Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...
Transcript of Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...
![Page 1: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/1.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 1
ROCHESTER INSTITUTE OF TEHNOLOGY MICROELECTRONIC ENGINEERING
4-8-2015 mem_app_pumps.ppt
Microelectromechanical Systems (MEMs) Applications – Valves and Pumps
Dr. Lynn Fuller
webpage: http://www.people.rit.edu/lffeee
Microelectronic Engineering Rochester Institute of Technology
82 Lomb Memorial Drive Rochester, NY 14623-5604
Tel (585) 475-2035 Email: [email protected]
Webpage: http://www.microe.rit.edu
![Page 2: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/2.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 2
REVIEW
Valves and Pumps Valves Flap Diaphragm Pumps Rotary Diaphragm Pump Peristaltic
Actuation Heat Piezoelectric Electrostatic Magnetic
![Page 3: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/3.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 3
OUTLINE
Introduction Basic Flapper and Diaphragm Valve Micromachined Silicon Microvalve, T. Ohnstein, et.el., Sensor and System Development Center, Honeywell, Inc., Bloomington, Minnesota, Proceedings of the IEEE Micro Electro Mechanical Systems Conference, February 1990. A Pressure-Balanced Electrostatically Actuated Microvalve, M. A. Huff, et.el., MIT, Cambridge, MA, Technical Digest of the IEEE Solid-State Sensor and Actuator Workshop, June 1990.
![Page 4: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/4.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 4
OUTLINE
Basic Diaphragm and Peristaltic Pumps A Thermopneumatic Micropump Based on Micro-engineering Techniques, F.C. M. Van De Pol, et. el., University of Twente, Department of Electrical Engineering, Enschede, The Netherlands, Proceedings of 5th International Conference on Solid-State Sensors and Actuators, June 1990 Piezoelectrically Actuated Miniature Peristaltic Pump, Y. Bar-Cohen, JPL/Caltech, Pasadena, CA, SPIE’s 7th Annual International Symposium on Smart Structures and Materials, March 1-5, 2000, Newport CA. Thermally Actuated Peristaltic Pump Design, Vinay V. Abhyankar, Lynn F. Fuller, RIT, January 22, 2002
![Page 5: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/5.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 5
INTRODUCTION
![Page 6: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/6.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 6
FLAPPER VALVES
![Page 7: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/7.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 7
DIAPHRAGM VALVE
![Page 8: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/8.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 8
AN ELECTROSTATIC FLAPPER VALAVE
![Page 9: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/9.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 9
AN ELECTROSTATIC FLAPPER VALAVE
Normally-open Valve Closure Plate 350 µm x 390 µm Inlet Orifice 24 µm x 60 µm
![Page 10: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/10.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 10
AN ELECTROSTATIC FLAPPER VALAVE
Metal electrodes (did not say, guess W) 4 Nitride Layers Oxide or Aluminum Sacrificial Layer
![Page 11: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/11.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 11
AN ELECTROSTATIC FLAPPER VALAVE
![Page 12: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/12.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 12
AN ELECTROSTATIC FLAPPER VALAVE
![Page 13: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/13.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 13
AN ELECTROSTATIC DIAPHRAGM VALVE
![Page 14: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/14.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 14
AN ELECTROSTATIC DIAPHRAGM VALVE
![Page 15: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/15.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 15
AN ELECTROSTATIC DIAPHRAGM VALVE
![Page 16: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/16.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 16
AN ELECTROSTATIC DIAPHRAGM VALVE
![Page 17: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/17.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 17
AN ELECTROSTATIC DIAPHRAGM VALVE
![Page 18: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/18.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 18
VALVE DESIGN AND SIMULATION
Greg Schallert – 2003
Fluent Simulation
![Page 19: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/19.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 19
JERMAINE WHITE CHECK VALVE
200
µ
200
µ
100
µ
2µ
2µ
![Page 20: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/20.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 20
CHECK VALVE THEORY OF OPERATION
When the backside pressure is greater, the flexible flap will bend up and allow airflow.
When the front side pressure is greater, the flap bends down and occludes the hole thus preventing airflow.
![Page 21: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/21.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 21
MOVIE OF CHECK VALVE OPERATING
![Page 22: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/22.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 22
MOVIE OF CHECK VALVE OPERATING
![Page 23: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/23.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 23
DIAPHRAGM PUMP
Heater
![Page 24: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/24.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 24
PERISTALTIC PUMP
![Page 25: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/25.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 25
THERMAL ACTIVATED DIAPHRAGM PUMP
![Page 26: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/26.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 26
THERMAL ACTIVATED DIAPHRAGM PUMP
![Page 27: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/27.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 27
THERMAL ACTIVATED DIAPHRAGM PUMP
![Page 28: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/28.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 28
THERMAL ACTIVATED DIAPHRAGM PUMP
![Page 29: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/29.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 29
THERMAL ACTIVATED DIAPHRAGM PUMP
Conclusion:
![Page 30: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/30.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 30
PIEZOELECTRIC ACTIVATED PERISTALTIC PUMP
![Page 31: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/31.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 31
PIEZOELECTRIC ACTIVATED PERISTALTIC PUMP
![Page 32: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/32.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 32
PIEZOELECTRIC ACTIVATED PERISTALTIC PUMP
![Page 33: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/33.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 33
PIEZOELECTRIC ACTIVATED PERISTALTIC PUMP
![Page 34: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/34.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 34
PIEZOELECTRIC ACTIVATED PERISTALTIC PUMP
Flow = 3 cc/min
Pressure = 1100 Pascal = 0.16 psi
![Page 35: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/35.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 35
THERMAL ACTUATED PERISTALTIC PUMP
Silicon Substrate
Silicon
80 mm diaphragm (watch glass)
Insulating material
Thin Film Heater
![Page 36: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/36.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 36
THERMAL ACTUATED PERISTALTIC PUMP
1 2 3 4 5 6
• Sequentially activating the pumps 1- 6 will advance the fluid
• Cycling pumping system gives desired flow rate [picoL/sec]
• Additional channels can be added in increase flow rate further
1 2 3 4 5 6
1 2 3 4 5 6
reservoir reservoir
![Page 37: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/37.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 37
THERMAL ACTUATED PERISTALTIC PUMP
• The resistive heating element heats the cavity
• The cavity pressure rises till the watch glass deflects downward
since p/T = constant (want 10 psi activation pressure)
• The deflection results in volume displacement in the etched channel
Silicon Substrate
Silicon
![Page 38: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/38.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 38
THERMAL ACTUATED PERISTALTIC PUMP
Length
Width
Deflected diaphragm
Forward Displacement Reverse Displacement
![Page 39: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/39.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 39
THERMAL ACTUATED PERISTALTIC PUMP
32
24
)/1(
]1)/1[()979.249(
vE
vPRy
y = deflection [mm]
P = pressure [mm hg]
R = diaphragm radius [mm]
v = Poisson’s ratio [-]
Y = Young’s Modulus [dyne/cm2]
= diaphragm thickness [mm]
![Page 40: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/40.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 40
THERMAL ACTUATED PERISTALTIC PUMP
Required Pressure vs Diaphragm Radius for 0.75 mm deflection
Required Pressure vs Diaphram Radius for 0.75 mm
Deflection
0
5
10
15
20
25
30
1000 1200 1400 1600 1800
Radius
Pre
ss
ure
[p
si]
v = 0.206 [-]
y = 0.75 mm
Y = 7.30E11 dyne/cm2
= 80 mm
P = 517.149 mm Hg
(10 psi)
R = 1226.932983 mm
![Page 41: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/41.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 41
THERMAL ACTUATED PERISTALTIC PUMP
Thermal Design Calculations
(qin – qout) + qgen = qstored 0 0
qgen= q1 + q2 ~ 0
qgen = q2
Theater – Tambient (kA/L)glass + (kA/L) silicon
q2 =
= 20 mW
Tambient
Tsurface
Power
q1
q2
Tambient
Theater
(kA/L)glass
(kA/L) silicon
![Page 42: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/42.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 42
THERMAL ACTUATED PERISTALTIC PUMP
Fabrication Process
Anisotropically etch pump pattern in silicon wafer
Glue 80µm thick slip glass cover across channel section
Place resistance heaters above diaphragm
Glue patterned rubber insulator or pattern photoresist over channel section
![Page 43: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/43.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 43
THERMAL ACTUATED PERISTALTIC PUMP
Fabrication Process Continued
Not to scale
Heater Diaphragm Insulator Channel
![Page 44: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/44.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 44
PUMPING FLUIDS WITH VOLTAGE
![Page 45: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/45.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 45
PUMPING FLUIDS WITH VOLTAGE
![Page 46: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/46.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 46
REFERENCES
1. Micromachined Transducers, Gregory T.A. Kovacs, McGraw-Hill, 1998.
2. Microsystem Design, Stephen D. Senturia, Kluwer Academic Press, 2001.
3. Microfluidic Technology and Applications, Michael Koch, Research Studies Press Ltd., Baldock, Hertfordshire, England, TJ853.K63 2000, ISBN 0 86380 244 3, 2000.
2. IEEE Journal of Microelectromechanical Systems.
![Page 47: Microelectromechanical Systems (MEMs ... - People · MEMs Applications –Valves and Pumps ...](https://reader030.fdocuments.net/reader030/viewer/2022021704/5b289f3e7f8b9ace7d8b48a6/html5/thumbnails/47.jpg)
© April 8, 2015 Dr. Lynn Fuller
Rochester Institute of Technology
Microelectronic Engineering
MEMs Applications –Valves and Pumps
Page 47
HW – APPLICATIONS VALVES AND PUMPS
1. Find another publication describing the fabrication of a MEMs valve or pump. Describe the fabrication sequence in your own words. Attach a copy of the paper.