Welcome to

Paper Presentation on

MEMS TECHNOLOGYBy

Chavan Mayuri Sanjay

Department of Electronics and Telecommunication EngineeringAnnasaheb Dange College of Engineering and Technology, Ashta

OUTLINE• MEMS Introduction• Sensor• Fabrication• MEMS manufacturing technology• Packaging• Advantages• Disadvantages• Application• Conclusion• Reference

INTRODUCTION

• MEMS is a acronym for micro-electro-mechanical system

• It is used to create tiny integrated devices

• Ability to scence, control and actuate

• MEMS is the promising technology in 21th century

WHY MEMS SENSOR?

• It measures physical quantity and convert into it into electronic signal

• Used to scence changing parameter

• Small in size

• Have lower power consumption

• More sensitivity to input variation

• Less invasive due to mass production

FABRICATION

Material used are: • Silicon

• Polymer • Metal

• Ceramic

Basic Process

Deposition Patterning Etching

MEMS MANUFACTURING TECHNOLOGY

• Bulk Micromachining

• Surface Micromachining

• LIGA

BULK MICROMACHINING• This technique involves removal of substrate material

• Bulk micromachining techniques are:

Wet etching

Dry etching

SURFACE MICROMACHINING• It enables fabrication of complex integrated structure

• Widely used technique is Polysilicon surface micromachining

• Structure thickness is smaller than 10 μm

LIGA• LIGA is a German acronym standing for lithographie,

galvanoformung (plating), and abformung (molding).

PACKAGING • Protect the sensor from external influences and

environmental effect

• Protect the environment from presence of the sensor

• Provide controlled interface between sensors

• Standard IC Packages: Ceramic Packages, Plastic Package, Metal Packages

ADVANTAGES

• Smaller package size

• Less power consumption

• Easy to integrate into system or modify

• Lighter weight

• Higher output signal

LIMITATIONS

• It is very small to trace out

• Expensive and Complex Packaging

APPLICATIONS

In medical science

• Pressure sensor

• Inertial sensor

• Sight for the blind

In marine science

CONTINUE….

Applications in marine military operation

Industrial Market

Communication

FUTURE SCOPE• Access to Foundries

• Design, Simulation and Modeling

• Packaging and Testing

• Standardization

• Education and Training

CONCLUSION• MEMS promises to be an effective technique of

producing sensors of high quality, at lower costs.

• Thus I can conclude that the MEMS can create a proactive computing world, connected computing nodes automatically, acquire and act on real-time data about a physical environment, helping to improve lives, promoting a better understanding of the world and enabling people to become more productive.

REFERENCE1. Microsensors , Muller, R.S., Howe, R.T., Senturia , S.D., Smith, R.L., and White, R.M. [Eds.], IEEE Press, New York, NY, 1991.

2. Micromechanics and MEMS: Classic and Seminal Paper to 1990, Trimmer, W.S., IEEE Press, New York, NY, 1997.

3. Journal of Micro-electro-mechanical-Systems(http://www.ieee.org/pub_preview/mems_toc.html)

4. Journal of Micromechanics and Microengineering(http://www.iop.org/Journals/jm)