MAGNETICALLY LEVITATED - Lesker...During a power failure, magnetic levitation is sustained by power...
Transcript of MAGNETICALLY LEVITATED - Lesker...During a power failure, magnetic levitation is sustained by power...
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M A G N E T I C A L L Y L E V I T A T E D
Service Network for Turbo Molecular Pump
SH IMADZU MAGNET ICALLY LEV ITATED TURBO-MOLECULAR PUMP
MOLECULAR PUMP
FEATURES◎A full range of pumps available to suit your application◎Compact digitally controlled power supply◎Compatible with a variety of transmission protocols●Standard: RS-232C, RS-485●Options: DeviceNet◎RoHS compliant
C675-E085B
SINGAPORESHIMADZU (ASIA PACIFIC) Pte. Ltd.79 Science Park Drive, #02-01/08, Cintech IVSingapore Science Park 1, Singapore 118264PHONE:65-6778-6280 FAX:65-6779-2935
Block E, No. 570 West Huaihai Road, Shanghai, 200052Phone: 86-21-2201-3816 Fax: 86-21-2201-3800
79 Science Park Drive, #02-01/08, Cintech IV Singapore Science Park 1,Singapore 118264Phone: 65-6778-6280 Fax: 65-6779-2935
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2 3
10-2 10-1 100 101 102
104
103
102
10-9Pa level(TMP-803LM, TMP-1003LM)
Features
Optimal exhaust performance can be selected for the processThe pump's rotational speed can be set between 25 % and 100 %, to tune the pump exhaust performance. The chamber pressure can be tuned via the rotational speed settings. A maximum of 10 minutes is required to reach the set rotational speed. The conductance valves can also be cut if the pump is used under fixed conditions.
Conceptual diagram of 5-axis magnetic bearingsA 5-axis magnetic bearing system has been adopted. This completely eliminates the use of oil (grease).
At outlet pressures of 133 Pa and less, partial pressure of the residual gases excluding Ar and H2 does not vary, and thus a stable ultra-high vacuum is obtained.
The pump stops safely, even in the event of a power failure.During a power failure, magnetic levitation is sustained by power generated by regenerative braking. The touchdown bearings are designed to withstand touchdown from 260 power failures.
The LCD indicators on the front panel indicate motor current, rotational speed, and degree of imbalance, as well as error occurrences. The control timer provided keep track of maintenance times. Further, an RS-232C port is provided on the front panel. This can be used to download the operational status to a PC even while the pump is operating. Comparison with normal status leads to early detection of problems (a rise in back pressure due to the deposition of reaction by-products), which contributes to system preventative maintenance.
Air in-rush testThis confirms restart after an inrush of air.This assures against operational failures.
Because of the compatibility of the turbo molecular pump with cable and power supply system combinations, retuning is unnecessary, even if the combination is changed. The cable length can be set between 3 m and 30 m.
The shared power supply system can be used with all pump models. It is no longer necessary to change the power supply when the model of connected pump is changed. (Enquire about applicable models.)
Exhaust Performance by Rotational Speed TMP-3304LMC (Argon gas)
Inlet pressure (Pa)
Flow
rate
(mL/
min
)
10-4
10-5
10-6
10-7
10-8
10-9
Inle
t pr
essu
re (P
a)
Typical Ultimate Pressure of the TMP-1003LMMagnetically Levitated Turbo Molecular Pump
(36hours bake out)
5.1×10-9 Pa
1 10 100
Time (hr)
10-10
10-11
10-12
10-13
10-14
Ion
curr
ent
(A)
10-5
10-6
10-7
10-8
10-9
Tota
l pre
ssur
e (P
a)
1 10 102 5×102
Outlet pressure (Pa)
Total pressure
Symbol Molecularweight Example
2 H2
16 O
18 H2O
28 CO, N2
32 O2
40 Ar
Changes of Residual Gases on the Inlet Side whenArgon is Introduced into the Outlet.
(Model: TMP-1003LM Magnetically Levitated Turbo Molecular Pump)
A
B
Air
Air
From the outletFrom the inlet
1
2
3
4
5
High-frequency motor
Connector
Shaft
Rotor blades
Stator blades
11
12
13
14
Inlet flange
Outlet flange
Protective net
Cooling water pipe
6
7
8
9
10
Spacers
Radial magnetic bearing
Axial magnetic bearing
Touchdown bearings
Gap sensors
14
6
5
4
9
7
8
12
10
11
1
3
2
Gas flow
To backing vacuum pump
13
X2
Y2
Y2
X1 Y1
Y1 X1
X2
1. X1−X12. Y1−Y13. X2−X24. Y2−Y25. Z−Z
Z
Z
Typical front panel display
Status monitor
・ Rotational speed・ Motor current・ Imbalance monitor
Maintenance of operating time
・ Maintenance-call timer・ Cumulative operating time
Display showing error occurrence
・ Display switches automatically when an error occurs・ Error log can also be displayed
★CE marking, TUV★NRTL (UL61010A-1)★SEMI S2 ★SEMI F47★SEMI E74 compatible
The system is equipped with RS-232C and RS-485 compliant serial communications ports, enabling the monitoring of pump startup/shutdown and other operational conditions, as well as readout of operating logs. Up to 32 pumps can be monitored from a single location.
RS-485
Line monitoring computer
System controller
REMOTE or RS-232C
TMP Power supply
30m
Tuning free
Cable lengthPower supply Pump
20m
15m
10m
7m
5m
3m
Measurement of ultimate pressure
Measurement of Residual Gases
Variable pump rotational speed functionality
Response to power failures
Monitoring functionality
Pump construction
Reliability test
Tuning free
Shared power supply
Compliant with various regulationsIntegrated rotor blades (using die-machined forged materials)
Network connectivity
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2 3
10-2 10-1 100 101 102
104
103
102
10-9Pa level(TMP-803LM, TMP-1003LM)
Features
Optimal exhaust performance can be selected for the processThe pump's rotational speed can be set between 25 % and 100 %, to tune the pump exhaust performance. The chamber pressure can be tuned via the rotational speed settings. A maximum of 10 minutes is required to reach the set rotational speed. The conductance valves can also be cut if the pump is used under fixed conditions.
Conceptual diagram of 5-axis magnetic bearingsA 5-axis magnetic bearing system has been adopted. This completely eliminates the use of oil (grease).
At outlet pressures of 133 Pa and less, partial pressure of the residual gases excluding Ar and H2 does not vary, and thus a stable ultra-high vacuum is obtained.
The pump stops safely, even in the event of a power failure.During a power failure, magnetic levitation is sustained by power generated by regenerative braking. The touchdown bearings are designed to withstand touchdown from 260 power failures.
The LCD indicators on the front panel indicate motor current, rotational speed, and degree of imbalance, as well as error occurrences. The control timer provided keep track of maintenance times. Further, an RS-232C port is provided on the front panel. This can be used to download the operational status to a PC even while the pump is operating. Comparison with normal status leads to early detection of problems (a rise in back pressure due to the deposition of reaction by-products), which contributes to system preventative maintenance.
Air in-rush testThis confirms restart after an inrush of air.This assures against operational failures.
Because of the compatibility of the turbo molecular pump with cable and power supply system combinations, retuning is unnecessary, even if the combination is changed. The cable length can be set between 3 m and 30 m.
The shared power supply system can be used with all pump models. It is no longer necessary to change the power supply when the model of connected pump is changed. (Enquire about applicable models.)
Exhaust Performance by Rotational Speed TMP-3304LMC (Argon gas)
Inlet pressure (Pa)
Flow
rate
(mL/
min
)
10-4
10-5
10-6
10-7
10-8
10-9
Inle
t pr
essu
re (P
a)
Typical Ultimate Pressure of the TMP-1003LMMagnetically Levitated Turbo Molecular Pump
(36hours bake out)
5.1×10-9 Pa
1 10 100
Time (hr)
10-10
10-11
10-12
10-13
10-14
Ion
curr
ent
(A)
10-5
10-6
10-7
10-8
10-9
Tota
l pre
ssur
e (P
a)
1 10 102 5×102
Outlet pressure (Pa)
Total pressure
Symbol Molecularweight Example
2 H2
16 O
18 H2O
28 CO, N2
32 O2
40 Ar
Changes of Residual Gases on the Inlet Side whenArgon is Introduced into the Outlet.
(Model: TMP-1003LM Magnetically Levitated Turbo Molecular Pump)
A
B
Air
Air
From the outletFrom the inlet
1
2
3
4
5
High-frequency motor
Connector
Shaft
Rotor blades
Stator blades
11
12
13
14
Inlet flange
Outlet flange
Protective net
Cooling water pipe
6
7
8
9
10
Spacers
Radial magnetic bearing
Axial magnetic bearing
Touchdown bearings
Gap sensors
14
6
5
4
9
7
8
12
10
11
1
3
2
Gas flow
To backing vacuum pump
13
X2
Y2
Y2
X1 Y1
Y1 X1
X2
1. X1−X12. Y1−Y13. X2−X24. Y2−Y25. Z−Z
Z
Z
Typical front panel display
Status monitor
・ Rotational speed・ Motor current・ Imbalance monitor
Maintenance of operating time
・ Maintenance-call timer・ Cumulative operating time
Display showing error occurrence
・ Display switches automatically when an error occurs・ Error log can also be displayed
★CE marking, TUV★NRTL (UL61010A-1)★SEMI S2 ★SEMI F47★SEMI E74 compatible
The system is equipped with RS-232C and RS-485 compliant serial communications ports, enabling the monitoring of pump startup/shutdown and other operational conditions, as well as readout of operating logs. Up to 32 pumps can be monitored from a single location.
RS-485
Line monitoring computer
System controller
REMOTE or RS-232C
TMP Power supply
30m
Tuning free
Cable lengthPower supply Pump
20m
15m
10m
7m
5m
3m
Measurement of ultimate pressure
Measurement of Residual Gases
Variable pump rotational speed functionality
Response to power failures
Monitoring functionality
Pump construction
Reliability test
Tuning free
Shared power supply
Compliant with various regulationsIntegrated rotor blades (using die-machined forged materials)
Network connectivity
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EI-S04M
Retuning is unnecessary if the combination of pump with cable and power supply system is changed
Operation: 0 ˚C to 45 ˚C / Storage: -25 ˚C to 70 ˚C (no condensation)
40 to 80 %RH
Single phase 100 V AC to 120 V AC ±10 % (50 Hz/60 Hz ±2 Hz)
Single phase 200 V AC to 240 V AC ±10 % (50 Hz/60 Hz ±2 Hz)
8 kg
TMP-203M / MC / LM / LMC TMP-303M / MC / LM / LMC
450 VA 550 VA
EI-R04MEI-S04M
Retuning is unnecessary if the combination of pump with cable and power supply system is changed
Operation: 0 ˚C to 45 ˚C / Storage: -25 ˚C to 70 ˚C (no condensation)
40 to 80%RH
Single phase 200 V AC to 240 V AC ±10 % (50 Hz/60 Hz ±2 Hz)
8 kg
TMP-803M(0) / MC(0) / LM(0) / LMC(0) TMP-1003M / MC / LM / LMCTMP-403M / MC / LM / LMC
Same as left
Same as left
Same as left
Same as left
Same as left
550 VA
Same as left
1.0 kVA
Power Supply
Model
Compatibility
Permitted ambient temperature
Input power source
Weight
Temperature
Humidity
Voltage
Power requirements
Air Cooled Type Turbo Molecular Pump, Standard SpecificationsTurbo molecular pump
Rotor coating
Applicable power supply
Inlet flange
Outlet flange
Cooling method
Ultimate pressure (after baking) Pa (Torr) (Note 1)
Maximum inlet pressure during continuous operation (N2)
Maximum outlet pressure during continuous operation
Pumping speed (Note 2)
Compression ratio
Rated rotation speed
Startup time
Direction of installation
Baking temperature of pump inlet
Vibration, measured by the Shimadzu method
Recommended purge gas flowrate (Note 3)
Recommended pumping speed of backing vacuum pump during gas purging
Operational ambient temperature range
Allowable magnetic flux density Radial directions
Axial directions
Weight
N2
He
H2
N2
He
H2
TMP-203M
EI-S04M
VG100 / ICF152 / ISO100B / ISO100C
KF25
Air cooled
TMP-203MC TMP-303M TMP-303MC
10-8 Pa order 10-7 Pa order
None Coated
EI-S04M
VG100 / ICF152 / ISO100B / ISO100C
KF25
Air cooled
None Coated
10-8 Pa order 10-7 Pa order
1.3 Pa
40 Pa
190 L/s
140 L/s
120 L/s
1×109
6×104
4×103
50000 rpm
Within 5 minutes
Arbitrary
120 ˚C or lower
Less than 0.012 µm (single amplitude)
20 to 30 mL/min
200 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
9 kg
1.3 Pa
40 Pa
320 L/s
340 L/s
320 L/s
1×109
8×104
1×104
45000 rpm
Within 5 minutes
Arbitrary
120 ˚C or lower
Less than 0.012 µm (single amplitude)
20 to 30 mL/min
200 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
14 kg
TMP-803M(0)
None
TMP-803MC(0)
Coated
TMP-1003M
None
TMP-1003MC
Coated
10-9 Pa order 10-8 Pa order 10-9 Pa order 10-8 Pa order
EI-R04M
VG150 / ICF203 / ISO160B
KF40
Air cooled
EI-R04M
VG200 / ICF253 / ISO200B
KF40
Air cooled
1.3 Pa
40 Pa
800 L/s
800 L/s
700 L/s
1×109 min.
8×104
4×103
35000 rpm
Within 5 minutes
Arbitrary
120 ˚C or lower
Less than 0.01 µm (single amplitude)
20 to 30 mL/min
500 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
33 kg
TMP-403M
None
TMP-403MC
Coated
10-8 Pa order 10-7 Pa order
EI-S04M
VG150 / ICF203 / ISO160B / ISO160C
KF25
Air cooled
1.3 Pa
40 Pa
420 L/s
360 L/s
340 L/s
1×109
8×104
1×104
45000 rpm
Within 5 minutes
Arbitrary
120 ˚C or lower
Less than 0.012 µm (single amplitude)
20 to 30 mL/min
200 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
14 kg
1.3 Pa
40 Pa
1080 L/s
930 L/s
790 L/s
1×109
8×104
4×103
35000 rpm
Within 5 minutes
Arbitrary
120 ˚C or lower
Less than 0.01 µm (single amplitude)
20 to 30 mL/min
500 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
32 kg max.
(Note 1) When a metal gasket is used at the inlet flange. If an O-ring gasket is used, the ultimate pressure will be order of 10-7 Pa. (Note 2) When no protective net is used. If a protective net is used, the exhaust speed (N2) will be as follows: TMP-203: 180 L/s; TMP-303:
300 L/s; TMP-403: 400 L/s; TMP-803(0): 730 L/s; TMP-1003: 970 L/s.(Note 3) mL/min shows the volumetric flowrate at 0 ˚C and 1 atmosphere. (Equivalent to SCCM.)
Specifications
4 5
-
EI-S04M
Retuning is unnecessary if the combination of pump with cable and power supply system is changed
Operation: 0 ˚C to 45 ˚C / Storage: -25 ˚C to 70 ˚C (no condensation)
40 to 80 %RH
Single phase 100 V AC to 120 V AC ±10 % (50 Hz/60 Hz ±2 Hz)
Single phase 200 V AC to 240 V AC ±10 % (50 Hz/60 Hz ±2 Hz)
8 kg
TMP-203M / MC / LM / LMC TMP-303M / MC / LM / LMC
450 VA 550 VA
EI-R04MEI-S04M
Retuning is unnecessary if the combination of pump with cable and power supply system is changed
Operation: 0 ˚C to 45 ˚C / Storage: -25 ˚C to 70 ˚C (no condensation)
40 to 80%RH
Single phase 200 V AC to 240 V AC ±10 % (50 Hz/60 Hz ±2 Hz)
8 kg
TMP-803M(0) / MC(0) / LM(0) / LMC(0) TMP-1003M / MC / LM / LMCTMP-403M / MC / LM / LMC
Same as left
Same as left
Same as left
Same as left
Same as left
550 VA
Same as left
1.0 kVA
Power Supply
Model
Compatibility
Permitted ambient temperature
Input power source
Weight
Temperature
Humidity
Voltage
Power requirements
Air Cooled Type Turbo Molecular Pump, Standard SpecificationsTurbo molecular pump
Rotor coating
Applicable power supply
Inlet flange
Outlet flange
Cooling method
Ultimate pressure (after baking) Pa (Torr) (Note 1)
Maximum inlet pressure during continuous operation (N2)
Maximum outlet pressure during continuous operation
Pumping speed (Note 2)
Compression ratio
Rated rotation speed
Startup time
Direction of installation
Baking temperature of pump inlet
Vibration, measured by the Shimadzu method
Recommended purge gas flowrate (Note 3)
Recommended pumping speed of backing vacuum pump during gas purging
Operational ambient temperature range
Allowable magnetic flux density Radial directions
Axial directions
Weight
N2
He
H2
N2
He
H2
TMP-203M
EI-S04M
VG100 / ICF152 / ISO100B / ISO100C
KF25
Air cooled
TMP-203MC TMP-303M TMP-303MC
10-8 Pa order 10-7 Pa order
None Coated
EI-S04M
VG100 / ICF152 / ISO100B / ISO100C
KF25
Air cooled
None Coated
10-8 Pa order 10-7 Pa order
1.3 Pa
40 Pa
190 L/s
140 L/s
120 L/s
1×109
6×104
4×103
50000 rpm
Within 5 minutes
Arbitrary
120 ˚C or lower
Less than 0.012 µm (single amplitude)
20 to 30 mL/min
200 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
9 kg
1.3 Pa
40 Pa
320 L/s
340 L/s
320 L/s
1×109
8×104
1×104
45000 rpm
Within 5 minutes
Arbitrary
120 ˚C or lower
Less than 0.012 µm (single amplitude)
20 to 30 mL/min
200 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
14 kg
TMP-803M(0)
None
TMP-803MC(0)
Coated
TMP-1003M
None
TMP-1003MC
Coated
10-9 Pa order 10-8 Pa order 10-9 Pa order 10-8 Pa order
EI-R04M
VG150 / ICF203 / ISO160B
KF40
Air cooled
EI-R04M
VG200 / ICF253 / ISO200B
KF40
Air cooled
1.3 Pa
40 Pa
800 L/s
800 L/s
700 L/s
1×109 min.
8×104
4×103
35000 rpm
Within 5 minutes
Arbitrary
120 ˚C or lower
Less than 0.01 µm (single amplitude)
20 to 30 mL/min
500 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
33 kg
TMP-403M
None
TMP-403MC
Coated
10-8 Pa order 10-7 Pa order
EI-S04M
VG150 / ICF203 / ISO160B / ISO160C
KF25
Air cooled
1.3 Pa
40 Pa
420 L/s
360 L/s
340 L/s
1×109
8×104
1×104
45000 rpm
Within 5 minutes
Arbitrary
120 ˚C or lower
Less than 0.012 µm (single amplitude)
20 to 30 mL/min
200 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
14 kg
1.3 Pa
40 Pa
1080 L/s
930 L/s
790 L/s
1×109
8×104
4×103
35000 rpm
Within 5 minutes
Arbitrary
120 ˚C or lower
Less than 0.01 µm (single amplitude)
20 to 30 mL/min
500 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
32 kg max.
(Note 1) When a metal gasket is used at the inlet flange. If an O-ring gasket is used, the ultimate pressure will be order of 10-7 Pa. (Note 2) When no protective net is used. If a protective net is used, the exhaust speed (N2) will be as follows: TMP-203: 180 L/s; TMP-303:
300 L/s; TMP-403: 400 L/s; TMP-803(0): 730 L/s; TMP-1003: 970 L/s.(Note 3) mL/min shows the volumetric flowrate at 0 ˚C and 1 atmosphere. (Equivalent to SCCM.)
Specifications
4 5
-
Wide-Range Turbo Molecular Pump Standard SpecificationsTurbo molecular pump
Rotor coating
Applicable power supply
Inlet flange
Outlet flange
Cooling method
Ultimate pressure (after baking) Pa (Torr) (Note 1)
Maximum inlet pressure during continuous operation (N2)
Maximum outlet pressure during continuous operation
Pumping speed (Note 2)
Compression ratio
Rated rotation speed
Startup time
Direction of installation
Baking temperature of pump inlet
Vibration, measured by the Shimadzu method
Recommended purge gas flowrate (Note 3)
Recommended pumping speed of backing vacuum pump during gas purging
Operational ambient temperature range
Allowable magnetic flux density Radial directions
Axial directions
Cooling water Flowrate
Pressure
Temperature
Weight
TMP-203LM
None
TMP-203LMC
Coated
TMP-303LM
None
TMP-303LMC
Coated
10-8 Pa order 10-7 Pa order 10-8 Pa order 10-7 Pa order
EI-S04M
VG100 / ICF152 / ISO100B / ISO100C
KF25
Water cooled
EI-S04M
VG100 / ICF152 / ISO100B / ISO100C
KF25
Water cooled
200 Pa
400 Pa
190 L/s
140 L/s
120 L/s
1×109
6×104
4×103
50000 rpm
Within 5 minutes
Arbitrary
120 ˚C or lower
Less than 0.012 µm (single amplitude)
20 to 30 mL/min
200 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
1 to 3 L/min
0.2 to 0.5 MPa
5 to 30 ˚C
9 kg
200 Pa
400 Pa
320 L/s
340 L/s
320 L/s
1×109
8×104
1×104
45000 rpm
Within 5 minutes
Arbitrary
120 ˚C or lower
Less than 0.012 µm (single amplitude)
20 to 30 mL/min
200 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
1 to 3 L/min
0.2 to 0.5 MPa
5 to 30 ˚C
14 kg
TMP-803LM(0)
None
TMP-803LMC(0)
Coated
TMP-1003LM
None
TMP-1003LMC
Coated
10-9 Pa order 10-8 Pa order 10-9 Pa order 10-8 Pa order
EI-R04M
VG150 / ICF203 / ISO160B
KF40
Water cooled
EI-R04M
VG200 / ICF253 / ISO200B
KF40
Water cooled
400 Pa
665 Pa
800 L/s
800 L/s
700 L/s
1×109 min.
8×104
4×103
35000 rpm
Within 5 minutes
Arbitrary
120 ˚C or lower
Less than 0.01 µm (single amplitude)
20 to 30 mL/min
500 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
1 to 3 L/min
0.2 to 0.5 MPa
5 to 30 ˚C
33 kg
TMP-403LM
None
TMP-403LMC
Coated
10-8 Pa order 10-7 Pa order
EI-S04M
VG150 / ICF203 / ISO160B / ISO160C
KF25
Water cooled
200 Pa
400 Pa
420 L/s
360 L/s
340 L/s
1×109
8×104
1×104
45000 rpm
Within 5 minutes
Arbitrary
120 ˚C or lower
Less than 0.012 µm (single amplitude)
20 to 30 mL/min
200 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
1 to 3 L/min
0.2 to 0.5 MPa
5 to 30 ˚C
14 kg
400 Pa
665 Pa
1080 L/s
930 L/s
790 L/s
1×109
8×104
4×103
35000rpm
Within 5 minutes
Arbitrary
120 ˚C or lower
Less than 0.01 µm (single amplitude)
20 to 30 mL/min
500 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
1 to 3 L/min
0.2 to 0.5 MPa
5 to 30 ˚C
32 kg max.
Dimensions of Power SupplyPower Supply EI-04 series
4-M4
213
198.1
122.
5
132
203
198.1
115
122.
5
196
1211
1
425Panel cut dimensions
Specifications
6 7
N2
He
H2
N2
He
H2
(Note 1) When a metal gasket is used at the inlet flange. If an O-ring gasket is used, the ultimate pressure will be order of 10-7 Pa. (Note 2) When no protective net is used. If a protective net is used, the exhaust speed (N2) will be as follows: TMP-203: 180 L/s;
TMP-303: 300 L/s; TMP-403: 400 L/s; TMP-803(0): 730 L/s; TMP-1003: 970 L/s.(Note 3) mL/min shows the volumetric flowrate at 0 ˚C and 1 atmosphere. (Equivalent to SCCM.)
-
Wide-Range Turbo Molecular Pump Standard SpecificationsTurbo molecular pump
Rotor coating
Applicable power supply
Inlet flange
Outlet flange
Cooling method
Ultimate pressure (after baking) Pa (Torr) (Note 1)
Maximum inlet pressure during continuous operation (N2)
Maximum outlet pressure during continuous operation
Pumping speed (Note 2)
Compression ratio
Rated rotation speed
Startup time
Direction of installation
Baking temperature of pump inlet
Vibration, measured by the Shimadzu method
Recommended purge gas flowrate (Note 3)
Recommended pumping speed of backing vacuum pump during gas purging
Operational ambient temperature range
Allowable magnetic flux density Radial directions
Axial directions
Cooling water Flowrate
Pressure
Temperature
Weight
TMP-203LM
None
TMP-203LMC
Coated
TMP-303LM
None
TMP-303LMC
Coated
10-8 Pa order 10-7 Pa order 10-8 Pa order 10-7 Pa order
EI-S04M
VG100 / ICF152 / ISO100B / ISO100C
KF25
Water cooled
EI-S04M
VG100 / ICF152 / ISO100B / ISO100C
KF25
Water cooled
200 Pa
400 Pa
190 L/s
140 L/s
120 L/s
1×109
6×104
4×103
50000 rpm
Within 5 minutes
Arbitrary
120 ˚C or lower
Less than 0.012 µm (single amplitude)
20 to 30 mL/min
200 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
1 to 3 L/min
0.2 to 0.5 MPa
5 to 30 ˚C
9 kg
200 Pa
400 Pa
320 L/s
340 L/s
320 L/s
1×109
8×104
1×104
45000 rpm
Within 5 minutes
Arbitrary
120 ˚C or lower
Less than 0.012 µm (single amplitude)
20 to 30 mL/min
200 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
1 to 3 L/min
0.2 to 0.5 MPa
5 to 30 ˚C
14 kg
TMP-803LM(0)
None
TMP-803LMC(0)
Coated
TMP-1003LM
None
TMP-1003LMC
Coated
10-9 Pa order 10-8 Pa order 10-9 Pa order 10-8 Pa order
EI-R04M
VG150 / ICF203 / ISO160B
KF40
Water cooled
EI-R04M
VG200 / ICF253 / ISO200B
KF40
Water cooled
400 Pa
665 Pa
800 L/s
800 L/s
700 L/s
1×109 min.
8×104
4×103
35000 rpm
Within 5 minutes
Arbitrary
120 ˚C or lower
Less than 0.01 µm (single amplitude)
20 to 30 mL/min
500 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
1 to 3 L/min
0.2 to 0.5 MPa
5 to 30 ˚C
33 kg
TMP-403LM
None
TMP-403LMC
Coated
10-8 Pa order 10-7 Pa order
EI-S04M
VG150 / ICF203 / ISO160B / ISO160C
KF25
Water cooled
200 Pa
400 Pa
420 L/s
360 L/s
340 L/s
1×109
8×104
1×104
45000 rpm
Within 5 minutes
Arbitrary
120 ˚C or lower
Less than 0.012 µm (single amplitude)
20 to 30 mL/min
200 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
1 to 3 L/min
0.2 to 0.5 MPa
5 to 30 ˚C
14 kg
400 Pa
665 Pa
1080 L/s
930 L/s
790 L/s
1×109
8×104
4×103
35000rpm
Within 5 minutes
Arbitrary
120 ˚C or lower
Less than 0.01 µm (single amplitude)
20 to 30 mL/min
500 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
1 to 3 L/min
0.2 to 0.5 MPa
5 to 30 ˚C
32 kg max.
Dimensions of Power SupplyPower Supply EI-04 series
4-M4
213
198.1
122.
5
132
203
198.1
115
122.
5
196
1211
1
425Panel cut dimensions
Specifications
6 7
N2
He
H2
N2
He
H2
(Note 1) When a metal gasket is used at the inlet flange. If an O-ring gasket is used, the ultimate pressure will be order of 10-7 Pa. (Note 2) When no protective net is used. If a protective net is used, the exhaust speed (N2) will be as follows: TMP-203: 180 L/s;
TMP-303: 300 L/s; TMP-403: 400 L/s; TMP-803(0): 730 L/s; TMP-1003: 970 L/s.(Note 3) mL/min shows the volumetric flowrate at 0 ˚C and 1 atmosphere. (Equivalent to SCCM.)
-
Turbo molecular pump
Rotor coating
Applicable power supply
Inlet flange
Outlet flange
Cooling method
Ultimate pressure (after baking) Pa (Torr) (Note 1)
Maximum flowrate of Ar gas (Note 2)
Maximum inlet pressure during continuous operation (N2)
Maximum outlet pressure during continuous operation
Pumping speed (Note 3)
Compression ratio
Rated rotation speed
Startup time
Direction of installation
Baking temperature of pump inlet
Vibration, measured by the Shimadzu method
Recommended purge gas flowrate (Note 2)
Recommended pumping speed of backing vacuum pump during gas purging
Operational ambient temperature range
Allowable magnetic flux density Radial directions
Axial directions
Cooling water Flowrate
Pressure
Temperature
Weight
N2
He
H2
N2
He
H2
TMP-1303LM(0)
None
EI-R04M
Retuning is unnecessary if the combination of pump with cable and power supply system is changed
Operation: 0 ˚C to 45 ˚C / Storage: -25 ˚C to 70 ˚C (no condensation)
40 to 80 %RH
Single phase 200 V AC to 240 V AC ±10 % (50 Hz/60 Hz ±2 Hz)
8 kg
TMP-1303LM(0) / LMC(0)
1.0 kVA
TMP-1503LM / LMC TMP-2203LM(0) / LMC(0)
1.2 kVA
TMP-1303LMC(0)
Coated
10-8 Pa order 10-7 Pa order
500 mL/min 800 mL/min
EI-R04M
VG200 / ICF253 / ISO200B
KF40
Water cooled
133 Pa
270 Pa
1300 L/s
1050 L/s
750 L/s
6×108
1×104
1×103
30300 rpm
Within 7 minutes
Arbitrary
120 ˚C or lower
Less than 0.01 µm (single amplitude)
20 to 30 mL/min
600 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
1 to 3 L/min
0.2 to 0.5 MPa
5 to 30 ˚C
39 kg
TMP-1503LM
None
TMP-1503LMC
Coated
10-8 Pa order 10-7 Pa order
500 mL/min 800 mL/min
EI-R04M
VG250 / ICF305 / ISO250B
KF40
Water cooled
133 Pa
270 Pa
1500 L/s
1200 L/s
800 L/s
6×108
1×104
1×103
30300 rpm
Within 7 minutes
Arbitrary
120 ˚C or lower
Less than 0.01 µm (single amplitude)
20 to 30 mL/min
600 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
1 to 3 L/min
0.2 to 0.5 MPa
5 to 30 ˚C
42 kg
TMP-2203LM(0)
None
TMP-2203LMC(0)
Coated
10-8 Pa order 10-7 Pa order
1300 mL/min 2000 mL/min
EI-R04M
VG250 / ICF305 / ISO250B
KF40
Water cooled
40 Pa
270 Pa
2140 L/s
2000 L/s
1350 L/s
1.4×108
1×104
1×103
24600 rpm
Within 11 minutes
Arbitrary
120 ˚C or lower
Less than 0.01 µm (single amplitude)
20 to 30 mL/min
800 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
1 to 3 L/min
0.2 to 0.5 MPa
5 to 30 ˚C
59 kg
Power Supply
Model
Compatibility
Permitted ambient temperature
Input power source
Weight
Temperature
Humidity
Voltage
Power requirements
TMP-3304 series TMP-4304 series
TMP-1003 series TMP-303 series TMP-1503 series
①
②
③
④
⑤
⑥
Example
TMP-① ② ③ ④ ⑤ ⑥
TMP- 100 3 LM T C
Symbol
(Numeral)
(Numeral)
M
LM
T
None
C
None
Description
Exhaust speed is the value multiplied by 10.
Product line
Air-cooled magnetic bearing type
Water-cooled magnetic bearing type
Temperature control function
No temperature control function
Anti-corrosion coating design
No coating
S Rotor overheating detection function(Limited number of models)
*In addition, there are models with special coatings (B, F).
Turbo Molecular Pump Models Integrated Production Factory for Turbo Molecular Pumps (Kyoto)
Photo of Turbo Molecular Pump Products
Specifications
8 9
High Pumping Throughput Turbo Molecular Pump Standard Specifications
(Note 1) When a metal gasket is used at the inlet flange. If an O-ring gasket is used, the ultimate pressure will be order of 10-7 Pa. (Note 2) mL/min shows the volumetric flowrate at 0 ˚C and 1 atmosphere. (Equivalent to SCCM.)(Note 3) When no protective net is used. If a protective net is used, the exhaust speed (N2) will be as follows: TMP-1303(0): 1130L/s;
TMP-1503: 1380L/s; TMP-2203(0): 2050L/s.
-
Turbo molecular pump
Rotor coating
Applicable power supply
Inlet flange
Outlet flange
Cooling method
Ultimate pressure (after baking) Pa (Torr) (Note 1)
Maximum flowrate of Ar gas (Note 2)
Maximum inlet pressure during continuous operation (N2)
Maximum outlet pressure during continuous operation
Pumping speed (Note 3)
Compression ratio
Rated rotation speed
Startup time
Direction of installation
Baking temperature of pump inlet
Vibration, measured by the Shimadzu method
Recommended purge gas flowrate (Note 2)
Recommended pumping speed of backing vacuum pump during gas purging
Operational ambient temperature range
Allowable magnetic flux density Radial directions
Axial directions
Cooling water Flowrate
Pressure
Temperature
Weight
N2
He
H2
N2
He
H2
TMP-1303LM(0)
None
EI-R04M
Retuning is unnecessary if the combination of pump with cable and power supply system is changed
Operation: 0 ˚C to 45 ˚C / Storage: -25 ˚C to 70 ˚C (no condensation)
40 to 80 %RH
Single phase 200 V AC to 240 V AC ±10 % (50 Hz/60 Hz ±2 Hz)
8 kg
TMP-1303LM(0) / LMC(0)
1.0 kVA
TMP-1503LM / LMC TMP-2203LM(0) / LMC(0)
1.2 kVA
TMP-1303LMC(0)
Coated
10-8 Pa order 10-7 Pa order
500 mL/min 800 mL/min
EI-R04M
VG200 / ICF253 / ISO200B
KF40
Water cooled
133 Pa
270 Pa
1300 L/s
1050 L/s
750 L/s
6×108
1×104
1×103
30300 rpm
Within 7 minutes
Arbitrary
120 ˚C or lower
Less than 0.01 µm (single amplitude)
20 to 30 mL/min
600 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
1 to 3 L/min
0.2 to 0.5 MPa
5 to 30 ˚C
39 kg
TMP-1503LM
None
TMP-1503LMC
Coated
10-8 Pa order 10-7 Pa order
500 mL/min 800 mL/min
EI-R04M
VG250 / ICF305 / ISO250B
KF40
Water cooled
133 Pa
270 Pa
1500 L/s
1200 L/s
800 L/s
6×108
1×104
1×103
30300 rpm
Within 7 minutes
Arbitrary
120 ˚C or lower
Less than 0.01 µm (single amplitude)
20 to 30 mL/min
600 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
1 to 3 L/min
0.2 to 0.5 MPa
5 to 30 ˚C
42 kg
TMP-2203LM(0)
None
TMP-2203LMC(0)
Coated
10-8 Pa order 10-7 Pa order
1300 mL/min 2000 mL/min
EI-R04M
VG250 / ICF305 / ISO250B
KF40
Water cooled
40 Pa
270 Pa
2140 L/s
2000 L/s
1350 L/s
1.4×108
1×104
1×103
24600 rpm
Within 11 minutes
Arbitrary
120 ˚C or lower
Less than 0.01 µm (single amplitude)
20 to 30 mL/min
800 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
1 to 3 L/min
0.2 to 0.5 MPa
5 to 30 ˚C
59 kg
Power Supply
Model
Compatibility
Permitted ambient temperature
Input power source
Weight
Temperature
Humidity
Voltage
Power requirements
TMP-3304 series TMP-4304 series
TMP-1003 series TMP-303 series TMP-1503 series
①
②
③
④
⑤
⑥
Example
TMP-① ② ③ ④ ⑤ ⑥
TMP- 100 3 LM T C
Symbol
(Numeral)
(Numeral)
M
LM
T
None
C
None
Description
Exhaust speed is the value multiplied by 10.
Product line
Air-cooled magnetic bearing type
Water-cooled magnetic bearing type
Temperature control function
No temperature control function
Anti-corrosion coating design
No coating
S Rotor overheating detection function(Limited number of models)
*In addition, there are models with special coatings (B, F).
Turbo Molecular Pump Models Integrated Production Factory for Turbo Molecular Pumps (Kyoto)
Photo of Turbo Molecular Pump Products
Specifications
8 9
High Pumping Throughput Turbo Molecular Pump Standard Specifications
(Note 1) When a metal gasket is used at the inlet flange. If an O-ring gasket is used, the ultimate pressure will be order of 10-7 Pa. (Note 2) mL/min shows the volumetric flowrate at 0 ˚C and 1 atmosphere. (Equivalent to SCCM.)(Note 3) When no protective net is used. If a protective net is used, the exhaust speed (N2) will be as follows: TMP-1303(0): 1130L/s;
TMP-1503: 1380L/s; TMP-2203(0): 2050L/s.
-
TMP-2804LM / LMC / LMB / LMF TMP-3304LM / LMC
1×109 min.
1×105
6×103
27600 rpm
Within 12 minutes
Arbitrary
120 ˚C or lower
Less than 0.01 µm (single amplitude)
30 mL/min
1500 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
2 to 4 L/min
0.2 to 0.5 MPa
5 to 25 ˚C
84 kg
Turbo molecular pump
Rotor coating
Applicable power supply
Inlet flange
Outlet flange
Cooling method
Ultimate pressure (after baking) Pa (Torr) (Note 2)
Maximum flowrate of Ar gas (Note 3)
Maximum inlet pressure during continuous operation (N2)
Maximum outlet pressure during continuous operation
Pumping speed (Note 4)
Compression ratio
Rated rotation speed
Startup time
Direction of installation
Baking temperature of pump inlet
Vibration, measured by the Shimadzu method
Recommended purge gas flowrate (Note 3)
Recommended pumping speed of backing vacuum pump during gas purging
Operational ambient temperature range
Allowable magnetic Radial directions
flux density Axial directions
Cooling water Flowrate
Pressure
Temperature
Weight
N2
He
H2
N2
He
H2
TMP-2804LM (Note 1)
None None
EI-R04M EI-R04M
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
TMP-3804LMC / LMFTMP-3304LMB / LMF TMP-4304LMC / LMF
TMP-2804LMC (Note 1)
1250 mL/min 1900 mL/min
[VG250] 2800 L/s
2800 L/s
2100 L/s
[ISO250B] 2500 L/s
2600 L/s
2000 L/s
EI-R04M
VG250 / ISO250B
KF40
Water cooled
10-7 Pa order
40 Pa
270 Pa
TMP-2804LMB (Note 1) TMP-2804LMF (Note 1)
2850 mL/min 2950 mL/min
EI-R04M
VG300 / VG350 / ISO320B
KF40
Water cooled
10-7 Pa order
40 Pa
270 Pa
3200 L/s
3100 L/s
2200 L/s
1×109 min.
1×105
6×103
27600 rpm
Within 12 minutes
Arbitrary
120 ˚C or lower
Less than 0.01 µm (single amplitude)
30 mL/min
1500 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
2 to 4 L/min
0.2 to 0.5 MPa
5 to 25 ˚C
84 kg
TMP-3304LM (Note 1) TMP-3304LMC (Note 1)
1250 mL/min 1900 mL/min
TMP-3804LMC (Note 1) TMP-3804LMF (Note 1)TMP-3304LMB (Note 1) TMP-3304LMF (Note 1)
1900 mL/min 2800 mL/min2850 mL/min 2950 mL/min
[VG300] 3800 L/s
—
2500 L/s
[ISO320B] 4000 L/s
—
2500 L/s
Coated
EI-R04M
VG300 / ISO320B
KF40
Water cooled
10-7 Pa order
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
40 Pa
270 Pa
1×109 min.
1×105
6×103
24000 rpm
Within 18 minutes
Arbitrary
120 ˚C or lower
Less than 0.01 µm (single amplitude)
30 mL/min
1500 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
2 to 4 L/min
0.2 to 0.5 MPa
5 to 25 ˚C
105 kg
TMP-4304LMC (Note 1) TMP-4304LMF (Note 1)
1900 mL/min 2800 mL/min
Coated
EI-R04M
VG350
KF40
Water cooled
10-7 Pa order
40 Pa
270 Pa
4400 L/s
—
2600 L/s
1×109 min.
1×105
6×103
24000 rpm
Within 18 minutes
Arbitrary
120 ˚C or lower
Less than 0.01 µm (single amplitude)
30 mL/min
1500 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
2 to 4 L/min
0.2 to 0.5 MPa
5 to 25 ˚C
105 kg
Power Supply
Model
Compatibility
Permitted ambient temperature
Input power source
Weight
Temperature
Humidity
Voltage
Power requirements
Retuning is unnecessary if the combination of pump with cable and power supply system is changed
Operation: 0 ˚C to 45 ˚C / Storage: -25 ˚C to 70 ˚C (no condensation)
40 to 80 %RH
Single phase 200 V AC to 240 V AC ±10 % (50 Hz/60 Hz ±2 Hz)
1.5 kVA
8 kg
Coated Coated
High Pumping Throughput Turbo Molecular Pump Standard Specifications
(Note 1) Models equipped with rotor overheating detection function are optionally available. (TMP-xxxS model)(Note 2) When a metal gasket is used at the inlet flange. If an O-ring gasket is used, the ultimate pressure will be order of 10-7 Pa.(Note 3) mL/min shows the volumetric flowrate at 0 ˚C and 1 atmosphere. (Equivalent to SCCM.)(Note 4) When no protective net is used. If a protective net is used, the exhaust speed (N2) will be as follows: TMP-2804(VG250): 2550L/s;
TMP-2804(ISO250B): 2300L/s; TMP-3304: 2900L/s; TMP-3804(VG300): 3450L/s; TMP-3804(ISO320B): 3600L/s; TMP-4304: 4000L/s.
Specifications
10 11
-
TMP-2804LM / LMC / LMB / LMF TMP-3304LM / LMC
1×109 min.
1×105
6×103
27600 rpm
Within 12 minutes
Arbitrary
120 ˚C or lower
Less than 0.01 µm (single amplitude)
30 mL/min
1500 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
2 to 4 L/min
0.2 to 0.5 MPa
5 to 25 ˚C
84 kg
Turbo molecular pump
Rotor coating
Applicable power supply
Inlet flange
Outlet flange
Cooling method
Ultimate pressure (after baking) Pa (Torr) (Note 2)
Maximum flowrate of Ar gas (Note 3)
Maximum inlet pressure during continuous operation (N2)
Maximum outlet pressure during continuous operation
Pumping speed (Note 4)
Compression ratio
Rated rotation speed
Startup time
Direction of installation
Baking temperature of pump inlet
Vibration, measured by the Shimadzu method
Recommended purge gas flowrate (Note 3)
Recommended pumping speed of backing vacuum pump during gas purging
Operational ambient temperature range
Allowable magnetic Radial directions
flux density Axial directions
Cooling water Flowrate
Pressure
Temperature
Weight
N2
He
H2
N2
He
H2
TMP-2804LM (Note 1)
None None
EI-R04M EI-R04M
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
TMP-3804LMC / LMFTMP-3304LMB / LMF TMP-4304LMC / LMF
TMP-2804LMC (Note 1)
1250 mL/min 1900 mL/min
[VG250] 2800 L/s
2800 L/s
2100 L/s
[ISO250B] 2500 L/s
2600 L/s
2000 L/s
EI-R04M
VG250 / ISO250B
KF40
Water cooled
10-7 Pa order
40 Pa
270 Pa
TMP-2804LMB (Note 1) TMP-2804LMF (Note 1)
2850 mL/min 2950 mL/min
EI-R04M
VG300 / VG350 / ISO320B
KF40
Water cooled
10-7 Pa order
40 Pa
270 Pa
3200 L/s
3100 L/s
2200 L/s
1×109 min.
1×105
6×103
27600 rpm
Within 12 minutes
Arbitrary
120 ˚C or lower
Less than 0.01 µm (single amplitude)
30 mL/min
1500 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
2 to 4 L/min
0.2 to 0.5 MPa
5 to 25 ˚C
84 kg
TMP-3304LM (Note 1) TMP-3304LMC (Note 1)
1250 mL/min 1900 mL/min
TMP-3804LMC (Note 1) TMP-3804LMF (Note 1)TMP-3304LMB (Note 1) TMP-3304LMF (Note 1)
1900 mL/min 2800 mL/min2850 mL/min 2950 mL/min
[VG300] 3800 L/s
—
2500 L/s
[ISO320B] 4000 L/s
—
2500 L/s
Coated
EI-R04M
VG300 / ISO320B
KF40
Water cooled
10-7 Pa order
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
Same as left
40 Pa
270 Pa
1×109 min.
1×105
6×103
24000 rpm
Within 18 minutes
Arbitrary
120 ˚C or lower
Less than 0.01 µm (single amplitude)
30 mL/min
1500 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
2 to 4 L/min
0.2 to 0.5 MPa
5 to 25 ˚C
105 kg
TMP-4304LMC (Note 1) TMP-4304LMF (Note 1)
1900 mL/min 2800 mL/min
Coated
EI-R04M
VG350
KF40
Water cooled
10-7 Pa order
40 Pa
270 Pa
4400 L/s
—
2600 L/s
1×109 min.
1×105
6×103
24000 rpm
Within 18 minutes
Arbitrary
120 ˚C or lower
Less than 0.01 µm (single amplitude)
30 mL/min
1500 L/min or higher
Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C
3 mT
15 mT
2 to 4 L/min
0.2 to 0.5 MPa
5 to 25 ˚C
105 kg
Power Supply
Model
Compatibility
Permitted ambient temperature
Input power source
Weight
Temperature
Humidity
Voltage
Power requirements
Retuning is unnecessary if the combination of pump with cable and power supply system is changed
Operation: 0 ˚C to 45 ˚C / Storage: -25 ˚C to 70 ˚C (no condensation)
40 to 80 %RH
Single phase 200 V AC to 240 V AC ±10 % (50 Hz/60 Hz ±2 Hz)
1.5 kVA
8 kg
Coated Coated
High Pumping Throughput Turbo Molecular Pump Standard Specifications
(Note 1) Models equipped with rotor overheating detection function are optionally available. (TMP-xxxS model)(Note 2) When a metal gasket is used at the inlet flange. If an O-ring gasket is used, the ultimate pressure will be order of 10-7 Pa.(Note 3) mL/min shows the volumetric flowrate at 0 ˚C and 1 atmosphere. (Equivalent to SCCM.)(Note 4) When no protective net is used. If a protective net is used, the exhaust speed (N2) will be as follows: TMP-2804(VG250): 2550L/s;
TMP-2804(ISO250B): 2300L/s; TMP-3304: 2900L/s; TMP-3804(VG300): 3450L/s; TMP-3804(ISO320B): 3600L/s; TMP-4304: 4000L/s.
Specifications
10 11
-
101
102
103
104
10-3 10-2 10-1 100 101 102 103
10-5 10-4 10-3 10-2 10-1 100
N2
H2
He
Pum
ping
Spe
ed (L
/s)
Inlet Pressure (Pa)
(Torr)
100
101
102
103
10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
N2
Gas
Thr
ough
put (
mL/
min
)
Inlet Pressure (Pa)
(Torr)
Notes. Without a protective net. Backing Pump : 160L/min mL/min : gas throughput in 20 °C, 1atm
Notes. Without a protective net. Backing Pump : 160L/min
Unit: mm
Inlet
Inlet
Gas purge port
Gas purge port
Unit: mm
Unit: mm
Unit: mm
Connector
Connector
Outlet KF25
Outlet KF25
Cooling water inlet joint
InletGas purge port Outlet KF25
Connector
4-M10 depth 10 for fixing pump
Inlet
Gas purge port
Outlet KF25
Connector
4-M10 depth 10 for fixing pump
Cooling water inlet joint2-RC1/4
TMP-203M and TMP-203MC
Inlet flangeICF152VG100ISO100BISO100C
A252238238238
B154140140140
C122108108108
øDø152ø185ø165ø130
øEø130.3ø160ø145
—
n-ød16-ø8.48-ø128-ø9—
F155141141141
G20121212
TMP-203LM and TMP-203LMC
Pumping Speed (TMP-203LM / LMC) Gas Throughput (TMP-203LM / LMC)
Inlet flangeICF152VG100ISO100BISO100C
A252238238238
B154140140140
C192178178178
øDø152ø185ø165ø130
øEø130.3ø160ø145
—
n-ød16-ø8.48-ø128-ø9—
F155141141141
G20121212
TMP-303M and TMP-303MC
Inlet flangeICF152VG100ISO100BISO100C
A279272279279
B204197204204
C149142149149
øDø152ø185ø165ø130
øEø130.3ø160ø145
—
n-ød16-ø8.48-ø128-ø9—
G20121212
H227220227227
TMP-303LM and TMP-303LMC
Pumping Speed (TMP-303LM / LMC) Gas Throughput (TMP-303LM / LMC)
Inlet flangeICF152VG100ISO100BISO100C
A279272279279
B204197204204
C231224231231
øDø152ø185ø165ø130
øEø130.3ø160ø145
—
n-ød16-ø8.48-ø128-ø9—
G20121212
H227220227227
101
102
103
104
10-3 10-2 10-1 100 101 102 103
10-5 10-4 10-3 10-2 10-1 100
ArN
2
H2
Pum
ping
Spe
ed (L
/s)
Inlet Pressure (Pa)
(Torr)
Notes. With a protective net. Backing Pump : 670L/min
100
101
102
103
104
10-2 10-1 100 101 102 103
ArN2H2
Gas
Thr
ough
put (
mL/
min
)
Inlet Pressure (Pa) Notes. Without a protective net. Backing Pump : 670L/min mL/min : gas throughput in 20 °C, 1atm
Dimensions and Pumping Performance
12 13
-
101
102
103
104
10-3 10-2 10-1 100 101 102 103
10-5 10-4 10-3 10-2 10-1 100
N2
H2
He
Pum
ping
Spe
ed (L
/s)
Inlet Pressure (Pa)
(Torr)
100
101
102
103
10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
N2
Gas
Thr
ough
put (
mL/
min
)
Inlet Pressure (Pa)
(Torr)
Notes. Without a protective net. Backing Pump : 160L/min mL/min : gas throughput in 20 °C, 1atm
Notes. Without a protective net. Backing Pump : 160L/min
Unit: mm
Inlet
Inlet
Gas purge port
Gas purge port
Unit: mm
Unit: mm
Unit: mm
Connector
Connector
Outlet KF25
Outlet KF25
Cooling water inlet joint
InletGas purge port Outlet KF25
Connector
4-M10 depth 10 for fixing pump
Inlet
Gas purge port
Outlet KF25
Connector
4-M10 depth 10 for fixing pump
Cooling water inlet joint2-RC1/4
TMP-203M and TMP-203MC
Inlet flangeICF152VG100ISO100BISO100C
A252238238238
B154140140140
C122108108108
øDø152ø185ø165ø130
øEø130.3ø160ø145
—
n-ød16-ø8.48-ø128-ø9—
F155141141141
G20121212
TMP-203LM and TMP-203LMC
Pumping Speed (TMP-203LM / LMC) Gas Throughput (TMP-203LM / LMC)
Inlet flangeICF152VG100ISO100BISO100C
A252238238238
B154140140140
C192178178178
øDø152ø185ø165ø130
øEø130.3ø160ø145
—
n-ød16-ø8.48-ø128-ø9—
F155141141141
G20121212
TMP-303M and TMP-303MC
Inlet flangeICF152VG100ISO100BISO100C
A279272279279
B204197204204
C149142149149
øDø152ø185ø165ø130
øEø130.3ø160ø145
—
n-ød16-ø8.48-ø128-ø9—
G20121212
H227220227227
TMP-303LM and TMP-303LMC
Pumping Speed (TMP-303LM / LMC) Gas Throughput (TMP-303LM / LMC)
Inlet flangeICF152VG100ISO100BISO100C
A279272279279
B204197204204
C231224231231
øDø152ø185ø165ø130
øEø130.3ø160ø145
—
n-ød16-ø8.48-ø128-ø9—
G20121212
H227220227227
101
102
103
104
10-3 10-2 10-1 100 101 102 103
10-5 10-4 10-3 10-2 10-1 100
ArN
2
H2
Pum
ping
Spe
ed (L
/s)
Inlet Pressure (Pa)
(Torr)
Notes. With a protective net. Backing Pump : 670L/min
100
101
102
103
104
10-2 10-1 100 101 102 103
ArN2H2
Gas
Thr
ough
put (
mL/
min
)
Inlet Pressure (Pa) Notes. Without a protective net. Backing Pump : 670L/min mL/min : gas throughput in 20 °C, 1atm
Dimensions and Pumping Performance
12 13
-
Unit: mm
Unit: mm
Unit: mm
Unit: mm
TMP-403M and TMP-403MC
Inlet flangeICF203VG150ISO160BISO160C
A238235241241
B163160166166
C108105111111
øDø203ø235ø225ø180
øEø181ø210ø200
—
n-ød20-ø8.48-ø128-ø11
—
G22121612
H186183189189
TMP-403LM and TMP-403LMC
Pumping Speed (TMP-403LM / LMC) Gas Throughput (TMP-403LM / LMC)
Inlet flangeICF203VG150ISO160BISO160C
A238235241241
B163160166166
C190187193193
øDø203ø235ø225ø180
øEø181ø210ø200
—
n-ød20-ø8.48-ø128-ø11
—
G22121612
H186183189189
TMP-803M (0) and TMP-803MC (0)
Inlet flangeICF203VG150ISO160B
A356350355
B291285290
C206200205
øDø203ø235ø225
øEø181ø210ø200
n-ød20-ø8.48-ø118-ø11
F296290295
G22
13.617.6
H329323328
Inlet flangeICF203VG150ISO160B
A356350355
B291285290
C211205210
øDø203ø235ø225
øEø181ø210ø200
n-ød20-ø8.48-ø118-ø11
F296290295
G22
13.617.6
H329323328
TMP-803LM (0) and TMP-803LMC (0)
Pumping Speed (TMP-803LM(0) / LMC(0)) Gas Throughput (TMP-803LM(0) / LMC(0))
101
102
103
104
10-3 10-2 10-1 100 101 102 103
10-5 10-4 10-3 10-2 10-1 100
ArN
2
H2
Pum
ping
Spe
ed (L
/s)
Inlet Pressure (Pa)
(Torr)
Notes. With a protective net. Backing Pump : 670L/min
100
101
102
103
104
10-2 10-1 100 101 102
10-4 10-3 10-2 10-1 ArN2H2
Gas
Thr
ough
put (
mL/
min
)
Inlet Pressure (Pa)
(Torr)
Notes. Without a protective net. Backing Pump : 670L/min mL/min : gas throughput in 20 °C, 1atm
101
102
103
104
10-3 10-2 10-1 100 101 102 103
10-5 10-4 10-3 10-2 10-1 100
N2
H2
He
Pum
ping
Spe
ed (L
/s)
Inlet Pressure (Pa)
(Torr)
Notes. Without a protective net. Backing Pump : 800L/min
101
102
103
104
10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
N2H2
Gas
Thr
ough
put (
mL/
min
)
Inlet Pressure (Pa)
(Torr)
Notes. Without a protective net Backing Pump : 800L/min mL/min : gas throughput in 20 °C, 1atm
Inlet
B (S
ame
as t
he g
as p
urge
por
t)
Outlet KF40
Motor connector
Magnetic bearing connector
Gas purge port
Cooling water inlet/outlet port2-RC1/4
4-M10 depth 15 for fixing pump
Inlet
Connector
Gas purge port Outlet KF25
4-M10 depth 10for fixing pump
InletGas purge port
Connector
Outlet KF25
Cooling water inlet joint2-RC1/4
4-M10 depth 10for fixing pump
Inlet
B (S
ame
as t
he g
as p
urge
por
t)
Outlet KF40
Motor connector
Magnetic bearing connector
Gas purge port
4-M10 depth 15 for fixing pump
Dimensions and Pumping Performance
14 15
-
Unit: mm
Unit: mm
Unit: mm
Unit: mm
TMP-403M and TMP-403MC
Inlet flangeICF203VG150ISO160BISO160C
A238235241241
B163160166166
C108105111111
øDø203ø235ø225ø180
øEø181ø210ø200
—
n-ød20-ø8.48-ø128-ø11
—
G22121612
H186183189189
TMP-403LM and TMP-403LMC
Pumping Speed (TMP-403LM / LMC) Gas Throughput (TMP-403LM / LMC)
Inlet flangeICF203VG150ISO160BISO160C
A238235241241
B163160166166
C190187193193
øDø203ø235ø225ø180
øEø181ø210ø200
—
n-ød20-ø8.48-ø128-ø11
—
G22121612
H186183189189
TMP-803M (0) and TMP-803MC (0)
Inlet flangeICF203VG150ISO160B
A356350355
B291285290
C206200205
øDø203ø235ø225
øEø181ø210ø200
n-ød20-ø8.48-ø118-ø11
F296290295
G22
13.617.6
H329323328
Inlet flangeICF203VG150ISO160B
A356350355
B291285290
C211205210
øDø203ø235ø225
øEø181ø210ø200
n-ød20-ø8.48-ø118-ø11
F296290295
G22
13.617.6
H329323328
TMP-803LM (0) and TMP-803LMC (0)
Pumping Speed (TMP-803LM(0) / LMC(0)) Gas Throughput (TMP-803LM(0) / LMC(0))
101
102
103
104
10-3 10-2 10-1 100 101 102 103
10-5 10-4 10-3 10-2 10-1 100
ArN
2
H2
Pum
ping
Spe
ed (L
/s)
Inlet Pressure (Pa)
(Torr)
Notes. With a protective net. Backing Pump : 670L/min
100
101
102
103
104
10-2 10-1 100 101 102
10-4 10-3 10-2 10-1 ArN2H2
Gas
Thr
ough
put (
mL/
min
)
Inlet Pressure (Pa)
(Torr)
Notes. Without a protective net. Backing Pump : 670L/min mL/min : gas throughput in 20 °C, 1atm
101
102
103
104
10-3 10-2 10-1 100 101 102 103
10-5 10-4 10-3 10-2 10-1 100
N2
H2
He
Pum
ping
Spe
ed (L
/s)
Inlet Pressure (Pa)
(Torr)
Notes. Without a protective net. Backing Pump : 800L/min
101
102
103
104
10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
N2H2
Gas
Thr
ough
put (
mL/
min
)
Inlet Pressure (Pa)
(Torr)
Notes. Without a protective net Backing Pump : 800L/min mL/min : gas throughput in 20 °C, 1atm
Inlet
B (S
ame
as t
he g
as p
urge
por
t)
Outlet KF40
Motor connector
Magnetic bearing connector
Gas purge port
Cooling water inlet/outlet port2-RC1/4
4-M10 depth 15 for fixing pump
Inlet
Connector
Gas purge port Outlet KF25
4-M10 depth 10for fixing pump
InletGas purge port
Connector
Outlet KF25
Cooling water inlet joint2-RC1/4
4-M10 depth 10for fixing pump
Inlet
B (S
ame
as t
he g
as p
urge
por
t)
Outlet KF40
Motor connector
Magnetic bearing connector
Gas purge port
4-M10 depth 15 for fixing pump
Dimensions and Pumping Performance
14 15
-
101
102
103
104
10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
ArN2H2He
Gas
Thr
ough
put (
mL/
min
)
Inlet Pressure (Pa)
(Torr)
Notes. With a protective net Inlet flange : ISO200/VG200 Backing Pump : 7000L/min mL/min : gas throughput in 0 °C, 1atm
Unit: mmUnit: mm
Unit: mm
TMP-1003M and TMP-1003MC
TMP-1003LM and TMP-1003LMC
Pumping Speed (TMP-1003LM / LMC) Gas Throughput (TMP-1003LM / LMC)
TMP-1303LM (0) and TMP-1303LMC (0)
Inlet flangeICF253VG200ISO200B
A347307312
B290250255
C318278283
øDø253ø300ø285
øEø231.8ø270ø260
n-ød24-ø8.48-ø1312-ø11
F293253258
G25
20.517.6
H320280285
Inlet flangeICF253VG200ISO200B
A315315307
B250250242
C165165157
øDø253ø300ø285
øEø231.8ø270ø260
n-ød24-ø8.48-ø15
12-ø11
F255255247
G251616
H288288280
Inlet flangeICF253VG200ISO200B
A315315307
B250250242
C170170162
øDø253ø300ø285
øEø231.8ø270ø260
n-ød24-ø8.48-ø15
12-ø11
F255255247
G251616
H288288280
Pumping Speed (TMP-1303LM(0) / LMC(0)) Gas Throughput (TMP-1303LM(0) / LMC(0))
101
102
103
104
10-3 10-2 10-1 100 101 102 103
10-5 10-4 10-3 10-2 10-1 100
N2
H2
He
Pum
ping
Spe
ed (L
/s)
Inlet Pressure (Pa)
(Torr)
Notes. Without a protective net. Backing Pump : 800L/min
101
102
103
104
10-3 10-2 10-1 100 101 102 103
10-5 10-4 10-3 10-2 10-1 100
ArN
2
H2
Pum
ping
Spe
ed (L
/s)
Inlet Pressure (Pa)
(Torr)
Notes. With a protective net. Inlet flange : VG200 Backing Pump : 1080L/min
Dimensions and Pumping Performance
16 17
InletMotor connector
Gas purge port
Outlet KF40
4-M10 depth 15for fixing pump
B (S
ame
as t
he g
as p
urge
por
t)
Magnetic bearing connector
Inlet Motor connector
Gas purge port
Outlet KF40
4-M10 depth 15for fixing pump
Cooling water inlet/outlet port2-RC1/4
B (S
ame
as t
he g
as p
urge
por
t)
Magnetic bearing connector
InletMotor connector
Gas purge port
Outlet KF40
For fixing pump5-M12 depth 10 (Regular interval)
Cooling water inlet/outlet port2-RC1/4
B (S
ame
as t
he g
as p
urge
por
t)
Magnetic bearing connector
101
102
103
104
10-2 10-1 100 101 102
N2H2
Gas
Thr
ough
put (
mL/
min
)
Inlet Pressure (Pa) Notes. With a protective net Backing Pump : 800L/min mL/min : gas throughput in 0˚C, 1atm
-
101
102
103
104
10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
ArN2H2He
Gas
Thr
ough
put (
mL/
min
)
Inlet Pressure (Pa)
(Torr)
Notes. With a protective net Inlet flange : ISO200/VG200 Backing Pump : 7000L/min mL/min : gas throughput in 0 °C, 1atm
Unit: mmUnit: mm
Unit: mm
TMP-1003M and TMP-1003MC
TMP-1003LM and TMP-1003LMC
Pumping Speed (TMP-1003LM / LMC) Gas Throughput (TMP-1003LM / LMC)
TMP-1303LM (0) and TMP-1303LMC (0)
Inlet flangeICF253VG200ISO200B
A347307312
B290250255
C318278283
øDø253ø300ø285
øEø231.8ø270ø260
n-ød24-ø8.48-ø13
12-ø11
F293253258
G25
20.517.6
H320280285
Inlet flangeICF253VG200ISO200B
A315315307
B250250242
C165165157
øDø253ø300ø285
øEø231.8ø270ø260
n-ød24-ø8.48-ø1512-ø11
F255255247
G251616
H288288280
Inlet flangeICF253VG200ISO200B
A315315307
B250250242
C170170162
øDø253ø300ø285
øEø231.8ø270ø260
n-ød24-ø8.48-ø1512-ø11
F255255247
G251616
H288288280
Pumping Speed (TMP-1303LM(0) / LMC(0)) Gas Throughput (TMP-1303LM(0) / LMC(0))
101
102
103
104
10-3 10-2 10-1 100 101 102 103
10-5 10-4 10-3 10-2 10-1 100
N2
H2
He
Pum
ping
Spe
ed (L
/s)
Inlet Pressure (Pa)
(Torr)
Notes. Without a protective net. Backing Pump : 800L/min
101
102
103
104
10-3 10-2 10-1 100 101 102 103
10-5 10-4 10-3 10-2 10-1 100
ArN
2
H2
Pum
ping
Spe
ed (L
/s)
Inlet Pressure (Pa)
(Torr)
Notes. With a protective net. Inlet flange : VG200 Backing Pump : 1080L/min
Dimensions and Pumping Performance
16 17
InletMotor connector
Gas purge port
Outlet KF40
4-M10 depth 15for fixing pump
B (S
ame
as t
he g
as p
urge
por
t)
Magnetic bearing connector
Inlet Motor connector
Gas purge port
Outlet KF40
4-M10 depth 15for fixing pump
Cooling water inlet/outlet port2-RC1/4
B (S
ame
as t
he g
as p
urge
por
t)
Magnetic bearing connector
InletMotor connector
Gas purge port
Outlet KF40
For fixing pump5-M12 depth 10 (Regular interval)
Cooling water inlet/outlet port2-RC1/4
B (S
ame
as t
he g
as p
urge
por
t)
Magnetic bearing connector
101
102
103
104
10-2 10-1 100 101 102
N2H2
Gas
Thr
ough
put (
mL/
min
)
Inlet Pressure (Pa) Notes. With a protective net Backing Pump : 800L/min mL/min : gas throughput in 0˚C, 1atm
-
Inlet
Motor connector
Gas purge port
Outlet KF40
Cooling water inlet/outlet port2-RC1/4
5-M12 depth 10 (Regular interval) for fixing pump
B (S
ame
as th
e ga
s pu
rge
port
)
Magnetic bearing connector
Inlet
Motor connector
Gas purge port
Outlet KF40
Cooling water inlet/outlet port2-RC1/4
Pump fixing tapB-M16 depth 20
C2 (
Coo
ling
wat
er in
let/o
utle
t por
t)
Magnetic bearing connector
C1 (
Coo
ling
wat
er
inle
t/out
let p
ort)
Unit: mmUnit: mm
TMP-1503LM and TMP-1503LMC
Pumping Speed (TMP-1503LM / LMC) Gas Throughput (TMP-1503LM / LMC)
TMP-2203LM (0) and TMP-2203LMC (0)
Inlet flangeICF305VG250ISO250B
A435375405
B345285315
C1294234264
C2439379409
øDø305ø350ø335
øEø284ø320ø310
n-ød32-ø8.412-ø1312-ø11
F354294324
G28
22.517.6
H392332362
I449390420
J507447477
Inlet flangeICF305VG250ISO250B
A296296304
B239239247
C267267275
øDø305ø350ø335
øEø284ø320ø310
n-ød32-ø8.412-ø1512-ø11
F242242250
G2820
17.6
H269269277
Pumping Speed (TMP-2203LM(0) / LMC(0)) Gas Throughput (TMP-2203LM(0) / LMC(0))
101
102
103
104
10-3 10-2 10-1 100 101 102 103
10-5 10-4 10-3 10-2 10-1 100
ArN
2
H2
Pum
ping
Spe
ed (L
/s)
Inlet Pressure (Pa)
(Torr)
Notes. With a protective net. Inlet flange : VG250 Backing Pump : 7000L/min
101
102
103
104
10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
ArN2
H2
Gas
Thr
ough
put (
mL/
min
)
Inlet Pressure (Pa)
(Torr)
Notes. With a protective net Inlet flange : VG250 Backing Pump : 7000L/min mL/min : gas throughput in 0 °C, 1atm
101
102
103
104
10-3 10-2 10-1 100 101 102 103
10-5 10-4 10-3 10-2 10-1 100
ArN
2
H2
Pum
ping
Spe
ed (L
/s)
Inlet Pressure (Pa)
(Torr)
Notes. With a protective net. Backing Pump : 7000L/min
101
102
103
104
10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
ArN2H2
Gas
Thr
ough
put (
mL/
min
)
Inlet Pressure (Pa)
(Torr)
Notes. With a protective net. Backing Pump : 7000L/min mL/min : gas throughput in 0 °C, 1atm
Dimensions and Pumping Performance
18 19
-
Inlet
Motor connector
Gas purge port
Outlet KF40
Cooling water inlet/outlet port2-RC1/4
5-M12 depth 10 (Regular interval) for fixing pump
B (S
ame
as th
e ga
s pu
rge
port
)
Magnetic bearing connector
Inlet
Motor connector
Gas purge port
Outlet KF40
Cooling water inlet/outlet port2-RC1/4
Pump fixing tapB-M16 depth 20
C2 (
Coo
ling
wat
er in
let/o
utle
t por
t)
Magnetic bearing connector
C1 (
Coo
ling
wat
er
inle
t/out
let p
ort)
Unit: mmUnit: mm
TMP-1503LM and TMP-1503LMC
Pumping Speed (TMP-1503LM / LMC) Gas Throughput (TMP-1503LM / LMC)
TMP-2203LM (0) and TMP-2203LMC (0)
Inlet flangeICF305VG250ISO250B
A435375405
B345285315
C1294234264
C2439379409
øDø305ø350ø335
øEø284ø320ø310
n-ød32-ø8.412-ø1312-ø11
F354294324
G28
22.517.6
H392332362
I449390420
J507447477
Inlet flangeICF305VG250ISO250B
A296296304
B239239247
C267267275
øDø305ø350ø335
øEø284ø320ø310
n-ød32-ø8.412-ø1512-ø11
F242242250
G2820
17.6
H269269277
Pumping Speed (TMP-2203LM(0) / LMC(0)) Gas Throughput (TMP-2203LM(0) / LMC(0))
101
102
103
104
10-3 10-2 10-1 100 101 102 103
10-5 10-4 10-3 10-2 10-1 100
ArN
2
H2
Pum
ping
Spe
ed (L
/s)
Inlet Pressure (Pa)
(Torr)
Notes. With a protective net. Inlet flange : VG250 Backing Pump : 7000L/min
101
102
103
104
10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
ArN2
H2
Gas
Thr
ough
put (
mL/
min
)
Inlet Pressure (Pa)
(Torr)
Notes. With a protective net Inlet flange : VG250 Backing Pump : 7000L/min mL/min : gas throughput in 0 °C, 1atm
101
102
103
104
10-3 10-2 10-1 100 101 102 103
10-5 10-4 10-3 10-2 10-1 100
ArN
2
H2
Pum
ping
Spe
ed (L
/s)
Inlet Pressure (Pa)
(Torr)
Notes. With a protective net. Backing Pump : 7000L/min
101
102
103
104
10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
ArN2H2
Gas
Thr
ough
put (
mL/
min
)
Inlet Pressure (Pa)
(Torr)
Notes. With a protective net. Backing Pump : 7000L/min mL/min : gas throughput in 0 °C, 1atm
Dimensions and Pumping Performance
18 19
-
Inlet
Control cable connectorCooling water inlet joint2-RC1/4 8-M20 depth 30
for fixing pump
Outlet KF40
Gas purge port
Inlet
Control cable connectorCooling water inlet joint2-RC1/4 8-M20 depth 30
for fixing pump
Outlet KF40
Gas purge port
TMP-2804LM series (LMC / LMB / LMF)
Pumping Speed (TMP-2804LM series) Gas Throughput (TMP-2804LM series)
TMP-3304LM series (LMC / LMB / LMF)
Pumping Speed (TMP-3304LM series) Gas Throughput (TMP-3304LM series)
Unit: mm
Inlet flangeVG250ISO250B
A409409
B331331
C303303
øDø350ø335
øEø320ø310
n-ød12-ø1312-ø11
F377377
G16
17.6
Unit: mm
Inlet flangeVG300VG350ISO320B
A365365370
B288288292
C259259264
øDø400ø450ø425
øEø370ø420ø395
n-ød12-ø1312-ø1312-ø13
F333333338
G18.524.522.5
101
102
103
104
10-2 10-1 100 101 102
ArN
2
H2
He
Pum
ping
Spe
ed (L
/s)
Inlet Pressure (Pa)
Notes. With a protective net Backing Pump : 7000L/min Pipe : I.D. 40mm, Length 2000mm 101
102
103
104
10-2 10-1 100 101 102
ArN2H2He
Gas
Thr
ough
put (
mL/
min
)
Inlet Pressure (Pa)
Notes. With a protective net Backing Pump : 7000L/min Pipe : I.D. 40mm, Length 2000mm mL/min : gas throughput in 0 , 1atm 101
102
103
104
10-2 10-1 100 101 102
ArN
2
H2
He
Pum
ping
Spe
ed (L
/s)
Inlet Pressure (Pa)
Notes. With a protective net Backing Pump : 7000L/min Pipe : I.D. 40mm, Length 2000mm 101
102
103
104
10-2 10-1 100 101 102
ArN2H2He
Gas
Thr
ough
put (
mL/
min
)
Inlet Pressure (Pa)
Notes. With a protective net Backing Pump : 7000L/min Pipe : I.D. 40mm, Length 2000mm mL/min : gas throughput in 0 , 1atm
Dimensions and Pumping Performance
20 21
-
Inlet
Control cable connectorCooling water inlet joint2-RC1/4 8-M20 depth 30
for fixing pump
Outlet KF40
Gas purge port
Inlet
Control cable connectorCooling water inlet joint2-RC1/4 8-M20 depth 30
for fixing pump
Outlet KF40
Gas purge port
TMP-2804LM series (LMC / LMB / LMF)
Pumping Speed (TMP-2804LM series) Gas Throughput (TMP-2804LM series)
TMP-3304LM series (LMC / LMB / LMF)
Pumping Speed (TMP-3304LM series) Gas Throughput (TMP-3304LM series)
Unit: mm
Inlet flangeVG250ISO250B
A409409
B331331
C303303
øDø350ø335
øEø320ø310
n-ød12-ø1312-ø11
F377377
G16
17.6
Unit: mm
Inlet flangeVG300VG350ISO320B
A365365370
B288288292
C259259264
øDø400ø450ø425
øEø370ø420ø395
n-ød12-ø1312-ø1312-ø13
F333333338
G18.524.522.5
101
102
103
104
10-2 10-1 100 101 102
ArN
2
H2
He
Pum
ping
Spe
ed (L
/s)
Inlet Pressure (Pa)
Notes. With a protective net Backing Pump : 7000L/min Pipe : I.D. 40mm, Length 2000mm 101
102
103
104
10-2 10-1 100 101 102
ArN2H2He
Gas
Thr
ough
put (
mL/
min
)
Inlet Pressure (Pa)
Notes. With a protective net Backing Pump : 7000L/min Pipe : I.D. 40mm, Length 2000mm mL/min : gas throughput in 0 , 1atm 101
102
103
104
10-2 10-1 100 101 102
ArN
2
H2
He
Pum
ping
Spe
ed (L
/s)
Inlet Pressure (Pa)
Notes. With a protective net Backing Pump : 7000L/min Pipe : I.D. 40mm, Length 2000mm 101
102
103
104
10-2 10-1 100 101 102
ArN2H2He
Gas
Thr
ough
put (
mL/
min
)
Inlet Pressure (Pa)
Notes. With a protective net Backing Pump : 7000L/min Pipe : I.D. 40mm, Length 2000mm mL/min : gas throughput in 0 , 1atm
Dimensions and Pumping Performance
20 21
-
TMP-3804LMC and TMP-3804LMF
Pumping Speed (TMP-3804LMC / LMF) Gas Throughput (TMP-3804LMC / LMF)
TMP-4304LMC and TMP-4304LMF
Pumping Speed (TMP-4304LMC / LMF) Gas Throughput (TMP-4304 LMC / LMF)
Unit: mm
Inlet flangeVG300ISO320B
A420420
B342342
C314314
øDø400ø425
øEø370ø395
n-ød12-ø1312-ø13
F388388
G20.524.5
Unit: mm
Inlet flangeVG350
A370
B292
C264
øDø450
øEø420
n-ød12-ø13
F338
G24.5
101
102
103
104
10-2 10-1 100 101 102
Ar
N2
H2
Pum
ping
Spe
ed (L
/s)
Inlet Pressure (Pa)
Notes. With a protective net Backing Pump : 5500L/min Pipe : I.D. 40mm, Length 2000mm
101
102
103
104
10-2 10-1 100 101 102
Ar
N2
H2
Gas
Thr
ough
put (
mL/
min
)
Inlet Pressure (Pa) Notes. With a protective net Backing Pump : 5500L/min Pipe : I.D. 40mm, Length 2000mm mL/min : gas throughput in 0 , 1atm
101
102
103
104
10-2 10-1 100 101 102
ArN2H2He
Pum
ping
Spe
ed (L
/s)
Inlet Pressure (Pa)
Notes. With a protective net Backing Pump : 5500L/min Pipe : I.D. 40mm, Length 2000mm
101
102
103
104
10-2 10-1 100 101 102
ArN2H2He
Gas
Thr
ough
put (
mL/
min
)
Inlet Pressure (Pa)
Notes. With a protective net Backing Pump : 5500L/min Pipe : I.D. 40mm, Length 2000mm mL/min : gas throughput in 0 , 1atm
Dimensions and Pumping Performance
22 23
Inlet
Control cable connectorCooling water inlet joint 2-RC1/4 8-M20 depth 30
for fixing pump
Outlet KF40
Gas purge port
Inlet
Control cable connectorCooling water inlet joint 2-RC1/4 8-M20 depth 30
for fixing pump
Outlet KF40
Gas purge port
-
TMP-3804LMC and TMP-3804LMF
Pumping Speed (TMP-3804LMC / LMF) Gas Throughput (TMP-3804LMC / LMF)
TMP-4304LMC and TMP-4304LMF
Pumping Speed (TMP-4304LMC / LMF) Gas Throughput (TMP-4304 LMC / LMF)
Unit: mm
Inlet flangeVG300ISO320B
A420420
B342342
C314314
øDø400ø425
øEø370ø395
n-ød12-ø1312-ø13
F388388
G20.524.5
Unit: mm
Inlet flangeVG350
A370
B292
C264
øDø450
øEø420
n-ød12-ø13
F338
G24.5
101
102
103
104
10-2 10-1 100 101 102
Ar
N2
H2
Pum
ping
Spe
ed (L
/s)
Inlet Pressure (Pa)
Notes. With a protective net Backing Pump : 5500L/min Pipe : I.D. 40mm, Length 2000mm
101
102
103
104
10-2 10-1 100 101 102
Ar
N2
H2
Gas
Thr
ough
put (
mL/
min
)
Inlet Pressure (Pa) Notes. With a protective net Backing Pump : 5500L/min Pipe : I.D. 40mm, Length 2000mm mL/min : gas throughput in 0 , 1atm
101
102
103
104
10-2 10-1 100 101 102
ArN2H2He
Pum
ping
Spe
ed (L
/s)
Inlet Pressure (Pa)
Notes. With a protective net Backing Pump : 5500L/min Pipe : I.D. 40mm, Length 2000mm
101
102
103
104
10-2 10-1 100 101 102
ArN2H2He
Gas
Thr
ough
put (
mL/
min
)
Inlet Pressure (Pa)
Notes. With a protective net Backing Pump : 5500L/min Pipe : I.D. 40mm, Length 2000mm mL/min : gas throughput in 0 , 1atm
Dimensions and Pumping Performance
22 23
Inlet
Control cable connectorCooling water inlet joint 2-RC1/4 8-M20 depth 30
for fixing pump
Outlet KF40
Gas purge port
Inlet
Control cable connectorCooling water inlet joint 2-RC1/4 8-M20 depth 30
for fixing pump
Outlet KF40
Gas purge port
-
Power supply Power supply
Power supply
MB cable
MB cable
MB cable
Air-cooling fan cord
Motor cable for air cooling type
Air cooled type turbo molecular pump
Water cooled type turbo molecular pump
Air cooled type turbo molecular pump
Power supplyMB cable
Motor cable for water cooling type
Water cooled type turbo molecular pump
Power supplyPower supply
Power supply
MB cable
MB cable
MB cable
Motor cable for water cooling type
Motor cable for water cooling
Temperature control cable
Temperature control cable
High pumping throughput turbo molecular pump
Power supply
Control cable
High pumping throughput turbo molecular pump
Turbo molecular pump with heating function
Turbo molecular pump with heating function
Turbo Molecular Pump, Air Cooled Type[Pump: 03 series / Power Supply: EI-S04M]
ICF152VG100ISO100BISO100CICF152VG100ISO100BISO100CICF152VG100ISO100BISO100CICF152VG100ISO100BISO100CICF203VG150ISO160BISO160CICF203VG150ISO160BISO160C
Inlet Flange262-81445-61262-81445-62262-81445-65262-81445-63262-81445-71262-81445-72262-81445-75262-81445-73262-81435-61262-81435-62262-81435-65262-81435-63262-81435-71262-81435-72262-81435-75262-81435-73262-81455-61262-81455-62262-81455-65262-81455-63262-81455-71262-81455-72262-81455-75262-81455-73
Part Number
・EI-S04M・EI-S04M(DN)・EI-S04M(232)
Applicable Power Supply
・MB cable・Air-cooling fan cord
CableTMP-203M
TMP-203MC
TMP-303M
TMP-303MC
TMP-403M
TMP-403MC
Pump Model
Turbo Molecular Pump, Air Cooled Type[Pump: 03 series / Power Supply: EI-R04M]
ICF203VG150ISO160BICF203VG150ISO160BICF253VG200ISO200BICF253VG200ISO200B
Inlet Flange263-18282-61263-18282-62263-18282-65263-18282-71263-18282-72263-18282-75262-81410-61262-81410-62262-81410-65262-81410-71262-81410-72262-81410-75
Part Number
・EI-R04M・EI-R04M(DN)・EI-R04M(232)
Applicable Power Supply
・MB cable・Motor cable for air cooling type
CableTMP-803M(0)
TMP-803MC(0)
TMP-1003M
TMP-1003MC
Pump Model
Turbo Molecular Pump, Water Cooled Type[Pump: 03 series / Power Supply: EI-S04M]
ICF152VG100ISO100BISO100CICF152VG100ISO100BISO100CICF152VG100ISO100BISO100CICF152VG100ISO100BISO100CICF203VG150ISO160BISO160CICF203VG150ISO160BISO160C
Inlet Flange262-81445-41262-81445-42262-81445-45262-81445-43262-81445-51262-81445-52262-81445-55262-81445-53262-81435-41262-81435-42262-81435-45262-81435-43262-81435-51262-81435-52262-81435-55262-81435-53262-81455-41262-81455-42262-81455-45262-81455-43262-81455-51262-81455-52262-81455-55262-81455-53
Part Number
・EI-S04M・EI-S04M(DN)・EI-S04M(232)
Applicable Power Supply
・MB cable
CableTMP-203LM
TMP-203LMC
TMP-303LM
TMP-303LMC
TMP-403LM
TMP-403LMC
Pump Model
High Pumping Throughput Turbo Molecular Pump[Pump: 03 series / Power Supply: EI-R04M]
ICF253VG200ISO200BICF253VG200ISO200BICF305VG250ISO250BICF305VG250ISO250BICF305VG250ISO250BICF305VG250ISO250B
Inlet Flange263-18283-41263-18283-42263-18283-43263-18283-51263-18283-52263-18283-53262-78773-41262-78773-42262-78773-43262-78773-51262-78773-52262-78773-53263-18286-01263-18286-02263-18286-03263-18286-11263-18286-12263-18286-13
Part Number
・EI-R04M・EI-R04M(DN)・EI-R04M(232)
Applicable Power Supply
・MB cable・Motor cable for water cooling type
CableTMP-1303LM(0)
TMP-1303LMC(0)
TMP-1503LM
TMP-1503LMC
TMP-2203LM(0)
TMP-2203LMC(0)
Pump Model
High Pumping Throughput Turbo Molecular Pump[Pump: 04 series / Power Supply: EI-R04M]
VG250ISO250BVG250ISO250BVG250ISO250BVG250ISO250BVG300VG350ISO320BVG300VG350ISO320BVG300VG350ISO320BVG300VG350ISO320BVG300ISO320BVG300ISO320BVG350VG350
Inlet Flange263-18168-02263-18168-03263-18168-12263-18168-13263-18168-42263-18168-43263-18172-42263-18172-43263-18034-07263-18034-09263-18034-08263-18034-17263-18034-19263-18034-18263-18034-47263-18034-49263-18034-48263-18050-47263-18050-49263-18050-48263-18110-17263-18110-18263-18114-47263-18114-48263-18110-19263-18114-49
Part Number
・EI-R04M・EI-R04M(DN)・EI-R04M(232)
Applicable Power Supply
・Control cable
CableTMP-2804LM
TMP-2804LMC
TMP-2804LMB
TMP-2804LMF
TMP-3304LM
TMP-3304LMC