MEMS Test Structures for Residual Stress Measurement banglore€¦ · MEMS Test Structures for...
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MEMS Test Structures for Residual Stress MeasurementsStress Measurements
1 1 2 1Akshdeep Sharma 1, Maninder Kaur1, Dinesh Kumar2 and Kamaljit Rangra1
1 Central Electronics Engineering Research Institute (CEERI), PILANI2 Kurukshetra University Kurukshetra, Haryana, India
Sensors and Nanotechnology GroupSensors and Nanotechnology GroupRF MEMS /SEM Team
9‐Nov‐10 1
Presented at the COMSOL Conference 2010 India
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OutlineOutline
MotivationMotivation
Theoryeo y
Results and Discussions
Summary
References
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MEMS Test structures*Displacement Type: T H shape structureDisplacement Type: T, H shape structure
Buckling Type: Beams, Cantilevers, Gückel Rings, Diamond structure
Rotation Type : Pointers Bent-beam Lancet structuresRotation Type : Pointers, Bent-beam, Lancet structures
R id l StResidual Stresses
* B.P. van Drieenhuizen, J.F.L. Goosen, P.J. French, Comparison of techniques for measuring , , , p q gboth compressive and tensile stress in thin films, Sens. Actuators A. 37/38, 756–765 (1993).Q. He, Z.X. Luo, X.Y. Chen ,Comparison of residual stress measurement in thin films using surface micromachining method, Thin Solid Films 516, 5318–5323 (2008).9‐Nov‐10
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TheoryAnchor
Driving 3.0
3.2
Dipalcement as a function of tilt angle a
2.4
2.6
2.8
plac
emen
t (μm
)
8‐10deg.
JunctionTilted
Beam4 8 12 16
2.0
2.2
Dis
p
Pointer
Basic Layout of Lancet
Tilt angle α (Deg)* A. Bagolini, B. Margesin, A. Faes, G. Turco, F. Giacomozzi, Novel test structures for stress diagnosis in micromechanics, Sensors and Actuators A 115, 494–500 (2004).
TensileCompressive
Junction ModelIn OutTilted Arm
ModelIn Out DisplacementForce acting on driving Strain
Basic Layout of Lancet
BarSchematic of modeling sequence
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Tensile displacement (X) CompressiveAnchor Anchordisplacement
Hτ
L
(a)
(b) H
LB
α
h
H
hLB
Lτ
(d)
Driving Bar
Tilted BeamB Junction B
α
(c)α
R β
xΔx
h
A. Conceptual schematic of the asymmetric lancet B. Conceptual schematic of the symmetric lancet
displacement
displacement = H sinα
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Results and Observations
Asymmetric pointer structure with single junction layout Cont…6
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Asymmetric pointer structure with double junction layout Cont…9‐Nov‐107
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Asymmetric Lancet pointer structure with single junction and electrical read out Cont…9‐Nov‐10 8
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Symmetric Lancet pointer structure with double junction and electrical read outCont…9‐Nov‐10
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ElectricalElectrical read out
i
Cont…SEM image of fabricated symmetric lancet
vernier
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SummaryType Displacement Stress (MPa) Stress Type
Summary
Structures (µm)Asymmetric
Pointer0.3 239 Tensile
SymmetricPointer
0.9 217 Tensile
A i 3 5 221 T ilAsymmetricLancet Pointer
3.5 221 Tensile
Symmetric 6 7 228 TensileSymmetricLancet Pointer
6.7 228 Tensile
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References [1] B.P. van Drieenhuizen, J.F.L. Goosen, P.J. French, Comparison of techniques for measuring both compressive and tensile stress in thin films, Sens. Actuators A. 37/38, 756 765 (1993)756–765 (1993).[2] L. Elbrecht, U. Storm, R. Catanescu, Comparison of stress measurement techniques in surface micromachining, J. Micromech. Microeng. 7 , 151–154 (1997) .[3] B. Yogesh, K. Najafi, Gianchandani, Bent beam strain sensors, J.Microelectromech. Syst. 5 (1) , 52–58 (1996).[4] Q. He, Z.X. Luo, X.Y. Chen ,Comparison of residual stress measurement in thin films using surface micromachining method, Thin Solid Films 516, 5318–5323 (2008).[5] A Bagolini B Margesin A Faes G Turco F Giacomozzi Novel test structures[5] A. Bagolini, B. Margesin, A. Faes, G. Turco, F. Giacomozzi, Novel test structures for stress diagnosis in micromechanics, Sensors and Actuators A 115, 494–500 (2004). [6] A. Bagolini, A. Faes, B.Margesin, Analytical model for magnified displacement Stress test structures,DTIP of MEMS & MOEMS, TIMA Labs/DTIP Montreux, Switzerland, 01-03 June (2005).[7] B. Margesin, A. Bagolini, V. Guarnieri, F. Giacomozzi, A. Faes, R. Pal, M. Decarli, Stress characterization of electroplated gold layers for low temperature surface micromachining. in: Proceedings of the DTIP 2003, France, 402–405, (2003).micromachining. in: Proceedings of the DTIP 2003, France, 402 405, (2003).
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