Mark L. Schattenburg- From nanometers to gigaparsecs: the role of nanostructures in unraveling the...
Transcript of Mark L. Schattenburg- From nanometers to gigaparsecs: the role of nanostructures in unraveling the...
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S p a c e N a n o t e c h n o l o g y L a b o r a t o r y
M a s s a c h u s e t t s I n s t i t u t e o f T e c h n o l o g yS N LS N L
From nanometers to gigaparsecs:*
the role of nanostructures in unraveling
the mysteries of the cosmos.
Mark L. Schattenburg
Space Nanotechnology Laboratory
Center for Space Research
and
NanoStructures Laboratory
Research Laboratory of Electronics
Massachusetts Institute of Technology
77 Massachusetts Avenue, Cambridge, MA 02139
Plenary Talk
45th International Conference on Electron, Ion and Photon Beam
Technology and NanofabricationWashington, D.C., May 30, 2001
*1 gigaparsec = 1034 nanometers
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MLS-2001-05-25.03.eps
1 arc-second
1parse
c=3.3
lighty
ears=
3.1x101
6
me
ters
Definition of the Parsec
("parallax second")
Earth
Sun
star
Nearest star ~1 parsecSize Milky Way galaxy ~1 kilo-parsecNearby galaxies ~1 mega-parsecSize of known universe ~1 giga-parsec
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Huge jets many times longer than our galaxy.
Exhaust from the supermassive black hole.
Supernova Remnant
Supernovae can emit more energy than
the combined output of all the billions of stars in our galaxy.
Supermassive Black Hole
Our Bizarre Universe
The centers of galaxies harbor black holes that can have
more mass than all the stars of our galaxy combined.
Galactic Jet
Huge jets many times longer than our galaxyare the exhaust from supermassive black holes.
Bizarre-Universe.eps
Cosmic vacuum cleaner.
Star Being Eaten by Black Hole
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What powers the enormous relativistic jets shooting from quasars?(Massive black holes are suspected.)
It appears that only 10% of the mass of the Universe is visible.What is the nature of the mysterious missing matter?
How did the Universe get here and what is its ultimate fate?
Unsolved Mysteries of the Universe.
NGC 3606Crab Nebula Pulsar
Quasar PKS 0637-752
3 gigaparsec distant.
Unsolved-Mysteries.eps
Our Galactic Center
Massive black hole?
Neutron star spinning at 33 Hz. Star birth region.
HCG 62
Cluster of galaxies.
Neutron Star
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S p a c e N a n o t e c h n o l o g y L a b o r a t o r y
M a s s a c h u s e t t s I n s t i t u t e o f T e c h n o l o g yS N LS N L
MOTIVATION
Goal: higher performance astrophysics instrumentation.
High launch costs place premium on high performance at lowest possible mass.
Many useful phenomena occur when size and accuracy of features are comparable towavelength of light.
Our lab has developed a variety of novel nanostructure technologies that have beenapplied to nine space missions.
Two missions are described:Chandra Observatory x-ray telescope.
IMAGE neutral atom camera.
Will show new microtechnology that we believe may lead to diffraction-limited x-raytelescopes.
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SubrahmanyanChandrasekhar
(1910-1995)
NASA Chandra ObservatoryX-ray Telescope
MLS-01-03-14.02
Nobel Prize, 1983
Performs high-resolution x-ray imaging and spectroscopy in the
energy range of 0.1-10 keV (wavelengths from 0.1 to 10 nanometers).
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Principles of X-ray Optics at Grazing Incidence
Refractive index for x-ray radiation:
Critical angle for total external reflection of x-rays:
,)()(1)( += wherein
2=c
c
Critic
alRay
Totally
Reflected
Rays
Grazing Incidence Radiation and
Total External Reflection
in +=1
0.5 1 1.5 2 2.5 3
0.2
0.4
0.6
0.8
1
Reflec
tivity
c /
A
B
C
D E
3/:
1/:
10/:
10/:
0/:
1
2
=
=
=
=
=
E
D
C
B
A
cc_
GrazingIncidence.ai
10-4
~10-2
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Nested
HyperboloidsNested
Paraboloids
Doubly-
Reflected
X-rays
X-rays
10 Meters
1.1 Meter Diameter
FocalPlane
MLS-2001-05-23.01.eps
Chandra ObservatoryGrazing Incidence Optics(Wolter Type I)
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ChandraX-ray Telescope Mirror Assembly
Chand
ra-Mirror.eps
Raytheon Optical Systems & Eastman Kodak Corp.
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NASA Chandra ObservatoryX-ray Telescope
High Energy Transmission Grating Spectrometer (HETGS)
HETG
S
HETGS Instrument
SunshadeDoor
High ResolutionMirror Assembly(HRMA) Thrusters (4)
(105 lb)Low GainAntenna (2)
Aspect CameraStray Light Shade
SpacecraftModule
OpticalBench
Integrated ScienceInstrument Module(ISIM)
High ResolutionCamera (HRC)
CCD ImagingSpectrometer(ACIS)
TransmissionGratings (2)
Solar Array (2)
ChandraTelescopeGrating(stowed)
X-ray CCDDetector array
Zero-order beamsDiffracted beams
CCD1 CCD6CCD5CCD4CCD3CCD2
Grating(in use)
X-rays
X-raymirrors
P H
Rowland Torus Transmission Grating Geometry and CCD Readout Array
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NASA Chandra X-ray Observatory
High Energy Transmission Grating Spectrometer (HETGS)
1.1 meter
100 nm
550 nm
MLS-2001-05-11.01eps
HETGS instrument.Invar grating frame.
Scanning electron micrograph of gold grating.
3 cm
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100 nm
0.6 m
1.0 m polyimide
goldgrating
polyimidemembrane
Invarframe
adhesive
5 nm Chrome
20 nm Gold
MLS-2001-05-24.01.eps
i
bar
- space
~
x rays
Pi-Phase-Shifting Transmission Grating Design
gold
bars
Transmission Grating DesignBars shift phase x-rays by ~
zero order ~0first order maximized
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Chandra ObservatoryX-ray Spectrum of Binary Star Capella
0.5
X-ray Wavelength (nanometers)
Coun
ts/Bin
100
50
0
2.01.51.0
/=1000
Capella-2.eps
Raw x-ray spectra.
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Chandra X-ray Spectrum
Small Magellanic Cloud Supernova Remant E0102-72
Direct X-ray Image (CCD Camera)
X-ray Image Dispersed by Transmission Gratings
longer wavelengths shorter wavelengths
E0102
-72.eps
l
Zero
Order
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Interference Lithography
variableattenuator
beamsplitter
laser beam = 351.1 nm
Pockels cell
mirror
beamsplitter
mirror
substrate
MLS-99-0
5-26.03
2
p= 2 sin
spatial filters
phase errorsensor
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0.5-1.0 mpolyimi e
silicon wafer
0.5-1.0 ARC
5 nm chromium20 nm gold
200 nmresist
(a) Prepare substrate.
silicon
(b) Pattern gold grating.
Invarframe
(c) Acid spin-etch waferbackside.
(d) Bond to Invar frame.
(e) Cut away.
MLS-94-
05-13.01
goldgrating
polyimide
15 nmTa2O5
silicon
adhesive
Membrane-Supported Transmission GratingFabrication Process - Macro View
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MLS-94-05
-13.02
(b) Pattern by ILand develop.
silicon
polyimide
(c) Etch interlayer inCF4 RIE plasma.
silicon
polyimide
ARC
(e) Gold electroplate.
plated gold
polyimide
silicon
Membrane-Supported Transmission Grating
Fabrication Process - Micro View
(f) Strip interlayerand ARC.
silicon
polyimide
silicon
polyimide
(d) Etch ARC in O2RIE plasma.
silicon
polyimide
ARC
resist
(a) Preparesubstrate.
platingbase
inter-
layer
(g) Acid spin-etchsubstrate.Align and bondto frames.
polyimide
epoxy
Invar
ARC
platedgold
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Medium EnergyNeutral Atom Detector (MENA)
NASA Imager for Magnetopause-to-AuroraGlobal Exploration Mission (IMAGE)
IMAGE.ep
s
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Earths Space Environment: The Magnetosphere
Magnetosphere-2.eps
Space Weather
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Charge Exchange
A magnetically trapped ion captures
an electron from a neutral
hydrogen atom...
TRAPPED
FREE
...creating an energetic neutral atom
(ENA) that is no longer trapped.
Charge-E
xchange-2
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MENA Neutral Atom Camera
Measurement Concept
ME
NA-Concept-2.eps
Collimator HWHM:
55 imaging plane
2 spin plane
AcceleratingGrid
START Electrons
Position
SensiveAnode
UV
Nanofilters
START Foil
2.6 nm Carbon
GroundGrid
Prim
aryMEN
A
STOP
tan() =X2 - X1
L
tan() =cos()
L
X2X
1
D2D1
Ioniz
edAto
m
MCP Stack
START Position (D1)
+
STOP Position (D2)
Time of Flight
+ Species
Pulse Height
Time of Flight
+ Energy
Species
Polar
Angle
Nanofilter UV Blocking Transmission Gratings
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UV+Atoms
Atoms
Detector
NanofilterGrating
Nanofilter UV-Blocking Transmission Gratings
Filter.eps
45 nm
10-1
10-9
10-7
10-5
10-3
Thickness (nm)
UVTransmissionCoeffic
ient
30 nm gap width40 nm gap width
50 nm gap width60 nm gap width
0 100 200 300 400 500 600 700 800
=121.6 nm(Hydrogen Lyman Alpha)
Electron micrograph of lines before electroplating.Electron micrograph of gold nanofilter.
45 nm
ARC
Resist
PB
IL
Mesh-Supported Grating Fabrication Process
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silicon
ARCresist
SiN
MLS-9
8-05-0
plating
base
(Cr/Au)
silicon
SiN
gold grating
plated nickel
gold and nickel gratings
SiNSilicon(e1) Spin resist and UV expose.
(e2) Plate nickel and strip resist.
(f) Mounting
metal frame
adhesive
(g) Backside Etch
resist exposed resist
UV
patterned resist
silicon
ARC
SiN SiN
silicon
SiN
plated gold
Mesh-Supported Grating Fabrication Process
plated nickel
Interlayer(Ta2O5)
(a) Wafer Preparation
(b1) Pattern resist. (b2) Etch and plate. (b3) Strip resist.(c) Pattern Support Grid
(e) Plug Pinholes
(b) Grating Patterning
(d) Wafer Etch
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Support Grating(nickel)
Nanofilter Grating
(gold)
155 nm line
45 nm space
UV Nanofilter Grating Support Mesh Design
Triangular
Support Mesh
(nickel)
MLS-2001-05-25.04.eps
4.0 m 346.4 m 10 mm
Completed
Flight Grating
(Stainless Steel Frame)
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Pinhole Plugging Results
MLS-01-03-14.01.eps
200 m m
Pinholes Before Plugging
200 m m
Pinholes After Plugging
4x 4x
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IMAGE Medium Energy Neutral Atom Camera (MENA)
Magnetospheric Storm Observations(August 12, 2000)
Sun Sun
Shadow Shadow
9:30 UT 22:00 UT
MLS-20
01-05-11-02.eps Frames from an oxygen atom "movie."
(Elapsed time between frames is 12.5 hours.)
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X-rays
X-rays
Doubly
Reflected
X-rays
Nested
Paraboloidal
Foils
Nested
Hyperboloidal
Foils
Wolter Type I Design
Two Popular Foil X-ray Telescope Designs
X-rays
Crossed 1-D Curved Mirror Foils
Kirkpatrick-Baez Design
Resolution is critically dependant on the precise
shaping and assembly of the reflective surfaces.
MLS-2
001-05-25.05
Focus
Focus
X F il O ti f Hi h Th h t X T l
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X-ray Foil Optics On-board the USA/Japan ASTRO-ESatellite
Traditional foil optics assembly techniques yield
resolution only on the arcminute level.
cc_
ASTROE.eps
X-ray Foil Optics for High Throughput X-ray Telescopes
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500 m m500 m m
Spring Comb Reference Comb
Microstructures for High-Resolution X-ray Foil Optic Assembly
MLS-2001-05-28.01.eps
Silicon micromachined combs.
500 m m
Stainess-steel wire-EDM combs.
Very low accuracy (> 20 microns).
Poor optic resolution (>1 arcminute telescope).
Very high accuracy (
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Two Types of Silicon Micro-Combs
(a) Reference combs are designed to accommodate the mirror foilswith ease and make highly accurate single-point contacts with the foils.
(b) Spring combs have flexible springs that impart minute forcesto the foils to properly shape and position them.
Units: mm Spacing tolerances
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Micro-combs as Tools for Assembling
Diffraction-Limited X-ray Foil Optics
200 mm
100 mm
200 mm
100 mm
x-rays
parabolic hyperbolic
Module for Kirkpatrick-Baez x-ray telescope.(Another module is needed to focus cross axis.)
Diffraction-limited optics at =1 nm demands ~10 nm assembly accuracy.
cc_
Comb
Purpose-2.eps
Force
Motion
Glass
Microsheet
Spring
Comb
Reference
Comb
~200 m
Assembly concept.
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100 mmsilicon wafer
microcombs etched through
entire wafer
a) Grow thermal oxide.
b) Photolithography.
c) Reactive ion etch oxide.
d) Attach quartz handle-wafer.
e) Deep reactive ion etch silicon.
f) Extract finished micro-combs.
Micro-comb Fabrication Process Overview
Silicon Wafer Oxide Resist Quartz
MLS-20
01-05-28.02.eps
Silicon Wafer
NASA Constellation X Mission Concept
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NASA Constellation-XMission Concept
Con-X-Concept
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S p a c e N a n o t e c h n o l o g y L a b o r a t o r y
M a s s a c h u s e t t s I n s t i t u t e o f T e c h n o l o g yS N LS N L
ACKNOWLEDGEMENTSSpace Nanotechnology Laboratory Staff
James M. Carter, Research Specialist, RLE
Robert C. Fleming, Lab Manager, CSR
Dr. Ralf K. Heilmann, Research Scientist, CSR
Dr. Michael McGuirk, Research Scientist, CSR
Ed Murphy, Project Technician, CSR
Dr. G.S. Pati, Postdoctoral Associate, CSR
Students
Nat Butler, Research Assistant, PhysicsCarl G. Chen, Research Assistant, Electrical Engineering
Paul T. Konkola, Research Assistant, Mechanical Engineering
Olivier Mongrard, Research Assistant, Aero. & Astro. Engineering
Glen Monnelly, Research Assistant, Physics
Significant assistance of Prof. Henry I. Smith and the NanoStructures Laboratory.
Research sponsored by NASA and DARPA/ARO.