MEMS-IC Common Platform

MEMS+

2012

Slide 2

MEMS+IC Challenge

System, IC and layout designers require a MEMS component for their IC design environment

No standard, automated methodology across the industry

Disconnect between MEMS, IC and system design flows leads to long development cycles and high costs and minimal design reuse

Standard FEM Approach MEMS+

Layout or 3D Geometry

Auto Mesher

Non-parametric Mesh model with 1e5 to 1e6 DOF’s

Library of generic low-order finite

elements

The Difference: Model Creation

Bricks, shells, teds, boundary elements

Library of (MEMS specific) high-order finite elements

Parametric mesh model with

10 to <1000 DOF’s

Graphical User Interface

Scripting Python or

Matlab

Height order FE beams, shells, bricks, damping elements, combs, electrode etc.

or

Slide 4

Introducing a Common Platform for MEMS + IC

Key Features

• Evolution of Architect3D

• 3-D interface for design entry

• Fully parametrized

• Integrated with EDA and system tools

• Simultaneous simulation of MEMS+IC

• Automatic generation of parametric layout (Pcells)

Parameterized MEMS

Component Library (.lib)

Coventor MEMS+

Assemble design in 3-D 1

Coventor MEMS+ for Cadence Virtuoso

Visualize simulations in 3-D 6

Export MEMS Model 2

P-Cell

Netlist

Symbol

Cadence Virtuoso

Insert MEMS model in schematic 3

Place MEMS pCell in layout 5

Spectre/UltraSim

Simulate 4

Parameterized MEMS

Component Library (.lib)

Coventor MEMS+

Assemble design in 3-D 1

Visualize simulations in 3-D 6

Coventor MEMS+ for Matlab Simulink

Insert MEMS model in schematic 3

Import MEMS Model 2

Symbol

S-Function Interface

Simulate 4

Slide 7

MEMS+ Innovator: Natural 3D Design Entry

Slide 8

All foundry relevant data is stored in two databases, which are either provided by an external foundry or by the technology group within the company

Foundry Data PDK

Slide 9

Material properties can be defined as values, variables or algebraic equations

Variable Assignment

Slide 10

The Process Editor details the sequence of MEMS fabrication steps

It holds layer names, thicknesses and sidewall angles

Process Editor

Slide 11

Each layer is associated to one of the materials from the Material Database

Layer Material Selection

Slide 12

Variables defined in the Material Database or Process Editor can be exposed to the MEMS designer

Exposing Variables

Slide 13

Why Process Variables?

MEMS versus IC Design

Customized or semi-customized processes are common; e.g., MEMS designer might be able to change a structural layer thickness within limits

MEMS component models like suspensions, combs and electrodes are not foundry specific

Varying process and material data are key for PDK development and yield analysis

Slide 14

The MEMS designer starts with a blank, 3-D canvas on the Innovator tab

Innovator

Slide 15

Exposed variables from the Process Editor or Material Database are automatically imported into Innovator

PDK Variable Import

Slide 16

MEMS device models are created with a library of parametric component generators for suspensions, plates, combs and electrical pads

Parametric Component Library

Slide 17

The MEMS designer picks components from the library to assemble the desired structure

Adding Components

Slide 18

Each component can be assigned to one or multiple layers of the corresponding process file

Layer Assignment

Slide 19

Component parameters can be defined as values, variables or algebraic equations

Component Parameters

Slide 20

Component Tree

The component tree highlights the component names and the hierarchical structure of the 3-D device schematic

Slide 21

Mechanical Connector View

The mechanical connector tree and viewing mode highlights which components are linked together

Slide 22

Electrical Connector View

The electrical viewing mode highlights electrical connectivity with colors and transparency in the canvas

Only electrical layers are shown as solid

Slide 23

3D Innovator designs can be imported into the Cadence Library Manager …

Cadence Virtuoso Cell Generation

Slide 24

3D Innovator designs can be imported into the Cadence Library Manager using the MEMS+ import tool

Cadence Virtuoso Cell Generation

Slide 25

3D Innovator designs can be imported into the Cadence Library Manager using the MEMS+ import tool

MEMS+ Import Tool

Slide 26

The MEMS+ import tool automatically creates a parametric layout and schematic view

Parametric Cell Views

Slide 27

The MEMS device cell in Virtuoso features all parameters that were exposed in MEMS+

Virtuoso Cell Parameters

Slide 28

Schematic Model Parameters

Changes in the cell parameters affect the underlying schematic model and layout cell

Schematic Model Parameters

Slide 29

The symbol view features all exposed electrical and mechanical ports

Electrical Pins

Slide 30

The symbol view features all exposed electrical and mechanical ports

Mechanical Pins

Slide 31

The MEMS designer adds electrical and mechanical boundary conditions to the exposed model pins

MEMS Device Schematic

Slide 32

The MEMS designer confirms the device performance running DC, AC and transient simulations

MEMS Device Simulation

Slide 33

Simulation results can be loaded back into MEMS+ and animated in the 3-D canvas

Simulation Results

Slide 34

MEMS+ Design Examples

DLP Mirrors Ring Gyros

RF Switches Resonators

Accelerometers

MEMS+ builds on top of Coventor’s proven parametric model library and can be applied to design the next generation of …