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Manual_Sophi_

Manual ELIAS Echelle Spectrometer Series

4.0_En.doc; D. Mory; 02.04.04 1

CONTENTS

1 INSTRUMENT DESCRIPTION 5

2 APPLIANCE COUPLERS 8

2.1 ELIAS - STANDARD 8 2.2 ELIAS – VUV 9 2.3 ELIAS – PORTABLE 10 2.4 ELIAS II AND ELIAS III 11

3 OPERATION 12

3.1 ELIAS - STANDARD 12 3.2 ELIAS – VUV 13 3.3 ELIAS – PORTABLE 15 3.4 ELIAS II AND ELIAS III 16

4 OPERATION SOFTWARE SOPHI 17

4.1 INTRODUCTION 17 4.2 DESCRIPTION OF THE PROGRAM SURFACE 18 4.2.1 INDEX CARD 'MEASURE' 18 4.2.2 INDEX CARD 'TRIGGER' 19 4.2.3 INDEX CARD 'TIME' FOR VUV, PORTABLE AND STANDARD ELIAS 19 4.2.4 INDEX CARD 'TIME' FOR ELIAS II AND ELIAS III 20 4.2.5 SYMBOL BAR 21 4.2.6 DIALOGUE "OPTIONS" 22 4.2.6.1 Index card 'Printer' 22 4.2.6.2 Index card 'Spectrometer' 22 4.2.6.3 Index card 'Evaluation' 23 4.2.6.4 Index card 'Save file as' 23 4.2.6.5 Index card 'Additional' 24 4.2.7 DIALOGUE "VIEW" 25 4.2.7.1 Index card 'X-Axis' 25 4.2.7.2 Index card 'Y-Axis' 25 4.2.8 DIALOGUE "REMARKS" 26 4.3 RECORDING A SPECTRUM 27 4.3.1 SETTING THE WAVELENGTH 27 4.3.2 ADJUSTING THE SPECTROMETER RESOLUTION 27 4.3.3 SETTING THE EXPOSURE TIME 27 4.3.4 SETTING THE AMPLIFIER GAIN 27

Manual_Sophi_4.0_En.doc; D. Mory; 02.04.04 2

4.3.5 SETTING THE PIXEL CLOCK TIME 28 4.3.6 SETTING THE AVERAGING 28 4.3.7 RECORDING OR CANCELING THE DARK SPECTRUM 28 4.3.8 STARTING THE MEASUREMENT 29 4.4 RECORDING A LARGER WAVELENGTH RANGE 30 4.4.1 DESCRIPTION 30 4.4.2 SETTING THE WAVELENGTH 31 4.4.3 STARTING THE MEASUREMENT 31 4.5 TIME RESPONSE DURING MEASUREMENTS 32 4.5.1 DESCRIPTION FOR VUV, PORTABLE AND STANDARD ELIAS 32 4.5.1.1 Internal Synchronization/Trigger 32 4.5.1.2 External Synchronization/Trigger 33 4.5.2 DESCRIPTION FOR ELIAS II AND ELIAS III 34 4.5.2.1 Internal Synchronization/Trigger 34 4.5.2.2 External Synchronization/Trigger 35 4.5.2.3 External Synchronization/Trigger/ Shutter: each exposure 35 4.6 ADAPTING THE DISPLAY OF THE SPECTRUM 37 4.6.1 AXIAL SCALING 37 4.6.1.1 X-axis 37 4.6.1.2 Y-axis 37 4.6.2 ZOOM FUNCTIONS 37 4.6.2.1 Automatic scaling 37 4.6.2.2 Manual Scaling 38 4.7 EVALUATING A SPECTRUM 39 4.7.1 ZERO LINE 39 4.7.2 MAXIMUM VALUE, CENTER OF FWHM, HALFWIDTH FWHM, 95% INTEGRATION WIDTH E95, SIGNAL-TO-NOISE-RATIO SNR AND RELATIVE CONTRAST LOSS RCL 40 4.7.3 CURSOR 41 4.7.4 SAVE, QUICK-SAVE, LOAD, COMMENT 41 4.7.5 FILE FORMAT 42 4.8 SPECTRAL LONG-TERM MEASUREMENTS 43 4.8.1 BASICS 43 4.8.2 DETAILS UND OPTIONS 44 4.9 REMOTE CONTROL VIA A LABVIEW DRIVER 45 4.10 CALIBRATION OF THE SPECTROMETER / TROUBLESHOOTING 46 4.10.1 TROUBLESHOOTING SCHEME (EXCEPT FOR ELIAS STANDARD AND PORTABLE) 46 4.10.2 COUPLING IN A MERCURY (HG) LAMP 47 4.10.3 AUTO-CALIBRATION 49 4.10.4 CARRYING OUT THE ABSOLUTE CALIBRATION 49 4.10.5 BEAM SCANNING 50 4.10.6 POSSIBLE ERROR MESSAGES 52 4.11 AUTOMATIC CORRECTION FUNCTIONS 53 4.11.1 FOCUSING 53 4.11.2 BEAM HEIGHT CORRECTION 53

5 SPECIFICATIONS 55

5.1 GENERAL 55 5.2 ELECTRICAL REQUIREMENTS 55 5.3 SYSTEM FUNCTION, DISPERSION AND INSPECTION RANGE 56 5.3.1 VUV, PORTABLE AND STANDARD ELIAS 56 5.3.2 ELIAS II 57 5.3.3 ELIAS III 57


6 APPENDIX 58

6.1 SOFTWARE-UPDATE 58 6.2 TRANSPORT CONDITIONS 58 6.3 SUPPLY SCHEDULE ELIAS (STANDARD) 58 6.4 OPTIONS 59 6.5 WARRANTY 59


1 Instrument Description The Emission Line Analyzing Spectrometer „ELIAS“ allows the highly resolving spec-tral characterization of emission and absorption lines, in particular of laser lines. The ELIAS (Patent No. DE 199 61 908.5, 20.12.99) was jointly developed with the Insti-tute for Spectrochemistry and Applied Spectroscopy Berlin (ISAS) and engineered for commercial use by LTB Lasertechnik Berlin GmbH. The line profiles can be detected simultaneously within their spectral vicinity by means of a CCD camera. Such a char-acterization gains an increasing importance for various tasks. The spectrometer’s main area of application is in excimer laser lithography. The information on the exact spectral distribution is of the utmost importance for the further development of exci-mer lasers, as well as for the development of the beam guidance optics. Not least, the spectrometer facilitates quality control in the production process. The comparison of the different spectroscopic methods shows that optic arrange-ments using Echelle gratings are particularly suited for this task. They achieve an extremely high theoretical resolution capability by the diffraction of the light in a multi-tude of high interference orders. Additionally, their characteristic stair-like groove pro-file leads to high diffraction effectiveness within each order. To be able to use the theoretical resolution capability of the Echelle grating, the opti-cal system of the spectrometer must meet two requirements. First, a nearly diffraction limited imaging has to be achieved. Second, the linear dispersion must be sufficiently high so as to be able to scan the diffraction limited image of the entrance slit within 5-10 pixels given that the typical pixel width of linear arrays is approx. 25µm.

Echelle grating

off-axisparaboloidmirror

planemirror

foldingmirror

entranceslit

cylindermirror

detector

cylindermirror

optical fibreor

mirror optics

foldingmirror

Emission Line Analyzing SpectrometerELIAS

In the ELIAS, the 360 mm wide Echelle grating within a Littrow arrangement can be used alternatively in a double or single pass.


This makes it possible, through motor-controlled software, to work either with an ex-tremely resolving capability for profile characterization or with a reduced resolving capability but larger inspection range and higher signal-to-noise-ratio for wavelength calibration. The resulting camera focal distance of 10 m of the ELIAS is attained by a 2.5 m off-axis paraboloid and the accompanying anarmophotic magnification optics with a tan-gential image reproduction scale of 4:1. By using only two folding mirrors in the collimating Littrow-beam, the system is com-pact and extremely thermally and mechanically stable. By exclusively applying reflec-tion optics with broad-band UV layers, chromatic aberrations are avoided and there are no limitations in choosing the measurement wavelengths. The coupling of the radiation into the spectrometer can be realized via a SMA fiber-optic interface or, in case that there is a risk of excessive beam intensity on the fiber, a reflection transfer optics with a diffuser at the front end of the instrument can also be used. For the measuring of F2 lasers (157 nm), a vacuum-suited version of the ELIAS was developed. The optical design of the VUV spectrometer is identical with the standard version. For the mobile use of the spectrometer, a portable version was designed, the damp-ing of which even allows a transport under “rough” conditions without affecting the optical alignment of the spectrometer. Developing the measuring system, the following aspects were to the fore: • High spectral resolution capability

The use of a very large Echelle grating with a large blaze-angle results in a reso-lution capability of 2.5 x 106.

• High mechanical stability of the optic construction design

The mechanical construction of the spectrometer makes readjustments unneces-sary after transportation and provided that the temperature range of 15 to 30°C is kept.

• Simple and error-free operation

As the operation is completely software-guided, manual faulty operation is pre-vented. An optional LabView driver allows the spectrometer to be remote con-trolled and thus to be integrated into complex test stations. An integrated Hg calibration lamp allows the monitoring of the adjustment state of the spectrometer. The clear-cut spectrum of the Hg line at 253,652 nm is particu-larly suited for that. Position and structure allow to make an objective judgment of the adjustment state. (see 4.10.2, p.47 point 9).


Driven by the fast development to more and more narrowband excimer lasers for the lithography market and based on the experience gathered in the serial production of the ELIAS spectrometer, an improved version, the ELIAS II, was developed. The spectral resolution could be improved significantly. This was achieved by select-ing qualitatively better optical components and handpicking the Echelle gratings. A detector system with higher spatial resolution and the improvement of the mechanical stability were further measures to attain this. The new detector system and the newly developed fast shutter also allow an im-proved time-resolved measurement. A more intense cooling of the detector system diminishes the background noise of the detector and thus, it again improves the signal-to-noise ratio significantly. Based on the ELIAS II, the ELIAS III was developed. An integrated retro-reflector al-lows the Echelle grating to be used 4 times now. This makes the doubling of the spectral resolution of the ELIAS II possible.


2 Appliance Couplers 2.1 ELIAS - Standard

Beam input Spectrometer

Mains switch Hg lamp

Beam output SMA coupling Hg lamp Computer Power-on LED

Mains pushbutton switch

Fuse cartridge

Connection for network / terminal Mains main switch

Mains connection

Output for exter-nal shutter TTL Stand-by LED

Input for pulse counter TTL (optional)

Input for external triggering

Fig. 2-1 Manual_Sophi_4.0_En.doc; D. Mory; 02.04.04 8

2.2 ELIAS – VUV

Fine-dosing valve Filling gas (N2)

Network /Terminal connection

Computer On/Off

Computer

Printer port Beam output SMA coupling Hg lamp


Power-on LED Spectrometer

Mains connec-tion socket

Mains switch

Fuse cartridges

Stand-by-LED spectrometer

Output: ext. shutter TTL

Input: ext. trigger TTL

Pressure display choice: recipient /forepump

Parameter selection pump control

Pumps On/Off

Display: pump control

Display: pressure vacuum chamber / forepump

Beam entrance window

Manual_Sophi_4.0_En.doc; D. Mory; 02.04.04 9 Fig. 2-2

2.3 ELIAS – Portable

Mains connection socket

Stand-by LED spectrometer

Fuse cartridges Mains main switch (Stand-by)

Input: ext. trigger TTL


Input: pulse counter TTL (optional)

Network /terminal connection

Beam output SMA coupling Hg lamp

Beam input spectrometer Mains switch

Hg lamp

Fig. 2-3


2.4 ELIAS II and ELIAS III

Stand-by-LED

Mains connection

Fuse cartridge

Mains main switch


Beam output SMA coupling Hg lamp

Mains pushbutton switch

Connection for Network / Terminal

Input for ext.triggering TTL

Beam input Spectrometer


Input: pulse counter TTL

Output: int. shutter monitor TTL

Computer

(not seized)

Output: Fire TTL

Fig. 2-4 Manual_Sophi_4.0_En.doc; D. Mory; 02.04.04 11

3 Operation 3.1 ELIAS - Standard (1) Connect the mains cable with the built-in coupler socket of the instrument (see fig.

3-1) and a mains socket with the installed load as shown beside the built-in cou-pler socket.

Fig. 3-1 (2) Switch on the main switch located above the mains connector socket. The instru-

ment is now in the stand-by mode. The spectrometer can be switched on now either by pressing the power button at the computer (see fig. 3-2) or via a terminal computer (optional).

Fig. 3-2

Before you start the measurement, please wait for 30 minutes, so that the camera can reach its operation temperature.


3.2 ELIAS – VUV

(1) Connect the mains cable with the built-in coupler socket of the instrument (see fig. 3-3) and a mains socket with the installed load as shown beside the built-in coupler socket.

(2) Switch on the main switch that is above the mains connection socket. The in-strument is now in the stand-by mode.

(3) You can run the spectrometer either in the vacuum (10-4 mbar) or with a nitro-gen filling (quality 5.0 or better) with a maximum pressure of 10-3 mbar. If the pressure in the recipient is > 1 mbar with nitrogen filling respective > 10-4 mbar without nitrogen filling (pressure display see fig. 3-3), switch on the vacuum pumps to evacuate the recipient, otherwise proceed with (7).

(3)

Pressure display choice: vacuum chamber / fore-pump Pressure display

(7)

(2)

(1)

Fig. 3-3


(4) If the stop valve is closed (see fig. 3-4), please wait approx. 20 sec. after

switching on the pumps before you slowly open the stop valve (see fig. 3-5), so that the supply pressure is not too high.

Fig. 3-5 Fig. 3-4

(5) Wait until a pressure of < 10-4 mbar is reached in the vacuum chamber. (see fig. 3-3).

(6) If you intend to work with a nitrogen filling connect a nitrogen supply (quality

5.0 or better) to the connector (Gyrolok or Swagelok) on the fine dosing valve (see fig. 2-2 and fig. 3-6). To open the valve, turn the back ring shown in fig. 3-7. The dosage is changed with the front ring. Fill the vacuum chamber up to a pressure of maximum 1 mbar.

Fig. 3-7 Fig. 3-6 (7) The spectrometer can now be switched on by pressing the mains push button

switch (see fig. 3-3).



3.3 ELIAS – Portable

(1) Connect all free cables with the accordingly marked connectors of the portable PC.

(2) Connect the mains cable with the built-in coupler socket of the instrument and

a mains socket with the installed load as shown beside the built-in coupler socket.

(3) Switch on the main switch that is above the mains connection socket. The in-

strument is now in the stand-by mode. The spectrometer can now be switched on by pressing the mains push button switch of the computer (fig. 2-3).



3.4 ELIAS II and ELIAS III

(1) Connect the mains cable with the built-in coupler socket of the instrument (see fig. 3-8) and a mains socket with the installed load as shown beside the built-in coupler socket.

Fig. 3-8

(2) Switch on the main switch located above the mains connector socket. The in-strument is now in the stand-by mode. The spectrometer can be switched on now by pressing the power button at the computer (see fig. 3-9).

Fig. 3-9 Before you start the measurement, please wait until the camera has stabilized its op-erational temperature (see temperature display in the status line of the software).


4 Operation Software Sophi 4.1 Introduction Sophi is started via the autostart function of Windows after switching on the com-puter. Sophi runs in the full screen mode (see fig. 4-1). The measurement saved last is loaded and displayed. The program surface can be minimized via "File" 'Minimize' from the main menu.

Fig. 4-1

All important functions or controls for the measurement are in the three index cards on the left edge of the screen. The frequently used functions for evaluation or modification of the graphic display can be quickly accessed via the buttons in the symbol bar. All other settings can be made in the menu bar on the upper screen edge. In the status bar on the bottom of the screen, the state of the camera resp. the cam-era temperature, the state of the spectrometer control, the file name of the loaded measurement in clear text and potential error messages are displayed.


4.2 Description of the program surface

4.2.1 Index card 'Measure'

Display of the corrected slope of the zero line

Display of the zero line shift or manual entry

Selection of one of the last used wavelengths

Enabling of the automatic beam height correction

* Beam height correction only visible when enabled

Direct entry of the number of measurements for averaging

Enabling of the automatic focusing

Start / Stop of the measurement

Direct entry of a wavelength in the range of 156... 550 nm

Selection of the spectrometer resolution (except for ELIAS II)

Size of beam height correction *

Change wavelength by the half inspection range

Enabling or disabling of the automatic zero line shift

Beam height correction down *

Beam height correction up *

Positional indication *

Enabling the automatic dark measurement

Changing of the wavelength in 1 pm steps

Number of measurements for averaging (max. 99)

Setting of the amplifier gain (except for ELIAS II /ELIAS III)


4.2.2 Index card 'Trigger'

Choice of the trigger edge (in combination with ext. triggering, except for ELIAS II / ELIAS III)

Choice of the trigger mode: internal or external (Input: ext. trigger, TTL level)

Enabling the software triggering)

Entry of the trigger level for the Software triggering

4.2.3 Index card 'Time' for VUV, Portable and Standard ELIAS

Setting of the exposure time for the whole camera line in the range of 17 to 600 ms

Setting of the delay time between input of an ex-ternal trigger pulse and start of the measurement (external trigger and start mode) in the range of 0 ... 32767 ms

Setting of the analog-digital transducer time in the range of 4 ... 128 µs


4.2.4 Index card 'Time' for ELIAS II and ELIAS III

Setting of the analog/digital transducer time in steps 1, 2, 16 und 32 µs; Setting 32 µs has amplification

Setting of the exposure time for the whole camera line in the range of 2 to 1000 ms

Setting for the times of the mechanical shutter

Enabling the shutter for each measurement (available only for ext. trigger)


4.2.5 Symbol bar


Loading of a measuring curve. Saving of a measuring curve.

Numbered saving of the current measuring curve under the name: Data_1.eli ... Data_X.eli. The numbering is carried out automati-cally. If there is already a number, the next higher number, for which there is no file, is searched for.

The current measuring curve is printed. The Recording Window is opened. The maximum of the measuring curve is displayed. The center of FWHM is displayed. If no halfwidth can be displayed, the maximum of the measurement curve is displayed instead. The halfwidth of a measurement curve is calculated and displayed. The width of the curve at 95% area under the curve is calculated and displayed. The relative contrast loss is calculated and displayed. The scanning is started. The terminal operation is switched on (optional). Zoom in to the current measuring curve.

Zoom out to the whole dynamic range and the whole inspection range of the camera. The automatic scaling for all axes is switched on. The automatic scaling for all axes is switched off. The marked cursor is shifted to the left. The marked cursor is shifted to the right. All cursors are cancelled. The remark dialogue box is faded in.

4.2.6 Dialogue "Options" 4.2.6.1 Index card 'Printer'

Setting of the print resolution High: very fine scaled, small characters Low: very rough scaled, large characters

Printing in the horizontal or upright format

Choice of the connected printer and its settings

4.2.6.2 Index card 'Spectrometer'

Sensitivity of beam scan-ning

Size of the scan zone for the beam scanning

Starts beam scanning

Enables the beam correction; the but-tons for beam correction are released

Input field for absolute calibration; current wavelength is replaced by the entered wavelength.

Start of the auto calibration for the beam correction

Start of the auto-calibration for the wavelength adjustment


4.2.6.3 Index card 'Evaluation'

Number of pixels on the sides of thespectrum, that are used for the calcula-tion of the zero line

Enabling the slope correction for thezero line

Input of the wavelength factor for thecalculation of the contrast loss

Input of the exponential for the calcula-tion of the contrast loss

4.2.6.4 Index card 'Save file as'

Enter the file name for the numbered quick-saving

Select the path for the numbered quick-saving


4.2.6.5 Index card 'Additional'

Enter your specific identification of the spectrometer

Select the terminal computer for the re-mote control of the spectrometer via the optional LabView driver

Opening of the find- computer dialogue of Windows

Set the CCD temperature (ELIAS II / ELIAS III: -60..25 °C; Presetting–60 °C)


4.2.7 Dialogue "View" 4.2.7.1 Index card 'X-Axis'

Type of scaling

Manual entering; automatic mode is disabled

Axis scaling wave-length in nm

Axis scaling in pixels

Minimum is adjusted automatically Maximum is adjusted automatically

4.2.7.2 Index card 'Y-Axis'

Logarithmic scaling

Normal linear scaling

Minimum is adjusted automatically

Maximum is adjusted automatically

Manual entering; automatic mode is disabled

Axis scaling: Intensity in counts

Axis scaling: In-tensity normalized to 100%


4.2.8 Dialogue "Remarks" With this dialogue, measuring results can be specified for documentation. The entered remarks are saved along with the measurement and printed.


4.3 Recording a spectrum

4.3.1 Setting the wavelength Since the inspection range of the spectrometer is very small, it is advantageous to know the wavelength to be measured precisely. The inspection range of the spec-trometer depends on the respective pixel dispersion that is different for each wave-length. The indication of the wavelength refers to the middle of the inspection range.

Enter the required wavelength in nm in the index card ''Measure'' in field *Center wavelength*, or adjust the wave-length by clicking the arrow buttons in 1-pm-steps or by the half inspection range (red arrow buttons). You can also

select from the last 8 entered wavelengths (see 4.2.1, p. 18). In the status line in the field *SM-Status*, the advancement of the adjustment is dis-played, or “Out of range” is displayed if the wavelength is out of the adjustable range.

4.3.2 Adjusting the spectrometer resolution By switching over the beam path, the spectrometer resolution can be varied between high (double) and low (single) – (except for ELIAS II).

To change the spectrometer resolution, click the required resolution in the index card ''Measure'' in the field *Grating mode* (see also 5.3, p. 56).

4.3.3 Setting the exposure time

To set the exposure time, enter the required time in ms in the index card 'Time', in the field *Exposure time*. The minimum exposure time depends on the CCD camera that is applied.

4.3.4 Setting the amplifier gain Choose the wanted amplifier gain in the index card ''Meas-ure'' in the field *Amp gain* (except for ELIAS II / ELIAS III) Please note, that a higher amplifier gain also leads to a noise amplification of the camera.


4.3.5 Setting the Pixel clock time

ELIAS II and ELIAS III: For a better signal-to-noise ratio or a higher intensity, choose a higher pixel clock time. The setting 32 µs is combined with an amplification.

4.3.6 Setting the Averaging

Click the arrow buttons in the index card ''Measure'' in the field *Averaging* or enter the required value directly, in order to set the number of spectrums, that will be aver-aged.

4.3.7 Recording or canceling the dark spectrum Before recording a spectrum, you should always record a dark spectrum, in order to avoid an adulteration of the spectrum with extraneous light.

Click into the checkbox in the index card 'Measure' for enabling or disabling the automatic dark measurement.

Please note, that after each amendment of the exposure time, the amplification gain and the wavelength, also the dark spectrum must be recorded again. If you are just measuring, stop the measurement and start again. When starting the measurement, a dark spectrum is recorded first (if enabled) and subtracted from the measurement.


4.3.8 Starting the measurement Couple the beam source into the spec-trometer (ELIAS Standard see fig. 4-2). Fig. 4-2

After you have carried out the steps described in 4.3.1 to 4.3.7, press the button Start in the index card 'Measure' in the field *Measure* or the F1-key. Please observe, that you make the best use of the dynamic range of the detector system by optimally setting the expo-

sure time and the signal coupling.


4.4 Recording a larger wavelength range

4.4.1 Description By stringing together the spectrums, a wavelength range can be measured sequen-tially that is larger than the inspection range of the spectrometer. This facilitates to find light sources spectrally, the wavelength of which is not pre-cisely known. But it is also possible to measure light sources that are spectrally wider than the inspection range of the spectrometer. After recording a spectrum the wave-length is automatically adjusted and the next spectrum is recorded etc. until the end wavelength is reached. The measured spectrums are presented contiguously then. Figure 4-3 shows the spectrum of a nitrogen laser.

Fig. 4-3 The measurement is saved in another file format than a normal spectrum and has the file extension 'sca'. The evaluation methods FWHM, 95% integration width etc. are not available for this measurement.


4.4.2 Setting the wavelength Choose "Scanning" in the menu bar and then 'Scan setup'.

Enter the start wavelength and the end wavelength in the dialogue box. Additionally you can determine the number of pixels that shall be evaluated. The chosen number of pixels determines the step width and the size of the dispersion error at the begin-ning and the end of the respective inspection range. Exposure time, amplifier gain, averaging and dark spectrum are set as described in 4.3.3 to 4.3.7.

4.4.3 Starting the measurement

Click this button in the symbol bar. The button can only be clicked when a valid wavelength range has been chosen. During the measurement all operating elements are blocked. In the status

line, the advance of the measurement in percentages is displayed.


4.5 Time response during measurements

4.5.1 Description for VUV, Portable and Standard ELIAS There is the possibility of internal as well as external triggering (please see 4.2.2, page p. 19). If you select the internal trigger mode, the measurement is triggered by the camera itself in dependence of the selected settings for the exposure time. If you select external triggering, the CCD is measuring permanently as well. When a TTL trigger pulse is given at the external trigger input (see 2, p. 8), always the measuring that follows this trigger pulse is displayed first. 4.5.1.1 Internal Synchronization/Trigger

When the start button is pressed, the next data are valid.

LASER PULS


4.5.1.2 External Synchronization/Trigger

Spectrum

Emitted light

Short exposure time

Spectrum

Emitted light

Long exposure time


4.5.2 Description for ELIAS II and ELIAS III Like all models of the ELIAS I series, the ELIAS II can be triggered internally as well as externally (see 4.2.2, p. 19). If you select the internal trigger mode, the spectrometer is triggered by the camera itself in dependence of the selected settings for the exposure time. If you select external triggering, the spectrometer is waiting for a TTL trigger pulse at the trigger input (see 2, p. 8). The fast shutter of the ELIAS II / ELIAS III provides a measurement mode, in which the shutter is opened and closed for each single spectrum that is recorded. Thereby light can go into the spectrometer only in the chosen time. Thus, a time-resolved measurement is possible. This mode can only be selected when the spectrometer is externally triggered (see 4.2.4, p. 20). The effective measuring time is determined by the opening of the shutter and the readout of the camera. Without using the shutter for each exposure, the effective measuring time is deter-mined by the erasure and the readout of the camera. 4.5.2.1 Internal Synchronization/Trigger

Exposure time

Readout of the camera (approx. 470 µs)

Erase of the camera


4.5.2.2 External Synchronization/Trigger

Delay approx. 200 ns


Exposure time

Trigger pulse

Erasure of the camera

4.5.2.3 External Synchronization/Trigger/ Shutter: each exposure

Exposure time


Trigger pulse

Shutter Monitorausgang

Shutter opening time

Delay approx. 200 ns

Erasure of the camera


Rise time approx. 200 µs

The shutter monitor signal is an AND rela-tion between the expo-sure time of the camera and the opening time of the shutter (see 2.4, p. 10)

Delay between trigger pulse and shutter approx. 2 ms

Shutter opening time

Shutter Monitor output

Trigger pulse

Exposure

Trigger pulse

Laser pulse sequence

Delay


4.6 Adapting the display of the spectrum

4.6.1 Axial scaling 4.6.1.1 X-axis You can scale the X-axis with the wavelength in nm or with pixels in pixel numbers. To choose the required setting, either click directly on the X-axis, or choose "View" (see also 4.2.7.1, p. 25) in the menu bar. Plea e observe that it might be necessary to zoom in again after a change of the scal g. In adtially 4.6.1 The the menloga Pleaing.

4.6.24.6.2

matisetti

Manu

sin

dition to the linear scaling in pixels and nm, there is the option to scale differen- in relation to the center of focal point, the center of FWHM and the maximum.

.2 Y-axis

y-axis indicates the intensity either in counts or normalized to 100 %. To choose required setting, click either directly on the y-axis, or choose "View" from the u bar (see also 4.2.7.2, p. 25). Furthermore, you can choose between linear and rithmic scaling.

se observe that it might be necessary to zoom in again after a change of a scal-

Zoom functions .1 Automatic scaling

You can have the axes automatically scaled. If you want to have the axes automatically scaled completely, click on the corresponding icon or the F9-key. If the automatic scaling shall completely be switched off, click the icon op-posite or the F10-key. If only the „interesting“ range of the spectrum shall be displayed, you can restrict the display range to the maximum and minimum of the spectrum and on the X-axis to one thousandth of the maximum each on the left and on the right side of the maximum by clicking this icon or the F11-key. If the display range shall be expanded to the whole dynamic and inspection range, click this icon or the F12-key. If you want to have only the maximum or minimum value of an axis auto-

cally scaled, click either directly onto the relevant axis or choose the required ng in the menu "View" in the menu bar (see also 4.2.7, p. 25).

al_Sophi_4.0_En.doc; D. Mory; 02.04.04 37

4.6.2.2 Manual Scaling To fix the minimums or maximums of the axes, either click directly on the relevant axis or on "View" in the menu bar and enter the values in the corresponding fields and confirm with the 'Enter' key. (see also 4.2.7, p. 25). Alternatively, you can choose the range to be displayed with the mouse. Click on the left upper corner of the window, keep the left mouse key pressed and let it go off on the right bottom corner. To zoom out again, press the left mouse key, keep it pressed and move the mouse a bit to the left top and release the mouse key. By pressing the right mouse key and simultaneously moving the mouse, the zoomed-in window can be shifted in any direction. You can also click the red arrows on the axes to shift the display space in the corre-sponding direction by 10 %.


4.7 Evaluating a spectrum

4.7.1 Zero line To be able to make the calculations for the evaluation described in section 4.7.2, the zero line must be set. The easiest way is to have the zero line calculated automatically by clicking in the index card 'Measure' in the field *Zero line* into the checkbox <automatic>.

n Pixel n Pixel

If you have chosen this setting, the first and the last n pixels of the spectrum are av-eraged and this value is subtracted from the total spectrum. If a difference between the mean value of the first n pixels and the mean value of the last n pixels is determined, the spectrum will be corrected linearly provided that the slope subtraction is enabled. Unless the slope subtraction is enabled, only the mean value determined over the first and last n pixels will be subtracted from the total spec-trum. The calculated value for the total mean value is displayed in counts in the field *Zero line* in the box <mean value> in the index card 'Measure' and the determined slope value in the box below. The value is updated after each measurement. You can preset the number n that shall be averaged by clicking on "Options" in the menu bar, choosing the index card 'Evaluation' and entering the required number n in the field *Zero line calculation* (see also 4.2.6.3, p. 23). Here you can also deter-mine, if an occurring slope shall be equalized. But you can also set the zero line yourselves by disabling the automatic calculation and entering the required value in the relevant field.


4.7.2 Maximum value, center of FWHM, halfwidth FWHM, 95% integration width E95, signal-to-noise-ratio SNR and relative contrast loss RCL

To calculate the above mentioned evaluation criteria and have them displayed, click the corresponding button as described in fig. 4-4. Alternatively, the function keys F5 can activate the maximum value, F6 the center of FWHM, F7 the halfwidth FWHM and F8 the 95% integration width. The signal-to-noise-ratio (SNR) is always displayed in upper left corner of the spec-trum. The SNR is the quotient from the maximum of the spectrum and the standard deviation of the left and the right n pixels (see also 4.7.1, p. 39).

Fig. 4-4 Either the mdetermines The halfwidwidth resulcally from evaluation o In order to ear interpol

Manual_Sophi_

aximum value or the center of FWHM is displayed. The center of FWHM the center between the two half maximums of the curve.

th is the width of the curve at the half maximum. The 95% integration ts when 95% of the total integral are below the curve, starting symmetri-the maximum. A good signal-to-noise-ratio is necessary for a useful f the 95% integration width.

get more precise values for the center of FWHM, halfwidth and E95, a lin-ation is carried out between two camera pixels.

4.0_En.doc; D. Mory; 02.04.04 40

To evaluate the signal-to-noise-ratio and the quality of the zero line/dark measure-ment, a logarithmic representation of the spectrum is recommended (see also 4.2.7.2, p. 25). This representation makes it easier to find very small structures com-pared to the maximum (secondary modes of lasers). The parameters for the calculation of the relative contrast loss RCL can be altered acc. to 4.2.6.3, p. 23.

4.7.3 Cursor You can set as many cursors as you want, in order to evaluate a spectrum. Simply click on the graph.

To shift a cursor, click on the cursor, in order to mark it. The marked cursor becomes blue. Press the arrow buttons in the symbol bar or the cursor keys for shifting the cursor to the left or to the right

(see 4.2.5, p. 21).

The cursors can be cancelled by pressing the button opposite.

4.7.4 Save, Quick-save, Load, Comment To save a spectrum, choose "File" in the menu bar and click on 'save' or 'save as' or the button opposite. To be able to save a spectrum quickly, click on the button opposite. The spectrum is then saved under the 'File save as' name „name“+x.eli from the index card "Options" (see 4.2.6.4, p. 23). X specifies the serial number. It is

checked which the highest number in the register is and saved with the next. An overwriting of a former measurement by mistake is excluded.

To load a spectrum, choose either "File" in the menu bar and click on 'Open' or press the button opposite. If the settings of the spectrometer to be loaded differ from the current settings, you will be asked whether the settings of the

spectrometer shall be adapted to the settings of the saved spectrum.

If you want to include a comment to the spectrum before saving or printing it, click on the opposite button in the symbol bar. You can enter your comments in the dialogue box "Remarks" (see also 4.2.8, p. 26).


4.7.5 File format A spectrum is saved as a text file in the following format: [Devicename] [Serialnumber] [Engineer] [Comments] [averaging counts] 1 [amp gain] low [x-axis] pixel [y-axis] counts [trigger mode] internal [start mode] internal [trigger polarity] positive [exposure time] 60 [delay time] 0 [pixel clock time] 1 2048 x 512 [center wave] 265.263 double [Pixeldispersion= 15.9 fm] -1 4 11 0 -4 2 5 11 The signal data minus the dark spectrum are saved. The zero line correction is not considered. The extension of the file is „eli“.


4.8 Spectral long-term measurements

4.8.1 Basics To carry out a spectral long-term measurement, click on button ”Recording Window“ in the symbol bar (see 4.2.5, p. 21). Intensity, halfwidth, E95 and the relative wave-length deviation is recorded. For all these parameters, minimum, maximum, average and standard deviation of all measured values are displayed below the graph. A long-term measurement can consist of maximum 10000 individual measurements. Choose the required number of individual measurements that are to be recorded in the box ”Number of points“. The time interval between the individual measurements can be varied in 1-second step widths. Make your choice in the field “Time Step [s]“. If the interval shall be smaller than 1 second, enable the “all available“ check box. Then all available measuring results are recorded depending on the chosen exposure time of the amera. c

Choice of all measur-ing results or in the chosen interval

Print the long-term measurement Save/Export the long-term measurement

Load a long-term measurement

Choice of unit for the measurands

Erasure of all meas-urement results

Choice of number of indi-vidual measurements Enabling the long-term measurement

Choice of time interval of individual measurements

Fig. 4-5 Exposure time, Amplification, Averaging and Dark spectrum are set as described in 4.3.3 to 4.3.7. To be able to start the long-term measurement with the “REC“ Button, the measurement must have been started before as described in 4.3.8. After the set number of individual measurements has been measured, the long-term measurement stops. You can stop the long-term measurement at any time by clicking the “REC” button again.


4.8.2 Details und Options To save or export long-term measurements or to adapt the appearance of the dia-gram, click the button “Save” in the Recording-Window (see fig. 4-5).

In the index card “Picture“, you can save the long-term meas-urement as graphic in different formats. In the index card “Native“, you can save the long-term meas-urements in the format (*.tee), which allows a reloading by clicking the button ”Load“. The index card “Data“ provides various options for exporting the measuring data. The data can be saved as MS Excel, XML, HTML, Table and Text file.


4.9 Remote control via a LabView driver Optionally, you can obtain a LabView driver for the spectrometer system. It allows the integration of the spectrometer in complex test stands. The complete operation of the system can be done via the LabView driver and de-pending on the spectrometer settings, data transfer rates of up to 20 spectra per sec-ond are possible. The communication with the spectrometer is realized via a network connection with the network protocol TCP/IP and the data transfer protocol TCP.

Fig. 4-6 Fig. 4-6 shows the user interface of the LabView driver. For setting up the communi-cation between LabView and the ELIAS, the LabView driver must be started on a separate computer (Terminal) and a network connection between the ELIAS and this computer must be installed. The establishment of the connection is only possible from the LabView computer. Choose the name of the LabView computer (Terminal) from “Options” on the index card “Additional“ (see 4.2.6.5, p. 24). Then the communication can be enabled by clicking the ”Terminal“ Button (see 4.2.5, p. 21). There is a separate manual for the LabView driver to make a fast system integration possible.


4.10 Calibration of the spectrometer / Troubleshooting

4.10.1 Troubleshooting scheme (except for ELIAS Standard and Portable)

spectrometer ready for opera-tion again

9)

9)

No Start

Yes

Yes

Yes

Yes

Yes

Yes

No

couple in calibration laser and carry out beam scanning (p. 50)

couple in Hg-lamp

start measurement

Hg-spectrum visible? (p. 48)

No

No

No

No

carry out auto-calibration for the beam correction (p. 4

start measurement

Hg spectrum visible? (p. 48)

carry out auto-calibration for the grating (p. 4

start measurement

Hg spectrum visible?

Does no light come out of the fiber at spectrometer entrance?

Hg lamp switched off?

Yes

carry out abso-lute calibration

(p. 49)

Center of FWHMof Hg spectrum at 253,652 nm

and FWHM approx. 5 pm?

(p. 47)

couple in Hg lamp (p. 47)

No

start measurement Hg-spectrum visible? (p. 48)

call LTB Service


4.10.2 Coupling in a Mercury (Hg) lamp 1. Connect the fiber of the Hg lamp with the fiber input of the spectrometer (see also

fig. 3-2, p. 29). 2. Set the wavelength to 253.652 nm (see 4.3.1, p. 27). 3. Choose the spectrometer resolution 'double' (see 4.3.2, p. 27). (The VUV version

and the ELIAS III should be calibrated with the spectrometer resolution 'single'.) 4. Choose "Options" in the menu bar and click in the index card 'Spectrometer' in the

field *Beam-correction* on <enable> (see 4.2.6.2, p. 22). The field *Beam correc-tion* with two buttons (+/-) in the index card 'Measure' is released. Click in the field *Beam correction* on <middle>. Set the beam correction on the position zero approximately.

5. Set an exposure time of approx. 400 ms. (see also 4.3.3, p. 27). 6. Choose 'high' for the amplification gain (see also 4.3.4, p. 27) or pixel clock time

32 µs for ELIAS II / ELIAS III. 7. Set the Averaging to 5 (see 4.3.6, p. 28). 8. Enable the automatic scaling for the two axes (see 4.6.2.1, p. 37). 9. Enable the automatic dark measurement (see 4.3.7, p. 28). 10. Switch on the mercury lamp and start the measurement. 11. Click on center of FWHM and halfwidth (see 4.7.2, p. 40). When the spectrometer is correctly calibrated, the spectrum must look like in fig. 4-7. The halfwidth must be between 5 and 6 pm, the intensity ≥ 1000 counts resp. 300 counts for ELIASII and ELIAS III, and the center of FWHM must be at 253.652 nm.


Fig. 4-7 No Hg spectrum Try to find the spectrum of the Hg lamp by clicking the +/- buttons in the field *Beam correction* few times. The default position for the beam correction is accurately Zero in the 'double' mode and approx. 1000 in the 'single' mode. If you do not find the Hg spectrum, start the auto-calibration for the grating first (see 4.10.3, p. 49) and repeat the steps described before. If no spectrum is to be seen after the auto-calibration for the grating, start the auto-calibration for the beam correction. If no spectrum is to be seen after the auto-calibration for the grating and the beam correction, start the beam scanning (see 4.10.5, p. 50). Center of FWHM not at 253.652 nm Carry out an absolute calibration straight away (see 4.10.4, p. 49).


Spectrum falls off steeply to one side Choose "Options" in the menu bar and click <enable> in the index card 'Spectrome-ter' in the field *Beam correction*. Thus, the two buttons on the index card 'Measure' are released. Click <middle> in the field *Beam correction*. Press the '+' or '-' button only a few times until the lines of the spectrum show roughly the same intensity. Halfwidth is approx. 3 pm or deviates clearly Check if the spectrometer resolution is set to 'double'. If not, repeat the calibration starting from point 3 (see p. 47). If the spectrometer resolution is set to 'double' and the halfwidth is approx. 3 pm, start the auto-calibration for the beam correction.

4.10.3 Auto-calibration Only carry out the auto-calibration, if you have executed the steps described in 4.10.2 and no Hg spectrum is to be seen or the halfwidth deviates clearly from 6 pm (approx. 2,5 pm or 10 pm). The spectrometer has thoroughly been calibrated at LTB before the dispatch. The instrument characteristics have been filed in the software and allow a calibration to the state of dispatch. To carry out an auto-calibration, choose "Options" in the menu bar and then the index card 'Spectrometer'. It is possible to calibrate the motor drive of the grating as well as of the beam correc-tion. The corresponding drive is driven against a limit switch and reset to a positional value of the limit switch determined at LTB. Click the relevant button, in order to carry out the calibration (see also 4.2.6.2, p. 22). After finishing the auto-calibration, the spectrometer is reset to the previously set wavelength and beam height.

4.10.4 Carrying out the absolute calibration Please observe that the correct wavelength scale of the spectrometer can get lost through a faulty absolute calibration.

1. Choose pixels for the scaling of the x-axis (see 4.6.1.1, p.37).

2. Couple in a light source of which you know the exact center wavelength of a line, e.g. the Hg lamp (see 4.10.2, p. 47).

3. Start the measurement (see 4.3.8, p. 29).


4. By pressing the arrow buttons in the field *Center wavelength* in the index

card 'Measure' (see 4.3.1, p. 27) shift the middle of the line to pixel number 511 (x-axis) resp. 1024 for ELIASII and ELIAS III.

5. Only after 4., choose "Options" and then the index card 'Spectrometer'. Enter

into the red field the center wavelength of the line and confirm with the return key.

4.10.5 Beam Scanning A precondition for successfully using this function is the availability of a laser an am-plitude of better than 5000 counts is reached with at an exposure time of 20 ms and if the amp gain is set to 'low', which is monomode and the wavelength of which is known with an accuracy of < 10 pm. These criteria are fulfilled by the calibration la-ser, which can be obtained optionally from LTB (see also 6.4, p. 59). At the VUV version, this procedure can only be carried out, if the spectrometer has a second beam input, which is available optionally. This routine is to allow to restore the wavelength alignment, if the steps described in the scheme (see 4.10.1, p. 46) have already carried out without succeeding in finding a spectrum. This case only occurs as a consequence of a misalignment of the spec-trometer. (e.g. because of careless transportation). 1. Make sure that the auto-calibration for the grating and for the beam height cor-

rection has already been carried out (see 4.10.3).

2. Couple the calibration laser into the spectrometer and enter the precise wave-lengths of the laser.

3. Choose "Options" in the menu bar and then the index card 'Spectrometer'. You

can enter the threshold value for the amplitude in the field *Sensitivity* at which a spectrum is accepted as that of the laser searched for. The scan range can be defined in the field *Size of scan zone*. The larger the scan range, the longer the scanning period. Therefore we recommend to choose the search range 'small' first.


4. Click the start button in the field *Beam scanner* (see fig. 4-8). The column on the right in fig. 4-9 shows the progress of the procedure. "Current maximum" in-dicates the current maximum of the measurement and "Maximum hold" the maxi-mum of all measurements. If a spectral line is found, but below the set threshold value in relation to the intensity, the red LED starts flushing. (fig. 4-10). If the

If the intensity of the line found is higher than the threshold, the LED is flushing yellow (fig. 4-11). When a line is found, it is checked, if it comes from the right grating order. If not, the LED goes out again and the procedure continues.

Fig. 4-9 Fig. 4-8

Fig. 4-11 Fig. 4-10

If the line found comes from the right order, the procedure is finished and the LED shines green for a short moment (fig. 4-12).

If the laser line cannot be found, the LED does not shine green in the end and a corresponding mes-sage is displayed. You can now restart the proce-dure with a larger scan range. If you do not find a line even with the largest scan range, please contact our service.

Fig. 4-12


4.10.6 Possible Error Messages

No. Error message Error description

1 Camera not found - Camera-Controller not found / defective - Driver for camera controller not installed

2 SM-cartridge not found - Stepper motor card not found / defective - Driver for stepper motor card not installed

3 Mirror-/Grating-Motor not found

- Cable W16 not properly connected - Corresponding motor defective

4 Beamcorrection-/grating-Motor position failure - Corresponding motor is at the limit switch

5 Out of range - The required wavelength is outside the possible adjustment range

6 Calc failure - The required wavelength is outside the possible adjustment range

7 ELIAS-ID-Dongle not found - USB-Dongle not found / defective - Cable W37 not properly connected

8 Loud beep of the camera - ELIAS II / ELIAS III: ventilation slots closed (protective film) - Camera fan defective


4.11 Automatic correction functions

4.11.1 Focusing If the system function of the spectrometer specified by LTB is not reached anymore (see 5.3, p. 56), the reason might be that the spectrum is not imaged sharply on the CCD detector. To get a sharp image again, please proceed as follows: 1. Couple in the LTB calibration laser (see 6.4, p. 59) or another source, which has

a sufficiently stable line profile and only a single line. 2. Set the exposure time and the amp gain that way that a good signal-to-noise-ratio

at an intensity of at least 20000 counts is achieved. 3. Click the button <focus> in the index card 'Measure' in the field *Auto beam align-

ment*. During the automatic focusing "Auto focus is operating!" is displayed on the screen. Do not interrupt the measurement, since the routine is aborted then and the previous setting is restored. The routine can be aborted by clicking the button <focus>. The previous setting is restored.

4.11.2 Beam height correction If the intensity of a line profile is not sufficient, the reason might be that the spectrum is imaged slightly above or below the CCD detector. To obtain a good image again, proceed as follows: Click the button <level> in the index card 'Measure' in field *Auto beam alignment*. During the automatic beam height correction "Auto beam correction is operating!" is displayed on the screen. Do not interrupt the measurement, since the routine is aborted then and the previous setting is restored. The routine can be aborted by clicking the button <level>. The previous setting is re-stored. Additionally, you can correct the beam height manually.


Choose "Options" in the menu bar and click <enable> in the index card 'Spectrome-ter' in the field *Beam correction*. The two buttons in the index card 'Measure' are released then. Click <middle> in the field *Beam correction*. Maximize the intensity of the line profile by clicking the "+" or "-" button few times. The position indication between the two buttons is for your orientation. The default position at the spectrometer resolution "double" is zero.


5 Specifications 5.1 General

Camera ELIAS II / III

Max. tilt of the spectrometer

Humidity (storage)

Temperature (storage)

Ambient temperature (operation)

Ambient humidity (operation)

Camera standard

Spectrometer size without cart

optical entrance

Spectral resolution

Spectral range

Effective focus length

Spectrometer Design

CCD 2048 x 512 back-illuminated

5 %

Max. 85 %

10 … 60 °C

15 ... 30 °C

Max. 65 %

CCD 1024x 64 back-illuminated

1.2 m x 0.4 m x 0.3 m, 45 kg

SMA connector or mirror optics

R = 2 500 000 (see table under 5.3)

150 bis 900 nm (depends on version)

10 m

Echelle Monochromator in Littrow Design

5.2 Electrical requirements

ELIAS Standard, Portable, ELIAS II/III ELIAS VUV

Voltage [Volt] 115 230 115 230

Current [A] 2,5 (slow)

1,25 (slow)

8 (slow)

6 (slow)

Frequency [Hz] 50..60 50..60 50..60 50..60


5.3 System function, dispersion and inspection range

5.3.1 VUV, Portable and Standard ELIAS FWHM = 6 pixels x pixel dispersion E 95 = 22 pixels x pixel dispersion Inspection range = 1024 pixels x pixel dispersion

Wavelength [nm] 157.63 193.37 248.33

Grating mode double single double single double single

Pixel dispersion [fm] 13.8 42.4 14.4 47.2 19.5 62.6

Inspection range [pm] 14.13 43.42 14.75 48.33 19.97 64.1

Dispersions error [fm] 0.1 0.3 0.2 0.3 0.1 0.9

FWHM [pm] 0.0828 0.2544 0.0864 0.2832 0.117 0.3756

E95 [pm] 0.3036 0.9328 0.3168 1.0384 0.429 1.3772

The values depend on the wavelength and are only valid for the standard CCD! Absolute accuracy when calibrating with the internal Hg lamp better than +/- 5 pm. Repeatability better than +/- 2 pm.


5.3.2 ELIAS II Inspection range = 2048 pixels x pixel dispersion

Wavelength [nm] 193.37 248.33

Pixel dispersion [fm] ≈ 8.0 ≈ 11.0

Inspection range [pm] ≈ 16.38 ≈ 22.53

Dispersion error [fm] 0.2 0.1

FWHM [pm] 0.06 0.082

E95 [pm] 0.20 0.275


5.3.3 ELIAS III Inspection range = 2048 pixels x pixel dispersion

Wavelength [nm] 193.37 248.33

Grating mode double single double single

Pixel dispersion [fm] approx. 4.0 8.0 5.5 11.0

Inspection range [pm] approx. 8.2 16.38 11.25 22.53

Dispersion error [fm] 0.1 0.2 0.1 0.1

FWHM [pm] 0.022 0.06 0.032 0.082

E95 [pm] 0.18 0.23 0.25 0.28



6 Appendix 6.1 Software-update The installation of Sophi from version 3.0 on requires an USB dongle (not available with older ELIAS) as additional hardware. Uninstall previous versions before installing the new version.

1. Start the installation program. You will be guided through the installation by the installation program.

2. Restart the PC after finishing the installation.

3. The software is automatically started after the booting of the PC (the neces-

sary links in the Autostart directory of MS Windows are generated by the in-stallation program.

6.2 Transport conditions The transport is only permitted in upright position and outside the house in a special transport packing (LTB packaging)! The instrument shall be transported in a temperature range of 10 ... 60° C and a max. humidity of 85 %. Tilting the spectrometer by more than 5 % leads to a misalignment, a destruc-tion of the echelle grating is possible! 6.3 Supply schedule ELIAS (Standard) • Monochromator in Littrow design • CCD camera 1024 x 64 pixels (ELIAS II ELIAS III: 2048 x 512 pixels) • Camera controller and power supply • Calibration lamp (Hg) • Industrial PC in a 19‘‘ case and TFT screen • Operating system Windows 98 or Windows 2000


• Software Sophi • 2 x quartz fibers 400 µm (1.5 m) • 1 x quartz fiber 400 µm (0.6 m) • Cart: all parts mounted easily accessible central mains connection with net filter central mains switch 6.4 Options • Standardized beam coupling with diffuser, focusing • Calibration laser for verifying the system function of the spectrometer: wavelength

266 nm, FWHM and E95 smaller than the system function of the spectrometer, monomode

• Wavelength absolute alignment for highly precise wavelength scaling in the

vacuum for the ELIAS-VUV • Second beam input with fiber coupling for the ELIAS-VUV for the expansion of the

wavelength range also for 193 and 248 nm. This option allows the wavelength absolute alignment and additionally the measurement of the system function with the calibration laser.

• Interruption-free power supply (USV) for mobile measuring (no rebooting of the

PC necessary after short periods of current interruptions) • LabView driver for the integration into test stands allows the operation of the

ELIAS via another computer (terminal) • Integration of specific evaluation algorithms in the software • Transport packing 6.5 Warranty • 1 year for the system • 3 months for optical components Any warranty lapses with the opening of the spectrometer and the removing of the lead-seals!


Manual - University of California, San Diegoaries.ucsd.edu/LMI/MANUALS/Elias-manual.pdf · contents...

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