“MEMS based seismic and vibration sensors in Building & Structural Health Monitoring systems”

Sean Neylon: Chief Executive Officer, Colibrys Switzerland SA• Founder • 35+ years of experience in Micro-Electronics and Micro-Systems (MEMS)• Former Chairman of NEXUS, the European Microsystems Networking Association• Formerly with GEC Marconi, Plessey, Micronas, CSEM

Contents

The world of Seismic sensing SHM in context of Seismic Market supply chain &

applications Sensor Classification & standards

Driving forces for Structural monitoring applications

Technology Roadmap for MEMS based Strong Motion seismic sensors

Conclusions

Seismic sensing Applications

Geoscience Structuralmonitoring

Civil protection

Civil Engineering

Geotechnics

Volcanic eruptions

Avalanches, landslides

Soil/rock mechanics

Geodesy

Geophysics ‘Free field’

Techtonics

Volcanic

Rapid response, early

warning, public

information

Earthquake

Tsunami

Volcanic explosion

Landslip

Site evaluation Shake maps Subsoil, microzonation Requalification of

structures Land Use planning

Construction

Pile driving, Compaction

Tunneling

Blasting, Mining

Quarrying, Demolition

Industrial equipments

Nuclear Power plants

Dams, embankments

Bridges / Tunnels / Towers

LNG / Oil / Gas storage

Pipeline

Landfills

Tunnel monitoring

Traffic

(Rail and Road) monitoring

Large Buildings

Medical centers

Energy Subsurface

imaging (Oil, Gas, Geothermal)

DefenseNuclear,

Tunneling,Remote monitoring

Market supply chain

Government Agencies

Universities

Hardware integrator

Sensors + data recording + interface

electronics

Sensor manufacturer

Construction & Demolition companies

System integratorSensors, DS , SW +

communications

Regional suppliersN. America: Nanometrics,

Kinemetric/Metrozet, ReftekEMEA:

Syscom, Geosig, GuralpAsia:

Mitsubishi, Kokusai, Aimil

Sensor TechnologySM FBAs: Nanometrics,

Kinemetrics, Guralp, HarbinSM MEMS: Colibrys, SDI, ADIStrain, Velocity

Insurance Security

‘Building’ ownersConsultants

Structural Health Monitoring Sensors

Broadly 4 families of sensors Velocity: Broadband (high sensitivity), Short period and

Strong motion velocity Accelerometers: „Strong Motion“ Class A-D Strain/Displacement: Positioning: GPS

Important Standards: National e.g. USGS.... Regional e.g. State of California......

Classification - Strong Motion

Class A Typically electromechanical Force Balance Accelerometers 5g (±3.5g +1g) High sensitivity, high linearity, low frequency response Expensive, fragile, low volume capacity, medium power Primary application: National (>70km spacing) and Regional (3-30km) networks

Class B Typically MEMS closed loop sensor design 5g (±3.5g +1g) Medium sensitivity, medium linearity, medium frequency response, medium power Relatively inexpensive, robust, medium volume, Primary application: Regional, Urban (<4Km) networks and Structural Health monitoring,

Shake maps, modelling validation Class C

Typically MEMS open loop based sensors 5g (±3.5g +1g) Low dynamic range/resolution, low linearity, medium frequency response, low power Inexpensive, robust, Medium / high volume, Primary application: Earthquake detection & intervention

Strong Motion StandardsClass A

Specifications: USGS & ANSS specifications (13 June 2007)

Technical: Range: >± 4.5 g , (± 3.5 g + 1 g gravity) Noise:

Must: 145dB (0.02-2Hz); 130dB (2-50Hz) Nonlinearity: ≤ 1 % (at full scale) Temperature: Operating range: -20°C to 70°C, Temperature error

over full Temperature span: < 2%, Offset drift: < 0.5 mg /°C Self-test: Must No steps in Bias Lifetime: 5 years

Strong Motion StandardsClass B

State of California specifications are a dominant standard Technical:

Range: ± 5 g , (± 4 g + 1 g gravity) Noise:

Must: .03 mg RMS over .02 to 100 Hz BW (87.3dB (0.1-35Hz) Wish: < 500 µg/√Hz in 1 to 100 Hz band

Nonlinearity: ≤ 1 % (at full scale) Temperature: Operating range: -20°C to 70°C, Temperature error

over full Temperature span: < 2%, Offset drift: < 0.5 mg /°C Self-test: Must No steps in Bias Lifetime: 10 years

9

Market size by application & grade

10

1

Performance S/N Dynamic

range dB

Mar

ket

Siz

e $M

io

100

120dB300ng/√Hz

100dB1 µg/√Hz

140dB 30ng/√Hz

Class AClass BClass C

Regional & Urban earthquake monitoring

Energy Oil and gas, discovery

& reservoir monitoring

SubsurfaceMining & Downhole

imaging

National earthquake monitoring

Earthquake detection & intervention

TAM: Internal estimates 2007-2010

Sensor level valuation

Market size and growth are drivers in innovation!

‘Ground shake’ maps, Structural modeling &

monitoring

10

Competitive supply base - today

100

10

Performance S/N Dynamic

range dB

Pri

ce p

er a

xis

($)

1000

120dB300ng/√Hz

100dB1 µg/√Hz

140dB 30ng/√Hz

MS9005

SF2006

SF2005

SF1600

SF1500

Electromechanical

FBA

NanometricsKinemetrics

Consumer

MEMS

Harbin

Class AClass BClass C

Colibrys

MEMS Open loop

MEMS Closed loop FBA

SF2006 Product Parts

Mechanical Sensor

Closed Loop Sigma-Delta ASIC

PCB + electronic components

Derivative of Oil/Gas ‘geophone’

Class B +/-5g seismic sensor

State of California compliant

RoHS compliant

Self noise of Siflex product line vs. Class A and FBA

-170

-160

-150

-140

-130

-120

-110

-100

-90

-80

-70

-60

-50

-40

-30

-20

-10

0

10

0.01 0.10 1.00 10.00 100.00 1000.00Frequency (Hz)

No

ise

PS

D (

dB

g/r

tHz)

SF1500SNSF1500SN.A

Episensor

1g

0.1g

10mg

1mg

0.1mg

10ug

1ug

0.1ug

Class A

Competitive position - today

13

Competitive position - today

100

10

Performance S/N Dynamic

range dB

Pri

ce p

er a

xis

($)

1000

120dB300ng/√Hz

100dB1 µg/√Hz

140dB 30ng/√Hz

MS9005

SF2006

SF2005SF1600

SF1500

Electromechanical

FBA

NanometricsKinemetrics

ConsumerMEMS

Harbin

Class AClass BClass C

Colibrys

MEMS Open loop

MEMS Closed loop FBA

14

Competitive position - Roadmap

100

10

Performance Dynamic range dB

Pri

ce p

er a

xis

in U

SD

1000

120dB300ng/√Hz

100dB1 µg/√Hz

140dB 30ng/√Hz

MSxxxx

Electromechanical

FBA

EpisensorKinemetrics

Lower costMEMS

Harbin

MEMS

Class A/B

MEMS Class B

Class AClass BClass C

Colibrys

MEMS Open loop

FBAMEMS Closed loop

Strong Motion Roadmap

MEMS based Class B sensorsSmaller size, lower power, improved linearity,

extended FS range Integrated wirelessLower power / energy harvesting

MEMS based ‘Class A’ sensorsLower cost, more robust, lower power, smaller

size

Target specifications

ProductsKinemetrics Class A FBA

MEMS Class A

Target values Colibrys Class B

MEMS

ApplicationsSeismic monitoring

Seismic & Structural monitoring

Seismic & structural monitoring

Full scale rang g ± 4 g ± 5 g ± 5 g

Noise<100 ng/√Hz (0.01 to 100

Hz)

<100 ng/√Hz (0.01 to 100 Hz)

1 µg/√Hz (0.1 to 100 Hz)

Resolution (S/N ratios)

24 bits (50 Hz

BW) (137 db)24 bits (50 Hz BW)

(137 db)20 bits (50 Hz BW) (117

db)

Output Digital (SPI?) Digital (SPI?) Digital (SPI?)

Power < 120 mW < 100 mW < 100 mW

Goal is to replace traditional electromechanical devices (FBA) with closed loop MEMS technology

Class A MEMS Sensor prototype

Prototype 10 g FS Inertial MEMS sensor

Sensor component MEMS and FE ASIC in ceramic

MCM PCB board

FPGA Power supplies, clock Ethernet controller (for testing)

Size Current board: 10 cm x 10 cm x

4mm Potential to make it much smaller Market Beta site sampling 2011/12

Conceptual drawing

Conclusions:MEMS continue to be a strong technology for new Strong Motion Seismic sensor development

My interests are today to: 1. Find potential interested partners for new MEMS Class A sensors?2. Understand objectives of Seismic sensor development within MEMCON FP7 ?3. Confirm if our market assessment is realistic?4. Increase awareness: Europe has a real solution in hand to counter US/HP long term roadmaps

Many thanks for listening to me!

Many thanks to Philippe Krebs at Colibrys for his assistance in providing market details.

“multi-cultural, small, fast, flexible, a symbol of creativity and fertility, strongly territorial, successful through intelligent mutation” – culture of Colibrys

www.colibrys.com