van der Graaf Peter Kluit Jan Timmermans Jan Visschers.

Micropattern on CMOS pixels

NIKHEF Maximilien ChefdevilleAuke-Pieter ColijnAlessandro FornainiHarry van der GraafPeter KluitJan TimmermansJan Visschers

Saclay CEA DAPNIA Paul ColasYannis GiomatarisArnaud Giganon

Univ. Twente/Mesa+ Jurriaan Schmitz

CERN/Medipix Constm Eric HeijneXavie LlopartMichael Campbell

Thanks to:Wim GotinkJoop RovenkampArnaud Giganon

Harry van der Graaf

NIKHEF

SECOND WORKSHOP ON LARGE TPCFORLOW ENERGY RARE EVENT DETECTION

LPNHE - Paris VI and VII Universities  PARIS, France 20 December 2004