States of Matter. There are Four States of Matter Solid Solid Liquid Liquid Gas Gas Plasma Plasma.
Liquid Films and the Plasma-enhanced Deposition of Solid Coatings · 2018. 4. 25. · 5 Former use...
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Liquid Films and the Plasma-enhanced Deposition of Solid Coatings New Perspectives in-between Polymer and Plasma Chemistry
Transcript of Liquid Films and the Plasma-enhanced Deposition of Solid Coatings · 2018. 4. 25. · 5 Former use...
Liquid Films and the Plasma-enhanced
Deposition of Solid Coatings
New Perspectives in-between
Polymer and Plasma Chemistry
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Use of liquids in gas phase processes?
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Former use of liquid phases in plasma-based film deposition
Atmospheric Pressure Plasma Liquid Deposition (APPLD)
O‘Neill et al., Chem. Vap. Deposition 2005, 11, 477-479Dr. Severich, 22. Hofer Vliesstofftage, 2007
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Former use of liquid phases in plasma-based film deposition
Plasma-initiated Polymerization
Molina et al., Plasma Process. Polym. 2013, 10, 506-516
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Former use of liquid phases in plasma-based film deposition
Liquid Assisted – Plasma Enhanced Chemical Vapour Deposition
Mauchauffé et al., Plasma Process. Polym. 2016, DOI: 10.1002/ppap.201600002
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Former use of liquid phases in plasma-based film deposition
Plasma Curing of PDMS
Ott et al., Contrib. Plasma Phys. 2012, 52, 593-600
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Polymerization of HMDSO and MMA
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Liquid HMDSO in air DBD
ppPDMS on PE foilCLSM
Refe
rence
ppP
DM
S
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Liquid HMDSO in air DBD
ppPDMS on Aluminum sheet
CLSM
Refe
rence
ppP
DM
S
Optical Microscope
ppP
DM
SppP
DM
S
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Liquid HMDSO in air DBD
ppPDMS on Shape Memory Alloy
CL
SM
Op
tical M
icro
sco
pe
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liquid HMDSO
Liquid HMDSO in air DBD
Oxygen partial pressure
Monomer partial pressure
Evaporation rate
…
Substrate
Plasma
Eva
pora
tion
Adsorp
tion
Polymerization
Oxidation
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Liquid MMA in air DBD
ppPMMA on PP foil
CLSMOptical Microscope
ppP
MM
AppP
MM
A
Refe
rence
ppP
MM
A
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MMA-based dispersion in DBD
PMMA / Al(OH)3 composite particles in MMA
TE
MS
EM
0,01 0,1 1 10 100 1000
0
2
4
Diff. v
olu
me [%
]
particle size [µm]
stable Kerrock
water phase
Kerrock pure
Laser Granulometry
Op
tical M
icro
scop
eC
LS
M
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Plasma-Enhanced Chemical Solution Deposition
liquid formulation
Substrate
Plasma
UV photoinitiation
Thermal initiation
Cross-linkers
Particles, pigments, …
Liquid phase
Dissociation
Polymerisation
Cluster / Aerosols
…
Plasma phase
Electrons
Radicals
Metastables
Polymerization
Etching
Chain scission
Interphase
Evaporation
Condensation
Charging
Heating
Exchange processes
